JPS63215987A - Highly resolvable scintillation fiber plate - Google Patents
Highly resolvable scintillation fiber plateInfo
- Publication number
- JPS63215987A JPS63215987A JP4976987A JP4976987A JPS63215987A JP S63215987 A JPS63215987 A JP S63215987A JP 4976987 A JP4976987 A JP 4976987A JP 4976987 A JP4976987 A JP 4976987A JP S63215987 A JPS63215987 A JP S63215987A
- Authority
- JP
- Japan
- Prior art keywords
- scintillator
- film
- fiber plate
- columnar crystal
- organic film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000835 fiber Substances 0.000 title claims abstract description 42
- 239000013078 crystal Substances 0.000 claims abstract description 37
- 239000011347 resin Substances 0.000 claims abstract description 17
- 229920005989 resin Polymers 0.000 claims abstract description 17
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 claims abstract description 14
- 239000008096 xylene Substances 0.000 claims abstract description 14
- 230000000903 blocking effect Effects 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 4
- 230000035699 permeability Effects 0.000 abstract description 4
- 238000005229 chemical vapour deposition Methods 0.000 abstract description 3
- 238000002834 transmittance Methods 0.000 abstract description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 25
- 238000010586 diagram Methods 0.000 description 8
- 239000011521 glass Substances 0.000 description 5
- 239000011261 inert gas Substances 0.000 description 5
- 238000007740 vapor deposition Methods 0.000 description 4
- 238000001816 cooling Methods 0.000 description 3
- 238000000354 decomposition reaction Methods 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 239000012298 atmosphere Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000007888 film coating Substances 0.000 description 2
- 238000009501 film coating Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野〕
本発明はＸＭ像を高解像度で観察するためのシンチレー
ションファイバープレートに関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a scintillation fiber plate for observing XM images with high resolution.
従来、２次元Ｘ線像（数ＫｅＶ〜百ＫｅＶ）を高解像度
で観察するシンチレーションファイバープレートは、第
４図に示すように、通常のファイバープレート上にその
ファイバープレートの持つファイバー径と等しく、柱状
結晶を互いに独立にわずかな隔たりをもたせて配列した
ものである。Conventionally, a scintillation fiber plate for observing two-dimensional X-ray images (several KeV to 100 KeV) with high resolution has a columnar shape on a normal fiber plate with a diameter equal to the fiber diameter of the fiber plate, as shown in Figure 4. Crystals are arranged independently from each other with a slight distance between them.
図中、１はシンチレータ、２はタララドガラス、３はフ
ァイバープレート、４はコアガラス、５はＸ線である。In the figure, 1 is a scintillator, 2 is a Talarad glass, 3 is a fiber plate, 4 is a core glass, and 5 is an X-ray.
通常のファイバープレートのファイバー径は５〜６μｍ
であるから柱状結晶シンチレータ１も同等のサイズであ
る。柱状結晶の材料は使用対象のＸ線の線質によるが、
通常Ｃｓ ｒ、Ｎａ Ｉが使われる。The fiber diameter of a normal fiber plate is 5 to 6 μm.
Therefore, the columnar crystal scintillator 1 is also of the same size. The material of the columnar crystals depends on the quality of the X-rays used, but
Usually Csr, NaI are used.
第５図は第４図のシンチレーションファイバープレート
の使用例を示す図であり、６は試料である。FIG. 5 is a diagram showing an example of use of the scintillation fiber plate shown in FIG. 4, and 6 is a sample.
例えば、試料６を透過してプレートに投影されたＸ線像
は、上記柱状結晶から成るセグメントに分割され、第４
図に示すように各々のセグメントでシンチレーション光
を生じる。このシンチレーション光の一部はまず柱状結
晶シンチレータｌ中をファイバープレート３側に反射を
繰り返しながら伝わり、ファイバープレート３の端部で
一部反射ロスを受けながらファイバープレート３に入射
し、最終的にファイバープレート３の出力端に現われる
。このシンチレーションファイバープレートは第４図に
示すように、一本一本の柱状結晶と対応するファイバー
が各々独立してセグメントを形成することから、非常に
高い空間解像度を示すこととなる。For example, the X-ray image transmitted through the sample 6 and projected onto the plate is divided into segments consisting of the above-mentioned columnar crystals.
As shown in the figure, scintillation light is generated in each segment. A part of this scintillation light first propagates through the columnar crystal scintillator l while repeating reflection to the fiber plate 3 side, and then enters the fiber plate 3 while undergoing some reflection loss at the end of the fiber plate 3, and finally enters the fiber plate 3. Appears at the output end of plate 3. As shown in FIG. 4, this scintillation fiber plate exhibits extremely high spatial resolution because each columnar crystal and the corresponding fiber form segments independently.
ところで、シンチレーションファイバープレートの柱状
結晶部に用いられるシンチレータ材料としては前述した
ようにＣｓ １％ Ｎａ Ｉなどがあるが、いずれも潮
解性を持っている。そして図示したような構造では、一
本一本の柱状結晶は６μｍ以下と非常に細く、従って、
全体を構成する柱状結晶の本数は膨大な数になる０例え
ば、１インチ径の場合で結晶本数は約６００万本程度に
なる。Incidentally, scintillator materials used for the columnar crystal portions of scintillation fiber plates include Cs 1% Na I and the like as described above, but all of them have deliquescent properties. In the structure shown in the figure, each columnar crystal is very thin, less than 6 μm, and therefore,
The number of columnar crystals that make up the whole is enormous. For example, in the case of a diameter of 1 inch, the number of crystals is about 6 million.
全体は一本一本が独立し、空間的に分離していることか
ら結晶の示す表面積は非常に大きなものとなり、１イン
チ径単結晶の場合に比して約４０倍にもなる。そのため
、空気中に放置したとき、潮解性による発光効率の劣化
が問題となる。As each crystal is independent and spatially separated, the surface area of the crystal is extremely large, approximately 40 times that of a 1-inch diameter single crystal. Therefore, when left in the air, deterioration of luminous efficiency due to deliquescence becomes a problem.
第６図は不活性ガス中と大気中における発光効率の経時
変化の実験結果を示す図である。FIG. 6 is a diagram showing experimental results of changes in luminous efficiency over time in an inert gas and in the atmosphere.
図において、不活性ガスとして窒素雰囲気中に保管した
場合には殆ど変化はなく、大気中に保管した場合には２
４時間で１５％程に低下することが分かる。これは各々
の柱状結晶間に空気が入り込み結晶を潮解させて、発光
効率が低下することによるものである。In the figure, there is almost no change when stored in a nitrogen atmosphere as an inert gas, and 2% when stored in the atmosphere.
It can be seen that the temperature decreases to about 15% in 4 hours. This is because air enters between each columnar crystal, deliquifying the crystal and reducing luminous efficiency.
そこでシンチレータ全体をＸ線透過性の良い被膜で完全
に覆い、空気を完全に遮断して潮解性はもとより、空気
と結晶表面の接触による発光効率劣化の防止、さらには
取り扱い昌さの向上を図ることが考えられるが、高解像
シンチレーションファイバープレートの場合、結晶一本
一本が径６μｍ以下で、長さが数ｌＯ〜数１００μｍと
非常に細く、従って機械的に極めて弱い結晶の集合体で
あるため、アルミフォイルによる被膜とかＢｅ板を直接
押しつけるような形の保護はできず、また真空容器に収
納するものも提案されているが、柱状結晶の先端を確実
に固定することができないために機械的強度の点で問題
があった。Therefore, the entire scintillator is completely covered with a film that is highly transparent to X-rays, completely blocking air, preventing not only deliquescent properties but also deterioration of luminous efficiency due to contact between air and the crystal surface, as well as improving handling. However, in the case of high-resolution scintillation fiber plates, each crystal is very thin, with a diameter of 6 μm or less and a length of several 100 μm to several 100 μm, and is therefore an aggregate of mechanically extremely weak crystals. Because of this, it is not possible to protect the columnar crystals by applying a coating with aluminum foil or by directly pressing the Be plate.Also, storage in a vacuum container has been proposed, but it is not possible to securely fix the tips of the columnar crystals. There was a problem with mechanical strength.
本発明は上記問題点を解決するためのもので、シンチレ
ータの潮解性による発光効率の低下を防止すると共に、
機械的強度を向上させ取り扱いを容易にすることが可能
な高解像シンチレーションファイバープレートを提供す
ることを目的とする。The present invention is intended to solve the above problems, and prevents a decrease in luminous efficiency due to the deliquescence of the scintillator, as well as
The purpose of the present invention is to provide a high-resolution scintillation fiber plate that has improved mechanical strength and can be easily handled.
そのために本発明の高解像シンチレーションファイバー
プレートは、ファイバープレートと、１亥フアイバープ
レート上に形成された柱状結晶シンチレータ群から成る
シンチレータ３ンフアイバープレートにおいて、柱状結
晶シンチレータをフィルムで被覆し固定支持したことを
特徴とする。To this end, the high-resolution scintillation fiber plate of the present invention has a three-fiber plate consisting of a fiber plate and a group of columnar crystal scintillators formed on one fiber plate, in which the columnar crystal scintillator is covered with a film and fixedly supported. It is characterized by
本発明の高解像シンチレーションファイバープレートは
、柱状結晶シンチレータ群をフィルムで被覆して固定す
ることにより、シンチレータを空気から遮断して潮解す
るのを防止すると共に、ファイバープレート基板方向へ
はストレスを与えずにシンチレータを固定支持すること
ができる。The high-resolution scintillation fiber plate of the present invention covers and fixes a columnar crystal scintillator group with a film, thereby shielding the scintillator from the air and preventing it from deliquescence, while applying stress toward the fiber plate substrate. The scintillator can be fixedly supported without any problems.
以下、実施例を図１を参照して説明する。 An example will be described below with reference to FIG.
第１図は本発明による高解像シンチレーションファイバ
ープレートの一実施例を示す図で、第３図と同一番号は
同一内容を示している。なお図中、７は反射膜コーティ
ング、８は有機フィルムである。FIG. 1 is a diagram showing an embodiment of a high-resolution scintillation fiber plate according to the present invention, and the same numbers as in FIG. 3 indicate the same contents. In the figure, 7 is a reflective film coating, and 8 is an organic film.
図において、有機フィルム８は各々の柱状結晶からなる
シンチレータｌが空気に触れないようにＣＶＤ （Ｃｈ
ｅ＋ｗｉｃａｌ Ｖａｐｏｕｒ Ｄｅｐｏｓｉｔｉｏｎ
）法によって形成した被膜で、ＸＳＳ透過性が高（、
かつ空気を遮断することができる被膜からなっている。In the figure, an organic film 8 is formed by CVD (Ch
e+wical Vapor Deposition
) method with high XSS permeability (,
It also consists of a coating that can block air.
この場合、有機フィルム８の内部に空気が入り込まない
ように真空あるいは不活性ガス中においてフィルム形成
を行う。なおプレートの出力面は高解像が得られるよう
に有機フィルムのコーティングは行わない。この被膜形
成により、シンチレーションファイバープレートを空気
中に放置したときに問題となる潮解性による発光効率の
劣化を防ぐことができる。In this case, film formation is performed in vacuum or in an inert gas to prevent air from entering the organic film 8. Note that the output surface of the plate is not coated with an organic film to obtain high resolution. By forming this film, it is possible to prevent deterioration of luminous efficiency due to deliquescence, which becomes a problem when the scintillation fiber plate is left in the air.
またこの有機フィルムは、完全には面一ではない全ての
シンチレータ先端部に固着するので、ファイバープレー
ト基板の方へはストレスを与えずにこれを固定支持し、
極めて細いシンチレータの強度を向上させる働きも兼ね
ている。In addition, this organic film adheres to all scintillator tips that are not completely flush, so it can be fixed and supported without applying stress to the fiber plate substrate.
It also serves to improve the strength of extremely thin scintillators.
なお有機フィルム８として、例えばポリパラキシレン、
ポリモノクロロキシレン、ポリジクロロキシレン等のキ
シレン系樹脂が望ましく、１０μｍ厚のキシレン系樹脂
フィルムであれば、水蒸気透過率が非常に低いと共にＸ
ｖＡ透過率が高く、数百ｅＶ程度の低エネルギー領域ま
で使用可能である。ただしこの場合、有機フィルム８が
透明薄膜であるため、シンチレータ１で発光した光が入
力側に戻り、そこから外に射出されてしまい発光量の損
失を生ずる。また、シンチレーションファイバープレー
トに直接光が入射したりすることも生ずる。そこで有機
フィルム８の外面あるいは内面に反射膜７等をコーティ
ングし、再度シンチレータ側に光を反射させたり、或い
は光吸収膜を設けて外部からの直接光を遮断したりする
ことが望ましい。Note that as the organic film 8, for example, polyparaxylene,
Xylene-based resins such as polymonochloroxylene and polydichloroxylene are preferable, and a xylene-based resin film with a thickness of 10 μm has a very low water vapor permeability and
It has a high vA transmittance and can be used up to a low energy range of several hundred eV. However, in this case, since the organic film 8 is a transparent thin film, the light emitted by the scintillator 1 returns to the input side and is emitted from there to the outside, resulting in a loss in the amount of light emitted. Furthermore, light may be directly incident on the scintillation fiber plate. Therefore, it is desirable to coat the outer or inner surface of the organic film 8 with a reflective film 7 or the like to reflect the light back to the scintillator side, or to provide a light absorption film to block direct light from the outside.
第２図はキシレン系樹脂のＣＶＤ蒸着方法を示す図で、
図中、１１は加熱室、１２は分解炉、１３は蒸着室、１
４は冷却装置である。Figure 2 is a diagram showing the CVD deposition method of xylene resin.
In the figure, 11 is a heating chamber, 12 is a decomposition furnace, 13 is a vapor deposition chamber, 1
4 is a cooling device.
図において、加熱室１１でキシレン系樹脂材料を１５０
〜２００℃程度に加熱して昇華蒸発させ、分解炉１２で
５５０〜７００℃程度に加熱昇温しで分子化する０分子
化された状態の蒸気は蒸着室１３を室温にすることによ
り蒸着する。なお冷却装置１４は真空ポンプ側に分子が
行くのを防止するために設けられているものである。In the figure, 150% of the xylene resin material is heated in the heating chamber 11.
The vapor is heated to about ~200°C to sublimate and evaporate, and then heated to about 550 to 700°C in the decomposition furnace 12 to be molecularized. The vapor in the molecularized state is vaporized by bringing the vapor deposition chamber 13 to room temperature. . Note that the cooling device 14 is provided to prevent molecules from going to the vacuum pump side.
第３図は第２図の方法により柱状結晶シンチレータ上に
生成されたキシレン系樹脂フィルムを示す図で、第１図
と同一番号は同一内容を示している。FIG. 3 is a diagram showing a xylene-based resin film produced on a columnar crystal scintillator by the method shown in FIG. 2, and the same numbers as in FIG. 1 indicate the same contents.
シンチレータ柱状結晶の隙間を窒素等の不活性ガスで満
たすか真空にしてほぼ屈折率を１にしである。こうする
ことによりシンチレータとして使用するＣｓ Ｉ、Ｎａ
Ｉが屈折率がほぼ１．７であるので、シンチレーショ
ン光は柱状結晶の内面で反射されてファイバープレート
に到達する。The gaps between the scintillator columnar crystals are filled with an inert gas such as nitrogen or evacuated so that the refractive index is approximately 1. By doing this, Cs I, Na used as a scintillator
Since I has a refractive index of approximately 1.7, the scintillation light is reflected from the inner surface of the columnar crystal and reaches the fiber plate.
このようにＣＶＤ法により蒸着されたキシレン系樹脂の
被膜は、高真空に耐え、Ｘ線透過率はほぼ１００％であ
り、また空気や蒸気の透過性が極めて小さいので、シン
チレータ柱状結晶の潮解を防ぐことができ、また柔軟性
に優れ、寸法安定性が良好であるので、シンチレータ柱
状結晶の先端部を安定的に固定支持することができる。The xylene-based resin film deposited by the CVD method can withstand high vacuum, has an X-ray transmittance of almost 100%, and has extremely low permeability to air and vapor, so it prevents the deliquescence of the scintillator columnar crystals. In addition, since it has excellent flexibility and good dimensional stability, the tip of the scintillator columnar crystal can be stably fixed and supported.
なお、キシレン系樹脂を直接蒸着して被膜を形成する代
わりに、ガラスプレートのような平坦なものの上に成長
させたキシレン系樹脂膜を剥がしてシンチレーションフ
ァイバープレート上にラップし、周辺部を接着剤等で固
定するようにしても樹脂膜が柔軟性に優れているので同
様の効果が得られる。Note that instead of directly vapor depositing xylene resin to form a film, the xylene resin film grown on a flat object such as a glass plate is peeled off, wrapped on a scintillation fiber plate, and the surrounding area is covered with adhesive. The same effect can be obtained even if the resin film is fixed with a similar method because the resin film has excellent flexibility.
またキシレン系樹脂以外にも、アルミ等を蒸着して形成
してもよく、ただこの場合はキシレン系樹脂に比して柱
状結晶間の隙間が完全に密封されにくいのと、空気（水
分）を通し易いことを考慮する必要がある。In addition to xylene-based resin, aluminum or the like may also be vapor-deposited, but in this case, it is difficult to completely seal the gaps between columnar crystals compared to xylene-based resin, and air (moisture) is It is necessary to consider ease of passage.
以上のように本発明によれば、柱状結晶シンチレータ群
をフィルムで被覆して固定することによりシンチレータ
を空気から完全に遮断し、潮解により発光効率が低下す
るのを防止することができる。またファイバープレート
の方へストレスを与えずに全てのシンチレータ柱状結晶
を固定支持することができ、その結果機械的強度を向上
させて取り扱いを容品にすることが可能となる。As described above, according to the present invention, by covering and fixing the columnar crystal scintillator group with a film, the scintillator can be completely shielded from the air, and it is possible to prevent the luminous efficiency from decreasing due to deliquescence. In addition, all the scintillator columnar crystals can be fixedly supported without applying stress to the fiber plate, and as a result, the mechanical strength can be improved and handling becomes easier.
第１図は本発明による高解像シンチレーションファイバ
ープレートの一実施例を示す図、第２図はキシレン系樹
脂のＣＶＤ蒸着方法を示す図、第３図は柱状結晶シンチ
レータ上に生成されたキシレン系樹脂フィルムを示す図
、第４図は高解像度用シンチレーションファイバープレ
ートの断面図、第５図はシンチレーションファイバープ
レートの使用例を示す図、第６図は不活性ガス中保管と
大気中保管の発光効率の変化を示す図である。
１・・・シンチレータ、２・・・タララドガラス、３・
・・ファイバープレート、４・・・コアガラス、５・・
・Ｘ＆ｌ。
６・・・試料、７・・・反射膜コーティング、８・・・
有機フィルム、１１・・・加熱室、１２・・・分解炉、
１３・・・蒸着室、１４・・・冷却装置。
出 願 人 浜松ホトニクス株式会社代 理
人 弁理士 蛭 川 昌 信第１図
第２図Fig. 1 is a diagram showing an embodiment of a high-resolution scintillation fiber plate according to the present invention, Fig. 2 is a diagram showing a CVD deposition method of xylene-based resin, and Fig. 3 is a diagram showing a xylene-based resin produced on a columnar crystal scintillator. Figure 4 shows a resin film, Figure 4 is a cross-sectional view of a high-resolution scintillation fiber plate, Figure 5 shows an example of how a scintillation fiber plate is used, and Figure 6 shows luminous efficiency when stored in inert gas and in air. FIG. 1...Scintillator, 2...Tararad glass, 3.
...Fiber plate, 4...Core glass, 5...
・X&l. 6... Sample, 7... Reflective film coating, 8...
Organic film, 11... heating chamber, 12... decomposition furnace,
13... Vapor deposition chamber, 14... Cooling device. Applicant Hamamatsu Photonics Co., Ltd. Representative
Person Patent Attorney Masanobu Hirukawa Figure 1 Figure 2
Claims (3)
に形成された柱状結晶シンチレータ群から成るシンチレ
ーションファイバープレートにおいて、柱状結晶シンチ
レータをフィルムで被覆し固定支持したことを特徴とす
る高解像シンチレーションファイバープレート。(1) A high-resolution scintillation fiber plate comprising a fiber plate and a group of columnar crystal scintillators formed on the fiber plate, characterized in that the columnar crystal scintillator is covered with a film and fixedly supported.
の範囲第１項記載の高解像シンチレーションファイバー
プレート。(2) The high-resolution scintillation fiber plate according to claim 1, wherein the film is made of xylene resin.
膜または反射膜がコーティングされている特許請求の範
囲第１項記載の高解像シンチレーションファイバープレ
ート。(3) The high-resolution scintillation fiber plate according to claim 1, wherein the outer or inner surface of the film is coated with an absorbing film or a reflective film for blocking light.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4976987A JPS63215987A (en) | 1987-03-04 | 1987-03-04 | Highly resolvable scintillation fiber plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4976987A JPS63215987A (en) | 1987-03-04 | 1987-03-04 | Highly resolvable scintillation fiber plate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63215987A true JPS63215987A (en) | 1988-09-08 |
Family
ID=12840376
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4976987A Expired - Lifetime JPS63215987A (en) | 1987-03-04 | 1987-03-04 | Highly resolvable scintillation fiber plate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63215987A (en) |
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-
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- 1987-03-04 JP JP4976987A patent/JPS63215987A/en not_active Expired - Lifetime
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