JPS62264118A - Contactless pneumatic holding device for work - Google Patents
Contactless pneumatic holding device for workInfo
- Publication number
- JPS62264118A JPS62264118A JP10819786A JP10819786A JPS62264118A JP S62264118 A JPS62264118 A JP S62264118A JP 10819786 A JP10819786 A JP 10819786A JP 10819786 A JP10819786 A JP 10819786A JP S62264118 A JPS62264118 A JP S62264118A
- Authority
- JP
- Japan
- Prior art keywords
- work
- pad
- workpiece
- air
- transfer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 1
- 230000007306 turnover Effects 0.000 abstract 2
- 238000011109 contamination Methods 0.000 abstract 1
- 229920001296 polysiloxane Polymers 0.000 abstract 1
- 239000000725 suspension Substances 0.000 abstract 1
- 235000006693 Cassia laevigata Nutrition 0.000 description 3
- 241000522641 Senna Species 0.000 description 3
- 229940124513 senna glycoside Drugs 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 241000219793 Trifolium Species 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 230000002747 voluntary effect Effects 0.000 description 1
Landscapes
- Specific Conveyance Elements (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
- Feeding Of Workpieces (AREA)
- Manipulator (AREA)
Abstract
Description
【発明の詳細な説明】
てきたワークをパッドに無接触にて吸引懸垂し、ハード
ディスク1シリコンウエハ1フオトマスク等の精密部品
等のワークはへ傷や汚れを非常に嫌う。従ってそれらの
搬送には細心の注意がはられれている。DETAILED DESCRIPTION OF THE INVENTION The workpieces that have come are suctioned and suspended from the pad without contact, and the workpieces, such as precision parts such as a hard disk, silicon wafer, and photomask, are extremely sensitive to scratches and dirt. Therefore, great care must be taken when transporting them.
従来これらの部品の撃退の手段としては1真空搬
パッドやチャック等を用いて行なわれていたが、パッド
跡がついたシ傷や汚れかつくことが避けられずXfM品
価値を損なっていた。Conventionally, these parts have been repelled using a vacuum transfer pad, chuck, etc., but this has inevitably resulted in scratches and dirt left by the pads, which has impaired the value of the XfM product.
本発明はこれらの欠点を改良するためになされたもので
ある。The present invention has been made to improve these drawbacks.
本発明は1コンベヤ等の搬送装置と上面が閉ざされてい
て下部が開口している箱状体(1)の上面に空気送入口
(2)を具え為開口された下部内側端面をなめらかな円
弧状に形成して曲げ部(3)を形成し)その曲げ部(3
)の先に上側にそシ返る折り返し部(4)を設けh空気
送入口(2)より空気を送入することによりワークを無
接触にて’lf、壬するパッド(A)とこのパッド(A
)を取り付ける回転および昇降が可能な移載片を具える
旋回が可能な移載具とパッド(A)に近接して取付けら
れ1ワーク(9)の存在および接近を検知し1雫≠≠#
;樽もパッド(A)の空気送入口(2)と、送風機(1
1)を接続するホース(12)途中に介在する電磁弁α
Qを開閉するセンナ(8)、 (+()とワーク(9)
を移載¥・る移載台(14)とからなる装置である。The present invention includes a transport device such as a conveyor, and a box-like body (1) whose top surface is closed and whose bottom surface is open, and which has an air inlet port (2) on the top surface, so that the inner end surface of the open bottom part is formed into a smooth circle. The bent portion (3) is formed into an arc shape to form a bent portion (3).
) is provided with a folded part (4) that folds back upwards, and the pad (A) and this pad ( A
) is installed in close proximity to the pad (A) and detects the presence and approach of 1 workpiece (9). 1 drop≠≠#
;Keg also connects the air inlet (2) of the pad (A) and the blower (1)
1) Connecting hose (12) Solenoid valve α interposed in the middle
Senna (8) that opens and closes Q, (+ () and work (9)
This is a device consisting of a transfer table (14) for transferring.
移載具および移載片には)ロボット)モータ穐シリンダ
等により前後進1昇降為旋回等の往復運動を行う機能を
有する機器にて構成されている。The transfer tool and the transfer piece are comprised of equipment that has the function of performing reciprocating movements such as forward and backward movement, lifting, turning, etc. using a robot) motor, cylinder, etc.
移載台は)集積台1ストツクケース)検査装置1機械お
よび装置等が考えられる。The transfer table may include a) an accumulation table, a stock case) an inspection device, and one machine and equipment.
以下添付図によシ本発明の好適な例を説明するが)本発
明は1これに限定されるものではない。Preferred examples of the present invention will be described below with reference to the accompanying drawings; however, the present invention is not limited thereto.
本発明に使用するパッド(A)は1第2図および第3図
に示すごとく空気送入口(2)よシ空気をパッド(A)
内に送入することによシ)曲げ部(3)に接近したワー
ク(9)は無接触にてパッド(A)K吸引懸垂される。The pad (A) used in the present invention is 1 as shown in Figs. 2 and 3.
By feeding the workpiece (9) into the bending portion (3), the workpiece (9) is suctioned and suspended by the pad (A)K without contact.
箱状体(1)の側面に取付けられたガイド(5)は蔦懸
垂中のワーク(9)が自由に移動するのを防ぐ役割をし
ている。A guide (5) attached to the side of the box-like body (1) serves to prevent the workpiece (9) suspended from moving freely.
第1図はコンベア(13) Kより送られてきたワーク
(9)を移載台(14)の上に積層するラインである。Figure 1 shows a line in which works (9) sent from conveyor (13) K are stacked on transfer table (14).
パッド(A)は為旋回可能な移載具であるロボット(6
)に設けられた昇降可能な移載片であるアーム(7)に
取付けられている。センナ(8)% (81はアーム(
7)の側面に取付けられ1ワーク(9)の存在および接
近を検出する。パッド(A)の空気送入口(2)には電
磁弁a1を介してホース(12)により送風機(12)
K接続している。The pad (A) is a robot (6) which is a rotatable transfer device.
) is attached to an arm (7) that is a movable transfer piece. Senna (8)% (81 is arm (
7) to detect the presence and approach of the workpiece (9). A blower (12) is connected to the air inlet (2) of the pad (A) by a hose (12) via a solenoid valve a1.
K is connected.
コンベヤ(13)の端までワークが送られてくると1該
ワーク(9)の真上で待期していたアーム(7)K取付
けられたパッド(A)が下降してきて)パッド(A)と
ワーク(9)との距離がある一定のところまでくると)
センナ(8)Kよシ検出し1アーム(7)の下降を中止
し1同時に電磁弁αQを開にし1送風機(11)から送
られてきた空気を空気送入口(2)よシパッド(A)に
送入し1ワーク(9)を無接触にて懸垂する。When the workpiece is sent to the end of the conveyor (13), the pad (A) attached to the arm (7) K, which was waiting just above the workpiece (9), descends and the pad (A) When it reaches a certain distance from the workpiece (9))
Senna (8) detects K, stops the lowering of arm 1 (7), simultaneously opens solenoid valve αQ, and transfers the air sent from blower 1 (11) to air inlet (2) and pad (A). 1 workpiece (9) is suspended without contact.
ワーク(9)がパッド(A)によシ懸垂されたことをセ
ンサ關により検知すると1アーム(7)は上昇し1同時
にロボット(6)は旋回し移載台(14)のワーク(9
)の積層場所の真上にくると為旋回を中止し電磁弁αQ
を閉じ、パッド(A) K供給する空気をしゃ断し1ワ
ーク(9)はパッド(A)から解放され移載台(14)
の所定の位置に積層される。When the sensor detects that the workpiece (9) is suspended on the pad (A), one arm (7) rises and at the same time the robot (6) turns and lifts the workpiece (9) on the transfer table (14).
), the rotation is stopped and the solenoid valve αQ is activated.
is closed, the air supplied to pad (A) is cut off, and one workpiece (9) is released from pad (A) and transferred to transfer table (14).
are laminated at predetermined positions.
以上述べたごとく本発明により1ワークを無接触にて移
載することが可能となり)移載中のワークの傷や汚れを
防止することが可能となった。As described above, the present invention makes it possible to transfer one workpiece without contact, and prevents scratches and stains on the workpiece during transfer.
第1図は本発明の実施例1第2図はパッドの平面図1第
3歯はパッドの断面側面図。図において、(1)〜箱状
体 (2)〜空気送入口 (3)〜曲り部(6)〜ロボ
ット (7]〜アーム +5osi〜七ンサ(9)〜ワ
〜り 四〜電磁弁 (11)〜送風機(12)〜ホース
(13)〜コンベヤ (14)〜移載台
称
ト続袖正書(自発)
1.・μ件の表示 昭和61年特願108197号2
、発明の名称 無接触ワーク空気保持器3、捕d
、16汗
・)を件との関係 特許出願人 明石 博(l、所 大
阪府豐中市北桜暉2丁目7番12号4、代理人
住所
L(名
5、捕lE1宿令の日付 自発的補正6、補正の対
象 明細2、特許請求の範囲」「発明の詳細な説明j
「図面の簡
別紙
(1)、r特許請求の範囲」の欄を下記のように変更し
ます。
「ワークを搬送する搬送装置と、該搬送装置と前記ワー
クを移載する移載場所との間を往復運動でき、かつ昇降
自在な移動片を具える移動具と、前記移動片に取り付け
られた上部が閉ざされていて、上部が開口している箱上
体の上面に空気送入[]を具え、開口している下部内側
端面をなめらかな円弧状に形成して曲げ部とし、その曲
げ部の先にフランジ状の折り返し部を設け、前記空気送
入1」より空気を送入することによりワークを無接触に
て懸重しうるパットと、前記パッドに開閉弁を介在して
空気送入口に連通し、パッドに送風する送風装置とから
なる無接触ワーク空気保持器。
(2)、r発明の詳細な説明jの欄を次のように変史し
よす。
イ、明細3(2)ページの17行目の「上側にそり返る
」を削除し、「・・・の先に」の後に[フランジ状のJ
を加入します。
「折り返し部(4)の形状は、箱状体(1)の軸心と直
角、上向きまたは下向きのいずれかの形状をしており、
ワーク(9)の性状に応じて適切な形萩を選択して形成
する。」
(3)、r図面の簡単な説明」の欄
イ、明細書(5)ベージ12行目「・・側面図、」の後
に下車を加入します。
[第4図は、平行な折り返し部、第5図は、下向きの折
り返し部を表す断面図である。°」口、明細書(5)ペ
ージ17行目の後に下記を加入します。
[(4)〜折り返し部 (4’ )(4”)〜折り返
し部」
4、r図面」を添付図と差し替え−ます。
以上FIG. 1 is an embodiment of the present invention. FIG. 2 is a plan view of the pad. The third tooth is a cross-sectional side view of the pad. In the figure, (1) - Box-shaped body (2) - Air inlet (3) - Bent part (6) - Robot (7] - Arm +5osi - Seven sensors (9) - Wall 4 - Solenoid valve (11) ) ~Blower (12) ~Hose (13) ~Conveyor (14) ~Transfer platform name Continuation of title (spontaneous) 1. Display of μ 1985 Patent Application No. 108197 2
, Title of the invention Contactless workpiece air retainer 3, trap d
Patent applicant: Hiroshi Akashi (L, Address: 2-7-12-4, Kitasakuragi, Toonaka City, Osaka Prefecture, Address: L (Name: 5, Date of Arrest: Voluntary) Amendment 6, Subject of amendment Specification 2, Claims, Detailed description of the invention
The column "Simplified appendix of drawings (1), r Claims" will be changed as follows. ``A transfer device that transfers a workpiece, a moving tool that is capable of reciprocating between the transfer device and a transfer location that transfers the workpiece, and includes a moving piece that can be raised and lowered, and that is attached to the moving piece. The upper part of the box upper body is closed and the upper part is open, and the upper surface of the box upper body is equipped with an air inlet [ ], and the open inner end surface of the lower part is formed into a smooth arc shape to form a bent part, and the bent part A pad is provided with a flange-shaped folded part at the end of the pad, and a workpiece can be suspended without contact by supplying air from the air supply 1, and an air supply port is provided with an on-off valve interposed in the pad. A non-contact work air retainer consisting of an air blower that communicates with the pad and blows air to the pad. (2), Detailed explanation of the invention (j) will be changed as follows. B. Delete "curves upwards" in line 17 of page 3 (2) of the specification, and after "beyond..." [flange-shaped J
will join. "The shape of the folded part (4) is perpendicular to the axis of the box-shaped body (1), and is either upward or downward,
An appropriate shape of clover is selected and formed according to the properties of the workpiece (9). ” (3), r Brief explanation of the drawing” column A, and the statement (5) page, line 12, add ``Side view,'' followed by alighting. [FIG. 4 is a sectional view showing a parallel folded portion, and FIG. 5 is a sectional view showing a downward folded portion. °'', add the following after line 17 on page 5 of the statement. [(4) ~ Folded part (4') (4'') ~ Folded part "4, r drawing" is replaced with the attached drawing. that's all
Claims (1)
を移載する移載場所との間を往復運動でき、かつ昇降自
在な移動片を具える移動具と、前記移動片に取付けられ
た上部が閉ざされていて、下部が開口している箱状体の
上面に空気送入口を具え、開口している下部内側端面を
なめらかな円弧状に形成して曲げ部を形成し、その曲げ
部の先に上側にそり返る折り返し部を設け、前記空気送
入口より空気を送入することによりワークを無接触にて
懸垂しうるパッドと、前記パッドに開閉弁を介在して空
気送入口に連通し、パッドに送風する送風装置と、前記
搬送装置上のワークを検知しワークの検知により移動片
を下降するとともに、前記開閉弁を開くセンサーとから
なる無接触ワーク空気保持装置。A transfer device that transfers a workpiece, a moving tool that is capable of reciprocating between the transfer device and a transfer location that transfers the workpiece and includes a movable piece that can be raised and lowered, and an upper part that is attached to the moving piece. An air inlet is provided on the upper surface of the box-like body which is closed and the lower part is open, and the open inner end surface of the lower part is formed into a smooth arc shape to form a bent part. A pad is provided with a folded portion that curves upward first, and allows the workpiece to be suspended without contact by supplying air from the air inlet, and the pad is communicated with the air inlet through an on-off valve. A non-contact workpiece air holding device comprising: a blower device that blows air to the pad; and a sensor that detects a workpiece on the conveyance device, lowers the moving piece upon detection of the workpiece, and opens the opening/closing valve.
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10819786A JPS62264118A (en) | 1986-05-12 | 1986-05-12 | Contactless pneumatic holding device for work |
KR860010726A KR870005887A (en) | 1985-12-30 | 1986-12-15 | Contactless conveying device |
DE19863642937 DE3642937A1 (en) | 1985-12-30 | 1986-12-16 | Non-contacting conveying device |
US07/343,344 US5067762A (en) | 1985-06-18 | 1989-04-26 | Non-contact conveying device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10819786A JPS62264118A (en) | 1986-05-12 | 1986-05-12 | Contactless pneumatic holding device for work |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62264118A true JPS62264118A (en) | 1987-11-17 |
Family
ID=14478475
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10819786A Pending JPS62264118A (en) | 1985-06-18 | 1986-05-12 | Contactless pneumatic holding device for work |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62264118A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1999033725A1 (en) * | 1997-12-30 | 1999-07-08 | Krytek Corporation | Contactless wafer pick-up chuck |
JP2009028863A (en) * | 2007-07-27 | 2009-02-12 | Ihi Corp | Non-contact carrier |
CN102431787A (en) * | 2011-11-28 | 2012-05-02 | 四川长虹电器股份有限公司 | Method for removing impurities of vacuum chuck |
CN103381960A (en) * | 2012-05-02 | 2013-11-06 | 立晔科技股份有限公司 | Chip-casting transfer device |
CN108466833A (en) * | 2018-03-28 | 2018-08-31 | 江苏理工学院 | A kind of feed device |
-
1986
- 1986-05-12 JP JP10819786A patent/JPS62264118A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1999033725A1 (en) * | 1997-12-30 | 1999-07-08 | Krytek Corporation | Contactless wafer pick-up chuck |
JP2009028863A (en) * | 2007-07-27 | 2009-02-12 | Ihi Corp | Non-contact carrier |
CN102431787A (en) * | 2011-11-28 | 2012-05-02 | 四川长虹电器股份有限公司 | Method for removing impurities of vacuum chuck |
CN103381960A (en) * | 2012-05-02 | 2013-11-06 | 立晔科技股份有限公司 | Chip-casting transfer device |
CN108466833A (en) * | 2018-03-28 | 2018-08-31 | 江苏理工学院 | A kind of feed device |
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