JPS6328027B2 - - Google Patents
Info
- Publication number
- JPS6328027B2 JPS6328027B2 JP54161212A JP16121279A JPS6328027B2 JP S6328027 B2 JPS6328027 B2 JP S6328027B2 JP 54161212 A JP54161212 A JP 54161212A JP 16121279 A JP16121279 A JP 16121279A JP S6328027 B2 JPS6328027 B2 JP S6328027B2
- Authority
- JP
- Japan
- Prior art keywords
- ink
- recording
- recording head
- liquid
- droplets
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007788 liquid Substances 0.000 claims description 34
- 238000007599 discharging Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 description 30
- 239000000463 material Substances 0.000 description 8
- 239000000758 substrate Substances 0.000 description 7
- 238000009434 installation Methods 0.000 description 5
- 239000011241 protective layer Substances 0.000 description 5
- 238000002474 experimental method Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- 229920000122 acrylonitrile butadiene styrene Polymers 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 235000009508 confectionery Nutrition 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000011437 continuous method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- -1 fluororesin Polymers 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 125000000325 methylidene group Chemical group [H]C([H])=* 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 239000006089 photosensitive glass Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 238000001454 recorded image Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1604—Production of bubble jet print heads of the edge shooter type
Description
【発明の詳細な説明】
本発明は、一般にインクと呼ぶ、記録液を種々
の方式によつて小滴化し、このインク小滴の被記
録面への付着を以つて記録を行うインクジエツト
記録装置に適用される記録ヘツド部の構成に関す
る。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an inkjet recording device that forms recording liquid, generally called ink, into small droplets using various methods, and performs recording by adhering these ink droplets to a recording surface. This invention relates to the configuration of the applicable recording head section.
現在、知られる各種、記録方式の中でも、記録
時に、騒音の発生がほとんどないノンインパクト
記録方式であつて、且つ、高速記録が可能であ
り、しかも、普通紙に特別の定着処理を必要とせ
ずに記録の行える所謂インクジエツト記録法は、
極めて有用な記録方式であると認められている。
このインクジエツト記録法に就いては、これ迄に
も様々な方式が提案され、改良が加えられて商品
化されたものもあれば、現在もなお、実用化への
努力が続けられているものもある。 Among the various recording methods currently known, it is a non-impact recording method that generates almost no noise during recording, is capable of high-speed recording, and does not require special fixing treatment on plain paper. The so-called inkjet recording method that can record on
It is recognized as an extremely useful recording method.
Various methods have been proposed for this inkjet recording method, some have been improved and commercialized, and others are still being worked on to put them into practical use. be.
インクジエツト記録法は、要するに、インクと
称される記録液の液滴（droplet）を吐出、飛翔
させ、それを紙等の被記録部材に付着させて記録
を行うものである。そして、インク滴の発生法及
び生じたインク滴の飛翔方向を制御する為の制御
方法等により、このインクジエツト記録法は、幾
つかの方式に大別される。それ等の中で、代表的
な方式の一つは、例えばUSP3596275（Sweet方
式）、USP3298030（Lewis and Brown方式）等
に開示されている方式であつて、連続振動発生法
によつて帯電量の制御されたインク滴流を発生さ
せ、この帯電量の制御されたインク滴流を一様の
電界が掛けられている偏向電極間を飛翔させるこ
とで、液滴の飛翔軌道を制御しつつ紙等の被記録
部材上に記録を行うものである。そして、この方
式は一般にコンテイニアス方式とも略称されてい
る。 In short, the ink jet recording method performs recording by ejecting and flying droplets of a recording liquid called ink and making them adhere to a recording member such as paper. The inkjet recording method is roughly divided into several types depending on the method of generating ink droplets and the control method for controlling the flying direction of the generated ink droplets. Among them, one of the representative methods is the method disclosed in USP3596275 (Sweet method), USP3298030 (Lewis and Brown method), etc., which uses a continuous vibration generation method to reduce the amount of charge. By generating a controlled flow of ink droplets and making the flow of ink droplets with a controlled amount of charge fly between deflection electrodes where a uniform electric field is applied, the flying trajectory of the droplets can be controlled while being applied to paper, etc. Recording is performed on the recording member. This method is also generally referred to as a continuous method.
これと対比される代表的な他の方式は、例えば
USP37447120に開示されている方式（Stemme方
式）である。この方式は、記録のためのインクを
吐出するオリフイスを有する記録ヘツドに付設さ
れているピエゾ振動素子に、電気的な記録信号を
付与し、この電気的記録信号をピエゾ振動素子の
機械的振動に変え、その機械的振動に従つて必要
時毎に前記オリフイスよりインク滴を吐出飛翔さ
せて被記録部材に付着させることで記録を行うも
のである。 Other typical methods that can be contrasted with this are, for example,
This is a method (Stemme method) disclosed in USP37447120. This method applies an electrical recording signal to a piezo vibrating element attached to a recording head that has an orifice that ejects ink for recording, and converts this electrical recording signal into mechanical vibration of the piezo vibrating element. Recording is performed by ejecting ink droplets from the orifice and adhering them to the recording member whenever necessary according to the mechanical vibrations.
これが、所謂、オンデイマンド方式である。
又、別に、これらの方式とは原理・思想を異にす
る新規記録方式も、本件出願人の先願（つまり、
例えば特願昭52−118798号（特開昭54−59936
号））に於いて提案されており、その中の一つの
記録法は次に概説する通りである。つまり、作用
室中に導入されたインクに対して、情報信号とし
て熱的パルスを与え、前記インクが状態変化をお
こすことによつて生じる作用力に従つて、先の作
用室に連通したオリフイスより前記インクを液滴
にして吐出・飛翔せしめ、これを紙等の被記録部
材に付着させて記録を行う方式である。 This is the so-called on-demand method.
Additionally, a new recording method that differs in principle and idea from these methods was also developed in the applicant's earlier application (i.e.,
For example, Japanese Patent Application No. 52-118798 (Japanese Patent Application No. 54-59936)
(No.)), and one of the recording methods is as outlined below. In other words, a thermal pulse is applied as an information signal to the ink introduced into the action chamber, and according to the action force generated by the state change of the ink, the ink is moved from the orifice communicating with the previous action chamber. This is a method in which the ink is ejected and made to fly in the form of droplets, and the droplets are attached to a recording material such as paper to perform recording.
ところで、以上に例示した各種インクジエツト
記録方式に就いて、何れにも共通する、解決され
るべき技術的課題が今もなお残されている。 However, with respect to the various inkjet recording methods exemplified above, there still remain technical problems common to all of them that must be solved.
その中でも特に重要な課題は、より高速のイン
クジエツト記録を行う目的から、記録ヘツドのマ
ルチアレイ化、並びに、高密度集積化技術を確立
することである。 Among these, particularly important issues are the establishment of multi-array recording heads and high-density integration technology for the purpose of higher-speed inkjet recording.
しかも、その場合、吐出するインク滴の大きさ
や、その吐出速度或は吐出方向が常時、一様とな
るような記録ヘツドを構成することが大切なこと
とされる。 Moreover, in this case, it is considered important to configure the recording head so that the size of the ink droplets to be ejected, the ejection speed, and the ejection direction are always uniform.
しかしながら、現状に於いては、記録ヘツドが
マルチアレイ型式の場合、インク滴噴射ノズル間
に相互干渉が起こり、記録品位を低下させること
がなくはなかつた。 However, currently, when the recording head is of a multi-array type, mutual interference occurs between the ink droplet ejecting nozzles, resulting in a deterioration of the recording quality.
つまり、マルチアレイ型式の記録ヘツドに於い
ては、一つのインク滴噴射ノズルに生じた圧力波
が隣接する他のノズル内のインクに伝播して、そ
れが別のノズルから吐出するインク滴の大きさに
変動を与えたり、インク滴の吐出速度を変化させ
たり、吐出のタイミングを狂わせる等々の不都合
をもたらすことが、なくはなかつた。 In other words, in a multi-array type recording head, the pressure wave generated in one ink droplet ejecting nozzle propagates to the ink in the other adjacent nozzles, which causes the size of the ink droplet ejected from the other nozzle to increase. Inconveniences such as fluctuations in the ink droplets, changes in the ejection speed of ink droplets, and disturbances in the timing of ejection have been occurring.
そこで、本発明の主たる目的は、マルチアレイ
型式のインクジエツト記録ヘツドに就いて、従来
指滴されている不利を解消して信頼性の高い高密
度マルチアレイ型式の記録ヘツドを提供するこ
と、換言すれば、その作用部が高密度に集積さ
れ、且つ、実用上の信頼性が高いインクジエツト
記録ヘツドを提供することである。 SUMMARY OF THE INVENTION Accordingly, the main object of the present invention is to provide a highly reliable high-density multi-array type recording head by eliminating the disadvantages of the conventional multi-array type inkjet recording head. For example, it is an object of the present invention to provide an inkjet recording head whose working parts are highly integrated and which has high practical reliability.
本発明の別の目的は、高速度で安定して良品位
の記録を長期に亘つて保証する新規構成の記録ヘ
ツドを提供することにある。 Another object of the present invention is to provide a recording head of a new configuration that guarantees high-speed, stable, and high-quality recording over a long period of time.
又、本発明に於いては、細密にして高精度に加
工された記録ヘツドを提供することも他の目的で
ある。 Another object of the present invention is to provide a recording head that is finely machined with high precision.
而して、これ等の目的を達成する本発明は、記
録液を吐出するための複数のオリフイス、各対応
するオリフイスに連通した複数の流路、及びこれ
らの流路に前記記録液を供給するための液室とを
有し、該液室の内壁面に微小凹凸が設けられてい
ることを特徴としている。 The present invention, which achieves these objects, includes a plurality of orifices for discharging recording liquid, a plurality of channels communicating with each corresponding orifice, and supplying the recording liquid to these channels. The liquid chamber is characterized in that the inner wall surface of the liquid chamber is provided with minute irregularities.
つまり、本発明の記録ヘツドでは、所定のノズ
ル（液路）内のインクに生じた圧力波の中で、イ
ンク供給系側に伝播する成分が液路の内壁面で反
射され、再度、その波動がインク噴射ノズル（液
路）内に在るインクに伝播するのを実質的に完全
に防止できるように、記録ヘツドの内部構造に改
良を加えたものである。 In other words, in the recording head of the present invention, among the pressure waves generated in the ink in a predetermined nozzle (liquid path), the component that propagates toward the ink supply system side is reflected by the inner wall surface of the liquid path, and the wave is regenerated. The internal structure of the recording head has been improved to substantially completely prevent the ink from propagating to the ink in the ink ejection nozzle (liquid path).
本発明では、インク供給系側からの所謂、戻り
波動が乱反射されて解消される構造になつている
から、マルチアレイ型式の記録ヘツドにおいて、
所謂、クロストークの発生は全くなく、信号入力
のないノズル（液路）が隣接液路室への入力信号
の影響を受けてインク滴を吐出させたり、隣接ノ
ズル相互間で、インク滴吐出作用に干渉が見られ
たりして、吐出インク滴による印字に不要な汚
れ、欠損部、或は乱れ等を残すと言つた不都合は
生じない。 The present invention has a structure in which so-called return waves from the ink supply system are diffusely reflected and eliminated, so in a multi-array type recording head,
There is no occurrence of so-called crosstalk, and nozzles (liquid paths) with no signal input eject ink droplets under the influence of input signals to adjacent liquid path chambers, and ink droplet ejection effects occur between adjacent nozzles. There will be no inconvenience such as interference seen in the ink droplets, leaving unnecessary stains, missing parts, or disturbances in printing by ejected ink droplets.
以下、図示具体例に従つて、本発明を詳細に説
明する。 EMBODIMENT OF THE INVENTION Hereinafter, the present invention will be explained in detail according to illustrated examples.
なお、以下の図示例では、インクに熱エネルギ
ー信号を与えてインク滴の噴射を行う型式の記録
ヘツドに限つて説明するが、本発明の範囲をこの
型式のものに限定するものではなく、別の記録ヘ
ツド型式を採用することは、本発明に於いて任意
である。 In the illustrated example below, explanation will be limited to a type of recording head that ejects ink droplets by applying a thermal energy signal to the ink. However, the scope of the present invention is not limited to this type of recording head, and other recording heads may be used. It is optional in the present invention to employ this type of recording head.
先ず、第１図及び第２図を用いて、本発明に係
るインク滴噴射ノズルの構成例とそのインク滴噴
射原理に就いて説明しておく。 First, an example of the configuration of an ink droplet ejecting nozzle according to the present invention and its ink droplet ejecting principle will be explained using FIGS. 1 and 2.
第１図は、インク滴噴射ノズルの１形態を示す
模式的斜視図である。このノズルは主に、発熱体
設置基板１と別の基板３とから構成されている。
そして、発熱体設置基板１の表面に発熱部２が設
けられている。又、基板３の材料としては、ガラ
ス、セラミツクス或いには耐熱性プラスチツク等
が用いられる。基板３には、吐出前のインクを収
容する液路４′及び吐出オリフイス５を構成する
長尺溝が予め形成してあり、この基板３と前記発
熱体設置基板１とは、発熱部２と溝４の位置合せ
をした後、接着剤によつて接合して一体化され
る。次に、この図示装置に係るインク滴噴射原理
に就いて簡単に述べる。第２図は、第１図に於け
る溝４の軸線に沿つた模式的断面図である。記録
用インクIKは、図中矢印で示される様に液路
４′内へ供給されている。今、液路４′内の１部に
付設された発熱部２に対して外部から電気信号が
付与されると、発熱部２は発熱し、その近傍のイ
ンクIKに熱エネルギーを与える。熱エネルギー
を受けたインクIKは体積膨張或いは気泡の発生
等の状態変化を起こして圧力変化を生じじ、この
圧力変化が吐出オリフイス５の方向に伝わり、イ
ンクIKが小滴１０となつて吐出する。勿論この
際、圧力の一部は、前記と逆の方向にも伝播す
る。そして、この小滴１０が不図示の紙等、任意
の被記録材に付着することによつて記録が為され
る。第２図に於いては、発熱体設置基板１の詳細
構造も図示されており、この発熱部２は、アルミ
ナ等の基板６上に、蓄熱層７、発熱抵抗体、１
１、電極８を順次薄膜形成技術によつて積層し、
発熱抵抗体１１及び電極８を所定の形状にパター
ニングした後、更に金属酸化物から成る保護層９
を積層して構成される。そして、この発熱部２は
液路４′内に露出する構成となつている。発熱部
２において、インクIKが直接接するのは保護層
９であるが、この保護層９は発熱抵抗体１１が直
接にインクIKと接触して酸化されたり、逆に、
インクIKが電気分解されるのを防いでいる。こ
の保護層９の厚さは、インク滴吐出の熱応答性、
或はエネルギー効率の良否を左右するから、でき
るだけ薄い方が望ましい。 FIG. 1 is a schematic perspective view showing one form of an ink droplet ejecting nozzle. This nozzle is mainly composed of a heating element installation board 1 and another board 3.
A heat generating part 2 is provided on the surface of the heat generating element installation board 1. Further, as the material of the substrate 3, glass, ceramics, heat-resistant plastic, etc. are used. The substrate 3 is pre-formed with a long groove that constitutes a liquid path 4' for accommodating ink before ejection and an ejection orifice 5, and this substrate 3 and the heating element installation substrate 1 are connected to After aligning the grooves 4, they are joined and integrated with adhesive. Next, the principle of ejecting ink droplets related to this illustrated device will be briefly described. FIG. 2 is a schematic sectional view taken along the axis of the groove 4 in FIG. 1. The recording ink IK is supplied into the liquid path 4' as indicated by the arrow in the figure. Now, when an electric signal is applied from the outside to the heat generating part 2 attached to a part of the liquid path 4', the heat generating part 2 generates heat and gives thermal energy to the ink IK in the vicinity thereof. The ink IK that has received thermal energy undergoes state changes such as volumetric expansion or the generation of bubbles, resulting in a pressure change, and this pressure change is transmitted in the direction of the ejection orifice 5, and the ink IK is ejected as small droplets 10. . Of course, at this time, part of the pressure also propagates in the opposite direction. Recording is then performed by the droplets 10 adhering to an arbitrary recording material such as paper (not shown). In FIG. 2, the detailed structure of the heating element installation board 1 is also shown.
1. The electrodes 8 are sequentially laminated by thin film formation technology,
After patterning the heating resistor 11 and the electrode 8 into a predetermined shape, a protective layer 9 made of metal oxide is further applied.
It is made up of layers. This heat generating portion 2 is configured to be exposed within the liquid path 4'. In the heat generating section 2, the ink IK comes into direct contact with the protective layer 9, and the heat generating resistor 11 directly contacts the ink IK and oxidizes the protective layer 9, or vice versa.
Prevents ink IK from being electrolyzed. The thickness of this protective layer 9 depends on the thermal response of ink droplet ejection,
Alternatively, it is desirable that it be as thin as possible, since it affects energy efficiency.
次に、叙上の所謂、シングルオリフイスタイプ
のインク滴噴射記録ヘツドをマルチオリフイスタ
イプの記録ヘツドに変更した場合の構成図を第３
図、第４図に示して考察する。 Next, the configuration diagram when the so-called single orifice type ink drop ejecting recording head is changed to a multi-orifice type recording head is shown in Fig. 3.
4 and 4 for consideration.
第３図においては、発熱体設置基板１２の表面
に複数個の発熱部１３が設けられている。なお、
基板１２の材料としては前述の如くアルミナ等が
使用される。各発熱部１３には、アルミニウム等
を蒸着して得られる電極リード１４，１４′が設
けられる。更に、これらの上に必要に応じて不図
示のSiO2等を保護層として設ける。更にこの基
板１２上には、複数の溝１６を有する溝フタ１５
が、各発熱部１３上に、各溝１６が来る様に重置
され接合される。 In FIG. 3, a plurality of heat generating parts 13 are provided on the surface of a heat generating element installation board 12. As shown in FIG. In addition,
As the material of the substrate 12, alumina or the like is used as described above. Each heat generating portion 13 is provided with electrode leads 14, 14' obtained by vapor depositing aluminum or the like. Furthermore, SiO 2 (not shown) or the like is provided as a protective layer on these as necessary. Further, on this substrate 12, a groove cover 15 having a plurality of grooves 16 is provided.
are superimposed and joined so that each groove 16 is on top of each heat generating part 13.
第４図に基板１２と溝フタ１５が接合したマル
チノズル構成部分１７が示される。マルチオリフ
イスタイプの記録ヘツドを完成するためには、こ
の構成部分１７に、インク供給管１８、泡抜き管
１９，１９′を備えたインク供給の液室用ブロツ
クによつて形成される液室２０を接合する。 FIG. 4 shows a multi-nozzle component 17 in which the substrate 12 and the groove cover 15 are joined. In order to complete a multi-orifice type recording head, this component 17 has a liquid chamber 20 formed by an ink supply liquid chamber block equipped with an ink supply pipe 18 and bubble removal pipes 19 and 19'. join.
こうして作成した記録ヘツドを用いてインク滴
噴射記録を行つたところ前述の如きクロストーク
等の不都合な点が生じる場合があつた。即ち、複
数の吐出オリフイス２１よりのインク滴吐出が連
続にわたつたり、２つ以上のオリフイス２１が作
動してインク滴吐出を行う場合等、次第に後続の
インク滴の吐出が不安定になる事実が判明した。
そのために、得られるインク滴による画像の品位
は、非常に低下したものになつてしまう場合があ
つた。 When ink droplet jet recording was performed using the recording head thus prepared, inconveniences such as crosstalk as described above sometimes occurred. That is, when ink droplets are ejected continuously from a plurality of ejection orifices 21, or when two or more orifices 21 operate to eject ink droplets, the ejection of subsequent ink droplets gradually becomes unstable. There was found.
As a result, the quality of the resulting ink droplet image may be extremely poor.
そこで本発明者は、これらの原因が、気泡の発
生、消滅に伴つたインクに加わつた圧力波の反射
波であることをつきとめ、更にこの反射波を防ぐ
にはインク供給の液室２０の内壁に微細な凹凸を
つけ、圧力波の伝播方向を分散させることが最良
であることを見出し、本発明に至つた。そして具
体的に液室２０の内壁に凹凸をつける方法として
は壁材料自体を加工して凹凸面にする方法と、凹
凸をつけた薄片を内壁面に貼付する方法の２方法
がある。 Therefore, the inventor of the present invention found that the cause of these problems was the reflected waves of the pressure waves applied to the ink as bubbles were generated and disappeared, and furthermore, in order to prevent these reflected waves, the inner wall of the ink supply liquid chamber 20. The inventors discovered that it is best to disperse the propagation direction of pressure waves by adding fine irregularities to the surface of the surface, and have thus arrived at the present invention. Specifically, there are two methods for creating an uneven surface on the inner wall of the liquid chamber 20: a method of processing the wall material itself to form an uneven surface, and a method of attaching a thin piece with an uneven surface to the inner wall surface.
又、凹凸の程度は、パターンとして規則的ある
いは不規則的に10μｍから２mmの範囲のものが良
く又、この凹凸の高低の程度としては、基準面か
ら±10μｍ〜２mmの範囲のものが好適である。又
凹凸の形状は円錘状、三角錘状、四角錘状等多角
形状が良いこともわかつた。但し、凹凸の形状
は、波状、円柱状等の形状でも良く、その形状
は、本発明に於いて本質的な問題ではない。本発
明に於いて、液室２０の内壁面を構成する材料と
しては、ガラス、金属、セラミツクス等の無機材
料の他高分子材料等の有機材料をも用いることが
できるが、いずれにせよインクを接するため耐溶
剤性、耐薬品性の高いものを選択しなければなら
ない。 Further, the degree of unevenness is preferably in the range of 10 μm to 2 mm in a regular or irregular pattern, and the level of the unevenness is preferably in the range of ±10 μm to 2 mm from the reference plane. be. It was also found that polygonal shapes such as conical, triangular pyramid, and quadrangular pyramid shapes are good for the shape of the unevenness. However, the shape of the unevenness may be wavy or cylindrical, and the shape is not an essential problem in the present invention. In the present invention, as the material constituting the inner wall surface of the liquid chamber 20, inorganic materials such as glass, metal, and ceramics as well as organic materials such as polymeric materials can be used. Since it comes in contact with the metal, it is necessary to select a material with high solvent and chemical resistance.
以下実施例をもつて本発明を更に詳述する。 The present invention will be explained in more detail with reference to Examples below.
実施例 １
厚み0.5mmの研磨ガラスに溝巾0.03mmピツチ、
0.15mm、深さ0.03mmで溝入れした後、溝巾0.1mm、
ピツチ0.15mm、深さ0.1mmで溝入れする。しかる
後、直交方向に再び溝入れを行うと、第５図ｂの
如き断面形状を持つ凹凸パターンが得られる。こ
れを所定寸法に切断し第４図に示す液室２０の内
壁にエポキシ樹脂を用いて接着した。次いで、こ
の液室２０の構成部分を前述とほゞ同様の方法で
作成した下記の詳細構造のマルチノズル部分に接
合して記録ヘツドを完成させた。しかる後、下記
条件でインク滴吐出実験を行つたところ、109回
の連続吐出が安定して為された。Example 1 Groove width 0.03mm pitch on polished glass 0.5mm thick,
After grooving at 0.15mm, depth 0.03mm, groove width 0.1mm,
Groove with a pitch of 0.15mm and a depth of 0.1mm. After that, grooving is performed again in the orthogonal direction to obtain a concavo-convex pattern having a cross-sectional shape as shown in FIG. 5b. This was cut into a predetermined size and adhered to the inner wall of the liquid chamber 20 shown in FIG. 4 using epoxy resin. Next, the constituent parts of this liquid chamber 20 were joined to a multi-nozzle part having the detailed structure described below, which was made in substantially the same manner as described above, to complete the recording head. Thereafter, an ink droplet ejection experiment was conducted under the following conditions, and 10 9 continuous ejections were performed stably.
液室大きさ
巾 ６mm（ノズル直交方向）
長さ ３mm
高さ １mm
マルチノズル
１本の巾 40μｍ 長さ ２mm
深さ 40μｍ
ピツチ 125μｍ
本数 32本
電極 巾 40μ長さ150μ
吐出条件
インク；メチレンブルエタノール２％溶液
電圧；19V
パルス巾；10μsec
周期；200μsec
実施例 ２
実施例１で得られた凹凸パターン上に無電解メ
ツキ処理を行い、これを電極にクロムおよび銅を
電着し、マスターを作成した。このマスター版を
もとに、アクリル樹脂、エポキシ樹脂、塩化ビニ
ル樹脂、ABS樹脂、ウレタン樹脂、シリコーン
樹脂、フツ素樹脂、ポリイミド樹脂からなるフイ
ルムに凹凸パタンを作成した。各々の樹脂フイル
ムは厚み0.3mmで片側は平面状になつている。こ
れを実施例１と同様にインク供給の液室２０の内
壁に接着し、実施例１と同様に記録ヘツドを組立
て、各々のヘツドを用いて実施例１と同一条件で
インク滴吐出実験を行つたところ、何れの場合も
実施例１と同様の良好な結果を得た。Liquid chamber size Width 6mm (perpendicular to the nozzle) Length 3mm Height 1mm Multi-nozzle Width 40μm Length 2mm Depth 40μm Pitch 125μm Number of electrodes 32 Width 40μ Length 150μ Ejection conditions Ink: methylene bullion ethanol 2% Solution Voltage: 19V Pulse width: 10 μsec Period: 200 μsec Example 2 Electroless plating was performed on the uneven pattern obtained in Example 1, and chromium and copper were electrodeposited on the electrode to create a master. Based on this master version, uneven patterns were created on films made of acrylic resin, epoxy resin, vinyl chloride resin, ABS resin, urethane resin, silicone resin, fluororesin, and polyimide resin. Each resin film has a thickness of 0.3 mm and one side is flat. This was adhered to the inner wall of the ink supply chamber 20 in the same manner as in Example 1, a recording head was assembled in the same manner as in Example 1, and an ink droplet ejection experiment was conducted using each head under the same conditions as in Example 1. As a result, good results similar to those of Example 1 were obtained in all cases.
実施例 ３
感光性樹脂；ダイクリル（デユポン社製）及び
リストン（デユポン社製）を用い、これ等に第６
図に示すパタンを紫外線で焼付けた後現像し凹凸
パタンを得た。ただしフイルム厚は200μｍであ
る。Example 3 Photosensitive resins; Daicryl (manufactured by Dupont) and Liston (manufactured by Dupont) were used, and No. 6 was applied to these resins.
The pattern shown in the figure was baked with ultraviolet light and then developed to obtain a concavo-convex pattern. However, the film thickness is 200 μm.
凹凸パタンを作成後、実施例２と同様に液室内
壁に貼付し実施例１とインクを変え、下記条件で
インク滴の吐出実験を行つたところ、良好な結果
が得られた。 After creating the uneven pattern, it was attached to the inner wall of the liquid chamber in the same manner as in Example 2, and an ink droplet ejection experiment was conducted under the following conditions using different ink from Example 1. Good results were obtained.
インク組成
水 70重量部
ジエチレングリコール 29 〃
黒色染料 １ 〃
駆動条件
電 圧 22V
パルス巾 10μsec
パルス周期 500μsec
なお、凹凸パターンの形状を第５図ａ、第５図
ｃに略示した断面形状のものに代える他は全く同
じ実験を行つたが、上記をほゞ同様に良好な結果
を得た。Ink composition Water 70 parts by weight Diethylene glycol 29〃 Black dye 1〃 Driving conditions Voltage 22V Pulse width 10 μsec Pulse period 500 μsec Note that the shape of the uneven pattern is replaced with the cross-sectional shape shown schematically in Figures 5a and 5c. Other than that, the experiment was conducted in exactly the same way, but almost the same good results as above were obtained.
実施例 ４
感光ガラス、フオトセラム（商品名；コーニン
グ社製）を厚み１mmに研磨し、これを所定寸法に
切断して第４図に示した液室２０部分を構成す
る。しかる後に、この液室２０のインクに接する
部分のみを第６図に示した如きパターンを焼付
け、フツ酸にて現像すると凹凸パターン（高低±
100μｍ）が生成する。これをマルチノズル部分
に接合して記録ヘツドを実施例１とほゞ同様の方
法で完成する。このヘツドを用いて実施例３と同
様のインク及び駆動条件でインク滴の吐出を行つ
たところ良好な結果が得られた。Example 4 A photosensitive glass, Photoceram (trade name; manufactured by Corning Inc.), was polished to a thickness of 1 mm and cut into a predetermined size to construct the liquid chamber 20 shown in FIG. 4. After that, a pattern as shown in FIG. 6 is printed only on the part of the liquid chamber 20 that comes into contact with the ink, and when developed with hydrofluoric acid, a concavo-convex pattern (high and low ±
100 μm) is generated. This is joined to the multi-nozzle portion to complete the recording head in substantially the same manner as in Example 1. When this head was used to eject ink droplets under the same ink and driving conditions as in Example 3, good results were obtained.
以上に詳説したとおり、本発明によれば、情報
信号入力に対するインク滴吐出の応答性、及びイ
ンク滴の吐出状態が非常に良好であると共に、所
謂クロストークを全く起こさずに、高速度でしか
も良質の記録画を与えるインクジエツト記録ヘツ
ドを提供することができる。 As explained in detail above, according to the present invention, the responsiveness of ink droplet ejection to information signal input and the ink droplet ejection condition are very good, and at high speed and without causing any so-called crosstalk. It is possible to provide an inkjet recording head that provides high quality recorded images.
第１図及び第２図は、本発明に係るインク滴噴
射ノズルの１構成例及びそのインク滴噴射原理を
説明する略図、第３図及び第４図は本発明に係る
記録ヘツドの１構成例を示す略図、第５図ａ、第
５図ｂ、第５図ｃ及び第６図は、本発明に係る液
室内壁の凹凸パターンのモデルを示す模式図であ
る。
図に於いて、４，１６は溝、５，２１は吐出オ
リフイス、１７はマルチノズル構成部分、２０は
液室用ブロツク、IKはインクである。
1 and 2 are schematic diagrams illustrating an example of the configuration of an ink droplet ejecting nozzle according to the present invention and its principle of ejecting ink droplets, and FIGS. 3 and 4 are exemplary configurations of a recording head according to the present invention. 5A, 5B, 5C, and 6 are schematic diagrams showing models of the uneven pattern of the inner wall of the liquid chamber according to the present invention. In the figure, 4 and 16 are grooves, 5 and 21 are ejection orifices, 17 is a multi-nozzle component, 20 is a liquid chamber block, and IK is ink.
Claims (1)
各対応するオリフイスに連通した複数の液路、及
びこれらの液路に前記記録液を供給するための液
室とを有し、該液室の内壁面に微小凹凸が設けら
れていることを特徴とするインクジエツト記録ヘ
ツド。1 Multiple orifices for discharging recording liquid,
It is characterized by having a plurality of liquid channels communicating with each corresponding orifice and a liquid chamber for supplying the recording liquid to these liquid channels, and having minute irregularities provided on the inner wall surface of the liquid chamber. Inkjet recording head.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16121279A JPS5684976A (en) | 1979-12-12 | 1979-12-12 | Ink jet recording head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16121279A JPS5684976A (en) | 1979-12-12 | 1979-12-12 | Ink jet recording head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5684976A JPS5684976A (en) | 1981-07-10 |
| JPS6328027B2 true JPS6328027B2 (en) | 1988-06-07 |
Family
ID=15730731
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16121279A Granted JPS5684976A (en) | 1979-12-12 | 1979-12-12 | Ink jet recording head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5684976A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0544175Y2 (en) * | 1987-03-12 | 1993-11-09 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5155238A (en) * | 1974-07-19 | 1976-05-14 | Silonics | Mushogekikirokusochi |
-
1979
- 1979-12-12 JP JP16121279A patent/JPS5684976A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5155238A (en) * | 1974-07-19 | 1976-05-14 | Silonics | Mushogekikirokusochi |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0544175Y2 (en) * | 1987-03-12 | 1993-11-09 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5684976A (en) | 1981-07-10 |
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