JPS629941A - Preparation of multi-layer film - Google Patents

Abstract

PURPOSE:To obtain an easily peelable no-dust film, by extruding a thermoplastic resin in molten state into at least three layers, by preventing the adhesion of the layers each other by blowing out a cooling gas between the layers except both side end parts, by laminating the resin layers on a casting roll and by adhering both side end parts on the melt. CONSTITUTION:A thermoplastic resin 2 supplied in an extruder 1 is extruded from a multi-slit die 3 into molten resin films 4 of at least three layers, which is cooled by a gas blown out from the gas-blowing holes or slits 8 of cooling gas pipes 7 set between the resin outlet slits 6 of the multi-slit die 3. This cooling operation prevents the adhesion of films by making the film temp. below the m.p. of the resin at laminating operation except the side end parts of the molten resin films. Jet air flow is blown onto the both ends of the films 4, which are then forcibly pressed and laminated by an air knife 12 on a casting roll 13. Both side end parts or each layer are adhered together and the multi- layer film 14 thus obtained is wound up. Upper and bottom layers are easily peelable by cutting the both side end parts of the film and the intermediate layer can be obtained as a dust-free film.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、剥離性多層フィルムの製造方法に関する。[Detailed description of the invention] Industrial applications The present invention relates to a method for producing a peelable multilayer film.

従来の技術 近年、半導体ウェハ（以下単にウエノ・という）から工
ＣやＬＳＩを製造するプロセスは長足の進歩をとけてい
る。この進歩に伴かい周辺で利用されている補助材料、
例えばウェハのダイシングチーブやキャリヤチーブなど
は、高度な清浄性（無塵化などンが要求されている。BACKGROUND OF THE INVENTION In recent years, the process of manufacturing ICs and LSIs from semiconductor wafers (hereinafter simply referred to as wafers) has made great progress. Along with this progress, auxiliary materials are being used in the surrounding area.
For example, wafer dicing chives and carrier chives are required to be highly clean (dust-free, etc.).

このため、この分野において用いられる上記の補助材料
であるフィルムやシートなどは、塵埃の付着しない界囲
気、例えば無塵室（クリーンルーム）内などで製造し包
装し開封後はクリーンルームに保管するか、あるいは製
造時にクリーンルームで少くとも片面を無塵な離型紙と
貼合わせて清浄度を維持するものであった。For this reason, the above-mentioned auxiliary materials used in this field, such as films and sheets, are manufactured and packaged in a dust-free environment, such as in a clean room, and then stored in a clean room after opening. Alternatively, during manufacturing, at least one side was pasted with dust-free release paper in a clean room to maintain cleanliness.

発明が解決しょうとする問題点 しかしながら、上記のような無塵フィルムやシートラフ
リーンルームなどの環境で製造するには各種の制約がら
υ、かつ製造コストが高くなるという問題がある。Problems to be Solved by the Invention However, manufacturing in an environment such as the above-mentioned dust-free film or a sheet la-free room is subject to various restrictions and the manufacturing cost is high.

本発明は、上記のような問題点を解消し、非無塵の環境
においても製造でき、かつ容易に剥離することにニジ無
塵フィルムまたはシートを得ることができる多層フィル
ムの製造方法を提供することを目的とする。The present invention solves the above-mentioned problems and provides a method for producing a multilayer film that can be produced even in a non-dust-free environment and that can be easily peeled to obtain a dust-free film or sheet. The purpose is to

問題点を解決するための手段 本発明は、熱可塑性樹脂を少くとも３層で溶融押出し、
該溶融樹脂層の両端部を除く層間に、冷却ガスを吹き出
させて融着を防止した後、該樹脂層をキャヌトロール上
で積層するとともに両端部を融着させる多層フィルムの
製造方法を要旨とする。Means for Solving the Problems The present invention provides melt extrusion of thermoplastic resin in at least three layers,
The gist of the present invention is a method for producing a multilayer film, in which cooling gas is blown out between the layers of the molten resin layer except for both ends to prevent fusion, and then the resin layers are laminated on a canutrol and both ends are fused. .

以下に本発明の方法合一実施態様の図面に基づいて詳細
に説明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the method according to the invention will be explained in detail below with reference to the drawings.

図面は本発明の方法全示す概略酸、明図であり、第１図
は製膜状態を示す正面説明図、第２図は製膜状態の側面
説明図および第５図はマルチダイの下部を示す説明図で
ある。The drawings are schematic diagrams showing the entire method of the present invention, FIG. 1 is a front explanatory view showing the film forming state, FIG. 2 is a side view explanatory drawing of the film forming state, and FIG. 5 is a diagram showing the lower part of the multi-die. It is an explanatory diagram.

押出機１に供給した熱可塑性樹脂２は、マルチスリット
ダイ３から少くとも３層の溶融樹脂フィルムまたはシー
ト４（以下フィルムと称すλ状に押出す。溶融樹脂フィ
ルム４は、第３図に示すように端盲板５で樹脂量ロスリ
ット乙の両端を塞ぎ、中間の樹脂フィルム４の幅を間層
に比べて短かくするか、または端盲板５を設けず樹脂フ
ィルム４の全層の幅を同じに押出してもよい。この場合
、前者は外層のみが端部で融着した多層フィルムとなシ
、後者は各層が端部で融着した多層フィルムと力る。ま
た、樹脂フィルム４の厚さは用途に↓９異なるが、中間
層は通常１００μｍ程度で、外層との厚さの構成比は外
層／中間層＝１／２〜１／４となるようにすることが望
ましい。また、上記樹脂フィルム４の構成は、３層以上
で、目的、用途に応じて中間層を増してもよい。さらに
、これら各層の樹脂は、同種またけ異種を組合せてもよ
いが、外層同志は熱接着性であることが必要である。The thermoplastic resin 2 supplied to the extruder 1 is extruded from a multi-slit die 3 into at least three layers of molten resin film or sheet 4 (hereinafter referred to as film) in the shape of λ. The molten resin film 4 is shown in FIG. Either end blind plates 5 are used to close both ends of the resin loss slit B, and the width of the intermediate resin film 4 is made shorter than the interlayer, or the end blind plate 5 is not provided and the width of the entire resin film 4 is reduced. In this case, the former is a multilayer film in which only the outer layer is fused at the edges, and the latter is a multilayer film in which each layer is fused at the edges. The thickness varies by ↓9 depending on the application, but the intermediate layer is usually about 100 μm, and it is desirable that the thickness composition ratio with the outer layer is outer layer / intermediate layer = 1/2 to 1/4. The structure of the resin film 4 is three or more layers, and an intermediate layer may be added depending on the purpose and use.Furthermore, the resins in each layer may be of the same type or different types, but the outer layers may be heated It needs to be adhesive.

溶融樹脂フィルム４は、マルチスリットダイ３の樹脂出
口スリット６の間に設けた冷却ガス導管７のガス吹出孔
またはスリット８工りガスを吹出させて冷却する。この
冷却は、溶融樹脂フィルム４の端部を除き積層時に樹脂
の溶融温度未満となるようにして各フィルム間の融着防
止し、かつ端部は積層時に溶融温度以上とすることが必
要である。冷却温度の調節は、ガスの吹出量により調節
することができる。この場合の冷却ガス９は、通常窒素
ガス、空気などが用いられるが、冷却ガス中の塵埃の混
入を防止するため大気を利用する場合は充分な濾過全す
ること、或いは液化窒素々どを気化して使用することが
望ましい、更に溶融フィルムの安定性のうえからは不活
性な窒素ガスが望ましい。ガス吹出しによる溶融樹脂フ
ィルムの冷却温度が上記の範囲を外れる場合は、多層フ
ィルムの端部が融着シールできないために積層後に塵が
侵入したり、一方フイルム間が融着して剥離性が失われ
るなどの不都合が生じるために好ましくない。The molten resin film 4 is cooled by blowing gas through the gas blowing holes or slits 8 of the cooling gas conduit 7 provided between the resin outlet slits 6 of the multi-slit die 3. This cooling is performed so that the temperature is below the melting temperature of the resin during lamination, except for the ends of the molten resin film 4, to prevent fusion between the films, and the temperature of the ends must be above the melting temperature during lamination. . The cooling temperature can be adjusted by controlling the amount of gas blown out. In this case, the cooling gas 9 is usually nitrogen gas, air, etc., but in order to prevent dust from entering the cooling gas, if air is used, it must be thoroughly filtered or liquefied nitrogen etc. It is desirable to use an inert nitrogen gas, and from the viewpoint of stability of the molten film, an inert nitrogen gas is desirable. If the temperature at which the molten resin film is cooled by gas blowing is outside the above range, the ends of the multilayer film may not be fused and sealed, allowing dust to enter after lamination, or the films may become fused and the peelability may be lost. This is not preferable because it causes inconveniences such as leakage.

端部１０を除き冷却した多層の樹脂フィルム４は、両端
にジェット気流１１を吹き付け、エアーナイフ１２でキ
ャストロール１３上に強制的に押し付は積層するととも
に両端部同志または各層を融着して多層フィルム１４と
した後巻き取る。なお、両端部の融着は、ジェット気流
の吹き付けに代シ、ロールなどの圧着によるものでも工
い。The multilayer resin film 4, which has been cooled except for the ends 10, is sprayed with a jet stream 11 on both ends, and is forcibly pressed onto a cast roll 13 using an air knife 12 to stack the resin film 4 and fuse the ends together or each layer. After forming the multilayer film 14, it is wound up. In addition, the fusion of both ends can also be done by crimping with a roll or the like instead of spraying with a jet stream.

得られた多層フィルムは、その幅方向の両端（耳りが融
着し、その端部からの塵などの混侵入を防止するもので
あり、その両端部を切ｐ落すことによって表裏の外層を
容易に剥離できて中間層を無塵フィルムとして得ること
ができる。The obtained multilayer film has both ends in the width direction (edges) fused together to prevent dust from entering from the ends, and by cutting off both ends, the outer layers on the front and back can be removed. It can be easily peeled off and the intermediate layer can be obtained as a dust-free film.

本発明における前記の熱可塑性樹脂としては、原則的に
は任意で、フィルムまたはシートの成形ができるもので
あれば特に限定はない。例えばポリオレフィン、ポリア
ミド、ポリエステル、ポリ塩化ビニル、ポリカーボネイ
ト、ポリイミド、ポリスルホン、フッ素樹脂などがあげ
られる。これらの樹脂は、他の樹脂お工び添加剤を添加
したものであってもよい。これら熱可塑性樹脂のうちで
は、ポリエチレン、ポリプロピレンたどが作業性および
価格などの点から好ましい。The thermoplastic resin in the present invention is basically arbitrary and is not particularly limited as long as it can be molded into a film or sheet. Examples include polyolefin, polyamide, polyester, polyvinyl chloride, polycarbonate, polyimide, polysulfone, and fluororesin. These resins may also contain other resin processing additives. Among these thermoplastic resins, polyethylene, polypropylene, etc. are preferred from the viewpoint of workability and cost.

実施例 第１〜３図に示すような、口径５０Ｗｎφの押出機３基
と幅５５０製の多数穴あき６潤φ冷却ガス吹出金属管お
よび中間層樹脂出ロスリット端盲板付マルチスリットキ
ャストダイからなる３種３層共押出キャストフィル吐出
装置、直径４００咽φ、長さ４００闘チルロ一ル引取装
置斤および巻取装置を用いて多層フィルム全製造した。Example As shown in Figures 1 to 3, it consisted of three extruders with a diameter of 50Wnφ, a 550mm wide multi-hole 6mm cooling gas blowing metal pipe, and a multi-slit cast die with a blind plate at the end of the intermediate layer resin extrusion. A multilayer film was entirely manufactured using a three-type, three-layer coextrusion cast film dispensing device, a diameter of 400 mm, a length of 400 mm, a take-up device, and a winding device.

線状低密度ポリエチレン（密度０．９２０　？／ａｎ３
、Ｍ工＝２ｆ７１０分）を、ヘッダ導管の温ｆｆを中間
層を１８０℃、両列層を２００℃に設定した押出機に供
給し、２００℃に設定したダイエり押出し、多層フィル
ムの厚さ全１００μｎｔ、外層／中間層／外層の厚でか
１：２：１となるように各押出機の吐出量を調整した。Linear low density polyethylene (density 0.920?/an3
, M = 2f710min) was fed to an extruder with the temperature ff of the header conduit set at 180°C for the middle layer and 200°C for both rows, and die extrusion was performed at 200°C to determine the thickness of the multilayer film. The discharge rate of each extruder was adjusted so that the total thickness was 100 μnt, and the outer layer/intermediate layer/outer layer thickness was approximately 1:2:1.

冷却ガス吹出孔ニジ元圧が０．５〜ｔ　５　ｋｇ／ｃｍ
２Ｇになるように調整した窒素ガス吹出させて溶融押出
フィルムを冷却した。Cooling gas outlet pressure is 0.5 to 5 kg/cm
The melt-extruded film was cooled by blowing nitrogen gas adjusted to 2G.

両端部を除き冷却した各フィルム金、エアーナイフで強
制的にキャストロールに押付けるとともに、フィルムの
端から約１５　ｍｍ　ｆ中心としてエアージェット気流
を吹き付は溶融状態の外層フィルム同志を融着して巻取
った。Each film, which had been cooled except for both ends, was forcibly pressed onto a cast roll using an air knife, and an air jet was blown at a center of about 15 mm from the edge of the film to fuse the molten outer films together. I wound it up.

得られた多層フィルムは、両端を夫々２０ｍ＋切ｐ落し
表裏面にセロハンテープを貼り左右に広げることに、ｃ
シ容易に剥離させることができ、中間層から塵の付着し
ないフィルムが得られた。The obtained multilayer film was cut off at both ends by 20 m + p, and then cellophane tape was applied to the front and back sides and spread to the left and right.
A film was obtained which could be easily peeled off and no dust adhered to the intermediate layer.

発明の効果 本発明の方法によれば剥離性が容易な多層フィルムが得
られる。また、多層フィルムは非無塵の環境において製
造できるために、これを剥離して得られる無塵フィルム
は従来のものに比べてコストダウンが図れる。また、多
層フィルム全構成する樹脂は、同種、異種の組合せに制
限がなく製造できる。このため、同種の樹脂を用いた場
合に、端部を切シ落したスクラップの再生が容易である
。Effects of the Invention According to the method of the present invention, a multilayer film with easy peelability can be obtained. Furthermore, since the multilayer film can be manufactured in a dust-free environment, the cost of the dust-free film obtained by peeling it off can be reduced compared to conventional films. In addition, the resins that make up the entire multilayer film can be manufactured without any restrictions on the combination of the same or different types. For this reason, when the same type of resin is used, it is easy to recycle the scrap with the end cut off.

【図面の簡単な説明】[Brief explanation of the drawing]

図面は本発明を示す概略説明図で、第１図は製膜状態を
示す正面説明図、第２図は製膜状態の側面説明図および
第５図はマルチダイの下部を示す説明図である。The drawings are schematic explanatory diagrams showing the present invention, and FIG. 1 is a front explanatory view showing a film forming state, FIG. 2 is a side view explanatory drawing showing a film forming state, and FIG. 5 is an explanatory view showing the lower part of a multi-die.

Claims (1)

【特許請求の範囲】[Claims] 熱可塑性樹脂を少くとも３層で溶融押出し、該溶融樹脂
層の両端部を除く層間に、冷却ガスを吹き出させて融着
を防止した後、該樹脂層をキャストロール上で積層する
とともに両端部を融着させる多層フィルムの製造方法。At least three layers of thermoplastic resin are melt-extruded, cooling gas is blown out between the layers except for both ends of the molten resin layer to prevent fusion, and then the resin layers are laminated on a cast roll and both ends are A method for producing a multilayer film by fusing.