JPS63230806A - Gas atomizing apparatus for producing metal powder - Google Patents
Gas atomizing apparatus for producing metal powderInfo
- Publication number
- JPS63230806A JPS63230806A JP6533987A JP6533987A JPS63230806A JP S63230806 A JPS63230806 A JP S63230806A JP 6533987 A JP6533987 A JP 6533987A JP 6533987 A JP6533987 A JP 6533987A JP S63230806 A JPS63230806 A JP S63230806A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- tank
- spray
- metal powder
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 title claims abstract description 102
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 102
- 239000000843 powder Substances 0.000 title claims abstract description 83
- 238000009689 gas atomisation Methods 0.000 title claims description 16
- 239000007789 gas Substances 0.000 claims abstract description 74
- 239000011261 inert gas Substances 0.000 claims abstract description 27
- 238000011084 recovery Methods 0.000 claims abstract description 15
- 238000001816 cooling Methods 0.000 claims abstract description 12
- 229910001111 Fine metal Inorganic materials 0.000 claims abstract description 11
- 239000007921 spray Substances 0.000 claims description 87
- 238000004519 manufacturing process Methods 0.000 claims description 14
- 238000005507 spraying Methods 0.000 claims description 11
- 238000002844 melting Methods 0.000 claims description 9
- 230000008018 melting Effects 0.000 claims description 9
- 230000001105 regulatory effect Effects 0.000 claims description 8
- 230000001276 controlling effect Effects 0.000 claims description 2
- 230000001590 oxidative effect Effects 0.000 claims 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 5
- 239000002245 particle Substances 0.000 description 12
- 238000000889 atomisation Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 229910000881 Cu alloy Inorganic materials 0.000 description 5
- 239000000428 dust Substances 0.000 description 5
- 229910000997 High-speed steel Inorganic materials 0.000 description 4
- 239000002923 metal particle Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000011362 coarse particle Substances 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000001965 increasing effect Effects 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 229910000851 Alloy steel Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000004663 powder metallurgy Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は金属粉末製造ガス噴霧装置に係り、特に不活性
ガスを用いるガス噴霧法によって金属粉末を製造する装
置において、装置を大型化することなく粉末冶金に適し
た高品質な種々の金属粉末を容易に製造でき、しかも作
業性及び操作性を大幅に向上させた金属粉末製造ガス噴
霧装置に関するものである。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a metal powder production gas atomization device, and in particular, to an apparatus for producing metal powder by a gas atomization method using an inert gas. The present invention relates to a metal powder production gas atomizing apparatus which can easily produce various high quality metal powders suitable for powder metallurgy without any problems, and which has greatly improved workability and operability.
最近、新しい金属材料の開発に伴って高品質な金属粉末
を製造する技術が望まれ、特に高速度鋼等の高合金鋼粉
末においては、酸素量の低い清浄な粉末を得る必要性か
ら不活性ガスを用いるガス噴霧法によって粉末が製造さ
れるようになっている。Recently, with the development of new metal materials, technology to produce high-quality metal powders has been desired, and in particular, high-alloy steel powders such as high-speed steels are inert due to the need to obtain clean powders with low oxygen content. Powders are now produced by gas atomization methods using gas.
ガス噴霧法とは、一般に噴霧装置内に配置したタンディ
シュ底部から流下させた溶融金属流に対して噴霧ノズル
から噴出した高速のＮ８やＡｒ等の不活性ガスを吹きつ
けることによって溶融金属を霧化し、冷却固化させて金
属粉末を得る方法である。この方法の一例を第３図に示
す、第３図において、タンディシュ１４内の金属溶湯１
８は溶融金属流１９となって流下し、この溶融金属流１
９に対して噴霧ノズル２０より不活性ガスからなる噴霧
ガス流２５が噴出し、溶融金属流１９は粉末粒子２６と
なり、下方から取り出される。The gas atomization method generally involves atomizing the molten metal by spraying a high-speed inert gas such as N8 or Ar from a spray nozzle onto the molten metal stream that flows down from the bottom of a tundish placed in a spraying device. This is a method of obtaining metal powder by cooling and solidifying. An example of this method is shown in FIG. 3. In FIG.
8 flows down as a molten metal flow 19, and this molten metal flow 1
A spray gas stream 25 made of an inert gas is ejected from the spray nozzle 20 to the molten metal stream 19, and the molten metal stream 19 becomes powder particles 26, which are taken out from below.
この種の金属粉末の製造方法に関しては、多くの報告に
より公知となっているが、特開昭５６−１４６８０４、
特開昭５９−１１８８０５等に開示されたような改良も
行われている。Methods for producing this type of metal powder are known from many reports, including JP-A-56-146804;
Improvements have also been made as disclosed in Japanese Patent Application Laid-Open No. 59-118805.
しかしながら、従来のガス噴霧装置では、噴霧槽を大き
くしなければならないために装置が大型化する問題点が
ある。すなわち、噴霧ノズルから噴出した高速の不活性
ガス流によって、微細に霧化された金属溶滴は、高速の
噴霧ガス流と共に降下しながら冷却固化されるが、ガス
中での金属粉末の冷却速度は遅く、金属溶滴が固化する
までの粒子の飛翔距離が長くなる。したがって、霧化さ
れた金属溶滴が冷却固化するのに必要な距離を確保する
ため、噴霧槽の高さが高くなっている。However, conventional gas atomizing devices have a problem in that the size of the device increases because the atomizing tank must be enlarged. In other words, finely atomized metal droplets are cooled and solidified by the high-speed inert gas flow ejected from the spray nozzle while falling with the high-speed atomization gas flow, but the cooling rate of the metal powder in the gas is is slow, and the flying distance of the metal droplet is longer before it solidifies. Therefore, the height of the spray tank is increased to ensure the distance necessary for the atomized metal droplets to cool and solidify.
仮に噴霧槽の高さを短くすれば、金属溶滴が十分に固化
しない内に高速の噴霧ガス流と共に噴霧槽内壁に衝突す
るために薄片形状とな９たり、さらには噴霧槽の内壁面
上に付着堆積してしまい、適性な粉末形状が得られない
上に、粉末の歩留りが低下する欠点がある。また、金属
溶滴が噴霧槽内壁に衝突するのを回避しようとすると、
必然的に噴霧槽の大型化を伴うことになる。If the height of the spray tank were to be shortened, the metal droplets would collide with the high-speed spray gas flow against the inner wall of the spray tank before solidifying sufficiently, resulting in a flaky shape, and furthermore, the metal droplets would form flakes on the inner wall of the spray tank. This has the drawback that it is not possible to obtain an appropriate powder shape, and the yield of the powder is reduced. Also, if you try to avoid the metal droplets colliding with the inner wall of the spray tank,
This inevitably involves increasing the size of the spray tank.
このように従来技術によるガス噴霧装置では、噴霧槽を
高くする必要から大型の装置となるために噴霧時におけ
る噴霧槽内の雰囲気制御が困難となり、また、異種の金
属粉末を製造する際には噴霧槽内の掃除を充分に実施す
ることができないためにダミーチャージを行うことによ
り、製造される金属粉末の純度を保持する方法が採られ
ているが、この場合でも、異種粉末の混入を避けること
ができないために品質の安定化、さらには作業性及び操
作性の面で多くの問題点があった。As described above, in the conventional gas atomizing apparatus, the atomizing tank needs to be raised, resulting in a large device, making it difficult to control the atmosphere inside the atomizing tank during atomizing. Since the interior of the spray tank cannot be thoroughly cleaned, dummy charging is used to maintain the purity of the manufactured metal powder, but even in this case, contamination with different types of powder is avoided. As a result, there were many problems in terms of quality stability, workability and operability.
本発明の目的は、上記した従来技術の問題点を解消し、
製造される金属粉末の品質安定化及び作業性や操作性の
向上を図りつつ、装置を小型化することができる金属粉
末製造ガス噴霧装置を提供することにある。The purpose of the present invention is to solve the problems of the prior art described above,
It is an object of the present invention to provide a metal powder manufacturing gas atomizing device that can be downsized while stabilizing the quality of manufactured metal powder and improving workability and operability.
以上目的を達成させるために、本発明は金属溶湯流をガ
ス噴霧ノズルを介して霧化させ、噴霧槽の内周面にその
槽内部において、旋回ガス流を付与する旋回ノズルを設
け、霧化された微細金属溶滴を旋回降下させながら冷却
固化して金属粉末を回収するようにしたものである。In order to achieve the above objects, the present invention atomizes the molten metal flow through a gas atomizing nozzle, and provides a swirling nozzle on the inner circumferential surface of the atomizing tank to apply a swirling gas flow inside the tank to atomize the atomization. The resulting fine metal droplets are cooled and solidified while swirling downward, and the metal powder is recovered.
ガス噴霧ノズルから噴出されるガス流によって金属溶湯
流は、微細な金属溶滴となる。この微細な金属溶滴はそ
のまま落下することなく、旋回しつつ降下する。この結
果、噴霧槽内における微細な金属溶滴の滞空時間が延長
され、確実に冷却固化した後、金属粉末回収手段により
回収される。The molten metal stream turns into fine metal droplets due to the gas flow ejected from the gas spray nozzle. These fine metal droplets do not fall as they are, but descend while swirling. As a result, the residence time of the fine metal droplets in the spray tank is extended, and after the fine metal droplets are reliably cooled and solidified, they are collected by the metal powder collection means.
したがって、高品質の金属粉末を製造でき、噴霧槽を小
型化できることから、作業性及び操作性が向上する。Therefore, high quality metal powder can be produced and the spray tank can be downsized, improving workability and operability.
以下、図面に基づいて本発明の詳細な説明する。 Hereinafter, the present invention will be described in detail based on the drawings.
第１図は本発明の金属粉末製造ガス噴霧装置の一実施例
を示す概略的構成図である。第１図において、密閉タン
ク１０に連結された真空ポンプ（図示せず）によって密
閉タンク１０内は〜１０−’Ｔｏｒｒの真空度が維持さ
れると共に外部の高圧ガス供給ｔＡ４０と調圧弁４３を
介して連結されたガス供給経路３８からガスを供給する
ことによりＮ ｔ 、Ａ ｒ等の不活性ガスのガス雰囲
気を保持できるようになっている。FIG. 1 is a schematic diagram showing an embodiment of the metal powder production gas atomizing apparatus of the present invention. In FIG. 1, a vacuum level of ~10-' Torr is maintained in the sealed tank 10 by a vacuum pump (not shown) connected to the sealed tank 10, and the pressure is supplied via an external high-pressure gas supply tA40 and a pressure regulating valve 43. By supplying gas from the gas supply path 38 connected to the gas supply path 38, a gas atmosphere of an inert gas such as N t or Ar can be maintained.
また、密閉タンク１０内には所定の金属を溶解する溶解
炉１２とタンディシュ１４が設置されている。溶解炉１
２には外部を源４６により通電されるコイルが巻回され
ていると共にこの溶解炉１２が図示していない傾斜装置
により傾斜可能の状態で設置されている。タンディシュ
１４の底部には溶湯流出ノズル１５が設けられ、この？
８湯流出ノズル１５を開閉するためのストッパーロッド
１６を昇降させるストッパー装置１７が設置されている
。また、タンディシュ１４の外周囲にはタンディシュ１
４内の溶湯を所定の温度に維持するための保持炉１３が
配置され、この保持炉１３は外部電源４７に接続されて
いる。Furthermore, a melting furnace 12 and a tundish 14 are installed in the closed tank 10 to melt a predetermined metal. Melting furnace 1
2 is wound with a coil which is externally energized by a source 46, and the melting furnace 12 is installed in a tiltable state by a tilting device (not shown). A molten metal outflow nozzle 15 is provided at the bottom of the tundish 14.
A stopper device 17 is installed that raises and lowers a stopper rod 16 for opening and closing the hot water outflow nozzle 15. In addition, around the outside of the tundish 14, there is a tundish 1.
A holding furnace 13 for maintaining the molten metal in 4 at a predetermined temperature is arranged, and this holding furnace 13 is connected to an external power source 47.
密閉タンク１０の底部には、溶湯流出ノズル１５の中心
軸と同軸上に配置された噴霧ノズル２０が固定され、こ
の噴霧ノズル２０付近にシリンダー５３により作動する
ゲート弁１１が設けられている。A spray nozzle 20 disposed coaxially with the center axis of the molten metal outflow nozzle 15 is fixed to the bottom of the closed tank 10, and a gate valve 11 operated by a cylinder 53 is provided near the spray nozzle 20.
噴霧槽２１は、その高さ方向の中段部において円筒状に
形成され、その下方側は逆円錐状に形成されている。こ
の円筒状部の側壁には内壁面に対して接線方向に配置さ
れた複数個の旋回ノズル２４が配置されている。この旋
回ノズル２４は調圧弁４４、バルブ４８．４９が配設さ
れた旋回ガス供給経路４５により高圧ガス供給源４０に
接続されている。噴霧槽２１の前記逆円錐状部の側壁面
は水冷ジャケット２２が設けられ、この水冷ジャケット
２２の下部側には旋回ノズル２４が設置され、この旋回
ノズル２４は前記同様にして高圧ガス供給源４０に接続
されている。The spray tank 21 is formed into a cylindrical shape at the middle part in the height direction, and the lower side thereof is formed into an inverted conical shape. A plurality of rotating nozzles 24 are arranged on the side wall of this cylindrical portion and are arranged tangentially to the inner wall surface. This swirling nozzle 24 is connected to a high-pressure gas supply source 40 through a swirling gas supply path 45 in which a pressure regulating valve 44 and valves 48 and 49 are provided. A water cooling jacket 22 is provided on the side wall surface of the inverted conical portion of the spray tank 21, and a rotating nozzle 24 is installed on the lower side of this water cooling jacket 22, and this rotating nozzle 24 is connected to the high pressure gas supply source 40 in the same manner as described above. It is connected to the.
噴霧槽２１は移動台車２３により水平方向に移動可能に
設置されると共に昇降機構により昇降自在に設置されて
いる。また、噴霧槽２１の底部には粉末回収経路２８が
接続され、この粉末回収経路２日はサイクロン２９、除
塵装置３２、吸引装置３３を経て系外に連通している。The spray tank 21 is installed so as to be movable in the horizontal direction by a movable cart 23, and is also installed to be able to be raised and lowered by a lifting mechanism. Further, a powder recovery path 28 is connected to the bottom of the spray tank 21, and this powder recovery path 28 communicates with the outside of the system via a cyclone 29, a dust removal device 32, and a suction device 33.
サイクロン２９の底部は回収チャンバー３０と回収容器
３１が接続されている。A collection chamber 30 and a collection container 31 are connected to the bottom of the cyclone 29 .
吸引装置３３は圧力制御装置３７が配設された供給経路
３９により密閉タンク１０に連通されている。また、吸
引装置３３のガス下流側はバルブ５１、不活性ガス回収
装置３５（加圧装置３６）、バルブ５２が配設された不
活性ガス供給経路３４により高圧ガス供給源４０に連通
している。The suction device 33 is communicated with the closed tank 10 through a supply path 39 in which a pressure control device 37 is provided. Further, the gas downstream side of the suction device 33 is connected to the high pressure gas supply source 40 through an inert gas supply path 34 in which a valve 51, an inert gas recovery device 35 (pressurizing device 36), and a valve 52 are provided. .
次に上記のように構成される金属粉末製造ガス噴霧装置
の作用・効果について詳細に説明する。Next, the functions and effects of the metal powder production gas atomizing apparatus configured as described above will be explained in detail.
密閉タンク１０内は、ゲート弁１１をシリンダー５３を
作動させることにより閉鎖し、密閉タンク１０内は〜１
０−’Ｔｏ ｒ ｒの真空度に維持され、また、真空に
した後、高圧ガス供給源４０からＡ「、Ｎ８等の不活性
ガスが調圧弁４３、ガス供給経路３８を介して供給され
、不活性ガス雰囲気に維持される。噴霧槽２１は、移動
台車２３により所定の位置に配置されると共に昇降機構
によりゲート弁１１を介して噴霧ノズル２０と同軸上に
密閉タンクＩＯの底部と接続され、シール手段により気
密可能に固定される。The inside of the closed tank 10 is closed by operating the gate valve 11 and the cylinder 53, and the inside of the closed tank 10 is closed by operating the cylinder 53.
It is maintained at a vacuum level of 0-'Torr, and after being evacuated, an inert gas such as A', N8, etc. is supplied from a high-pressure gas supply source 40 via a pressure regulating valve 43 and a gas supply path 38, The spray tank 21 is maintained in an inert gas atmosphere.The spray tank 21 is placed at a predetermined position by a moving cart 23, and is connected to the bottom of the closed tank IO coaxially with the spray nozzle 20 via the gate valve 11 by an elevating mechanism. , and are hermetically fixed by sealing means.
この状態で、密閉タンク１０内に設置された溶解炉１２
では、外部電源４６を介して通電され、炉外周囲に巻回
されたコイルにより金属が加熱され、所定の流動状態を
維持した溶湯となる。この溶湯は、溶解炉１２を傾斜す
ることよりタンディシュ１４内に移される。このとき、
タンディシュ１４内のストッパーロッド１６は溶湯流出
ノズル１５を閉鎖した状態となっており、密閉タンクｌ
０内を大気圧までガス置換を行う。タンディシュ１４内
に所定量の溶湯が満たされると、ストッパーロッド１６
はストッパー装置１７により上方に移動し、タンディシ
ュ１４内の溶湯は溶湯流出ノズル１５を介して流下し、
噴霧ノズル２０に供給されて霧化される。このストッパ
ーロッド１６の移動量の調整により溶湯流出ノズル１５
を介して噴霧ノズル２０に供給する溶湯の量が制御され
る。In this state, the melting furnace 12 installed in the closed tank 10
Then, electricity is applied via the external power source 46, and the metal is heated by a coil wound around the outside of the furnace, and becomes molten metal that maintains a predetermined fluid state. This molten metal is transferred into the tundish 14 by tilting the melting furnace 12. At this time,
The stopper rod 16 in the tundish 14 closes the molten metal outflow nozzle 15, and the closed tank l
Gas replacement is performed inside the 0 to bring it to atmospheric pressure. When the tundish 14 is filled with a predetermined amount of molten metal, the stopper rod 16
is moved upward by the stopper device 17, and the molten metal in the tundish 14 flows down through the molten metal outflow nozzle 15.
It is supplied to the spray nozzle 20 and atomized. By adjusting the amount of movement of the stopper rod 16, the molten metal outflow nozzle 15
The amount of molten metal supplied to the spray nozzle 20 is controlled.
高圧ガス供給源４０から調圧弁４２により流量と圧力が
調整された高圧ガスは供給管４１を介して溶湯流出ノズ
ル１５から流下する溶融流１９を取り囲むように噴霧ノ
ズル２０から高速のガス流となって噴出され、溶湯流１
９を霧化する。The high-pressure gas whose flow rate and pressure are adjusted by the pressure regulating valve 42 from the high-pressure gas supply source 40 is turned into a high-speed gas flow from the spray nozzle 20 so as to surround the melt stream 19 flowing down from the molten metal outflow nozzle 15 via the supply pipe 41. molten metal flow 1
Atomize 9.
噴霧ノズル２０から下方に放射状に霧化された粉末粒子
２６は、高圧ガス供給源４０から調圧弁４４により流量
と圧力が調整され、旋回ノズル２４から噴出する不活性
ガスからなる旋回ガス流２７の作用によって噴霧ガス流
が旋回流れとなるため噴霧槽２１内を旋回降下する。こ
の噴霧ガス流は、噴霧槽２■の逆円錐状部を通過する際
、水冷ジャケット２２により冷却が促進され、金属溶滴
が固化（凝固）して金属粉末２６が生成される。Powder particles 26 atomized radially downward from the spray nozzle 20 are fed from a high-pressure gas supply source 40 to a swirling gas flow 27 consisting of an inert gas, whose flow rate and pressure are adjusted by a pressure regulating valve 44 and spouted from the swirling nozzle 24. As a result of this action, the atomized gas flow becomes a swirling flow, so that it swirls and descends within the spray tank 21 . When this spray gas flow passes through the inverted conical portion of the spray tank 2, cooling is promoted by the water cooling jacket 22, and the metal droplets are solidified (solidified) to produce metal powder 26.
噴霧槽２１の底部に到達した金属粉末２６は、噴霧ガス
流と共にシール手段を介して噴霧槽２１に接続された粉
末回収路２８に導入され、サイクロン２９で噴霧ガスと
分離される。ここで分離された金属粉末２６は水冷ジャ
ケットを有する回収チャンバー３０に一時的に収納され
た後、さらに冷却され、回収チャンバー３０の下部に設
けられたバルブの開閉動作によって噴霧時の雰囲気を保
持したまま粉末回収容器３１内に連続的、または断続的
に回収される。The metal powder 26 that has reached the bottom of the spray tank 21 is introduced together with the spray gas flow into a powder recovery path 28 connected to the spray tank 21 via a sealing means, and is separated from the spray gas by a cyclone 29. The metal powder 26 separated here was temporarily stored in a recovery chamber 30 having a water-cooling jacket, and then further cooled, and the atmosphere at the time of spraying was maintained by opening and closing a valve provided at the bottom of the recovery chamber 30. The remaining powder is continuously or intermittently collected into the powder collection container 31.
一方、不活性ガスからなる噴霧ガスはサイクロン２９を
経た後、除塵装置３２に導入され、ここで噴霧ガス中の
微粉末が除去され、吸引装置３３によりて排出される。On the other hand, after passing through the cyclone 29, the spray gas made of an inert gas is introduced into a dust removing device 32, where fine powder in the spray gas is removed and discharged by a suction device 33.
この場合、ガスの排出量は、噴霧槽２１内の圧力が規定
値に維持されるように槽内の圧力を検知して圧力制御装
置３７により吸引装置３３による吸引量を変化させ制ｍ
される。In this case, the amount of gas discharged is controlled by detecting the pressure inside the spray tank 21 and changing the amount of suction by the suction device 33 using the pressure control device 37 so that the pressure inside the spray tank 21 is maintained at a specified value.
be done.
吸引量２３３から排出された噴霧ガスは、バルブ５０を
開とすれば大気中に排出され、バルブ５０を閉じてバル
ブ５１を開とすれば、ａｍガス回収装Ｍ（不活性ガス回
収装置ｉり３５に導入される。The atomized gas discharged from the suction amount 233 is discharged into the atmosphere when the valve 50 is opened, and when the valve 50 is closed and the valve 51 is opened, the atomized gas is discharged into the atmosphere. introduced in 35.
噴霧ガス回収装置３５で回収された不活性ガスは、加圧
装置３６を経由して高圧に加圧された後、外部の高圧ガ
ス供給源４０に帰還される。The inert gas recovered by the atomized gas recovery device 35 is pressurized to a high pressure via the pressurization device 36, and then returned to the external high pressure gas supply source 40.
また、金属溶湯の噴霧時には、密閉タンク１０内の圧力
と噴霧槽２１内の圧力とを検出して両者間に所定の圧力
差が維持されるように作動する圧力制御装置３７が以下
の制御を行う、すなわち噴霧ノズル２０から噴出される
噴霧ガス流による吸引作用によって密閉タンク１０内が
噴霧槽２１内よりも減圧状態とならないように密閉タン
ク１０内に外部の高圧ガス供給源４０からの不活性ガス
を供給し、または吸引量Ｗ３３により若干加圧されて排
出される不活性ガスの一部を循環させることにより噴霧
ガス流２５の逆流によって金ＷＡ溶湯流１９が密閉タン
クＩＯ内側に吹き上げられるのを防止し、安定した噴霧
操作の実施が可能となる。Further, when spraying molten metal, a pressure control device 37 that detects the pressure in the closed tank 10 and the pressure in the spray tank 21 and operates to maintain a predetermined pressure difference between the two performs the following control. In other words, inert gas from an external high-pressure gas supply source 40 is supplied into the closed tank 10 so that the inside of the closed tank 10 does not become under pressure lower than the inside of the spray tank 21 due to the suction effect of the spray gas flow ejected from the spray nozzle 20. By supplying gas or circulating a part of the inert gas discharged after being slightly pressurized by the suction amount W33, the gold WA molten metal flow 19 is blown up inside the closed tank IO by the reverse flow of the atomizing gas flow 25. This makes it possible to perform stable spraying operations.
このように本実施例においては、所定の溶融金属を高速
の不活性ガスによって請化し、生成した微細金属溶滴は
不活性ガス中で冷却され、回収されるので清浄な金属粉
末を得ることができる。As described above, in this example, a predetermined molten metal is heated with a high-speed inert gas, and the generated fine metal droplets are cooled in the inert gas and collected, making it possible to obtain clean metal powder. can.
一方、噴霧に使用された不活性ガスは、粉末の回収手段
、及び除塵手段を通過した後、再び高圧ガス供給源に帰
還されて、溶融金属の噴霧に再利用できるため、連続的
に噴霧を実施でき、生産性や経済的にも大幅な向上が期
待できる。On the other hand, the inert gas used for atomization is returned to the high-pressure gas supply source after passing through a powder recovery means and a dust removal means and can be reused for atomization of molten metal, so that atomization can be carried out continuously. It can be implemented, and significant improvements in productivity and economy can be expected.
また、噴霧槽の側壁に設けた旋回ノズルと外部の高圧ガ
ス供給源とを連結し、調圧弁によって不活性ガスの圧力
、及び流量を制御して供給したり、さらに、噴霧槽の下
部から導き粉末回収手段と除塵手段を通過させて金属粉
末を取り去った不活性ガスの吸引量を吸引手段で制御す
ることによって、各種の金属に適した噴霧条件が得られ
るように、噴霧槽内のガス流、及び金属粒子の旋回、降
下速さ等の旋回条件を種々に変化させると共に、冷却を
促進することによって噴霧槽を小型化することが可能と
なった。In addition, the rotating nozzle installed on the side wall of the spray tank is connected to an external high-pressure gas supply source, and the pressure and flow rate of inert gas can be controlled and supplied using a pressure regulating valve. By controlling the suction amount of the inert gas that has passed through the powder recovery means and the dust removal means to remove the metal powder, the gas flow in the spray tank can be adjusted to obtain spray conditions suitable for various metals. It has become possible to reduce the size of the spray tank by variously changing the swirling conditions such as swirling and descending speed of the metal particles, and by promoting cooling.
その結果として、噴霧槽内の雰囲気調整の短縮化や噴霧
槽内の掃除が容易となり、異種金属粉末の混入が防止さ
れ、品質をより一定化することができると共に、操作性
、生産性、及び経済性においても有効となる。As a result, it becomes easier to adjust the atmosphere in the spray tank and clean the tank, preventing the mixing of different metal powders, making it possible to maintain more consistent quality, and improving operability, productivity, and It is also effective in terms of economy.
なお、上記した実施例においては、金属溶湯流の霧化に
よって生成された微細な金属溶滴を旋回させるためのガ
スとしてＡｒ、Ｎｚ等の不活性ガスの例を示したが、噴
霧ノズルに対するガスにはＡｒ、Ｎｘ等の不活性ガスを
利用し、旋回を付与するためのガスとして、ヘリウムや
液体窒素等の冷却媒体を用いると、微細な金属溶滴の冷
却が、促進されるので高品質の金属粉末が得られると共
に装置の小型化が容易となる。In the above-described embodiments, an example of an inert gas such as Ar or Nz was used as a gas for swirling fine metal droplets generated by atomization of a molten metal flow. By using an inert gas such as Ar or Nx, and using a cooling medium such as helium or liquid nitrogen as the gas to give swirling, cooling of fine metal droplets is accelerated, resulting in high quality. of metal powder can be obtained, and the device can be easily miniaturized.
本発明において、噴霧槽は逆円錐状部を有する場合、旋
回ガス流が有効に形成されるので特に望゛ましいが、噴
霧槽は円筒形状であってもよい。In the present invention, it is particularly preferable for the spray tank to have an inverted conical part because swirling gas flow can be effectively formed, but the spray tank may also have a cylindrical shape.
また噴霧槽は、密閉タンクに対して着脱自在に配置すれ
ば、異種金属の粉末製造時、噴霧槽を容易に交換できる
。よって槽内の掃除が容易となり、槽の小型化と相まっ
て作業性が向上する。ただし、本発明において、ゲート
弁を介して密閉タンクと噴霧槽を着脱自在に配置した態
様に限定されるものでなく、第３図に示す金属粉末製造
装置と同様な装置構成において、噴霧槽２１内に旋回ガ
ス流を付与する旋回ノズルを放置したものでも本発明の
初期の効果を発揮することができる。Furthermore, if the spray tank is detachably arranged in the closed tank, the spray tank can be easily replaced when producing powder of different metals. Therefore, the inside of the tank can be easily cleaned, and work efficiency is improved as the tank is made smaller. However, the present invention is not limited to an embodiment in which the sealed tank and the spray tank are arranged detachably through a gate valve, and in an apparatus configuration similar to the metal powder manufacturing apparatus shown in FIG. 3, the spray tank 2 The initial effects of the present invention can also be achieved even when a swirling nozzle that provides a swirling gas flow inside is left alone.
試験例１
第１図に示す金属粉末製造ガス噴霧装置を用いて種々の
噴霧ノズルにより金属溶湯を噴霧した結果を第１表に示
す。Test Example 1 Table 1 shows the results of spraying molten metal using various spray nozzles using the metal powder production gas spraying apparatus shown in FIG.
噴霧実験に使用した噴霧ノズルは、特許出願昭６１−１
９６３５７に記載の噴霧ノズル（Ａ）と従来型の環状噴
霧ノズル（Ｂ）を用い、１２５０°Ｃで溶解したＣｕ合
金を直径φ５ｍの溶湯流出ノズルから流出させ、噴霧ノ
ズルからの噴霧ガス圧力を９ ｋｇ／ｃｄに一定したＮ
８ガスを使用して噴霧を実施した。また、噴霧槽内に導
入する旋回ノズルからの噴出ガス流量は約４０４！ ／
５ｅｃ一定で行った。これらの条件で噴霧して生成し
た金属粉末を回収し、噴霧粉中に占める１ ００ｍｅ
ｓ ｈ以下の粉末ｔ（以下、収率と記す、）と噴霧粉の
粒度分布を調べ、累積重量が５０％を示す粒径値を平均
粒子径として求めた。The spray nozzle used in the spray experiment was patented in 1986-1.
Using the spray nozzle (A) described in 96357 and the conventional annular spray nozzle (B), the Cu alloy melted at 1250°C was flowed out from the molten metal outlet nozzle with a diameter of 5 m, and the spray gas pressure from the spray nozzle was set to 9. N constant at kg/cd
Atomization was carried out using 8 gases. Also, the flow rate of gas ejected from the swirling nozzle introduced into the spray tank is approximately 404! /
It was carried out at a constant 5ec. The metal powder generated by spraying under these conditions is recovered, and the amount of metal powder occupied in the sprayed powder is
The particle size distribution of the powder t below s h (hereinafter referred to as yield) and the sprayed powder was investigated, and the particle size value at which the cumulative weight was 50% was determined as the average particle size.
第１表に示す如く、従来型環状ノズル（Ｂ）では得られ
る粉末の平均粒子径も大きく、また、噴霧槽の内壁に付
着したり、槽壁に衝突して薄片状となったものが多く、
歩留が著しく低かった。As shown in Table 1, with the conventional annular nozzle (B), the average particle size of the powder obtained is large, and there are many particles that adhere to the inner wall of the spray tank or collide with the tank wall and become flaky. ,
Yield was extremely low.
一方、（Ａ）型ノズルを使用した場合、噴霧ノズルから
噴出されるＮ２の噴霧ガス流がねじられているため、溶
湯流を微細に霧化するよう効果的に作用すると共に噴霧
槽内での噴霧ガス流の旋回が効果的に働き、槽壁への粉
末粒子の衝突が緩和されるため、槽壁への粉末の付着も
著しく低減され、収率の向上が達成できた。また、噴霧
槽の側壁に設けた旋回ノズルからガスを噴出させ、その
圧力や流量を任意に変えることによっても、槽内におけ
る旋回の効果を著しく発揮することが明らかとなった。On the other hand, when the type (A) nozzle is used, the N2 atomizing gas flow ejected from the atomizing nozzle is twisted, which effectively atomizes the molten metal flow and reduces the Since the swirling of the atomized gas flow worked effectively and the collision of powder particles against the tank wall was alleviated, adhesion of powder to the tank wall was significantly reduced, and an improvement in yield was achieved. It has also been found that the swirling effect within the tank can be significantly exerted by ejecting gas from a swirling nozzle provided on the side wall of the spray tank and arbitrarily changing the pressure and flow rate.
上記の如く、（Ａ−１）噴霧ノズルを使用して得られる
粉末の一例を第２図に示す。FIG. 2 shows an example of the powder obtained using the spray nozzle (A-1) as described above.
第２図は得られたＣｕ合金の形状を示すＳＥＭ写真（倍
率１００倍）である、第２図から明らかなように得られ
るＣｕ合金粒子はほぼ球形に形成されている。FIG. 2 is a SEM photograph (magnification: 100 times) showing the shape of the obtained Cu alloy. As is clear from FIG. 2, the obtained Cu alloy particles are formed into a substantially spherical shape.
試験例２
第２表は第１図に示す金属粉末製造装置によって、Ｃｕ
合金粉及び高速度鋼粉を製造して得られたそれぞれの粉
末の粒度分布を示したものである。Test Example 2 Table 2 shows that Cu
This figure shows the particle size distribution of each powder obtained by producing alloy powder and high-speed steel powder.
噴霧ノズルは上記実施例２に示した（Ａ−１）を用い、
Ｃｕ合金は１２５０℃で、高速度鋼は１５５０℃で溶解
した後、溶湯流出ノズル径をφ３．４．５＋ｗに変えた
タンディシュへ注湯し、細流にして流下させた溶湯流を
噴霧ガス圧力９ ｋｇ ／ ｃｊのＮ□ガスで噴霧した
結果である。The spray nozzle used was (A-1) shown in Example 2 above,
After melting the Cu alloy at 1250°C and high speed steel at 1550°C, the molten metal is poured into a tundish with a molten metal outlet nozzle diameter of φ3.4.5+W, and the molten metal flow is made into a trickle and flowed down at a spray gas pressure of 9. This is the result of spraying with N□ gas of kg/cj.
Ｃｕ合金（イ、口、ハ）の場合、（イ、口）における４
２メツシュ以上の粗粒子は（ハ）に比較して少な（、ま
た、噴霧槽内壁に衝突してできた薄片形状粉がわずかに
含まれているのみであった。In the case of Cu alloy (A, mouth, C), 4 in (A, mouth)
There were fewer coarse particles with a size of 2 or more meshes than in (c) (and only a small amount of flake-shaped powder formed by colliding with the inner wall of the spray tank was included).
一方、（ハ）は生成された金属粉末中に占める粗粒子が
多く、しかも（イ、口）と比較して≧４２メツシュの粗
粉中に含まれる薄片形状物が多かった。しかしくイ、口
、ハ）いずれの場合でも噴霧槽内壁への金属粒子の付着
は生じなかった。On the other hand, in (c), there were many coarse particles in the generated metal powder, and moreover, there were more flake-shaped particles contained in the coarse powder with a mesh size of ≧42 compared to (i). However, in all cases (a), (a) and (c), metal particles did not adhere to the inner wall of the spray tank.
高速度鋼５ＫＨ５１（二、ホ）の場合でも、噴霧槽内壁
への生成金属粒子の付着は生じず、また、ｉ８ ？Ｊ）
流出ノズル径をφ４鴫にすることによって、生成された
金属粉末中に占める粗粉量が減少したため、薄片形状物
がはるかに低減した。Even in the case of high speed steel 5KH51 (2, E), the generated metal particles did not adhere to the inner wall of the spray tank, and i8? J)
By setting the diameter of the outflow nozzle to φ4, the amount of coarse powder occupied in the generated metal powder was reduced, and the number of flakes was significantly reduced.
これらの結果から、本実施例の場合には溶湯流出ノズル
径をφ４■以下の適正な値を取って、生成金ｙ４粉末を
微粉化すると共に、噴霧ガス流に適正な旋回を付与する
ことによって、噴霧槽内壁への金属粒子の付着が防止で
き、内径がφ５００ｍと小径の噴霧槽でも金ＴＩ４粉末
の製造に十分な効果を発ＩＮできることが明らかとなっ
た。From these results, in the case of this example, the diameter of the molten metal outflow nozzle was set to an appropriate value of φ4 or less, the produced gold Y4 powder was pulverized, and the atomized gas flow was given an appropriate swirl. It has become clear that the adhesion of metal particles to the inner wall of the spray tank can be prevented, and that even a spray tank with a small inner diameter of φ500 m can produce sufficient effects for producing gold TI4 powder.
以上のように本発明によれば、金属溶湯流を高速ガス流
によって霧化して得られる微細な金属溶滴は、噴霧槽内
で旋回ノズルから噴出されるガス流によって旋回降下し
ながら冷却されるので小型の噴霧槽においても確実に冷
却固化され、高品質の金属粉末が得られると共に装置の
小型化により装置内のガス雰囲気の制御、槽内の掃除等
の作業性、操作性が容易となる。As described above, according to the present invention, fine metal droplets obtained by atomizing a molten metal stream with a high-speed gas stream are cooled while swirling and descending by a gas stream jetted from a swirling nozzle in a spray tank. Therefore, even in a small spray tank, it is reliably cooled and solidified, and high quality metal powder can be obtained.The miniaturization of the equipment also makes it easier to control the gas atmosphere inside the equipment and clean the inside of the tank, making it easier to operate. .
第１図は本発明の金属粉末製造ガス噴霧装置の一実施例
を示す概略的構成図、第２図は本発明の装置によって得
られる金属粉末の形状を示すＳＥＭ写真、第３図は従来
の金属粉末製造ガス噴霧装置の概略的構成図である。
１０・・・密閉タンク、
１１・・・ゲート弁、
１２・・・溶解炉、
１４・・・タンディシュ、
１５・・・溶湯流出ノズル、
１９・・・金属溶湯流、
２０・・・噴霧ノズル、
２１・・・噴霧槽、
２４・・・旋回ノズル、
２６・・・粉末粒子、
２９・・・粉末回収装置、
３２・・・除塵装置、
３３・・・吸引装置、
３５・・・不活性ガス回収装置、
３７・・・圧力制御装置、
４０・・・高圧ガス供給源。Fig. 1 is a schematic configuration diagram showing an embodiment of the metal powder production gas atomizing apparatus of the present invention, Fig. 2 is an SEM photograph showing the shape of the metal powder obtained by the apparatus of the present invention, and Fig. 3 is a conventional FIG. 1 is a schematic configuration diagram of a metal powder production gas spraying device. 10... Sealed tank, 11... Gate valve, 12... Melting furnace, 14... Tundish, 15... Molten metal outflow nozzle, 19... Molten metal flow, 20... Spray nozzle, 21... Spray tank, 24... Rotating nozzle, 26... Powder particles, 29... Powder recovery device, 32... Dust removal device, 33... Suction device, 35... Inert gas Recovery device, 37... Pressure control device, 40... High pressure gas supply source.
Claims (5)
流下させる手段と、金属溶湯流に高速のガス流を噴出し
て霧化するために外部の高圧ガス供給源と連結したガス
噴霧ノズルと、該ガス噴霧ノズルの下方に設置された噴
霧槽と該噴霧槽の下部に金属粉末回収手段とを備えた金
属粉末製造装置において、前記噴霧槽の内周面にその槽
内部において旋回ガス流を付与する旋回ノズルを設け、
霧化させた微細金属溶滴を旋回降下させながら冷却固化
して金属粉末を回収するようにしたことを特徴とする金
属粉末製造ガス噴霧装置。(1) A means for melting a predetermined metal and causing the molten metal to flow down in a trickle, and a gas spray connected to an external high-pressure gas supply source to spray a high-speed gas stream into the molten metal stream and atomize it. In a metal powder manufacturing apparatus comprising a nozzle, a spray tank installed below the gas spray nozzle, and a metal powder recovery means at the bottom of the spray tank, swirling gas is formed on the inner circumferential surface of the spray tank inside the tank. A rotating nozzle that provides flow is installed,
1. A metal powder manufacturing gas atomizing device characterized in that the metal powder is collected by cooling and solidifying the atomized fine metal droplets while swirling them down.
て流下させる手段と、前記噴霧ノズルとは、非酸化性雰
囲気を保持できる密閉タンク内に配置されると共に該密
閉タンクと前記噴霧槽はゲート弁を介して着脱自在に配
置されていることを特徴とする前記特許請求の範囲第（
１）項記載の金属粉末製造ガス噴霧装置。(2) The means for melting the predetermined metal and causing the molten metal to flow down in a trickle, and the spray nozzle are arranged in a closed tank that can maintain a non-oxidizing atmosphere, and the closed tank and the spray tank are arranged in a closed tank capable of maintaining a non-oxidizing atmosphere. Claim No. 3 is characterized in that it is arranged to be detachably attached via a gate valve.
1) The metal powder production gas atomizing device described in item 1).
特徴とする前記特許請求の範囲第（１）項記載の金属粉
末製造ガス噴霧装置。(3) The metal powder manufacturing gas spraying apparatus according to claim (1), wherein the spray tank is formed in an inverted conical shape.
ス供給源に連結されると共に前記金属粉末回収手段を通
過した不活性ガスを吸引する吸引手段と、該吸引手段に
より前記密閉タンク内及び前記噴霧槽内の圧力差を制限
する手段とを設けたことを特徴とする前記特許請求の範
囲第（２）項記載の金属粉末製造ガス噴霧装置。(4) The rotating nozzle is connected to an external high-pressure gas supply source via a pressure regulating valve, and includes a suction means for sucking the inert gas that has passed through the metal powder recovery means, and a suction means that causes the inside of the closed tank to be and a means for limiting the pressure difference within the spray tank.
る手段は、前記密閉タンク内に前記吸引手段を通過して
排出された不活性ガスを圧力制御手段を介して供給する
不活性ガス循環系路又は前記密閉タンク内へ前記外部の
高圧供給ガス源から調圧弁を介して不活性ガスを供給す
る第２の不活性ガス供給系路の少なくとも一方を有する
ことを特徴とする前記特許請求の範囲第（４）項記載の
金属粉末製造ガス噴霧装置。(5) The means for controlling the pressure difference between the sealed tank and the spray tank is configured to supply inert gas, which has passed through the suction means and is discharged into the sealed tank, through a pressure control means. The above-mentioned claim is characterized in that it has at least one of a circulation system path and a second inert gas supply system path that supplies inert gas from the external high-pressure supply gas source into the closed tank via a pressure regulating valve. The metal powder production gas atomizing device according to scope (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6533987A JPS63230806A (en) | 1987-03-19 | 1987-03-19 | Gas atomizing apparatus for producing metal powder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6533987A JPS63230806A (en) | 1987-03-19 | 1987-03-19 | Gas atomizing apparatus for producing metal powder |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63230806A true JPS63230806A (en) | 1988-09-27 |
Family
ID=13284085
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6533987A Pending JPS63230806A (en) | 1987-03-19 | 1987-03-19 | Gas atomizing apparatus for producing metal powder |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63230806A (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0622339U (en) * | 1992-05-29 | 1994-03-22 | 日新技研株式会社 | Powder production equipment |
| KR100706102B1 (en) | 2006-08-16 | 2007-04-13 | 주식회사에이엠씨 | Apparatus for manufacturing al powder |
| JP2009173991A (en) * | 2008-01-23 | 2009-08-06 | Uchu Miyao | Magnesium particle production device |
| CN104815988A (en) * | 2015-05-15 | 2015-08-05 | 苏州市华宁机械制造有限公司 | Powder making device for powder metallurgy |
| CN106041107A (en) * | 2016-08-19 | 2016-10-26 | 赵文天 | Gas atomization powder production equipment and powder production method thereof |
| CN107570720A (en) * | 2017-07-11 | 2018-01-12 | 张家港创博金属科技有限公司 | A kind of quantitative centrifugal atomization prepares the method and device of uniform grading metal dust |
| WO2018179344A1 (en) * | 2017-03-31 | 2018-10-04 | 株式会社イーツーラボ | Plasma surface treatment method and plasma surface treatment apparatus |
| JP2019014917A (en) * | 2017-07-03 | 2019-01-31 | 株式会社 東北テクノアーチ | Manufacturing device of metal powder and manufacturing method of the same |
| WO2020162037A1 (en) * | 2019-02-04 | 2020-08-13 | 三菱日立パワーシステムズ株式会社 | Apparatus for manufacturing metal powder and gas injector thereof |
-
1987
- 1987-03-19 JP JP6533987A patent/JPS63230806A/en active Pending
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0622339U (en) * | 1992-05-29 | 1994-03-22 | 日新技研株式会社 | Powder production equipment |
| KR100706102B1 (en) | 2006-08-16 | 2007-04-13 | 주식회사에이엠씨 | Apparatus for manufacturing al powder |
| JP2009173991A (en) * | 2008-01-23 | 2009-08-06 | Uchu Miyao | Magnesium particle production device |
| CN104815988A (en) * | 2015-05-15 | 2015-08-05 | 苏州市华宁机械制造有限公司 | Powder making device for powder metallurgy |
| CN106041107A (en) * | 2016-08-19 | 2016-10-26 | 赵文天 | Gas atomization powder production equipment and powder production method thereof |
| WO2018179344A1 (en) * | 2017-03-31 | 2018-10-04 | 株式会社イーツーラボ | Plasma surface treatment method and plasma surface treatment apparatus |
| JPWO2018179344A1 (en) * | 2017-03-31 | 2020-02-06 | 株式会社イーツーラボ | Plasma surface treatment method and plasma surface treatment device |
| JP2019014917A (en) * | 2017-07-03 | 2019-01-31 | 株式会社 東北テクノアーチ | Manufacturing device of metal powder and manufacturing method of the same |
| CN107570720A (en) * | 2017-07-11 | 2018-01-12 | 张家港创博金属科技有限公司 | A kind of quantitative centrifugal atomization prepares the method and device of uniform grading metal dust |
| WO2020162037A1 (en) * | 2019-02-04 | 2020-08-13 | 三菱日立パワーシステムズ株式会社 | Apparatus for manufacturing metal powder and gas injector thereof |
| JP2020125512A (en) * | 2019-02-04 | 2020-08-20 | 三菱日立パワーシステムズ株式会社 | Metal-powder producing apparatus and gas ejector for the same |
| CN112533712A (en) * | 2019-02-04 | 2021-03-19 | 三菱动力株式会社 | Metal powder manufacturing apparatus and gas injector thereof |
| US11298746B2 (en) | 2019-02-04 | 2022-04-12 | Mitsubishi Power, Ltd. | Metal powder producing apparatus and gas jet device for same |
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