JPS63253684A - Gas circulator - Google Patents
Gas circulatorInfo
- Publication number
- JPS63253684A JPS63253684A JP8811687A JP8811687A JPS63253684A JP S63253684 A JPS63253684 A JP S63253684A JP 8811687 A JP8811687 A JP 8811687A JP 8811687 A JP8811687 A JP 8811687A JP S63253684 A JPS63253684 A JP S63253684A
- Authority
- JP
- Japan
- Prior art keywords
- gas circulator
- gas
- sealed
- blower
- box body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007789 sealing Methods 0.000 abstract description 8
- 238000005260 corrosion Methods 0.000 abstract description 3
- 230000007797 corrosion Effects 0.000 abstract description 3
- 238000010030 laminating Methods 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 35
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Lasers (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
Abstract
Description
【発明の詳細な説明】
［発明の目的］
（産業上の利用分野）
本発明はガス循環器内係り、特に反応性気体を循環する
際に好適なガス循環器に関する。DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to the internal components of a gas circulator, particularly to a gas circulator suitable for circulating a reactive gas.
（従来の技術）
従来、高出力ガスレーザ等では、大出力化を図るため、
反応性気体を放＠、管に強制的に流して放電管内の加熱
した反応性気体を循環冷却する方式のものがある。(Conventional technology) Conventionally, in order to increase the output of high-power gas lasers, etc.,
There is a system that circulates and cools the heated reactive gas inside the discharge tube by releasing reactive gas and forcing it to flow through the tube.
このような高出力ガスレーザ装置では、ガスを循環させ
ためにガス循環器が備えられており、従来使用されてい
る方式のものとしては、導入したガスを送風器により冷
却し、このとき生じる放電管内とガス循環器内との差圧
によりガスを循環させる方式のものがある。Such high-power gas laser equipment is equipped with a gas circulator to circulate the gas.In the conventional method, the introduced gas is cooled by a blower, and the gas generated at this time inside the discharge tube is cooled. There is a system in which gas is circulated using the differential pressure between the gas circulator and the inside of the gas circulator.
この方式のガス循環器は大きな差圧を必要とするため、
一般に第２図に示したように送風機を内装した送風機ユ
ニット１を多段に積層連結して構成されている。This type of gas circulator requires a large pressure difference, so
Generally, as shown in FIG. 2, a blower unit 1 having an internal blower is stacked and connected in multiple stages.
ところで、ガス循環器内の圧力は外部の大気圧よりも高
圧であること、ガスレーザに使用する反応性気体には強
い腐食性・有毒性を持つものがあること等から、ガス循
環器の接合部例えば各送風機ユニット１の連結部２等は
気体の漏れがないようにパツキン等を使用したシール構
造となっている。なお、３は反応性気体を吐出するため
の吐出口である。By the way, the pressure inside the gas circulator is higher than the outside atmospheric pressure, and some of the reactive gases used in gas lasers are highly corrosive and toxic. For example, the connecting portion 2 of each blower unit 1 has a sealing structure using a gasket or the like to prevent gas leakage. Note that 3 is a discharge port for discharging reactive gas.
このようなガス循環器は、上部導入管から下部吐出口３
に向って各段の圧力ｐ＋、］）２、Ｐｘ、Ｐ４ 、Ｐｓ
が徐々に高くなっている。Such a gas circulator has an upper inlet pipe to a lower discharge port 3.
The pressure at each stage p+, ])2, Px, P4, Ps
is gradually increasing.
（発明が解決しようとする問題点）
ところが、送風器ユニットを多段構成したガス循環器で
は、各送風機ユニット１の連結部を完全にシール構造と
して組立てる必要があり、組立て作業が繁雑であるばか
りか、完全密閉することは非常に困難であった。(Problems to be Solved by the Invention) However, in a gas circulator in which blower units are configured in multiple stages, it is necessary to assemble the joints of each blower unit 1 as a completely sealed structure, which not only makes the assembly work complicated. It was extremely difficult to completely seal it.
本発明は上述した問題点を解決するためになされたもの
で、簡素な構造で気体の漏洩がないガスＷ４環器を提供
することを目的とする。The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide a gas W4 ring with a simple structure and no gas leakage.
［発明の構成］
（問題点を解決するための手段）
本発明のガス循環器は、送風機を収容した送風機ユニッ
トを複数積層して構成されたガス循環器において、上記
複数８ｉ層した送風機ユニット群を覆うように気密を保
持するケーシングを設けたことを特徴とするものである
。[Structure of the Invention] (Means for Solving the Problems) The gas circulator of the present invention is a gas circulator configured by laminating a plurality of blower units each containing a blower, in which the blower unit group has a plurality of 8i layers. It is characterized by having a casing that maintains airtightness so as to cover the casing.
（作 用）
本発明は、耐腐食性のケーシング内にガス循環器本体を
収容し、シールをケーシングの一部で行う構造とするこ
とで、構造が簡素で組立てが容易となり、しかもシール
性が向上する。(Function) The present invention has a structure in which the gas circulator main body is housed in a corrosion-resistant casing, and sealing is performed in a part of the casing, so that the structure is simple and easy to assemble, and the sealing performance is improved. improves.
（実施例）
以下、本発明の一実施例について第１図を参照にしなが
ら説明する。(Example) An example of the present invention will be described below with reference to FIG.
第１図は実施例のガス循環器の構成を示す図で、符号１
は送風器を内蔵した送ｍｔＩ！ユニットであり、該送風
器ユニット１を５段積層構造してガス循環器本体４を構
成している。FIG. 1 is a diagram showing the configuration of a gas circulator according to an embodiment, and the reference numeral 1
is a blower mtI with a built-in blower! The gas circulator main body 4 is constructed by stacking the blower units 1 in five stages.
ガス循環器本体４は、その全体を箱体５に収容されてお
り、この箱体の上１２５ａを開閉することでガス循環器
本体４の取出しが可能となっている。The gas circulator main body 4 is entirely housed in a box 5, and can be taken out by opening and closing the top 125a of the box.
箱体の上ｆｉ５ａと箱体５の側壁上端面５ｂはシール機
構例えばパツキン等により気密が保持される構造となっ
ている。箱体５の部材には、アルミニウム板にニッケル
メッキしたもの等が耐蝕性に優れ好適である。The upper fi 5a of the box body and the upper end face 5b of the side wall of the box body 5 have a structure in which airtightness is maintained by a sealing mechanism such as a packing. As the member of the box body 5, an aluminum plate plated with nickel or the like is suitable because it has excellent corrosion resistance.
このような構成のガス循環器では、各送風機ユニット連
結部２をシールする必要がなく、上蓋５ａと箱体の側壁
上端面５ｂのみをシールするだけでよい。従って組立て
作業が容易になるばかりが、シール部が１か所でよいた
め確実に気密を保持することが可能となる。このような
ガス循環器は、組立て作業の容易なこと、シール性が優
れていること等から室内に設置する場合に好適である。In the gas circulator having such a configuration, it is not necessary to seal each blower unit connecting portion 2, and only the upper lid 5a and the upper end surface 5b of the side wall of the box body need be sealed. Therefore, not only does the assembly work become easier, but since only one sealing portion is required, airtightness can be maintained reliably. Such a gas circulator is suitable for installation indoors because it is easy to assemble and has excellent sealing properties.
［発明の効果コ
以上説明したように本発明によれば、簡素な構造で確実
なシール性が保持でき、組立てが簡便なガス循環器が得
られる。[Effects of the Invention] As explained above, according to the present invention, a gas circulator can be obtained that has a simple structure, can maintain reliable sealing performance, and is easy to assemble.
第１図は実施例の構成を示す一部側断面図、第２図は従
来のガス循環器の側面図である。
１・・・・・・・・・送風機ユニット
２・・・・・・・・・送風機ユニット連結部４・・・・
・・・・・ガス循環器本体
５・・・・・・・・・箱体
５ａ・・・・・・上蓋
第１図FIG. 1 is a partial side sectional view showing the configuration of an embodiment, and FIG. 2 is a side view of a conventional gas circulator. 1...Blower unit 2...Blower unit connection part 4...
...Gas circulator body 5...Box body 5a...Top lid Fig. 1
Claims (2)
構成されたガス循環器において、 前記複数積層した送風機ユニット群を覆うように気密を
保持するケーシングを設けたことを特徴とするガス循環
器。(1) A gas circulator configured by stacking a plurality of blower units each containing a blower, characterized in that a casing that maintains airtightness is provided to cover the plurality of stacked blower units.
箱体であることを特徴とする特許請求の範囲第１項記載
のガス循環器。(2) The gas circulator according to claim 1, wherein the casing is a box having a lid that maintains airtightness when closed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8811687A JPS63253684A (en) | 1987-04-10 | 1987-04-10 | Gas circulator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8811687A JPS63253684A (en) | 1987-04-10 | 1987-04-10 | Gas circulator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63253684A true JPS63253684A (en) | 1988-10-20 |
Family
ID=13933920
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8811687A Pending JPS63253684A (en) | 1987-04-10 | 1987-04-10 | Gas circulator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63253684A (en) |
-
1987
- 1987-04-10 JP JP8811687A patent/JPS63253684A/en active Pending
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