JPS6161848U - - Google Patents
Info
- Publication number
- JPS6161848U JPS6161848U JP14539984U JP14539984U JPS6161848U JP S6161848 U JPS6161848 U JP S6161848U JP 14539984 U JP14539984 U JP 14539984U JP 14539984 U JP14539984 U JP 14539984U JP S6161848 U JPS6161848 U JP S6161848U
- Authority
- JP
- Japan
- Prior art keywords
- gauge
- diaphragm
- pressure sensor
- gauge resistors
- semiconductor pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 2
- 230000005855 radiation Effects 0.000 claims 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Description
第1図はこの考案の一実施例の構成を示す平面
図、第2図は従来の圧力センサの構成を示す平面
図である。 2……ダイヤフラム、3a〜3d……ゲージ抵
抗、5……ヒートシンク。
図、第2図は従来の圧力センサの構成を示す平面
図である。 2……ダイヤフラム、3a〜3d……ゲージ抵
抗、5……ヒートシンク。
Claims (1)
- ダイヤフラムの中央部に第1、第2のゲージ抵
抗を形成し、前記ダイヤフラムの周縁部に第3、
第4のゲージ抵抗を形成してなる半導体圧力セン
サにおいて、前記第1、第2のゲージ抵抗の周囲
に放熱用のヒートシンクを形成してなる半導体圧
力センサ。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1984145399U JPH0319232Y2 (ja) | 1984-09-26 | 1984-09-26 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1984145399U JPH0319232Y2 (ja) | 1984-09-26 | 1984-09-26 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6161848U true JPS6161848U (ja) | 1986-04-25 |
JPH0319232Y2 JPH0319232Y2 (ja) | 1991-04-23 |
Family
ID=30703653
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1984145399U Expired JPH0319232Y2 (ja) | 1984-09-26 | 1984-09-26 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0319232Y2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010032389A (ja) * | 2008-07-29 | 2010-02-12 | Dainippon Printing Co Ltd | 物理量センサ及びその製造方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4994573U (ja) * | 1972-12-08 | 1974-08-15 | ||
JPS5468170A (en) * | 1977-11-11 | 1979-06-01 | Hitachi Ltd | Fine pattern element |
-
1984
- 1984-09-26 JP JP1984145399U patent/JPH0319232Y2/ja not_active Expired
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4994573U (ja) * | 1972-12-08 | 1974-08-15 | ||
JPS5468170A (en) * | 1977-11-11 | 1979-06-01 | Hitachi Ltd | Fine pattern element |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010032389A (ja) * | 2008-07-29 | 2010-02-12 | Dainippon Printing Co Ltd | 物理量センサ及びその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0319232Y2 (ja) | 1991-04-23 |