JPS63285502A - Condenser lens for laser - Google Patents
Condenser lens for laserInfo
- Publication number
- JPS63285502A JPS63285502A JP12003887A JP12003887A JPS63285502A JP S63285502 A JPS63285502 A JP S63285502A JP 12003887 A JP12003887 A JP 12003887A JP 12003887 A JP12003887 A JP 12003887A JP S63285502 A JPS63285502 A JP S63285502A
- Authority
- JP
- Japan
- Prior art keywords
- laser
- beams
- laser light
- lens
- focal plane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 2
- 101100459440 Caenorhabditis elegans nac-3 gene Proteins 0.000 claims 1
- 229910004613 CdTe Inorganic materials 0.000 claims 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims 1
- WCUXLLCKKVVCTQ-UHFFFAOYSA-M potassium chloride Inorganic materials [Cl-].[K+] WCUXLLCKKVVCTQ-UHFFFAOYSA-M 0.000 claims 1
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 claims 1
- 230000003287 optical effect Effects 0.000 abstract description 4
- 238000000034 method Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
Landscapes
- Lenses (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、レーザー用集元レンズに関し、レーザー発振
器から出た光を所定の直径内に集光し、均一な強度分布
を得るための集光レンズに関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a focusing lens for lasers, which focuses light emitted from a laser oscillator within a predetermined diameter to obtain a uniform intensity distribution. Regarding optical lenses.
従来から、レーザー光を用いて金属などの表面を熱処理
することが行なわれている。その際、処理効率をあげる
ために被処理物の表面上、例えば直径１０■程度の面積
にレーザー光を集光することが行なわれて＾る。この集
光方法としては、以下の方法がある。BACKGROUND ART Conventionally, laser light has been used to heat-treat the surfaces of metals and the like. At this time, in order to increase processing efficiency, laser light is focused on an area of, for example, about 10 square meters in diameter on the surface of the object to be processed. This light focusing method includes the following methods.
（１） レーザー光を集光レンズで絞り、その焦点面
をズラし、デフォーカスの位置で表面熱処理を行う方法
があるが、レーザー発振器から出るレーザー光は一般に
ガウス盟強度分布を有し、デフォーカスしても基本的に
強度分布に変化がないので、均一な表面熱処理ができな
かった。(1) There is a method of focusing the laser beam with a condensing lens, shifting its focal plane, and performing surface heat treatment at the defocused position, but the laser beam emitted from the laser oscillator generally has a Gaussian intensity distribution, Even when focused, there was basically no change in the intensity distribution, so uniform surface heat treatment was not possible.
（２） 多数の平面ｆＲ（例えば１０■角程度）を貼
夛合わせ、相対角度を調節したセグメントミラーを用い
る方法で、レーザー光をそれぞれの平面鏡で反射し、一
定距離後方でセグメント平面鏡１個の面積に集光させる
ものである。(2) A method using segment mirrors in which a large number of planes fR (for example, about 10 squares) are pasted together and the relative angles are adjusted, the laser beam is reflected by each plane mirror, and one segment plane mirror is reflected at a certain distance behind. It focuses light on an area.
これは前述のデフォーカス法よシビームの強度分布が均
一であるが、反射光学系であるためにビームを一回折シ
返す必要があり、広いスペースが求められ、また、使用
時の調節が難しいことも含めて、装置が高価となるとい
う欠点がある。This method provides a uniform beam intensity distribution compared to the defocus method described above, but since it is a reflective optical system, the beam must be refracted and returned once, requiring a large space, and is difficult to adjust during use. The disadvantage is that the equipment is expensive.
（３）ソの、他、ビームスキャナ方式、ポリゴンミラ一
方式、カライドスコープ方式などがあるが、いずれも設
備が高価であ夛、かつ、大きなスペースを必要とすると
いう欠点がある。(3) In addition to the method described above, there are beam scanner methods, polygon mirror one-way methods, kaleidoscope methods, etc., but all of them have the disadvantage that they require expensive and large amounts of equipment and a large space.
本発明は上記欠点を解消し、透過光学系によって均一な
強度分布を得ることができるレーザー用集光レンズを提
供しようとするものである。The present invention aims to eliminate the above-mentioned drawbacks and provide a condensing lens for a laser that can obtain a uniform intensity distribution using a transmission optical system.
本発明は、レーザー光の入射面を平面となし、出射面を
同心円状に分割し、異なる頂角を有する複数の円錐面と
なすことを特徴とするレーザー用集光レンズである。The present invention is a condensing lens for a laser, characterized in that the incident surface of the laser beam is a flat surface, and the exit surface is divided concentrically into a plurality of conical surfaces having different apex angles.
各円錐面はそれぞれの円錐面から出射するレーザー光を
一定距離後方において所定の直径内に集光するよ５に、
円錐面の頂角を決定する。Each conical surface condenses the laser beam emitted from the respective conical surface within a predetermined diameter at a certain distance behind 5.
Determine the apex angle of the conical surface.
また、レンズの材質はＺｎ８ｅ、 Ｇ５ＬＡ１５．０ｄ
Ｔｅ。Also, the material of the lens is Zn8e, G5LA15.0d
Te.
ＫＣＬ、Ｎ亀ＣＺの中から選択することができる。You can choose from KCL and Ngame CZ.
第１図は、本発明の一具体例であるレーザー用集光レン
ズ１の断面図であシ、レーザー光の入射面である平面１
Ｃとレーザーの出射面である円錐面１ｍ、１ｈからなる
ものである。FIG. 1 is a cross-sectional view of a laser condensing lens 1 which is a specific example of the present invention.
C and conical surfaces 1m and 1h which are laser emission surfaces.
第２図は、第１図の集光レンズ１を用い、レーザービー
ム６〜１０を焦点面３の上に集光する状態を説明するた
めの図である。FIG. 2 is a diagram for explaining a state in which laser beams 6 to 10 are condensed onto the focal plane 3 using the condensing lens 1 of FIG. 1.
集光レンズ１０平面１Ｃに入射するレーザー光のりち、
６と７の間の元は出射面１ｂで屈折し、焦点面５上の４
と５の間に照射される。同様に、７と８の間のレーザー
光は出射面１１Ｌで屈折し、焦点面３上の４と５の間に
照射される。The laser beam that enters the plane 1C of the condensing lens 10,
The element between 6 and 7 is refracted at the exit surface 1b, and the element 4 on the focal plane 5
and 5. Similarly, the laser light between 7 and 8 is refracted at the exit surface 11L, and is irradiated between 4 and 5 on the focal plane 3.
即ち、同心円状に分割された円錐面１ａ、１ｂによって
、出射するレーザー光は全て焦点面３上において４と５
を直径とする円内に集光することになる。Ｉａと１１）
＋２）元軸に対する角度は必要とするレンズと被処理面
（焦点面）の距離 ・を用いてスネルの法則によシ決定
すればよ＾。That is, all the emitted laser beams are focused on the focal plane 3 by the conical surfaces 1a and 1b divided into concentric circles.
The light will be focused within a circle with a diameter of . Ia and 11)
+2) The angle with respect to the original axis can be determined using Snell's law using the distance between the required lens and the surface to be processed (focal plane).
第３図はガウス型強度分布を有するレーザー光を第１図
の集光レンズに入射させ、集光させる状態を示した図で
ある。レーザー光のガウス型強度分布２１は集光レンズ
２２の各円錐面によシ焦点面上に集光照射され、均一な
強度分布２３となる。FIG. 3 is a diagram showing a state in which a laser beam having a Gaussian intensity distribution is made incident on the condensing lens of FIG. 1 and condensed. The Gaussian intensity distribution 21 of the laser beam is condensed onto the focal plane by each conical surface of the condenser lens 22, resulting in a uniform intensity distribution 23.
なお、円錐面は図のように２つに限られるものではなく
、必要に応じて３つ以上に分割形成してもよめ。Note that the number of conical surfaces is not limited to two as shown in the figure, and may be divided into three or more parts if necessary.
本発明は、上記構成を採用することにより、レーザー光
を所定の直径の中に均一な強度分布に集光することがで
きる。ｉた、本発明の集光レンズは元軸を中心とした回
転対称系であるところから、製作が容易であり、通常の
研磨加工が適用できるので安価である。さらに、集光レ
ンズの構造がシンプルであるところから、レーザー発振
器への敗シ付けも容易である。By employing the above configuration, the present invention can focus laser light into a uniform intensity distribution within a predetermined diameter. In addition, since the condensing lens of the present invention has a rotationally symmetrical system about the original axis, it is easy to manufacture, and it is inexpensive because ordinary polishing can be applied. Furthermore, since the structure of the condensing lens is simple, it is easy to attach it to the laser oscillator.
第１図は本発明の一具体例であるレーザー用集光レンズ
の断面図、！４２図はＮ１図の集光レンズを用いてレー
ザー光を焦点面上に照射する状態を説明するための図、
第３図はガウス型強度分布を有するレーザー光を第１図
の集光レンズを用いて所定直径の円内に均一な強度分布
として集光する状態を説明するための図である。FIG. 1 is a sectional view of a condensing lens for a laser, which is a specific example of the present invention. Figure 42 is a diagram for explaining the state in which laser light is irradiated onto the focal plane using the condenser lens in Figure N1,
FIG. 3 is a diagram for explaining a state in which a laser beam having a Gaussian intensity distribution is condensed into a circle of a predetermined diameter using the condenser lens of FIG. 1 with a uniform intensity distribution.
Claims (3)
円状に分割し、異なる頂角を有する複数の円錐面となす
ことを特徴とするレーザー用集光レンズ。(1) A condensing lens for a laser, characterized in that the incident surface of the laser beam is a flat surface, and the exit surface is divided concentrically into a plurality of conical surfaces having different apex angles.
後方において所定の直径内に集光するように各円錐面の
頂角を選択したことを特徴とする特許請求の範囲第１項
記載のレーザー用集光レンズ。(2) The apex angle of each conical surface is selected so that the laser beams emitted from the plurality of conical surfaces are focused within a predetermined diameter at a certain distance backward. Condensing lens for laser.
ｌの中から選択された材質によりレンズを形成すること
を特徴とする特許請求の範囲第１項または第２項記載の
レーザー用集光レンズ。(3) ZnSe, GaAs, CdTe, KCl, NaC
3. The condensing lens for a laser according to claim 1 or 2, wherein the lens is formed of a material selected from the following.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12003887A JPS63285502A (en) | 1987-05-19 | 1987-05-19 | Condenser lens for laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12003887A JPS63285502A (en) | 1987-05-19 | 1987-05-19 | Condenser lens for laser |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63285502A true JPS63285502A (en) | 1988-11-22 |
Family
ID=14776366
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12003887A Pending JPS63285502A (en) | 1987-05-19 | 1987-05-19 | Condenser lens for laser |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63285502A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5835283A (en) * | 1996-01-19 | 1998-11-10 | Nec Corporation | Condenser lens for optical disks |
-
1987
- 1987-05-19 JP JP12003887A patent/JPS63285502A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5835283A (en) * | 1996-01-19 | 1998-11-10 | Nec Corporation | Condenser lens for optical disks |
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