KR870005887A - Contactless conveying device - Google Patents
Contactless conveying device Download PDFInfo
- Publication number
- KR870005887A KR870005887A KR860010726A KR860010726A KR870005887A KR 870005887 A KR870005887 A KR 870005887A KR 860010726 A KR860010726 A KR 860010726A KR 860010726 A KR860010726 A KR 860010726A KR 870005887 A KR870005887 A KR 870005887A
- Authority
- KR
- South Korea
- Prior art keywords
- box
- conveying device
- contactless
- transport apparatus
- contactless transport
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G61/00—Use of pick-up or transfer devices or of manipulators for stacking or de-stacking articles not otherwise provided for
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
- B65G47/911—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with air blasts producing partial vacuum
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Delivering By Means Of Belts And Rollers (AREA)
- Specific Conveyance Elements (AREA)
Abstract
내용 없음No content
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제1도는 본 발명 구체예의 평면도.1 is a plan view of an embodiment of the present invention.
제2도는 본발명의 정면도.2 is a front view of the present invention.
제3도는 이젝터(ejector)의 설명도.3 is an explanatory diagram of an ejector.
제4도는 분리판을 부차한 본 발명의 정면도이고,4 is a front view of the present invention with the separator plate,
제5도는 그것의 정면도,5 is a front view of it,
제14도는 다른 발명의 무접촉 운반장치의 설명도.14 is an explanatory view of a contactless conveying device of another invention.
* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings
1 : 박스 3 : 곡부1: box 3: bend
4 : 벤드 5 : 노즐4: bend 5: nozzle
9' : 분리판 10,10' : 가이드9 ': Separator 10,10': guide
11,11' : 보스 14 : 후드11,11 ': Boss 14: Hood
15 : 배기관 16 : 운동수단15: exhaust pipe 16: exercise means
17 : 운반장치 19 : 작동아암17: conveying device 19: working arm
22 : 저장테이블 23'23 : 홈22: storage table 23'23: home
25 : 중공 A : 무접촉운반장치25: hollow A: contactless conveying device
Claims (7)
Applications Claiming Priority (10)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP29748985A JPS62157792A (en) | 1985-12-30 | 1985-12-30 | Air holder with positioning mechanism |
JP60-297489 | 1985-12-30 | ||
JP61-34048 | 1986-02-17 | ||
JP3404886A JPS62290654A (en) | 1986-02-17 | 1986-02-17 | Pneumatic holder |
JP61-91652 | 1986-04-21 | ||
JP9165286A JPS62251094A (en) | 1986-04-22 | 1986-04-22 | Noncontact air holder with exhaust sucker |
JP10819786A JPS62264118A (en) | 1986-05-12 | 1986-05-12 | Contactless pneumatic holding device for work |
JP61-108197 | 1986-05-12 | ||
JP61-235333 | 1986-10-02 | ||
JP61235333A JPS6392537A (en) | 1986-10-02 | 1986-10-02 | Noncontact conveying device |
Publications (1)
Publication Number | Publication Date |
---|---|
KR870005887A true KR870005887A (en) | 1987-07-07 |
Family
ID=33437235
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR860010726A KR870005887A (en) | 1985-12-30 | 1986-12-15 | Contactless conveying device |
Country Status (2)
Country | Link |
---|---|
KR (1) | KR870005887A (en) |
DE (1) | DE3642937A1 (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0419461B1 (en) * | 1988-06-17 | 1998-09-02 | Advanced Semiconductor Materials America, Inc. | Wafer handling system with bernoulli pick-up |
US6631935B1 (en) * | 2000-08-04 | 2003-10-14 | Tru-Si Technologies, Inc. | Detection and handling of semiconductor wafer and wafer-like objects |
DE10347545A1 (en) * | 2003-10-14 | 2005-05-19 | Lubas Maschinen Gmbh | Device for transporting and stacking flat loads |
DE102004045957A1 (en) * | 2004-09-22 | 2006-04-06 | Singulus Technologies Ag | Device for holding and transporting a workpiece with a flat surface |
DE102008062343B4 (en) * | 2008-12-15 | 2013-05-29 | Festo Ag & Co. Kg | According to the Bernoulli principle working suction pads |
CN112943753B (en) * | 2021-04-09 | 2022-06-24 | 浙江大学 | Expanding radiation flow mechanism |
-
1986
- 1986-12-15 KR KR860010726A patent/KR870005887A/en not_active Application Discontinuation
- 1986-12-16 DE DE19863642937 patent/DE3642937A1/en not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
DE3642937A1 (en) | 1987-08-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WITN | Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid |