JPS62200525A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPS62200525A JPS62200525A JP4266686A JP4266686A JPS62200525A JP S62200525 A JPS62200525 A JP S62200525A JP 4266686 A JP4266686 A JP 4266686A JP 4266686 A JP4266686 A JP 4266686A JP S62200525 A JPS62200525 A JP S62200525A
- Authority
- JP
- Japan
- Prior art keywords
- iron nitride
- recording medium
- magnetic
- magnetic recording
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 32
- 229910001337 iron nitride Inorganic materials 0.000 claims abstract description 29
- 229910000704 hexaferrum Inorganic materials 0.000 claims abstract description 11
- 150000004767 nitrides Chemical class 0.000 claims abstract description 11
- 239000010409 thin film Substances 0.000 claims abstract description 11
- 230000006866 deterioration Effects 0.000 abstract description 11
- 239000011521 glass Substances 0.000 abstract description 3
- 239000000758 substrate Substances 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 15
- 239000010408 film Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 230000032683 aging Effects 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 239000003302 ferromagnetic material Substances 0.000 description 3
- 230000004907 flux Effects 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 238000005422 blasting Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000005415 magnetization Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000005546 reactive sputtering Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 235000017166 Bambusa arundinacea Nutrition 0.000 description 1
- 235000017491 Bambusa tulda Nutrition 0.000 description 1
- 241001330002 Bambuseae Species 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 235000015334 Phyllostachys viridis Nutrition 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- YYXHRUSBEPGBCD-UHFFFAOYSA-N azanylidyneiron Chemical compound [N].[Fe] YYXHRUSBEPGBCD-UHFFFAOYSA-N 0.000 description 1
- 239000011425 bamboo Substances 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 239000006249 magnetic particle Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は窒化鉄簿膜を右する磁気記録媒体に関するもの
である。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a magnetic recording medium using an iron nitride film.
（発明の概要）
本発明は窒化鉄を利用した薄膜磁気記録媒体において、
γ′ −窒化鉄を主成分とＪる磁性層の表面にε−窒化
鉄を形成りることにより磁気特性の経時劣化を減少ｕし
め、°市罎変換特竹ど銅久竹にずぐれ、しからＣＯなど
の＾価な金属を使用しない高密爪な釣膜磁気記録媒体の
実用を１゛４能とづるしのである。(Summary of the Invention) The present invention provides a thin film magnetic recording medium using iron nitride.
By forming ε-iron nitride on the surface of the magnetic layer whose main component is γ'-iron nitride, the deterioration of the magnetic properties over time is reduced, making it superior to commercially available special bamboo and copper. This makes it possible to put into practical use high-density magnetic recording media that do not use expensive metals such as carbon dioxide.
（従来の技術）
窒化鉄は耐食性、耐１１耗性に寸ぐれた強磁性体で、し
かも金属に匹敵する飽和磁化をらち、かつＣＯなとの高
価な金属を含まないため、磁気記録媒体として好適であ
る。(Prior art) Iron nitride is a ferromagnetic material with excellent corrosion resistance and wear resistance, has saturation magnetization comparable to that of metals, and does not contain expensive metals such as CO, making it suitable as a magnetic recording medium. suitable.
窒化鉄は強磁性体としてはα“−窒化鉄Ｈ０１６Ｎ２）
、γ′−窒化鉄（ｒａ４Ｎ）、ε−窒化鉄ＣＦａＮで２
〈ｘ≦３）がある。As a ferromagnetic material, iron nitride is α“-iron nitride H016N2)
, γ′-iron nitride (ra4N), ε-iron nitride CFaN 2
There is <x≦3).
この窒化鉄を磁気記録媒体として利用するには釘状［０
粒子を窒化した剣状窒化鉄粒子を用いて塗布法により塗
布形媒体とすることが考えられるが、この場合はｔｌ状
合金磁性粒子を用いたメタル媒体を上回る特性は得られ
ない。In order to use this iron nitride as a magnetic recording medium, the nail-like [0
It is conceivable to create a coated medium by a coating method using sword-shaped iron nitride particles obtained by nitriding the particles, but in this case, characteristics superior to metal media using TL-shaped alloy magnetic particles cannot be obtained.
窒化鉄の特徴を生かすには塗布形媒体より＾密度な薄膜
媒体とするのがよい。To take advantage of the characteristics of iron nitride, it is better to use a thin film medium that is denser than a coated medium.
窒化鉄を薄膜化ηるには゛仝化鉄【、Ｌ融点以下で分解
してしまうため、「ｅを蒸発源とする反応性イＡンブレ
ーテイング法、１′０をターゲットとづる反応性スパッ
ク法、窒化鉄をターゲラ１へとするスパッタ法ながか利
用される９゜
窒化鉄のなかで磁気特性が１ぐれ、比較的４！７やすい
のはγ′−窒化鉄であり、このような窒化鉄磁性材料に
ついては雑誌「固体物理Ｊ１９８４年（１）ＶＯｌ、１
１．ｋ１９（１）７２１’、Ｑから７２７ ｉ、’ｒに
ｉｉＴしく述べられている。To make iron nitride into a thin film, since it decomposes below the melting point of iron nitride, there are two methods: the reactive ion blating method using e as the evaporation source, and the reactive spacking method using 1'0 as the target. Among the 9° iron nitrides that are used in some cases, the sputtering method of turning iron nitride into target layer 1 is γ'-iron nitride, which has inferior magnetic properties by 4.7% and is relatively easy to use. Regarding ferromagnetic materials, please refer to the magazine "Solid State Physics J 1984 (1) VOl, 1
1. k19 (1) 721', Q to 727 i, 'r iiT.
（８発明が解決しようとする問題点）
γ′−窒化鉄は本来、耐食性のすぐれた材料であるが、
実際にイオンブレーティング法やスパッタ法で形成され
た薄膜は、成膜時に導入される諸々の欠陥や、α−１相
の生成により経時的に飽和磁化が減少するという欠ｊｊ
１があった。(Problems to be solved by the 8th invention) γ'-Iron nitride is originally a material with excellent corrosion resistance, but
In fact, thin films formed by ion blasting or sputtering have defects in which the saturation magnetization decreases over time due to various defects introduced during film formation and the formation of α-1 phase.
There was 1.
（問題点を解決するための手段）
本発明では窒化鉄を利用したｉ９膜磁気記録媒体で、磁
気特性の経時劣化を低減りるため、第１図に磁気記録媒
体の概略断面図として示すように非隘性多ｊ体１の上に
形成したγ′−窒化鉄を主成分どする磁性層２の表面に
ε−窒化鉄層３を形成する。(Means for Solving the Problems) In the present invention, in order to reduce deterioration of magnetic properties over time in an i9 film magnetic recording medium using iron nitride, as shown in FIG. 1 as a schematic cross-sectional view of the magnetic recording medium, An ε-iron nitride layer 3 is formed on the surface of a magnetic layer 2 mainly composed of γ'-iron nitride, which is formed on a non-polluting multilayer body 1.
（作用）
窒化度が高く、成膜１１５にα−−相などの１−成しな
いε−窒化鉄層をγ′窒化鉄層の表面に形成することに
Ｊ、り薄い表面層にＪ、す、磁気特性をｔよとｌυど減
少させることなく、五〇股磁気記録媒体どしての経時的
安定性を向上さＵることがひきる。(Function) By forming an ε-iron nitride layer with a high degree of nitridation and not forming an α-phase or the like in the film 115 on the surface of the γ' iron nitride layer, a thin surface layer is formed. Therefore, it is possible to improve the stability over time of a 50-branched magnetic recording medium without decreasing the magnetic properties.
（実施例） 以下実施例により説明Ｊる。(Example) This will be explained below with reference to examples.
窒化鉄の成膜は−を蒸発源とするイオンブレーティング
法や、−をターゲットとする反応性スパッタ法では窒素
ガスを導入し、その際の窒素ガス圧を主とする成膜条件
により生成する窒化鉄相を容易に制御できる。Iron nitride films are formed using the ion blasting method that uses - as the evaporation source, or the reactive sputtering method that uses - as the target, by introducing nitrogen gas and using the film forming conditions mainly based on the nitrogen gas pressure at that time. The iron nitride phase can be easily controlled.
窒素鉄をターゲットと覆るスパッタ法ではターゲットの
組成と成膜条件で生成する窒化鉄相を制御できる。In the sputtering method using nitrogen iron as a target, the iron nitride phase produced can be controlled by the target composition and film formation conditions.
以下、２極高周波スパッタ装置を使用し、Ｆｅをターゲ
ラ［・とし、゛劣化ガスを導入した、反応性スパッタ法
の例を述べる。Hereinafter, an example of a reactive sputtering method will be described in which a two-pole high-frequency sputtering device is used, Fe is used as a target layer, and a deteriorating gas is introduced.
ガラス上にγ′ −窒化鉄を０．２Ａ１１形成した。0.2A11 of γ'-iron nitride was formed on the glass.
Ｘ線回折によって少量のα−Ｆｅ相が認められた。A small amount of α-Fe phase was observed by X-ray diffraction.
γ′−窒化鉄の単相の形成は困難だった。Formation of a single phase of γ'-iron nitride was difficult.
この表面にε−窒化鉄を５０人形成した。Fifty layers of ε-iron nitride were formed on this surface.
飽和磁束密度は５８００ガウスであった。The saturation magnetic flux density was 5800 Gauss.
飽和磁束密度の経時劣化を第２図に示す。Figure 2 shows the deterioration of the saturation magnetic flux density over time.
上記本発明の記録媒体の経時劣化を示す曲線１は表面に
ε−窒化鉱層の形成されていない記録媒体の経時劣化を
示１曲線２を比較するとその劣化は４分の１から５分の
１と大幅に減少している。Curve 1 showing the aging deterioration of the recording medium of the present invention shows the aging deterioration of the recording medium on which the ε-nitride layer is not formed on the surface.Comparing Curve 1 and Curve 2, the deterioration is 1/4 to 1/5. has decreased significantly.
非磁性媒体としてはｔ記例ではガラスであったが、その
他にアルミニウム合金やポリニスデル。The non-magnetic medium used was glass in the example, but other materials include aluminum alloy and polynisdel.
ポリイミドなどにも適用できる。It can also be applied to polyimide, etc.
また磁性層にはγ′−窒化鉄以外の無機物質が複合され
ていてもかまわない。Further, the magnetic layer may be composited with an inorganic substance other than γ'-iron nitride.
（発明の効果）
以」：）ホべたように本発明ではγ′ −窒化鉄を主成
分とする薄膜磁性層の表面にε−窒化鉄層を薄く形成す
ることにより、磁気特性の経１１５劣化を減少Ｖしめ、
Ｃｏのような高価な金属を使用しイｆい、０ｉＶｌ！度
の薄膜磁気記録媒体を実用に供することを可能とづる。(Effects of the Invention) As mentioned above, in the present invention, by forming a thin ε-iron nitride layer on the surface of a thin film magnetic layer mainly composed of γ'-iron nitride, deterioration of magnetic properties over time is reduced. Decrease V and tighten
No need to use expensive metals like Co! This makes it possible to put thin-film magnetic recording media into practical use.
。.
第１図は磁気記録媒体の概略断面図であり、第２図は飽
和磁束密度の経時劣化を示ず図である。
１・・・非磁性媒体
２・・・磁性層
３・・・ε−窒化鉄層
４・・・本発明の記録媒体の経時劣化を示す曲線５・・
・表面にε−窒化鉄層の形成されていない記録媒体の経
時劣化を示１曲線FIG. 1 is a schematic cross-sectional view of a magnetic recording medium, and FIG. 2 is a diagram that does not show the deterioration of the saturation magnetic flux density over time. 1...Nonmagnetic medium 2...Magnetic layer 3...ε-iron nitride layer 4...Curve 5 showing the aging deterioration of the recording medium of the present invention...
・Curve 1 shows the aging deterioration of a recording medium that does not have an ε-iron nitride layer formed on its surface.
Claims (1)
磁気記録媒体において、磁性層の表面にε−窒化鉄を形
成していることを特徴とする磁気記録媒体。A magnetic recording medium having a thin film mainly composed of γ'-iron nitride as a magnetic layer, characterized in that ε-iron nitride is formed on the surface of the magnetic layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4266686A JPS62200525A (en) | 1986-02-27 | 1986-02-27 | Magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4266686A JPS62200525A (en) | 1986-02-27 | 1986-02-27 | Magnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62200525A true JPS62200525A (en) | 1987-09-04 |
Family
ID=12642339
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4266686A Pending JPS62200525A (en) | 1986-02-27 | 1986-02-27 | Magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62200525A (en) |
-
1986
- 1986-02-27 JP JP4266686A patent/JPS62200525A/en active Pending
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