JPS62104440U - - Google Patents

Info

Publication number
JPS62104440U
JPS62104440U JP13648185U JP13648185U JPS62104440U JP S62104440 U JPS62104440 U JP S62104440U JP 13648185 U JP13648185 U JP 13648185U JP 13648185 U JP13648185 U JP 13648185U JP S62104440 U JPS62104440 U JP S62104440U
Authority
JP
Japan
Prior art keywords
pattern surface
pattern
light source
reticle mask
chip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13648185U
Other languages
English (en)
Other versions
JPH0322904Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985136481U priority Critical patent/JPH0322904Y2/ja
Publication of JPS62104440U publication Critical patent/JPS62104440U/ja
Application granted granted Critical
Publication of JPH0322904Y2 publication Critical patent/JPH0322904Y2/ja
Expired legal-status Critical Current

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  • ing And Chemical Polishing (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例の使用状態を示す断
面図、第２図は半導体ウエハ上の異種チツプパタ
ーンの形成例の平面図、第３図、第４図は本考案
による投影露光装置に用いるレチクルマスク上の
チツプパターンの二つの例を示す平面図、第５図
はレチクルマスクのパターン面から遮光板裏面ま
での距離とウエハ上でのまわり込み量との関係線
図である。 １：半導体ウエハ、２：レチクルマスク、３：
パターン面、４：レチクルホルダ、５：遮光板、
７：紫外線、８：縮小レンズ、３１：実用チツプ
パターン、３２：異種チツプパターン。
補正 昭６２．１．２７ 実用新案登録請求の範囲を次のように補正する
。 明細書第１頁第３行目と第４行目の間に以下の
文章を１行加入する。 「２．実用新案登録請求の範囲」

Claims (1)

    【実用新案登録請求の範囲】
  1. 投射光光源と、パターン面を該光源より遠い側
    にしてレチクルマスクを支持する支持枠と、前記
    パターン面のチツプパターンをウエハ上に縮小投
    影する光学系とを有するものにおいて、レチクル
    マスクのパターン面に近接し、かつ該パターン面
    に平行に移動可能の遮光板を備えたことを特徴と
    するチツプパターン縮小投影露光装置。
JP1985136481U 1985-09-06 1985-09-06 Expired JPH0322904Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985136481U JPH0322904Y2 (ja) 1985-09-06 1985-09-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985136481U JPH0322904Y2 (ja) 1985-09-06 1985-09-06

Publications (2)

Publication Number Publication Date
JPS62104440U true JPS62104440U (ja) 1987-07-03
JPH0322904Y2 JPH0322904Y2 (ja) 1991-05-20

Family

ID=31039635

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985136481U Expired JPH0322904Y2 (ja) 1985-09-06 1985-09-06

Country Status (1)

Country Link
JP (1) JPH0322904Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6461733A (en) * 1987-09-01 1989-03-08 Mitsubishi Electric Corp Manufacture of matrix type display device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55132039A (en) * 1979-04-02 1980-10-14 Mitsubishi Electric Corp Forming method for repeated figure
JPS55140838A (en) * 1979-04-23 1980-11-04 Hitachi Ltd Mask preparing apparatus
JPS55165629A (en) * 1979-06-11 1980-12-24 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device
JPS58419U (ja) * 1981-06-25 1983-01-05 富士通株式会社 レチクル

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH550820A (de) * 1971-04-14 1974-06-28 Ciba Geigy Ag Verfahren zur herstellung von heterocyclischen triglycidylverbindungen.

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55132039A (en) * 1979-04-02 1980-10-14 Mitsubishi Electric Corp Forming method for repeated figure
JPS55140838A (en) * 1979-04-23 1980-11-04 Hitachi Ltd Mask preparing apparatus
JPS55165629A (en) * 1979-06-11 1980-12-24 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device
JPS58419U (ja) * 1981-06-25 1983-01-05 富士通株式会社 レチクル

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6461733A (en) * 1987-09-01 1989-03-08 Mitsubishi Electric Corp Manufacture of matrix type display device

Also Published As

Publication number Publication date
JPH0322904Y2 (ja) 1991-05-20

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