KR870005887A - Contactless conveying device - Google Patents

Contactless conveying device Download PDF

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Publication number
KR870005887A
KR870005887A KR860010726A KR860010726A KR870005887A KR 870005887 A KR870005887 A KR 870005887A KR 860010726 A KR860010726 A KR 860010726A KR 860010726 A KR860010726 A KR 860010726A KR 870005887 A KR870005887 A KR 870005887A
Authority
KR
South Korea
Prior art keywords
box
conveying device
contactless
transport apparatus
contactless transport
Prior art date
Application number
KR860010726A
Other languages
Korean (ko)
Inventor
히로시 아까시
Original Assignee
히로시 아까시
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP29748985A external-priority patent/JPS62157792A/en
Priority claimed from JP3404886A external-priority patent/JPS62290654A/en
Priority claimed from JP9165286A external-priority patent/JPS62251094A/en
Priority claimed from JP10819786A external-priority patent/JPS62264118A/en
Priority claimed from JP61235333A external-priority patent/JPS6392537A/en
Application filed by 히로시 아까시 filed Critical 히로시 아까시
Publication of KR870005887A publication Critical patent/KR870005887A/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G61/00Use of pick-up or transfer devices or of manipulators for stacking or de-stacking articles not otherwise provided for
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90Devices for picking-up and depositing articles or materials
    • B65G47/91Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/911Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with air blasts producing partial vacuum

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Specific Conveyance Elements (AREA)

Abstract

내용 없음No content

Description

무접촉 운반 장치Contactless conveying device

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제1도는 본 발명 구체예의 평면도.1 is a plan view of an embodiment of the present invention.

제2도는 본발명의 정면도.2 is a front view of the present invention.

제3도는 이젝터(ejector)의 설명도.3 is an explanatory diagram of an ejector.

제4도는 분리판을 부차한 본 발명의 정면도이고,4 is a front view of the present invention with the separator plate,

제5도는 그것의 정면도,5 is a front view of it,

제14도는 다른 발명의 무접촉 운반장치의 설명도.14 is an explanatory view of a contactless conveying device of another invention.

* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings

1 : 박스 3 : 곡부1: box 3: bend

4 : 벤드 5 : 노즐4: bend 5: nozzle

9' : 분리판 10,10' : 가이드9 ': Separator 10,10': guide

11,11' : 보스 14 : 후드11,11 ': Boss 14: Hood

15 : 배기관 16 : 운동수단15: exhaust pipe 16: exercise means

17 : 운반장치 19 : 작동아암17: conveying device 19: working arm

22 : 저장테이블 23'23 : 홈22: storage table 23'23: home

25 : 중공 A : 무접촉운반장치25: hollow A: contactless conveying device

Claims (7)

박스의 상단은 닫혀있고 하단은 열려있으며, 박스의 상단에 부착된 노즐과 열려진 박스의 하단의 내부에 연속적으로 곡부와 벤드를 갖는 박스에 의해 형성되는 것을 특징으로 하는 무접촉 운반장치.The top of the box is closed and the bottom is open, the contactless transport device, characterized in that formed by a box having a bent and bend continuously in the interior of the bottom of the box and a nozzle attached to the top of the box. 제1항에 있어서, 상기 박스가 노즐로부터 박스의 내부에 방사상으로 연장된 분리판을 갖는 것을 특징으로 하는 무접촉 운반장치.2. The contactless transport apparatus of claim 1 wherein the box has a separator plate extending radially from the nozzle to the interior of the box. 제1항에 있어서, 상기 박스가 박스로부터 운반물이 이탈되지 않도록 박스의 외부에 고정된 가이드를 갖는 것을 특징으로 하는 무접촉 운반장치.The contactless transport apparatus of claim 1, wherein the box has a guide fixed to the outside of the box to prevent the package from being separated from the box. 제1항에 있어서, 상기 박스가 박스의 하부에서 목적물의 구멍속으로 삽입될수 있는 보스를 갖는 것을 특징으로 하는 무접촉 운반장치.The contactless transport apparatus of claim 1, wherein the box has a boss that can be inserted into the hole of the object at the bottom of the box. 제1항에 있어서, 상기 박스가 박스를 감싸는 배기관이 부착된 후드를 갖는것을 특징으로 하는 무접촉 운반장치.The contactless transport apparatus of claim 1, wherein the box has a hood to which an exhaust pipe surrounding the box is attached. 제1항에 있어서, 상기 벤드가 홈이나 중공을 갖는 것을 특징으로 하는 무접촉 운반장치.2. The contactless transport apparatus of claim 1 wherein the bend has a groove or a hollow. 운반물을 운반하기 위한 운반장치 및 상기 운반장치와 운반물이 저장되는 저장 테이블 사이에서 상.하로 움직이고 회전할수 있는 무접촉 운반장치가 부착된 작동 아암을 갖는 운동수단으로 구성되는 것을 특징으로 하는 무접촉 운반 시스템.Contactless conveying means comprising a conveying device for conveying a conveyance and an operating arm with a non-contact conveying device capable of moving up and down and rotating between the conveying device and a storage table in which the conveying device is stored. system. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR860010726A 1985-12-30 1986-12-15 Contactless conveying device KR870005887A (en)

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
JP29748985A JPS62157792A (en) 1985-12-30 1985-12-30 Air holder with positioning mechanism
JP60-297489 1985-12-30
JP61-34048 1986-02-17
JP3404886A JPS62290654A (en) 1986-02-17 1986-02-17 Pneumatic holder
JP61-91652 1986-04-21
JP9165286A JPS62251094A (en) 1986-04-22 1986-04-22 Noncontact air holder with exhaust sucker
JP10819786A JPS62264118A (en) 1986-05-12 1986-05-12 Contactless pneumatic holding device for work
JP61-108197 1986-05-12
JP61-235333 1986-10-02
JP61235333A JPS6392537A (en) 1986-10-02 1986-10-02 Noncontact conveying device

Publications (1)

Publication Number Publication Date
KR870005887A true KR870005887A (en) 1987-07-07

Family

ID=33437235

Family Applications (1)

Application Number Title Priority Date Filing Date
KR860010726A KR870005887A (en) 1985-12-30 1986-12-15 Contactless conveying device

Country Status (2)

Country Link
KR (1) KR870005887A (en)
DE (1) DE3642937A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0419461B1 (en) * 1988-06-17 1998-09-02 Advanced Semiconductor Materials America, Inc. Wafer handling system with bernoulli pick-up
US6631935B1 (en) * 2000-08-04 2003-10-14 Tru-Si Technologies, Inc. Detection and handling of semiconductor wafer and wafer-like objects
DE10347545A1 (en) * 2003-10-14 2005-05-19 Lubas Maschinen Gmbh Device for transporting and stacking flat loads
DE102004045957A1 (en) * 2004-09-22 2006-04-06 Singulus Technologies Ag Device for holding and transporting a workpiece with a flat surface
DE102008062343B4 (en) * 2008-12-15 2013-05-29 Festo Ag & Co. Kg According to the Bernoulli principle working suction pads
CN112943753B (en) * 2021-04-09 2022-06-24 浙江大学 Expanding radiation flow mechanism

Also Published As

Publication number Publication date
DE3642937A1 (en) 1987-08-06

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WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid