JPS63221878A - Ultrasonic washer - Google Patents
Ultrasonic washerInfo
- Publication number
- JPS63221878A JPS63221878A JP5354387A JP5354387A JPS63221878A JP S63221878 A JPS63221878 A JP S63221878A JP 5354387 A JP5354387 A JP 5354387A JP 5354387 A JP5354387 A JP 5354387A JP S63221878 A JPS63221878 A JP S63221878A
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- tank
- cleaning liquid
- ultrasonic
- cleaning device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 claims description 106
- 239000007788 liquid Substances 0.000 claims description 59
- 238000009835 boiling Methods 0.000 claims description 31
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 21
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 16
- 239000007789 gas Substances 0.000 claims description 9
- 238000011084 recovery Methods 0.000 claims description 6
- 238000007872 degassing Methods 0.000 claims description 5
- 238000001914 filtration Methods 0.000 claims description 5
- 238000011144 upstream manufacturing Methods 0.000 claims description 4
- 230000000694 effects Effects 0.000 description 10
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 6
- AJDIZQLSFPQPEY-UHFFFAOYSA-N 1,1,2-Trichlorotrifluoroethane Chemical compound FC(F)(Cl)C(F)(Cl)Cl AJDIZQLSFPQPEY-UHFFFAOYSA-N 0.000 description 5
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- -1 deposits Substances 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- UOCLXMDMGBRAIB-UHFFFAOYSA-N 1,1,1-trichloroethane Chemical compound CC(Cl)(Cl)Cl UOCLXMDMGBRAIB-UHFFFAOYSA-N 0.000 description 1
- CYTYCFOTNPOANT-UHFFFAOYSA-N Perchloroethylene Chemical group ClC(Cl)=C(Cl)Cl CYTYCFOTNPOANT-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は、脱気装置を有す超音波洗浄装置に係わり、更
に詳しくは、脱気装置の改良に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to an ultrasonic cleaning device having a deaerator, and more particularly relates to an improvement of the deaerator.
［従来の技術１
従来、脱気装置を有する超音波洗浄装置が提案されてい
る。即ち本出願人が先に出願したちので、これによれば
、超音波を放射した時、ある条件下で著しい減圧が生じ
、溶液の圧力がその温度に於ける飽和蒸気圧に下ったと
きに、溶液が蒸発して泡を生じ、これが核となって膨張
し空洞をつくり、次に圧縮されて著しい高圧を生ずる原
理に於いてより良くキャビテーションを起こさせる為に
洗浄液より脱気するようにしたものである。[Prior Art 1] Conventionally, an ultrasonic cleaning device having a deaerator has been proposed. That is, the present applicant previously filed an application, which states that when ultrasonic waves are radiated, a significant pressure reduction occurs under certain conditions, and the pressure of the solution falls to the saturated vapor pressure at that temperature. , the solution evaporates to create bubbles, which expand as a core to create a cavity, which is then compressed to create a significant high pressure.In order to better cause cavitation, the cleaning solution is degassed. It is something.
この技術の洗浄効果について確認した所、洗浄物の単位
時間当りの洗浄効果が良かったものであり、換言すれば
、同一の汚れに対する所定の洗浄効果を得る為の洗浄時
間が短かいことが確認されている。When we confirmed the cleaning effect of this technology, we found that the cleaning effect per unit time for the object to be cleaned was good.In other words, it was confirmed that the cleaning time required to obtain the specified cleaning effect for the same stain was short. has been done.
所でこの種の脱気装置付超音波洗浄装置の問題点は、洗
浄液を脱気する作業及びその操作、性が良いこと、価格
が安いこと、メンテナンスフリーであること、小型コン
パクトであること、更に洗浄効果の確認がし易い等々が
要請されている。By the way, the problems with this type of ultrasonic cleaning equipment with a deaerator are that it deaerates the cleaning liquid and its operation, that it has good performance, that it is low in price, that it is maintenance-free, that it is small and compact; Furthermore, it is required that the cleaning effect can be easily confirmed.
従って本発明の目的とする所は、脱気装置付超音波洗浄
装置を提供するに際し、
■洗浄液を脱気する作業及びそれに基づく装置の操作性
の良い超音波洗浄装置を提供するにある。Accordingly, an object of the present invention is to provide an ultrasonic cleaning device with a deaerator, and (1) to provide an ultrasonic cleaning device with good deaeration work of cleaning liquid and operability of the device based thereon.
■製造コストを安価にすることができる超音波洗浄装置
を提供するにある。(2) To provide an ultrasonic cleaning device that can reduce manufacturing costs.
■小型コンパクトで省スペース型の超音波洗浄装置を提
供するにある。■Providing a small, compact, space-saving ultrasonic cleaning device.
■メンテナンスフリーにすることができる超音波洗浄装
置を提供するにある。■Providing an ultrasonic cleaning device that can be maintenance-free.
［発明が解決しようとする手段］
本発明は上記目的を達成する為に次の技術手段を有する
。即ち、実施例に対応する添付図面に使用した符号を用
いて説明すると、洗浄槽と該洗浄槽に満たされ、被洗浄
物を浸漬する為の洗浄液と、該洗浄液に超音波を放射せ
しめる超音波振動子と、該超音波、轡動子を作動せしめ
る発振器より成る超音波洗浄装置であって、該洗浄槽に
該洗浄槽内の洗浄液に超音波を放射せしめた時、洗浄液
中にキャビテーションを良好に発生させられる様に上記
洗浄液中に含有されている気体を脱気するための脱気装
置を有する超音波洗浄装置に於いて：
上記脱気装置は沸騰槽３より成り、この沸騰槽３は上記
洗浄槽２への洗浄液８の供給側に配設されると共に、上
記洗浄液８の沸点より低い他の溶解気体を脱気すること
を特徴とする超音波洗浄装置に関する。[Means to be Solved by the Invention] The present invention has the following technical means to achieve the above object. That is, to explain using the reference numerals used in the attached drawings corresponding to the embodiments, there is a cleaning tank, a cleaning liquid filled in the cleaning tank for immersing the object to be cleaned, and an ultrasonic wave for emitting ultrasonic waves to the cleaning liquid. An ultrasonic cleaning device consisting of a vibrator and an oscillator that activates the ultrasonic wave and the oscillator, which effectively prevents cavitation in the cleaning liquid when the cleaning tank emits ultrasonic waves to the cleaning liquid in the cleaning tank. In an ultrasonic cleaning apparatus having a deaerator for deaerating the gas contained in the cleaning liquid so as to be generated, the deaerator comprises a boiling tank 3; The present invention relates to an ultrasonic cleaning device that is disposed on the supply side of the cleaning liquid 8 to the cleaning tank 2 and degass other dissolved gases whose boiling point is lower than the boiling point of the cleaning liquid 8.
［作用］
上記構成によると、気体を含んだ洗浄液８は蒸気槽４よ
り蒸気凝縮管１１、水分離器１３を介して連続的に脱気
装置である沸騰槽３に送られ、この沸騰槽３によって洗
浄液８の沸点より低い溶解気体と洗浄液８に分離され、
これにより気体溶解度の少ない洗浄液８のみが再び洗浄
槽２に戻される。この動作の連続により洗浄槽２には可
及的に脱気された洗浄液８のみになる。[Function] According to the above configuration, the cleaning liquid 8 containing gas is continuously sent from the steam tank 4 via the steam condensing pipe 11 and the water separator 13 to the boiling tank 3 which is a deaerator. is separated into the dissolved gas lower than the boiling point of the cleaning liquid 8 and the cleaning liquid 8,
As a result, only the cleaning liquid 8 with low gas solubility is returned to the cleaning tank 2 again. By continuing this operation, only the cleaning liquid 8 is left in the cleaning tank 2, which has been deaerated as much as possible.
そこで振動子６を作動させて超音波を放射すると洗浄液
８は減圧されて、その温度に於ける飽和蒸気圧に達する
と蒸気して空洞を発生する。When the vibrator 6 is activated to emit ultrasonic waves, the pressure of the cleaning liquid 8 is reduced, and when it reaches the saturated vapor pressure at that temperature, it evaporates and creates a cavity.
従ってキャビテーションが生じ易い。Therefore, cavitation is likely to occur.
而も周囲に減圧下で液中に存在していた気泡が膨張した
りすることはないから空洞の発生は何ら阻害されない（
キャビテーション良好）、又空洞の圧縮下に於ける破壊
による衝撃エネルギー（高エネルギー）も上記気泡に妨
げられることなく十分に被洗浄物に達する。故に洗浄効
果良好となる。However, since the bubbles existing in the liquid do not expand under the surrounding reduced pressure, the formation of cavities is not inhibited in any way (
Good cavitation) and impact energy (high energy) caused by the collapse of the cavity under compression sufficiently reach the object to be cleaned without being hindered by the bubbles. Therefore, the cleaning effect is good.
［実施例］ 次に添付図面に従い本発明の好適な実施例を詳述する。[Example] Next, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.
図中１は超音波洗浄装置を示し、この装置１は、洗浄槽
２、沸騰槽３、蒸気槽４、蒸気凝縮部５より構成されて
いる。In the figure, 1 indicates an ultrasonic cleaning device, and this device 1 is composed of a cleaning tank 2, a boiling tank 3, a steam tank 4, and a steam condensing section 5.
上記洗浄槽２は単一槽より成り、この洗浄槽２には図示
せざる発振器に連結した圧電型超音波振動子６が配設さ
れている。The cleaning tank 2 consists of a single tank, and a piezoelectric ultrasonic vibrator 6 connected to an oscillator (not shown) is disposed in the cleaning tank 2.
更に上記洗浄槽２の洗浄液８の供給側の上流側に上記沸
騰槽３が配設され、この沸騰槽３にはヒーター７が配管
され、洗浄液８の沸点付近の温度で加熱されている。本
例に於いては、種々ある洗ｔ′Ｉ、液８のうちのフロン
１１３の例を示したものであり、このフロン１１３の沸
点は４７．６℃であるので上記沸騰槽３はヒーター７に
よって加温され、略４７°Ｃ前後に設定されている。従
って上記洗浄液８であるフロン１１３の沸点より低い溶
解気体は沸点分離によって分離せしめられる。Further, the boiling tank 3 is disposed upstream of the cleaning liquid 8 supply side of the cleaning tank 2, and a heater 7 is piped to the boiling tank 3 to heat the cleaning liquid 8 at a temperature near the boiling point. In this example, an example of Freon 113 is shown among various cleaning solutions 8, and since the boiling point of this Freon 113 is 47.6°C, the boiling tank 3 is connected to the heater 7. The temperature is set at approximately 47°C. Therefore, dissolved gases having a boiling point lower than that of the chlorofluorocarbon 113, which is the cleaning liquid 8, are separated by boiling point separation.
更に上記沸騰槽３の洗浄液８の供給側の上流側には上記
蒸気槽４が配設されて、この蒸気槽４にはヒーター９が
配管されている。このヒーター９によって洗浄液８が沸
点以上に加熱蒸発される。Further, the steam tank 4 is disposed upstream of the cleaning liquid 8 supply side of the boiling tank 3, and a heater 9 is piped to the steam tank 4. The cleaning liquid 8 is heated and evaporated by the heater 9 to a temperature higher than its boiling point.
上記した洗浄槽２．沸騰槽３、蒸気槽４の上部ｌＯには
蒸気凝縮管１１が周囲に配設された蒸気凝縮部５が設け
られている。The above-mentioned cleaning tank 2. A steam condensing section 5 around which a steam condensing pipe 11 is disposed is provided in the upper part 10 of the boiling tank 3 and the steam tank 4.
上記蒸気凝縮部５によって凝縮された洗浄液８は連結管
１２を介して水分離器１３に送られる。そしてこの水分
離器１３で水分を分離される。この時の分離される水分
は主に上記洗浄槽２に被洗浄物（ワーク）を入れる時に
すでに付着している付着水等である。この水分離器１３
によって水分を分離された洗浄液８は洗浄液導入管１４
を介して上記沸騰槽３に送られる。そして再び沸点分離
によって分離された洗浄液８のみが洗浄槽２に導入され
る。又上記洗浄槽２の前部１５にはオーバーフロー回収
槽１８が連設されている。上記洗浄槽２の上端まで洗浄
液８が満たされているので、ワークを投入した時に、こ
のワークの体積分だけの洗浄液８がオーバーフローする
ので、このオーバーフローした洗浄液８を回収槽１８に
よって回収し１回収管１７を介して上記蒸気槽４に導入
されている。The cleaning liquid 8 condensed by the steam condensing section 5 is sent to a water separator 13 via a connecting pipe 12. Then, water is separated by this water separator 13. The water separated at this time is mainly adhering water that has already adhered when the object to be cleaned (workpiece) is put into the cleaning tank 2. This water separator 13
The cleaning liquid 8 from which water has been separated is transferred to the cleaning liquid introduction pipe 14.
The water is sent to the boiling tank 3 via the boiling tank 3. Then, only the cleaning liquid 8 separated by boiling point separation is introduced into the cleaning tank 2 again. Further, an overflow recovery tank 18 is connected to the front portion 15 of the cleaning tank 2. Since the cleaning liquid 8 is filled to the top of the cleaning tank 2, when a workpiece is put in, the cleaning liquid 8 corresponding to the volume of the workpiece overflows, so this overflowing cleaning liquid 8 is collected by the collection tank 18 and one recovery is made. It is introduced into the steam tank 4 via a pipe 17.
又上記洗浄槽２の底部１８の一方１９側にろ通管２０が
配管され、このろ通管２０にはポンプ２１、図示せざる
フィルター、冷却器２２が配設され、ろ通管２０の他端
が上記洗浄槽２の底部１８の他方２３側に配管されてい
る。A filtration tube 20 is installed on one side 19 of the bottom 18 of the cleaning tank 2, and a pump 21, a filter (not shown), and a cooler 22 are installed in this filtration tube 20. The end is piped to the other 23 side of the bottom 18 of the cleaning tank 2 .
上記洗浄槽２の洗浄液８はろ通管２０を介してポンプ２
１により循環さぜる゛過程でフィルターにより洗浄液８
中の異物（ゴミ、付着物、油）等を除去すると共に、上
記冷却器２２によって超音波による発熱分を冷却し、洗
浄液８の温度を一定に維持している。The cleaning liquid 8 in the cleaning tank 2 is supplied to the pump 2 through the filtration pipe 20.
In the process of circulating the cleaning solution through step 1, the cleaning solution is
In addition to removing foreign matter (dust, deposits, oil), etc. inside, the cooler 22 cools the heat generated by the ultrasonic waves, thereby maintaining the temperature of the cleaning liquid 8 constant.
尚上記した洗浄液８はフロン１１３の例で示したが、フ
ロン１１３以外の洗浄液を用いることが可能である。即
ち、フロン１１２．イソプロピルアルコール（ＩＰＡ）
、エタノール、塩化メチレン、トリクレン、パークロル
エチレン、１１１トリクロールエタン、及びそれらの共
沸物そして水等を用いることもできる。Although the cleaning liquid 8 described above is exemplified using Freon 113, it is possible to use a cleaning liquid other than Freon 113. That is, Freon 112. Isopropyl alcohol (IPA)
, ethanol, methylene chloride, trichlene, perchloroethylene, 111 trichloroethane, azeotropes thereof, water, and the like can also be used.
本件に於いては洗浄槽２を単一槽のものの例を示したが
、複数槽用いることも可能である。In this case, an example is shown in which the cleaning tank 2 is a single tank, but it is also possible to use a plurality of tanks.
次にこの実施例の使用例を説明する。Next, an example of how this embodiment is used will be explained.
先ず洗浄槽２に洗浄目的物（ワーク）を投入し、そこで
超音波振動子６を作動させて洗浄する。First, an object to be cleaned (workpiece) is placed in the cleaning tank 2, and the ultrasonic vibrator 6 is activated there to clean it.
即ち、上記洗浄目的物（ワーク）を洗浄槽２に投入する
ことによってこの洗浄槽ｚ内の洗浄液８がオーバーフロ
ーし、このオーバーフローシタ洗浄液８は回収槽ＩＢに
入り、回収管１７を介して蒸気槽４に導入される。この
蒸気槽４に導入された洗浄液８はヒーター９によって加
熱され蒸気となって上部１０に位置する蒸％凝縮部５の
凝縮管１１によって再び液体に戻される。そして連結管
１２を介して水分離器１３に導入され水分を分離される
。That is, by putting the object to be cleaned (workpiece) into the cleaning tank 2, the cleaning liquid 8 in the cleaning tank z overflows, and this overflow cleaning liquid 8 enters the recovery tank IB and is sent to the steam tank via the recovery pipe 17. 4 will be introduced. The cleaning liquid 8 introduced into the steam tank 4 is heated by a heater 9, becomes vapor, and is returned to liquid by a condensing pipe 11 of a vapor percentage condensing section 5 located in an upper part 10. Then, it is introduced into a water separator 13 via a connecting pipe 12, and water is separated.
水分を分離された洗浄液８は洗浄液導入管１４を介して
沸＠４６″３に導入される。この時洗浄液８はヒーター
７により加温されることによる沸点分離によって、この
洗浄液８の沸点より低い溶解気体は脱気される。脱気さ
れた洗浄液８のみが洗浄槽２に導入される。The cleaning liquid 8 from which water has been separated is introduced into the boiling point @46'' 3 through the cleaning liquid introduction pipe 14. At this time, the cleaning liquid 8 is heated by the heater 7 to separate the boiling point, so that the boiling point of the cleaning liquid 8 is lower than that of the cleaning liquid 8. The dissolved gas is degassed, and only the degassed cleaning liquid 8 is introduced into the cleaning tank 2.
この動作を繰り返すことにより洗浄槽２内には沸点分離
によって脱気された洗浄液８のみが常に導入されるので
、超音波振動子６を作動させて超音波を洗浄液８に放射
することによって常時良好なキャビテーション効果を得
ることができ、従って良好な洗浄力を得ることができる
ものである。By repeating this operation, only the cleaning liquid 8 that has been degassed by boiling point separation is always introduced into the cleaning tank 2. Therefore, by operating the ultrasonic vibrator 6 and emitting ultrasonic waves to the cleaning liquid 8, the cleaning liquid 8 can be constantly cleaned. It is possible to obtain a good cavitation effect and, therefore, to obtain good cleaning power.
更に本例に於いては洗浄槽２の洗浄液８はろ通管２０を
介してポンプ２１により循環させる過程でフィルターに
より洗浄液８中の異物（ゴミ、付着物、油）等を除去す
ると共に、冷却器２２を連結することによって超音波に
よる発熱分を除去するものであり、従って洗浄液８は略
温度を一定に維持されている。Furthermore, in this example, the cleaning liquid 8 in the cleaning tank 2 is circulated by the pump 21 through the filtration pipe 20, and foreign matter (dust, deposits, oil), etc. in the cleaning liquid 8 is removed by a filter, and the cleaning liquid 8 is also filtered through a cooler. By connecting 22, the heat generated by the ultrasonic waves is removed, and therefore the temperature of the cleaning liquid 8 is maintained substantially constant.
その結果よりキャビテーションを良好にすることが可能
である。従ってより洗浄効果をより向上させることがで
きる。As a result, it is possible to improve cavitation. Therefore, the cleaning effect can be further improved.
更に本例に於いては脱気手段をｓｍ槽３としているので
、上記洗浄槽２を単一槽とした例を示したが複数槽にす
ることも可能である。Furthermore, in this example, the degassing means is the SM tank 3, so although the above-mentioned cleaning tank 2 is a single tank, it is also possible to use a plurality of tanks.
更に脱気手段を沸騰槽３にすることにより装置１自体の
構造を簡単にすることができるのでより小型化省スペー
ス型とすることができ、加えてこの装置１を連続して使
用する時に於いてより一層の省スペース化がはかれるも
のである。Furthermore, by using the boiling tank 3 as the degassing means, the structure of the device 1 itself can be simplified, making it more compact and space-saving.In addition, when the device 1 is used continuously, This allows for further space savings.
［発明の効果］
以上詳述した如く、■キャビテーションの発生を良好に
得られる手段を提供できる。即ち、ギヤビテーション発
生を阻害する気泡は沸騰槽３によって脱気しであるので
洗浄槽２に於ける洗浄効果を格段と向上させることがで
きる。[Effects of the Invention] As detailed above, it is possible to provide (1) a means for effectively suppressing the occurrence of cavitation. That is, since the bubbles that inhibit the generation of gearvitation are removed by the boiling tank 3, the cleaning effect in the cleaning tank 2 can be significantly improved.
又■脱気装置である沸騰槽３を用いることにより脱気効
果を向上させると共に、沸騰槽３を用いることによって
装置ｌ自体の構造を簡単にすることができる超音波洗浄
装置を提供できる。In addition, by using the boiling tank 3 as a deaerator, the deaeration effect can be improved, and by using the boiling tank 3, it is possible to provide an ultrasonic cleaning device in which the structure of the device 1 itself can be simplified.
従って製造工程を少なくすることができるので、製造コ
ストを安価にすることが可能である。Therefore, since the number of manufacturing steps can be reduced, manufacturing costs can be reduced.
更に■脱気手段を沸騰槽３とすることによって装置１自
体を小型コンパクトにすることができ、而も設置スペー
スをより省スペースにすることができると共に作業員が
作業し易い装置を提供できる。Furthermore, by using the boiling tank 3 as the degassing means, the apparatus 1 itself can be made smaller and more compact, and the installation space can be further saved, and an apparatus that is easier for workers to operate can be provided.
この様に本発明は実用上数多くの利点を有するものであ
る。As described above, the present invention has many practical advantages.
添付図面は、本発明の実施例を示し、洗浄装置の構成図
である。
歯巾２・・・・洗浄槽、 ３・・・・沸騰槽、４・
・・・蒸気槽、 ８・・・・洗浄液。
１１・・・・蒸気凝縮器、 １３・・・・水分離器、１
８・・・・回収槽、 １Ｂ・・・・底部、２１・・
・・ポンプ、２２・・・・冷却器、をそれぞれ示してい
る。The accompanying drawings show an embodiment of the present invention and are a configuration diagram of a cleaning device. Tooth width 2...Cleaning tank, 3...Boiling tank, 4...
...Steam tank, 8...Cleaning liquid. 11...Steam condenser, 13...Water separator, 1
8...Recovery tank, 1B...Bottom, 21...
. . Pump and 22 . . . Cooler are shown, respectively.
Claims (1)
る為の洗浄液と、該洗浄液に超音波を放射せしめる超音
波振動子と、該超音波振動子を作動せしめる発振器より
成る超音波洗浄装置であって、該洗浄槽に該洗浄槽内の
洗浄液に超音波を放射せしめた時、洗浄液中にキャビテ
ーションを良好に発生させられる様に上記洗浄液中に含
有されてる気体を脱気するための脱気装置を有する超音
波洗浄装置に於いて； 上記脱気装置は沸騰槽３より成り、この沸騰槽３は、上
記洗浄槽２への洗浄液８の供給側に配設されると共に、
上記洗浄液８の沸点より低い他の溶解気体を脱気するこ
とを特徴とする超音波洗浄装置。 （２）上記沸騰槽３の上流側に水分離器１３を設けたこ
とを特徴とする特許請求の範囲第１項記載の超音波洗浄
装置。 （３）上記水分離器１３の上流側に蒸気凝縮器１１と蒸
気槽４を設けたことを特徴とする特許請求の範囲第１項
記載の超音波洗浄装置。 （４）上記洗浄槽２の下流側に回収槽１８を設けたこと
を特徴とする特許請求の範囲第１項記載の超音波洗浄装
置。 （６）上記洗浄槽２の底部１８にろ過フィルター、冷却
器２２、ポンプ２１が配設され、このポンプ２１によっ
て上記洗浄槽２内の洗浄液８を循環させていることを特
徴とする特許請求の範囲第１項記載の超音波洗浄装置。[Scope of Claims] (1) A cleaning tank, a cleaning liquid filled in the cleaning tank for immersing the object to be cleaned, an ultrasonic vibrator that emits ultrasonic waves to the cleaning liquid, and an ultrasonic vibrator that emits ultrasonic waves to the cleaning liquid. An ultrasonic cleaning device consisting of an oscillator that is activated, wherein the cleaning liquid contains an ultrasonic cleaning device that is contained in the cleaning liquid so that cavitation can be generated in the cleaning liquid when ultrasonic waves are emitted to the cleaning liquid in the cleaning tank. In an ultrasonic cleaning device having a deaerator for degassing the gases that are Along with being placed,
An ultrasonic cleaning device characterized by degassing other dissolved gases lower than the boiling point of the cleaning liquid 8. (2) The ultrasonic cleaning device according to claim 1, characterized in that a water separator 13 is provided upstream of the boiling tank 3. (3) The ultrasonic cleaning device according to claim 1, characterized in that a steam condenser 11 and a steam tank 4 are provided upstream of the water separator 13. (4) The ultrasonic cleaning device according to claim 1, characterized in that a recovery tank 18 is provided downstream of the cleaning tank 2. (6) A filtration filter, a cooler 22, and a pump 21 are disposed at the bottom 18 of the cleaning tank 2, and the pump 21 circulates the cleaning liquid 8 in the cleaning tank 2. The ultrasonic cleaning device according to scope 1.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5354387A JPS63221878A (en) | 1987-03-09 | 1987-03-09 | Ultrasonic washer |
| US07/130,552 US4907611A (en) | 1986-12-22 | 1987-12-09 | Ultrasonic washing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5354387A JPS63221878A (en) | 1987-03-09 | 1987-03-09 | Ultrasonic washer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63221878A true JPS63221878A (en) | 1988-09-14 |
| JPH0437754B2 JPH0437754B2 (en) | 1992-06-22 |
Family
ID=12945714
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5354387A Granted JPS63221878A (en) | 1986-12-22 | 1987-03-09 | Ultrasonic washer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63221878A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6430686A (en) * | 1987-07-24 | 1989-02-01 | Otsuka Giken Kogyo Kk | Fleon ultrasonic washer |
| US5494063A (en) * | 1994-03-30 | 1996-02-27 | Nec Corporation | Ultrasonic degreasing apparatus |
| US5810037A (en) * | 1994-07-22 | 1998-09-22 | Daido Metal Company Ltd. | Ultrasonic treatment apparatus |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5066476U (en) * | 1973-10-18 | 1975-06-14 |
-
1987
- 1987-03-09 JP JP5354387A patent/JPS63221878A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5066476U (en) * | 1973-10-18 | 1975-06-14 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6430686A (en) * | 1987-07-24 | 1989-02-01 | Otsuka Giken Kogyo Kk | Fleon ultrasonic washer |
| US5494063A (en) * | 1994-03-30 | 1996-02-27 | Nec Corporation | Ultrasonic degreasing apparatus |
| US5810037A (en) * | 1994-07-22 | 1998-09-22 | Daido Metal Company Ltd. | Ultrasonic treatment apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0437754B2 (en) | 1992-06-22 |
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