JPS62209720A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPS62209720A JPS62209720A JP5285486A JP5285486A JPS62209720A JP S62209720 A JPS62209720 A JP S62209720A JP 5285486 A JP5285486 A JP 5285486A JP 5285486 A JP5285486 A JP 5285486A JP S62209720 A JPS62209720 A JP S62209720A
- Authority
- JP
- Japan
- Prior art keywords
- iron nitride
- magnetic
- recording medium
- magnetic recording
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 38
- 229910001337 iron nitride Inorganic materials 0.000 claims abstract description 44
- 239000010409 thin film Substances 0.000 claims abstract description 13
- 230000006866 deterioration Effects 0.000 abstract description 13
- 229910052751 metal Inorganic materials 0.000 abstract description 6
- 239000002184 metal Substances 0.000 abstract description 6
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 abstract description 5
- 239000000696 magnetic material Substances 0.000 abstract description 5
- 150000004767 nitrides Chemical class 0.000 abstract description 5
- 238000006243 chemical reaction Methods 0.000 abstract description 3
- 230000007423 decrease Effects 0.000 abstract description 3
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 230000004907 flux Effects 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 5
- 230000032683 aging Effects 0.000 description 4
- 229910000704 hexaferrum Inorganic materials 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000010408 film Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 238000005546 reactive sputtering Methods 0.000 description 3
- 229910000727 Fe4N Inorganic materials 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000003302 ferromagnetic material Substances 0.000 description 2
- 230000005415 magnetization Effects 0.000 description 2
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000006249 magnetic particle Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229920003055 poly(ester-imide) Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000002952 polymeric resin Substances 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は窒化鉄薄膜を利用した磁気記録媒体に関するも
のである。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a magnetic recording medium using an iron nitride thin film.
（発明の概要）
本発明は窒化鉄を利用した薄膜磁気記録媒体において、
窒化鉄を主成分とする磁性層の表面にζ−窒化鉄を形成
することにより磁気特性の経時劣化を減少せしめ、磁気
記録媒体の信頼性の向上と安定性を確保し、電磁変換特
性と耐久性にすぐれしかもＧｏなどの高価な金属を使用
しない高密度な薄膜磁気記録媒体の実用を可能とするも
のである。(Summary of the Invention) The present invention provides a thin film magnetic recording medium using iron nitride.
By forming ζ-iron nitride on the surface of the magnetic layer whose main component is iron nitride, it reduces the deterioration of magnetic properties over time, improves the reliability and stability of magnetic recording media, and improves electromagnetic conversion characteristics and durability. This makes it possible to put into practical use a high-density thin-film magnetic recording medium that has excellent properties and does not use expensive metals such as Go.
（従来の技術）
窒化鉄は耐食性、耐摩耗性にすぐれた強磁性体で、しか
も金属に匹敵する飽和磁化をもち、かつＣＯなとの高価
な金属を含まないため、磁気記録媒体として好適である
。(Prior art) Iron nitride is a ferromagnetic material with excellent corrosion resistance and wear resistance, has a saturation magnetization comparable to that of metals, and does not contain expensive metals such as CO, making it suitable as a magnetic recording medium. be.
窒化鉄は強磁性体としてはα“−窒化鉄（ＦｅｓＮ２）
、γ′−窒化鉄（「ｅ４Ｎ）、ε窒化鉄（’ＦｃＸＮで
２＜Ｘ≦３〉がある。ただしε−窒化鉄は窒素含石組が
増加するに従いキューリ一点が低下し、おおよそＦｅ２
．５Ｎで飽和酸化が６０ ｅｍｕ／ｇ程度になる。Iron nitride is α“-iron nitride (FesN2) as a ferromagnetic material.
, γ'-iron nitride ('e4N), and ε-iron nitride ('FcXN, where 2<X≦3>. However, as the nitrogen-containing stone group increases, the curie point of ε-iron nitride decreases by one point, and it is approximately Fe2
．． At 5N, saturated oxidation is about 60 emu/g.
また非磁性体としてはζ−窒化鉄（Ｆｅ２Ｎ）がある。Further, as a non-magnetic material, there is ζ-iron nitride (Fe2N).
上記のような窒化鉄磁性材料については雑誌［固体物理
Ｊ１９８／Ｉ年（７）Ｖｏｌ、 １１ 、 Ｎｏ、 １
９（７）７２１頁から７２７頁に詳しく述べられている
。Regarding the above-mentioned iron nitride magnetic materials, the magazine [Solid State Physics J198/I (7) Vol. 11, No. 1
9(7), pages 721 to 727.
この窒化鉄を磁気記録媒体として利用するには針状Ｆｅ
粒子を窒化した針状窒化鉄粒子を用いて塗布法による塗
布形媒体とすることが考えられるが、この場合は組状合
金磁性粒子を用いたメタル媒体を上回る特性は得られな
い。In order to use this iron nitride as a magnetic recording medium, acicular Fe
It is conceivable to create a coated medium by a coating method using acicular iron nitride particles obtained by nitriding the particles, but in this case, characteristics superior to metal media using set alloy magnetic particles cannot be obtained.
塗布形媒体より高密度な磁気記録媒体として薄膜媒体が
あり、窒化鉄の特徴を生かすには薄膜媒体とするのがよ
い。Thin film media are available as magnetic recording media with a higher density than coated media, and it is best to use thin film media to take advantage of the characteristics of iron nitride.
窒化鉄を薄膜媒体とするには窒化鉄は融点以下で分解し
てしまうため、「ｅを蒸発源とする反応性イオンブレー
ティング法、 Ｆｅをターゲットとする反応性スパッタ
法、窒化鉄をターゲットとスパッタ法などが利用される
。In order to use iron nitride as a thin film medium, since iron nitride decomposes below its melting point, it is necessary to use a reactive ion brating method using e as an evaporation source, a reactive sputtering method using Fe as a target, or a reactive sputtering method using iron nitride as a target. Sputtering method etc. are used.
（発明が解決しようとする問題点）
窒化鉄は耐食性は本来すぐれた材料であるが、実際にイ
オンブレーティング法やスパッタ法で形成された窒化鉄
薄膜磁気記録媒体は経時的に飽和磁化が減少するという
欠点があった。(Problem to be solved by the invention) Iron nitride is originally a material with excellent corrosion resistance, but iron nitride thin film magnetic recording media actually formed by ion blating or sputtering have a tendency to lose saturation magnetization over time. There was a drawback to doing so.
（問題点を解決するための手段）
本発明では窒化鉄を利用したｉＦＩ膜磁気記録媒体で、
磁気特性の経時的劣化を低減するため、第１図に磁気記
録媒体の概略断面図として示すように非磁性基体１の上
に形成した窒化鉄を主成分とする磁性層２の表面にζ−
窒化鉄層３を形成する。(Means for solving the problem) In the present invention, an iFI film magnetic recording medium using iron nitride,
In order to reduce the deterioration of magnetic properties over time, as shown in FIG. 1 as a schematic cross-sectional view of a magnetic recording medium, ζ-
An iron nitride layer 3 is formed.
（作用）
窒化度の高いζ−窒化鉄を形成することにより、電磁変
換特性への影響が極めて小さく、磁性体としての窒化鉄
の特性を損じない程度の薄い厚みで十分に磁性層の窒化
鉄の磁気特性の経時劣化を大幅に減少せしめることがで
きる。(Function) By forming ζ-iron nitride with a high degree of nitridation, the effect on electromagnetic conversion characteristics is extremely small, and the iron nitride of the magnetic layer can be formed with a thin thickness that does not impair the characteristics of iron nitride as a magnetic material. The deterioration of magnetic properties over time can be significantly reduced.
しかもこのζ−窒化鉄は容易に安定に形成できるという
利点をもつ。Moreover, this ζ-iron nitride has the advantage of being easily and stably formed.
（実施例）
実施例１
２極高周波スパッタ装置を使用し、Ｆｅ４ Ｎとζ−窒
化鉄（Ｆｅ２Ｎ）をターゲットとし、ガラス上に−Ｆｅ
４Ｎを０．２伽形成し、その表面にζ−窒化鉄を４０人
形成した。この時の飽和磁束密度は５２００ガウスであ
った。(Example) Example 1 Using a two-electrode high frequency sputtering device, -Fe4N and ζ-iron nitride (Fe2N) were used as targets, and -Fe was deposited on glass.
4N was formed, and 40 layers of ζ-iron nitride were formed on the surface thereof. The saturation magnetic flux density at this time was 5200 Gauss.
飽和磁束密度の経時劣化を第２図に示す。Figure 2 shows the deterioration of the saturation magnetic flux density over time.
上記本発明の記録媒体の経時劣化を示す曲線１は表面に
ζ−窒化鉄層の形成されていない記録媒体の経時劣化を
示す曲線２と比較するとその劣化量は４分の１から５分
の１と大幅に減少している。Curve 1 showing the aging deterioration of the recording medium of the present invention is 1/4 to 5 times smaller than Curve 2 showing the aging deterioration of the recording medium on which the ζ-iron nitride layer is not formed on the surface. 1, a significant decrease.
実施例２
２極高周波スパシタ装置を使用し、Ｆｅをターゲットと
し、Ｎ２ガスを導入し、反応性スパッタ法によりガラス
上に成膜を行なった。Example 2 A film was formed on glass by reactive sputtering using a two-electrode high-frequency sputtering device, using Fe as a target, and introducing N2 gas.
導入するＮ２分圧が増加するに従い生成する相はα−Ｆ
ｅ、γ′−窒化鉄、ε−窒化鉄、ζ−窒化鉄と窒素含有
鎖の多い窒化鉄が生成し、Ｎ２分圧により窒化鉄層の制
御が可能である。As the N2 partial pressure introduced increases, the phase generated is α-F.
Iron nitride with many nitrogen-containing chains such as e, γ'-iron nitride, ε-iron nitride, and ζ-iron nitride is produced, and the iron nitride layer can be controlled by the N2 partial pressure.
ガラス上にＦｅ４ Ｎとε−窒化鉄の混在層を０゜２趨
形成し、その表面にζ−窒化鉄を４０人形成した。飽和
磁束密度は４８００ガウスであった。A mixed layer of Fe4N and ε-iron nitride was formed on the glass in a 0°2 direction, and 40 layers of ζ-iron nitride were formed on the surface. The saturation magnetic flux density was 4800 Gauss.
飽和磁束密度の経時劣化は実施例１と同様に大幅に減少
できた。As in Example 1, the deterioration of saturation magnetic flux density over time was significantly reduced.
以上の例ではスパッタ法により成膜したが、その他イオ
ンブレーティング法によっても同様の結果が得られる。In the above example, the film was formed by sputtering, but similar results can also be obtained by other ion blating methods.
また磁性層は磁気特性向上のために窒化鉄以外の成分が
複合されていてもかまわない。Further, the magnetic layer may contain a composite of components other than iron nitride in order to improve magnetic properties.
非磁性体としてはアルミニウム合金やポリエステル、ポ
リイミドなどの高分子樹脂などにも適用できる。As non-magnetic materials, aluminum alloys and polymer resins such as polyester and polyimide can also be used.
（発明の効果）
以上述べたように本発明では窒化鉄を主成分とする薄膜
磁性層の表面にζ−窒化鉄槽を薄（形成することにより
、磁気特性の経時劣化を低減せしめ、「ｅのような安価
な金属を主成分とする高密度の簿膜磁気記録媒体を実用
に供することを可能とする。(Effects of the Invention) As described above, in the present invention, by forming a thin ζ-iron nitride tank on the surface of a thin film magnetic layer mainly composed of iron nitride, deterioration of magnetic properties over time can be reduced, and This makes it possible to put into practical use a high-density thin film magnetic recording medium whose main component is an inexpensive metal such as.
第１図は磁気記録媒体の概略断面図であり、第２図は飽
和磁束密度の経時劣化を示す図である。
１・・・非磁性媒体
２・・・磁性層
３・・・ζ−窒化鉄
４・・・本発明の記録媒体の経時劣化を示す曲線５・・
・表面にζ−窒化鉄層の形成されていない記録媒体の経
時劣化を示す曲線FIG. 1 is a schematic cross-sectional view of a magnetic recording medium, and FIG. 2 is a diagram showing the deterioration of the saturation magnetic flux density over time. 1...Nonmagnetic medium 2...Magnetic layer 3...ζ-iron nitride 4...Curve 5 showing the aging deterioration of the recording medium of the present invention...
・Curve showing the aging deterioration of a recording medium that does not have a ζ-iron nitride layer formed on its surface
Claims (1)
録媒体において、磁性層の表面のζ−窒化（Ｆｅ＿２Ｎ
）を形成していることを特徴とする磁気記録媒体。In a magnetic recording medium having a thin film mainly composed of iron nitride as a magnetic layer, ζ-nitridation (Fe_2N
). A magnetic recording medium characterized by forming:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5285486A JPS62209720A (en) | 1986-03-11 | 1986-03-11 | Magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5285486A JPS62209720A (en) | 1986-03-11 | 1986-03-11 | Magnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62209720A true JPS62209720A (en) | 1987-09-14 |
Family
ID=12926441
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5285486A Pending JPS62209720A (en) | 1986-03-11 | 1986-03-11 | Magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62209720A (en) |
-
1986
- 1986-03-11 JP JP5285486A patent/JPS62209720A/en active Pending
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