JPS628764B2 - - Google Patents
Info
- Publication number
- JPS628764B2 JPS628764B2 JP3604682A JP3604682A JPS628764B2 JP S628764 B2 JPS628764 B2 JP S628764B2 JP 3604682 A JP3604682 A JP 3604682A JP 3604682 A JP3604682 A JP 3604682A JP S628764 B2 JPS628764 B2 JP S628764B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- laminated piezoelectric
- fabry
- electrode
- optical modulator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 9
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000009429 electrical wiring Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Elements Other Than Lenses (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Spectrometry And Color Measurement (AREA)
Description
【発明の詳細な説明】
本発明はフアブリペロ型光学変調器に関するも
のである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a Fabry-Perot optical modulator.
一般にフアブリペロ型光学変調器は、第１図
ａ，ｂに示すように、２枚の透明平板１，２のう
ち１枚の平板２を積層圧電素子３で３点保持し、
面間隔をその積層圧電素子３の厚さ変動で変調す
る構成になつている。ここで、４は保持台、５は
電源である。しかしこの構造では、各積層圧電素
子３からの３組のリード線を引きまわす必要があ
り、また平板１，２は平行平面を形成するため、
直径の1/6以上の厚さが必要になる。 In general, a Fabry-Perot optical modulator, as shown in FIGS. 1a and 1b, holds one flat plate 2 out of two transparent flat plates 1 and 2 at three points with laminated piezoelectric elements 3,
The structure is such that the interplanar spacing is modulated by variations in the thickness of the laminated piezoelectric element 3. Here, 4 is a holding stand, and 5 is a power source. However, in this structure, it is necessary to route three sets of lead wires from each laminated piezoelectric element 3, and since the flat plates 1 and 2 form parallel planes,
The thickness must be at least 1/6 of the diameter.
本発明はこのような欠点を解消するためになさ
れたもので、積層圧電素子を環状にし、透明平板
の周縁すべてを固定するようにして、リード線の
数を減らすとともに、透明平板の厚さも薄くして
重量、寸法を小さくすることが可能なフアブリペ
ロ型光学変調器を提供するものである。 The present invention has been made to eliminate these drawbacks, and by making the laminated piezoelectric element into an annular shape and fixing the entire periphery of the transparent flat plate, the number of lead wires can be reduced and the thickness of the transparent flat plate can also be reduced. The present invention provides a Fabry-Perot optical modulator that can be reduced in weight and size.
以下図面を用いてその一実施例を詳細に説明す
る。第２図は本発明によるフアブリペロ型光変調
器の一実施例を示す。図において１１，１２は透
明平板で、各々その周縁部においてリング状の積
層圧電素子１３，１４により保持台１５に固定さ
れる。２つのリング状積層圧電素子１３，１４は
互いに電気的に接続され、各々電源１６に接続さ
れる。各リング状積層圧電素子１３，１４への通
電は通電時に互いに反対方向に同期して変動する
ように加えられる。したがつて平行面間隔は各平
面の変位の和になり、変調度は、同一印加電圧、
同一積層枚数であれば当然大きくなる。又周囲温
度変化による圧電素子１３，１４の厚さ変動によ
る誤差は両平板１１，１２とも同じような積層圧
電素子１３，１４にマウントされているので、互
に相殺され、両者のバランスをとることにより、
ほゞ温度による誤差をゼロに近づけることが可能
である。 One embodiment will be described in detail below with reference to the drawings. FIG. 2 shows an embodiment of a Fabry-Perot optical modulator according to the present invention. In the figure, reference numerals 11 and 12 denote transparent flat plates, each of which is fixed to a holding table 15 at its peripheral edge by ring-shaped laminated piezoelectric elements 13 and 14. The two ring-shaped laminated piezoelectric elements 13 and 14 are electrically connected to each other and each connected to a power source 16. Current is applied to each of the ring-shaped laminated piezoelectric elements 13 and 14 so as to fluctuate in synchronization in opposite directions when the current is applied. Therefore, the parallel plane spacing is the sum of the displacements of each plane, and the modulation degree is the same applied voltage,
Naturally, if the number of laminated sheets is the same, the size will be larger. Furthermore, since both flat plates 11 and 12 are mounted on the same laminated piezoelectric elements 13 and 14, errors due to changes in the thickness of the piezoelectric elements 13 and 14 due to changes in ambient temperature are canceled out and a balance between the two is maintained. According to
It is possible to bring the error due to temperature close to zero.
第３図は積層圧電素子１３，１４を構成する一
枚のリング状圧電素子の電極構造を示す図で、
ａ，ｂは各々表裏面に相当する。図において、２
１はリング状圧電材料、２２は表面電極、２３は
裏面電極である。各電極２２，２３はリング状圧
電材料２１の表裏面にほぼ全面に形成され、一部
に切欠部２４，２５が形成され、この切欠部の側
面には反対側の電極が延長している。電極２２，
２３は蒸着、メツキその他種々の方法で形成可能
である。 FIG. 3 is a diagram showing the electrode structure of one ring-shaped piezoelectric element constituting the laminated piezoelectric elements 13 and 14.
a and b correspond to the front and back surfaces, respectively. In the figure, 2
1 is a ring-shaped piezoelectric material, 22 is a front electrode, and 23 is a back electrode. Each of the electrodes 22 and 23 is formed almost entirely on the front and back surfaces of the ring-shaped piezoelectric material 21, and cutouts 24 and 25 are formed in a part of the ring-shaped piezoelectric material 21, and the opposite electrode extends from the side surface of the cutout. electrode 22,
23 can be formed by various methods such as vapor deposition, plating, etc.
このように圧電材料２１の表裏両面に電極２
２，２３を形成したリング状の圧電素子を第４図
に示すように多数積層して積層圧電素子を構成す
る。Ａは接着前の状態、Ｂは接着した状態を示
す。第４図の各圧電素子は第３図のＸ−X′線断
面から見た図である。重ね合わせは接着剤で行な
い、両側面に出ている電極を一括してリードに電
気的接続を行なう。電気的接続の様子は第５図に
示す通りになる。必要であれば側面電極の電気的
接続は側面に導電性接着剤を塗布して実現するこ
ともできる。 In this way, electrodes 2 are placed on both the front and back sides of the piezoelectric material 21.
A laminated piezoelectric element is constructed by laminating a large number of ring-shaped piezoelectric elements having 2 and 23 formed thereon as shown in FIG. A shows the state before adhesion, and B shows the state after adhesion. Each piezoelectric element in FIG. 4 is a view taken along the line X-X' in FIG. 3. Overlapping is done with adhesive, and the electrodes protruding from both sides are collectively electrically connected to the leads. The electrical connection is as shown in FIG. If necessary, electrical connection of the side electrodes can also be achieved by applying a conductive adhesive to the side surfaces.
第５図に示すように、各圧電素子を交互に重ね
合わせ、各々の圧電素子１枚毎に並列に電圧を印
加することにより各層が同時に厚さが縮むか増大
するように動作する。しかも、このように薄い圧
電素子を重ね合せることにより、低い電圧で素子
を動作させることができる。したがつて、この積
層圧電素子を第２図に示すように２つの透明平板
１１，１２に対して互いに逆方向に接続すれば、
平板１１，１２は互いに逆方向に移動する。 As shown in FIG. 5, the piezoelectric elements are stacked alternately and a voltage is applied in parallel to each piezoelectric element so that each layer simultaneously shrinks or increases in thickness. Moreover, by stacking thin piezoelectric elements in this manner, the elements can be operated at a low voltage. Therefore, if this laminated piezoelectric element is connected to two transparent flat plates 11 and 12 in opposite directions as shown in FIG.
The flat plates 11 and 12 move in opposite directions.
ところで、この積層圧電素子の製法において、
各電圧ウエハが薄い場合、例えば0.1mm程度の場
合環状に打ち抜いたものを重ね合わせるのは、か
なり困難である。その場合、円板状のウエハの周
辺部に第３図に示すようにリング状の形状に電極
を形成し、しかるのち接着剤で重ね合わせて、積
層状態を実現したあと、環状に打ち抜くことによ
り容易に、環状積層圧電素子を製造できる。 By the way, in the manufacturing method of this laminated piezoelectric element,
When each voltage wafer is thin, for example about 0.1 mm, it is quite difficult to overlap the circularly punched wafers. In that case, electrodes are formed in a ring shape around the periphery of a disc-shaped wafer as shown in Figure 3, and then stacked with adhesive to achieve a laminated state, and then punched out in a ring shape. An annular laminated piezoelectric element can be easily manufactured.
上記構成の本発明においては、電極からのリー
ド線の数を減らすことができ、かつ平板を周縁全
て固定しているので、平板の厚さが1/12程度でも
平行度（λ／100；λは対象とする光の波長）を
達成することができ、従来の約1/2の厚さの平板
ですむので、重量、寸法各々約２割〜３割削減で
きることになる。 In the present invention having the above configuration, the number of lead wires from the electrodes can be reduced, and the entire peripheral edge of the flat plate is fixed, so even if the thickness of the flat plate is about 1/12, the parallelism (λ/100; λ (wavelength of the target light), and requires only a flat plate that is about half the thickness of the conventional one, which means that the weight and dimensions can be reduced by about 20% to 30%.
この効果は、遠赤外領域では更に吸収による光
損失の軽減、高価な光学材料の節約につながり、
本発明の効果は更に大きくなる。 This effect further reduces optical loss due to absorption in the far infrared region, leading to savings in expensive optical materials.
The effects of the present invention are even greater.
以上のように、本発明は同心円状に配置された
環状積層圧電素子の各々に透明平板を保持固定さ
せ、両平板のなす平行面間隔を変調するようにし
たフアブリペロ型光学変調器であり、従来型にく
らべ、リードの本数が少くてすみ、重量、寸法が
削減でき、温度変化による誤差が少く、かつ、赤
外領域で使用する場合高価な光学材料が節約でき
吸収による光学損失も少ないという優位性を有す
る。 As described above, the present invention is a Fabry-Perot optical modulator in which a transparent flat plate is held and fixed to each of annular laminated piezoelectric elements arranged concentrically, and the distance between parallel planes between the two flat plates is modulated. Compared to molds, it requires fewer leads, reduces weight and dimensions, has fewer errors due to temperature changes, and when used in the infrared region has the advantages of saving expensive optical materials and reducing optical loss due to absorption. have sex.
第１図ａ，ｂは従来のフアブリペロ型光変調器
の断面側面図および平面図、第２図ａ，ｂは本発
明の一実施例におけるフアブリペロ型光変調器の
断面側面図および平面図、第３図ａ，ｂは本発明
に使用される圧電素子の平面図および底面図、第
４図ａ，ｂは本発明に使用される積層圧電素子の
製造方法を説明する断面図、第５図は本発明に使
用される積層圧電素子の電気的結線図である。
１１，１２……透明平板、１３，１４……積層
圧電素子、１５……保持台、１６……電源、２１
……圧電材料、２２，２３……電極、２４，２５
……切欠。
1a and b are a sectional side view and a plan view of a conventional Fabry-Perot optical modulator, and FIGS. 2a and 2b are a sectional side view and a plan view of a Fabry-Perot optical modulator according to an embodiment of the present invention. Figures 3a and 3b are top and bottom views of the piezoelectric element used in the present invention, Figures 4a and 4b are cross-sectional views illustrating the manufacturing method of the laminated piezoelectric element used in the present invention, and Figure 5 is a FIG. 2 is an electrical wiring diagram of a laminated piezoelectric element used in the present invention. 11, 12... Transparent flat plate, 13, 14... Laminated piezoelectric element, 15... Holding stand, 16... Power source, 21
... Piezoelectric material, 22, 23 ... Electrode, 24, 25
...notch.
Claims (1)
素子で保持し、各環状積層圧電素子を同必円状に
配置させたことを特徴とするフアブリペロ型光学
変調器。 ２ 各環状積層圧電素子を互に反対方向に同期し
て振動するよう通電させた特許請求の範囲第１項
記載のフアブリペロ型光学変調器。 ３ 環状積層圧電素子を構成する一枚の圧電素子
は、環状の圧電材料の一方の面に形成された第１
の電極と、他方の面に形成された第２の電極とを
有し、第１の電極および第２の電極の一部は前記
圧電材料の側面に延びており、この側面に延びた
電極部分よりリードをとり出すことを特徴とする
特許請求の範囲第１項記載のフアブリペロ型光学
変調器。[Scope of Claims] 1. A Fabry-Perot optical modulator characterized in that each peripheral edge of two transparent flat plates is held by an annular laminated piezoelectric element, and the annular laminated piezoelectric elements are arranged in a concentric circle. . 2. The Fabry-Perot optical modulator according to claim 1, wherein each annular laminated piezoelectric element is energized to vibrate in synchronization in opposite directions. 3 One piezoelectric element constituting the annular laminated piezoelectric element has a first piezoelectric element formed on one surface of an annular piezoelectric material.
and a second electrode formed on the other surface, a portion of the first electrode and the second electrode extending to a side surface of the piezoelectric material, and an electrode portion extending to the side surface. 2. The Fabry-Perot optical modulator according to claim 1, wherein the lead is taken out.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3604682A JPS58152201A (en) | 1982-03-08 | 1982-03-08 | Fabry-perot type optical modulator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3604682A JPS58152201A (en) | 1982-03-08 | 1982-03-08 | Fabry-perot type optical modulator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58152201A JPS58152201A (en) | 1983-09-09 |
| JPS628764B2 true JPS628764B2 (en) | 1987-02-24 |
Family
ID=12458764
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3604682A Granted JPS58152201A (en) | 1982-03-08 | 1982-03-08 | Fabry-perot type optical modulator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58152201A (en) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04116878A (en) * | 1990-09-07 | 1992-04-17 | Ricoh Co Ltd | Semiconductor laser element with heater |
| JPH0786829A (en) * | 1993-09-17 | 1995-03-31 | Nec Corp | Reflector antenna |
| US7324148B2 (en) | 2002-04-26 | 2008-01-29 | Olympus Optical Co., Ltd. | Camera and image pickup device unit used therefor having a sealing structure between a dust proofing member and an image pick up device |
| US7324149B2 (en) | 2002-05-20 | 2008-01-29 | Olympus Optical Co., Ltd. | Camera and image pick-up device unit having an optical member that is vibrated to remove dust |
| JP2003348462A (en) | 2002-05-27 | 2003-12-05 | Olympus Optical Co Ltd | Camera and imaging element unit |
| JP2004064554A (en) | 2002-07-30 | 2004-02-26 | Olympus Corp | Camera and image pickup element unit used for the same |
| JP4296974B2 (en) * | 2004-03-24 | 2009-07-15 | 株式会社村田製作所 | Fabry-Perot tunable filter and multi-channel Fabry-Perot tunable filter |
| JP5123492B2 (en) * | 2006-05-22 | 2013-01-23 | オリンパス株式会社 | Optical device for spectral image observation |
| NO336140B1 (en) * | 2009-09-18 | 2015-05-26 | Sintef | Micro optical device actuator |
| CN109884837A (en) * | 2019-04-26 | 2019-06-14 | 昆山锐芯微电子有限公司 | Lightwave filter |
| CN110032020A (en) * | 2019-04-26 | 2019-07-19 | 昆山锐芯微电子有限公司 | The frequency stabilization lightwave filter and its working method of temperature self-adaptation |
-
1982
- 1982-03-08 JP JP3604682A patent/JPS58152201A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58152201A (en) | 1983-09-09 |
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