JPS6053848B2 - Beam concentrator - Google Patents
Beam concentratorInfo
- Publication number
- JPS6053848B2 JPS6053848B2 JP55146150A JP14615080A JPS6053848B2 JP S6053848 B2 JPS6053848 B2 JP S6053848B2 JP 55146150 A JP55146150 A JP 55146150A JP 14615080 A JP14615080 A JP 14615080A JP S6053848 B2 JPS6053848 B2 JP S6053848B2
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- light
- center
- laser beam
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/003—Light absorbing elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/02—Catoptric systems, e.g. image erecting and reversing system
- G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
- G02B17/0605—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using two curved mirrors
- G02B17/061—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using two curved mirrors on-axis systems with at least one of the mirrors having a central aperture
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
- Microscoopes, Condenser (AREA)
- Lenses (AREA)
- Laser Beam Processing (AREA)
Description
【発明の詳細な説明】
本発明はＣＯ２レーザ等の大出力レーザビームの集光
に好適なビーム集光装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a beam focusing device suitable for focusing a high-output laser beam such as a CO2 laser.
一般にＣＯ２にレーザビームを集光する場合、セレン
化亜鉛（ＺｎＳｅ）、ヒ素化カリニウム（ＧａＡ、）、
ゲルマニユウム（Ｇｅ）等のレンズを利用するが、レー
ザビームの光量が多くなり光密度が高くなるとかなりひ
んぱんにレンズの破損が生ずる。Generally, when focusing a laser beam on CO2, zinc selenide (ZnSe), potassium arsenide (GaA),
Lenses made of germanium (Ge) or the like are used, but as the amount of light from the laser beam increases and the light density increases, the lenses often break.
そこでよりレーザ光耐力が強く、クリーニングにも耐え
られるミラーを用いてレーザビームを集光する方法が要
求される。ます第一に放物面等の非球面ミラーを用いて
集光する方法があるが、製作が困難であり高価なもので
ある。そこで第二の方法として安価で高精度な球面ミラ
ーを利用して集光することが考えられるが、入射光と反
射光とのなす角度を実用上ある程度大きくせざるを得ず
非点収差とコマ収差による焦点でのぼけが球面収差と回
折限界とによるぼけよりも大きくなり望みのスポット径
に集光することが不可能となる。そこで反射型天体望遠
鏡に利用されているカセグレン光学系を集光に利用する
方法が拳られる。この方法は第１図に示すように中心に
穴の開いた凹面ミラー（主鏡）１と凸面ミラー（副鏡）
２とを光軸に垂直に配置してあるため、球面収差と回折
限界だけを考慮すれば良く、レンズを用いた場合の様に
小さなスポット径に集光することが出来る。主鏡１の中
心部にある直径Ｌ、なる穴より直径レなる入射ビームが
副鏡２にて反射され主鏡１に向い主鏡１にて反射され焦
点３に集光される。ここで入射ビームの中心部の直径Ｌ
２なる光束は副鏡２の中心部４で反射され主鏡１の中心
部の直径Ｌ、なる穴より入射方向と反対側に散逸してし
まい入射光を効率的に集光することが出来ないという本
質的な欠点を持つている。さらにこの散逸レーザ光は照
射してはならない所を照射する危険性があり安定性の点
でも問題がある。このような欠点を除去するために従来
副鏡２の中心部４に反射防止用の光吸収塗料を塗布する
方策がとられて来たが大出力レーザビーム下で使用する
場合には、吸収塗料により発生する熱の除去が困難であ
り、又発生熱による副鏡の面形状変化はさけられない。
本発明は上記のような欠点を除去する目的でなされたも
ので、副鏡の中心に必要な径の穴をあけ、その裏側に反
射鏡を設け、光軸からレーザビームをはずして熱吸収体
に導びくことにより、実用上安全なりセグレン型集光系
を構成し実用に供するものである。Therefore, there is a need for a method of focusing a laser beam using a mirror that has stronger laser beam resistance and can withstand cleaning. The first method is to condense light using an aspherical mirror such as a paraboloid, but this method is difficult to manufacture and expensive. Therefore, the second method is to use an inexpensive and highly accurate spherical mirror to condense the light, but in practical terms the angle between the incident light and the reflected light has to be increased to some extent, resulting in astigmatism and coma. The blur at the focal point due to aberration becomes larger than the blur due to spherical aberration and the diffraction limit, making it impossible to condense the light to a desired spot diameter. Therefore, a method of using Cassegrain optical systems used in reflective astronomical telescopes to collect light was proposed. This method consists of a concave mirror (primary mirror) 1 with a hole in the center and a convex mirror (secondary mirror) as shown in Figure 1.
2 are arranged perpendicular to the optical axis, so only spherical aberration and diffraction limit need to be taken into consideration, and the light can be focused to a small spot diameter like when a lens is used. An incident beam having a diameter of L is reflected by a secondary mirror 2 through a hole having a diameter L in the center of the primary mirror 1, is directed toward the primary mirror 1, is reflected by the primary mirror 1, and is focused at a focal point 3. Here, the diameter L of the center of the incident beam
The second beam of light is reflected by the center 4 of the secondary mirror 2 and is scattered through a hole with a diameter L at the center of the primary mirror 1 to the opposite side of the incident direction, making it impossible to efficiently collect the incident light. It has an essential drawback. Furthermore, this dissipated laser light has a risk of irradiating areas that should not be irradiated, and there is also a problem in terms of stability. In order to eliminate such defects, conventional measures have been taken to coat the central part 4 of the secondary mirror 2 with light-absorbing paint for anti-reflection purposes, but when used under a high-power laser beam, the absorbing paint It is difficult to remove the heat generated by this, and changes in the surface shape of the secondary mirror due to the generated heat are unavoidable.
The present invention was made for the purpose of eliminating the above-mentioned drawbacks.The present invention was made with the aim of eliminating the above-mentioned drawbacks.A hole of the required diameter is made in the center of the secondary mirror, a reflecting mirror is installed on the back side of the hole, and the laser beam is removed from the optical axis to be used as a heat absorber. By guiding this, a practically safe Segren type condensing system can be constructed and put to practical use.
さらにこの熱吸収体をカロリーメーターにすれば入射光
量のモニターとしても利用出来るという効果もある。以
下本発明の一実施例を第２図に基いて詳述する。Furthermore, if this heat absorber is used as a calorimeter, it can also be used as a monitor of the amount of incident light. An embodiment of the present invention will be described in detail below with reference to FIG.
副鏡５の中心部に直径！の円形の穴をあけ、その裏面に
ミラー６を設け、第１図の従来の構成ては主鏡１の中心
部の穴から散逸した入射光束（直径Ｌ２）を光軸よりは
ずし熱吸収体てある力５ロリーメーター７に導びくこと
により、従来の構成では入射方向と反射方向に散逸する
危険な反射光をなくし作業上の安全性をはかるとともに
入射レーザビーム光量のモニター（計測）として利用す
る。以上のように、本発明によれば従来のカセグレン集
光系の欠点の一つである副鏡中心部からの反射の損失光
を安全な熱吸収体に導びくか、または熱吸収体をカロリ
ーメーターとすることにより入射光量のモニター（計測
）として利用出来るようにしたもので、カセグレン型集
光方法の小さなスポット径に集光出来る利点を発揮させ
ながら実用上安全で便利なレーザビーム集光装置を提供
することができる利点を有する。Diameter in the center of secondary mirror 5! In the conventional configuration shown in FIG. 1, the incident light beam (diameter L2) scattered through the hole in the center of the primary mirror 1 is removed from the optical axis by a heat absorber. By guiding a certain force 5 to the Lolly meter 7, the dangerous reflected light that would be dissipated in the incident direction and the reflected direction in the conventional configuration is eliminated, ensuring operational safety, and it is also used as a monitor (measurement) of the amount of incident laser beam light. . As described above, according to the present invention, the lost light reflected from the center of the secondary mirror, which is one of the drawbacks of conventional Cassegrain focusing systems, can be guided to a safe heat absorber, or the heat absorber can be This laser beam focusing device can be used as a meter to monitor (measure) the amount of incident light, and is a practical, safe and convenient laser beam focusing device that takes advantage of the Cassegrain focusing method's ability to focus light into a small spot diameter. It has the advantage of being able to provide
第１図は従来のカセグレン型集光方法の原理を示す概略
図、第２図は本発明の一実施例におけるレーザビーム集
光装置の概略図である。
１・・・・・・主鏡、２・・・・・・副鏡、３・・・・
・・焦点、６・・・ミラー、７・・・・・・カロリーメ
ーター。FIG. 1 is a schematic diagram showing the principle of a conventional Cassegrain type focusing method, and FIG. 2 is a schematic diagram of a laser beam focusing device according to an embodiment of the present invention. 1...Primary mirror, 2...Secondary mirror, 3...
...Focus, 6...Mirror, 7...Calorimeter.
Claims (1)
軸に垂直に配置させてなるカセグレン光学系を有するビ
ーム集光装置において、前記凸面ミラーの中心部に孔を
設け、前記凸面ミラーを挟んで凹面ミラーと反対側に少
なくとも１枚の反射鏡を有し、この反射鏡により反射さ
れたビームの光軸上に熱吸収体を設けたことを特徴とす
るビーム集光装置。 ２ 上記熱吸収体としてカロリーメータを用いたことを
特徴とする特許請求の範囲第１項記載のビーム集光装置
。[Claims] 1. In a beam focusing device having a Cassegrain optical system including a concave mirror with a hole in the center and a convex mirror arranged perpendicular to the optical axis, a hole is formed in the center of the convex mirror. and at least one reflecting mirror on the opposite side of the concave mirror across the convex mirror, and a heat absorber is provided on the optical axis of the beam reflected by the reflecting mirror. light device. 2. The beam focusing device according to claim 1, wherein a calorimeter is used as the heat absorber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55146150A JPS6053848B2 (en) | 1980-10-17 | 1980-10-17 | Beam concentrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55146150A JPS6053848B2 (en) | 1980-10-17 | 1980-10-17 | Beam concentrator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5768811A JPS5768811A (en) | 1982-04-27 |
| JPS6053848B2 true JPS6053848B2 (en) | 1985-11-27 |
Family
ID=15401258
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP55146150A Expired JPS6053848B2 (en) | 1980-10-17 | 1980-10-17 | Beam concentrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6053848B2 (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5983124A (en) * | 1982-11-04 | 1984-05-14 | Yasuto Ozaki | Wide angle condenser for laser beam |
| JPS60166915A (en) * | 1984-02-10 | 1985-08-30 | Canon Inc | Optical system for formation of annular beam |
| US7817246B2 (en) * | 2006-06-21 | 2010-10-19 | Asml Netherlands B.V. | Optical apparatus |
| DE102009046685A1 (en) * | 2009-11-13 | 2011-05-26 | Carl Zeiss Smt Gmbh | Imaging optics |
| JP5534490B2 (en) * | 2011-03-16 | 2014-07-02 | 株式会社ニコン | Infrared imaging device |
| KR102615739B1 (en) * | 2018-12-05 | 2023-12-19 | 삼성디스플레이 주식회사 | Laser processing apparatus |
-
1980
- 1980-10-17 JP JP55146150A patent/JPS6053848B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5768811A (en) | 1982-04-27 |
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