JPS62193123A - パタ−ン位置合わせ方法 - Google Patents
パタ−ン位置合わせ方法Info
- Publication number
- JPS62193123A JPS62193123A JP61034228A JP3422886A JPS62193123A JP S62193123 A JPS62193123 A JP S62193123A JP 61034228 A JP61034228 A JP 61034228A JP 3422886 A JP3422886 A JP 3422886A JP S62193123 A JPS62193123 A JP S62193123A
- Authority
- JP
- Japan
- Prior art keywords
- manual alignment
- pattern
- target
- alignment marks
- marks
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 27
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61034228A JPS62193123A (ja) | 1986-02-19 | 1986-02-19 | パタ−ン位置合わせ方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61034228A JPS62193123A (ja) | 1986-02-19 | 1986-02-19 | パタ−ン位置合わせ方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62193123A true JPS62193123A (ja) | 1987-08-25 |
| JPH0222532B2 JPH0222532B2 (zh) | 1990-05-18 |
Family
ID=12408287
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61034228A Granted JPS62193123A (ja) | 1986-02-19 | 1986-02-19 | パタ−ン位置合わせ方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62193123A (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0276214A (ja) * | 1988-09-12 | 1990-03-15 | Oki Electric Ind Co Ltd | ホトリソグラフィー工程におけるガラスマスク |
-
1986
- 1986-02-19 JP JP61034228A patent/JPS62193123A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0276214A (ja) * | 1988-09-12 | 1990-03-15 | Oki Electric Ind Co Ltd | ホトリソグラフィー工程におけるガラスマスク |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0222532B2 (zh) | 1990-05-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |