JPS616117A - Molding of starting material for manufacturing sic or metallic si - Google Patents

Molding of starting material for manufacturing sic or metallic si

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Publication number
JPS616117A
JPS616117A JP59125093A JP12509384A JPS616117A JP S616117 A JPS616117 A JP S616117A JP 59125093 A JP59125093 A JP 59125093A JP 12509384 A JP12509384 A JP 12509384A JP S616117 A JPS616117 A JP S616117A
Authority
JP
Japan
Prior art keywords
sio2
sic
sio
moldings
weight ratio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP59125093A
Other languages
Japanese (ja)
Inventor
Matao Araya
荒谷 復夫
Takeshi Fukutake
福武 剛
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Steel Corp
Original Assignee
Kawasaki Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kawasaki Steel Corp filed Critical Kawasaki Steel Corp
Priority to JP59125093A priority Critical patent/JPS616117A/en
Publication of JPS616117A publication Critical patent/JPS616117A/en
Pending legal-status Critical Current

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  • Silicon Compounds (AREA)
  • Carbon And Carbon Compounds (AREA)

Abstract

PURPOSE:To improve the yield of Si by increasing the amount of C in the peripheral parts of moldings of an SiO2-C mixture as compared with the average C content of the moldings so as to fix SiO formed during a reaction for manufacturing metallic Si or SiC. CONSTITUTION:The weight ratio of SiO2/C in the central parts of moldings of a mixture contg. SiO2 and C as principal components is increased as compared with the average weight ratio of SiO2/C in the moldings, and the weight ratio of SiO2/C in the outside peripheral parts is decreased. The resulting moldings have a two-layered structure contg. much C in the outer layers. SiO formed chiefly in the central parts during a reaction for manufacturing metallic Si or SiC is fixed by the outside peripheral parts without scattering, so the yield of Si is improved and the consumption unit of electric power required to manufacture SiC can be reduced.

Description

【発明の詳細な説明】 く光用の目的〉 産業上の利用分野 本発明はSiCあるいは金属S1製造用原料成型物に係
り、詳しくは、SiCや金属31等がぎわめで製品歩留
りよく製造できかつ大巾に電力原単位も低減できる原料
成型物に係る。
[Detailed Description of the Invention] Purpose of Lighting> Industrial Field of Application The present invention relates to a raw material molded product for producing SiC or metal S1, and more specifically, it is a molded product that is made of SiC, metal S1, etc., and can be produced with a high product yield. It relates to raw material moldings that can significantly reduce the electricity consumption rate.

従  来  の  技  術 金1iisiは従来粒状の3102および炭素(例えば
コークス)を電気炉に装入し、2000℃以上の温度に
bO熱し、SiO2と炭素を反応させる口とにより製造
され−(きた。また、SiCはSiO2と炭素の混合物
を大気を遮断して電気的に加熱し、5102と炭素を反
応させることにより製造されている。両者の反応はそれ
ぞれ、 SiO2+2C→Si+2GO・・・・(1)Sin2
−1 30→SiC+2GO・・・・(2)上記(1)
、(2)式によって示されるが、実際には、これら反応
に削随して、どうしても、Slの並酸化物て゛あるSi
Oが(3)式の反応により生成づる。
Conventional technology Gold 1IIS has conventionally been produced by charging granular 3102 and carbon (e.g. coke) into an electric furnace, heating it to a temperature of 2000° C. or higher, and causing SiO2 and carbon to react. In addition, SiC is manufactured by electrically heating a mixture of SiO2 and carbon while blocking the atmosphere, and reacting 5102 with carbon.The reactions between the two are as follows: SiO2+2C→Si+2GO... (1) Sin2
-1 30→SiC+2GO...(2) Above (1)
, (2), but in reality, as a result of these reactions, Si, which is a sub-oxide of Sl, is inevitably produced.
O is produced by the reaction of formula (3).

5102イーC−+SiO+GO・・・・・(3)しが
し、このSiOが生成すると、SiOは蒸気圧が高いた
め、SiOが外部に放散し、成品の歩留りの低下、電力
原単位の1臂をもたらし、例えば、アーク炉での金属S
1製造における歩留り(、、L約85%程瓜できわめて
低い。
5102 E-C-+SiO+GO...(3) However, when this SiO is generated, SiO has a high vapor pressure, so it dissipates to the outside, reducing the yield of the product and reducing the power consumption per unit. For example, metal S in an arc furnace
1. The yield in production is extremely low for melons (approximately 85%).

発明が解決しようとする問題点 要づるに、本発明は上記欠点の解決を目的としているが
、具体的には、金属31等の製造時のSiOの生成によ
る成品歩留り低下や、電力原単位の低下等の問題点を解
決することを目的としている。
Problems to be Solved by the Invention In short, the present invention aims to solve the above-mentioned drawbacks, but specifically, the reduction in product yield due to the generation of SiO during the production of metal 31, etc., and the reduction in the power consumption rate. The purpose is to solve problems such as the decline in

〈発明の構成〉 問題点を解決するための 手段ならひにその作用 本発明は、金属S1やSiC等の!!!7造時のSiO
の生成の抑制が困難であるため、直接その抑制を行なわ
ずに生成させるが、生成づるSiOは飛散することなく
効率よく捕捉されしかも金属S1ヤSiC等に転化でき
る構造の原料成型物を提案ゴる。
<Structure of the Invention> The present invention is a means to solve the problem. ! ! SiO at the time of 7 construction
Since it is difficult to suppress the generation of SiO, we have proposed a raw material molded product with a structure that allows it to be generated without directly suppressing it, but the generated SiO can be efficiently captured without scattering and can be converted into metal S1 or SiC. Ru.

すなわち、本発明は主として5102とCとの混合物か
ら成る成型物であって、この成型物の平均のSiO2/
Cの重量比に対し、中心部のSiO2/Cの重量比を人
きくかつ外周部のSiO2/Cの重量比を小さく構成し
て成ることを特徴とする。
That is, the present invention is a molded product mainly composed of a mixture of 5102 and C, and the average SiO2/
It is characterized in that the weight ratio of SiO2/C in the central part is set to be high and the weight ratio of SiO2/C in the outer peripheral part is small relative to the weight ratio of C.

そこで、この構成ならひにその作用につき更に詳しく説
明すると、次の通りである。
Therefore, the operation of this configuration will be explained in more detail as follows.

まず、5102および、炭素から金属Siを製造する揚
台の反1,6は上述の(1)式で示される。けれども、
実際に小型電気炉内に3102とCI!:混合して装入
し、高温で反応させると、金属S1の他にもSiCや、
更にはSiOが生成し、とくに、S i 01.Lフユ
ームとなって、電気炉外へ排出される。そこて、このS
iOをCあるいはSiCと反応させると、前当のCの場
合は、金fist J SiC,後者のSiCの場合は
金属Siが゛それぞれ生成することを確認した。この反
応をみると、生成した510(ま、CあるいはSiCと SiO4−C−I Si +Go・・・・・(4)Si
O+2O−3iC+GO・・・・・(5)SiO−1−
3iC→2Si+GO・・・・・(6)のJ、うな反応
を起こすことが判った。更に、このような反応は、生成
物が固体あるいは液体であり、がっ、蒸気圧がSiOと
比較して低いため、Slの歩留り向上のため有益であっ
た。
First, 5102 and the lift platform 1, 6 for producing metal Si from carbon are expressed by the above equation (1). However,
Actually 3102 and CI in a small electric furnace! : When mixed and charged and reacted at high temperature, in addition to metal S1, SiC,
Furthermore, SiO is generated, especially SiO1. It becomes L fume and is discharged outside the electric furnace. There, this S
It was confirmed that when iO is reacted with C or SiC, gold fist J SiC is produced in the case of the former C, and metallic Si is produced in the case of the latter SiC. Looking at this reaction, the generated 510 (well, C or SiC and SiO4-C-I Si + Go... (4) Si
O+2O-3iC+GO...(5) SiO-1-
3iC→2Si+GO...J in (6) was found to cause a similar reaction. Furthermore, such a reaction was beneficial for improving the yield of Sl because the product was solid or liquid and had a lower vapor pressure than SiO.

しかしながら、現実の電気炉内においては、(4)、(
5)、(6)式で示されるSiO消費反応と同時に(3
1X”、で示されるSiO生成反応が起き、このため、
SiOが外部へ放散J−るのを完全に止めることは困難
であった。
However, in an actual electric furnace, (4), (
At the same time as the SiO consumption reaction shown by equations (5) and (6), (3
1X", a SiO production reaction occurs, and therefore,
It has been difficult to completely prevent SiO from dissipating to the outside.

そこで、本発明者等は、(3)式によるSiOの生成は
SiO2の存在づる場所で起こるのに対し、(4)、(
5) <:jらひに(6)式によるSiOの固定は、C
またはSiCが存在Jる場所で起こることに着目し、金
属S1やSiC等の製造用原料を主としてSiO2とC
とがら成る混合物の成型物とし、その成型物の中心部若
しくは内部を実質的に8102が多く、壬してこの部分
をSiO生成帯とし、この生成帯の外周にCが過剰に存
在する領域を配置した構造の原料成型物を開発した。
Therefore, the present inventors concluded that, whereas the generation of SiO according to equation (3) occurs at the location where SiO2 exists, (4), (
5) <:j Rahini The fixation of SiO by formula (6) is C
Or, focusing on the fact that SiC occurs where SiC exists, we mainly use SiO2 and C as raw materials for manufacturing metal S1 and SiC.
A molded product of a mixture consisting of spikes, the center or inside of the molded product has a substantial amount of 8102, this part is used as a SiO generation zone, and a region in which C is excessively present is arranged around the outer periphery of this generation zone. We have developed a raw material molded product with a similar structure.

すなわら、口の成型物は少なくとも2層、例えば、第1
図に示す通り、中心部1とぞの外周部2とを具えている
。この成型物は全体としては主としてSiO2とC(7
)混合物であるが、外周部2にCを過剰に存在させ、そ
の内側の中心部1にSiO□を多く存在させる。この中
心部1や外周部2の8102やCの割合を成型物全体の
5i02/Cの平均重量比とに関連させて示すと、中心
部1の5i02 /C重呈比が平均重量比より大きくし
、外周部2の5iO7/C@Ni比が平均重量比より小
さい。
That is, the mouth molding has at least two layers, e.g.
As shown in the figure, it has a central portion 1 and an outer peripheral portion 2. This molded product as a whole consists mainly of SiO2 and C(7
) A mixture in which an excessive amount of C is present in the outer peripheral part 2, and a large amount of SiO□ is present in the inner central part 1. When the proportions of 8102 and C in the center part 1 and the outer peripheral part 2 are shown in relation to the average weight ratio of 5i02/C of the entire molded product, the weight ratio of 5i02/C in the center part 1 is larger than the average weight ratio. However, the 5iO7/C@Ni ratio of the outer peripheral portion 2 is smaller than the average weight ratio.

まI:、5102の多い中心部1は第1図に示す如く必
ずしし成型物の中心に配置しなくとも良く、Cの多い外
周部2の内側であれば、いかなるところに配置すること
もできる。
I: The center part 1 with many Cs does not necessarily need to be placed at the center of the molded product as shown in FIG. 1, but can be placed anywhere as long as it is inside the outer peripheral part 2 with many Cs. can.

この構成に係る原料成型物であると、生成反応の間にS
iOが生成してもそれによるSiの飛散lf tJ:と
んとおさえられて金属S1、SiC?7が生成できる。
With a raw material molded product having this configuration, S during the production reaction
Even if iO is generated, Si scatters due to it lf tJ: Metal S1, SiC? 7 can be generated.

従来がら、原料とC等の還元剤を微粉砕して両名を良く
混合した後、これを塊成化し−C両名の反1.i;を促
進させることが行なわれている。例えば、酸化鉱の1コ
−タリーキルン法による還元において、C粉を混合した
ベレットが使用されている。しがし、金属Siの製造に
おいては、単に3102とCを微粉砕し、ベレットまた
はブリケラ1〜状にしたのみC−は十分満足されるSi
の歩留りを得ることは回動である。
Conventionally, the raw material and the reducing agent such as C are finely pulverized and the two are mixed well, and then this is agglomerated to form an anti-1. i; is being promoted. For example, in the reduction of oxide ores by the one-cotery kiln method, pellets mixed with C powder are used. However, in the production of metal Si, simply pulverizing 3102 and C into pellets or briquettes can produce Si that satisfies C-.
Obtaining a yield of is a rotation.

この点、本発明では単に粉状の810.とCとを混合、
塊成化したものでなく、個々の1宛成化原料の外表面部
分には平均より多くのCを配合し、逆に中心部分には平
均より多くの5102を配合(る。従って、この構造の
ものであると、内部で生成したガス状SiOが原料の内
部から外部へと拡散づる過程でSlまたはSiCとして
捕えられ、原料がらのSiO放出聞を大巾)こ低下させ
る。
In this regard, in the present invention, 810. and C mixed,
Rather than agglomerated materials, the outer surface portion of each 1-containing raw material contains more C than the average, and conversely, the center portion contains more 5102 than the average. Therefore, this structure If it is, the gaseous SiO generated inside is captured as Sl or SiC in the process of diffusing from the inside of the raw material to the outside, greatly reducing the SiO emission rate from the raw material.

この点について、以下に述べる実験にJ二りその効果を
確認したところ、次の通りであった。
Regarding this point, the effect was confirmed by J2 in the experiment described below, and the results were as follows.

まず、平均の原料となる8102粒子とCIaであるコ
ークス粒子を粉砕する。コークス中のCは約88%であ
るため、実際に原料の配合をh ’Jう場合はこの影響
を考慮するが、以下においては簡単のためSiO2. 
Cの両方とも純a100%であるものとして配合量を示
す。実験は化学量論的に金1i1siを生成・するたけ
の平均C配合量すなわちSiO2[30gに対し、C2
4Qの割合(0%−28,6%)で行なった。なJ3、
塊成化にはタール系のバインダーを;へ加した。
First, 8102 particles, which are the average raw material, and coke particles, which are CIa, are crushed. Since C in coke is approximately 88%, this effect will be taken into consideration when actually blending the raw materials, but for the sake of simplicity below, we will use SiO2.
The blending amounts are shown assuming that both C are 100% pure a. The experiment was conducted using the average C content of SiO2 [30 g, C2
It was conducted at a rate of 4Q (0%-28.6%). Na J3,
A tar-based binder was added for agglomeration.

塊成原料はほぼ球形のベレン1〜であり、C;農度の異
なる内、外2重層で構成づる。低温で塊成化したペレッ
トは一旦900’Cまで昇温する口とにより焼成し、焼
成ペレットを第2図に示すSiの収率測定実験装置の誘
導加熱型の電気炉内で、2000“Cまで冒温し、その
後、2000”Cに保持して反応を完結させ、ペレット
をか外に取出し、ごの重量と分析値よりSiの収率を計
算する。
The raw material for agglomeration is approximately spherical belene 1~, which is composed of two layers, C: inner and outer layers with different agricultural degrees. The pellets agglomerated at a low temperature are fired by raising the temperature to 900'C, and the fired pellets are heated to 2000'C in an induction heating electric furnace of the Si yield measurement experimental apparatus shown in Figure 2. After that, the pellet was heated to 2000"C to complete the reaction. The pellet was taken out, and the yield of Si was calculated from the weight of the pellet and the analytical value.

なお、第2図で3はスペーサ(SiC板)、3aはシリ
カヂ1−ブ、3bは誘導コイル、4は黒鉛るつは、5は
支持台、6はのぞき窓、7は排ガス管、8はミラー、9
は光高温計、10は塊成化原料の試トlを示1゜ 内外の苦の重量割合を一定とし、内外に配分するCの割
合を変化させて、実験を行なった。
In Fig. 2, 3 is a spacer (SiC plate), 3a is a silica die, 3b is an induction coil, 4 is a graphite tube, 5 is a support stand, 6 is a peephole, 7 is an exhaust gas pipe, and 8 is an induction coil. mirror, 9
Reference numeral 10 indicates an optical pyrometer, and 10 indicates a trial of the agglomerated raw material. 1° Experiments were conducted by keeping the weight proportions of the inner and outer parts constant and varying the proportion of C distributed between the inner and outer parts.

第1表に内層と外層の重量圧を40 : 60としたと
きの内、外層へのCの分配率と$1収率の関係を示づ。
Table 1 shows the relationship between the distribution ratio of C to the outer layer and the $1 yield when the weight pressure of the inner layer and the outer layer is 40:60.

この試験結果から本発明の効果は明らかである。The effects of the present invention are clear from this test result.

第1表 なお、上記のところで本発明は市販ならひに現在製造さ
れるSiO2粉末全てに適用できるが、本発明はなるべ
く高純度、例えば、98%以上のものを原料とするとき
に、その効果は〜跨発揮でき、とくに、99%台、更に
は、99.999%やそれ以上の高純度の8102粉末
にも適用でさ、更に、CRとしてはCを含むものは何れ
の固体にも適用で・きるが、高純度の黒鉛、ツノ−ボン
ブラック等も適用できる。
Table 1 As mentioned above, the present invention can be applied to all currently produced SiO2 powders if they are commercially available. It can be applied to 8102 powder with a purity of 99% or even 99.999% or higher.Furthermore, as CR, it can be applied to any solid containing C. However, high purity graphite, horn bomb black, etc. can also be used.

実  施  例 次に、実施例を示すと、次の通りである。Example Next, examples are as follows.

まず、第3図に示す小型の抵抗加熱式反応炉を用いて、
SlおよびSiC製造実験を行なった。
First, using a small resistance heating reactor shown in Figure 3,
Sl and SiC production experiments were conducted.

この反応炉において符号12は電極13は黒鉛発熱体、
14は鉄皮、15はシリカるつぼ、16は断熱材、17
は・5、た、18はス料の塊成化原石を承り。また、S
i製造の場合(こ1.L装入JるSiO2とCの重量比
をC4O:24ニ、SiC製i1 (7)場合ニt、!
5i02トc(7)’1ffi比を60 : 36に固
定し、その上で各々につき外周部と中心部のC吊を変化
させて3種の塊成化原石1.2.3をつくった。
In this reactor, reference numeral 12 indicates an electrode 13 which is a graphite heating element;
14 is the iron skin, 15 is the silica crucible, 16 is the insulation material, 17
Ha・5, Ta, 18 received agglomerated raw stone of steel. Also, S
In the case of i manufacturing (this 1.L charge, the weight ratio of SiO2 and C is C4O:24, and if SiC is made in i1 (7), !
5i02tc(7)'1ffi ratio was fixed at 60:36, and three types of agglomerated fossilized raw stones 1.2.3 were made by changing the C-hangs of the outer periphery and center.

更に、比較例として従来例の粒状のSiO2とコークス
の混合物から成る塊成化原石を用意した。これら塊成化
原料(焼成後のもの)を第3図に示づ反応炉に装入し、
一定時間一定電力を通電した後、反応炉を冷却し、生成
物中の金属S1生成mあるいはSiC生成量を求めた。
Further, as a comparative example, an agglomerated ore made of a mixture of granular SiO2 and coke of a conventional example was prepared. These agglomerated raw materials (after firing) are charged into the reactor shown in Fig. 3,
After applying constant electric power for a certain period of time, the reactor was cooled, and the amount of metal S1 produced (m) or SiC produced in the product was determined.

この結果は、従来例の粒状の8102とコークス混合′
勿の場合の生成量を100としたときの相対舶で金属S
1あるいはSiCの生成量を示づと、第2表 第2表から明らかなように、従来の卯月より本発明に係
るものの方が、収量が増し−Cおり、本発明による原料
の優位性が明らかとなった。。
This result shows that the conventional example of granular 8102 and coke mixture'
Metal S in the relative ship when the production amount in the case of course is 100
1 or SiC production, as is clear from Table 2, the yield of the raw material according to the present invention is higher than that of the conventional Uzuki, indicating the superiority of the raw material according to the present invention. It became clear. .

〈発明の効果ン 本発明は、主として5102とCの混合物がら成る成望
慟であるが、外周部とその内側の中心部とがC含有量が
相違する諾状構造物であり、しがも、外周部に過剰のC
が含まれる。従って、金属S1や5iC77の製造反応
時に土として中心部からSiOが生成−づるが、このS
iOは飛散せず(こ外周部(こより固定され、S1収率
は大巾に向」−シ、S1製造時の霜力原中位が低下−づ
る。とくに、高価な高f沌度の3102粉末を用いると
きは、Si収率の大巾の向上によりその効果は一隔助長
される。
<Effects of the Invention> The present invention is a composite structure mainly composed of a mixture of 5102 and C, but it is a composite structure in which the outer peripheral part and the inner center part have different C contents. , excessive C on the outer periphery
is included. Therefore, during the manufacturing reaction of metal S1 and 5iC77, SiO is produced from the center as soil, but this S
iO does not scatter (it is fixed from the outer periphery), and the S1 yield increases significantly, and the medium frost force during S1 production decreases. When powder is used, the effect is further enhanced due to the significant improvement in Si yield.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一つの実施例に係る原石成型物の断面
図、第2図はSlの収率測定実験装置の一例の配置図、
第3図は本発明に係るものと比較例とを用いて金属S1
あるいはSiCを製造し、その際の効果を求めた実験装
置の一例の配置図である。 符号1・・・・・中心部    2・・・・・・外周部
3・・・・・SiC板(スペーサー暑 3a・・・・・・シリカヂ]−ブ 31)・・・・・・誘導コイル  4・・・・・・黒鉛
るつ【−[5・・・・・・支持台    6・・・・・
・のぞき窓7・・・・・・排ガス管   8・・・・・
ミラー9・・・・・・光高温計 10・・・・・・試料(塊成化原料) 12・・・・・・電極     13・・・・黒鉛発熱
体14・・・・・鉄皮
FIG. 1 is a cross-sectional view of a molded raw stone according to one embodiment of the present invention, and FIG. 2 is a layout diagram of an example of an experimental device for measuring the yield of Sl.
FIG. 3 shows the metal S1 using the one according to the present invention and the comparative example.
Alternatively, it is a layout diagram of an example of an experimental device for manufacturing SiC and determining the effects at that time. Code 1... Center part 2... Outer circumference part 3... SiC plate (spacer heat 3a... Silicaji]-bu 31)... Induction coil 4...Graphite melt [-[5...Support stand 6...
・Peep window 7...Exhaust gas pipe 8...
Mirror 9... Optical pyrometer 10... Sample (agglomeration raw material) 12... Electrode 13... Graphite heating element 14... Iron shell

Claims (1)

【特許請求の範囲】[Claims] 主としてSiO_2とCとの混合物から成る成型物であ
って、この成型物の平均のSiO_2/Cの重量比に対
し、中心部のSiO_2/Cの重量比を大きくかつ外周
部のSiO_2/Cの重量比を小さく構成して成ること
を特徴とするSiCあるいは金属Si製造用原料成型物
A molded product mainly consisting of a mixture of SiO_2 and C, in which the weight ratio of SiO_2/C in the center is larger than the average weight ratio of SiO_2/C in the molded product, and the weight of SiO_2/C in the outer periphery is increased. A raw material molded product for producing SiC or metal Si, characterized in that it is configured with a small ratio.
JP59125093A 1984-06-20 1984-06-20 Molding of starting material for manufacturing sic or metallic si Pending JPS616117A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59125093A JPS616117A (en) 1984-06-20 1984-06-20 Molding of starting material for manufacturing sic or metallic si

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59125093A JPS616117A (en) 1984-06-20 1984-06-20 Molding of starting material for manufacturing sic or metallic si

Publications (1)

Publication Number Publication Date
JPS616117A true JPS616117A (en) 1986-01-11

Family

ID=14901671

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59125093A Pending JPS616117A (en) 1984-06-20 1984-06-20 Molding of starting material for manufacturing sic or metallic si

Country Status (1)

Country Link
JP (1) JPS616117A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5401464A (en) * 1988-03-11 1995-03-28 Deere & Company Solid state reaction of silicon or manganese oxides to carbides and their alloying with ferrous melts
JP2009221034A (en) * 2008-03-14 2009-10-01 Tokuyama Corp Silicon production apparatus
JP2010155761A (en) * 2008-12-29 2010-07-15 Akita Univ Method of producing micro silicon carbide, micro silicon nitride, metal silicon and silicon chloride

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5401464A (en) * 1988-03-11 1995-03-28 Deere & Company Solid state reaction of silicon or manganese oxides to carbides and their alloying with ferrous melts
JP2009221034A (en) * 2008-03-14 2009-10-01 Tokuyama Corp Silicon production apparatus
JP2010155761A (en) * 2008-12-29 2010-07-15 Akita Univ Method of producing micro silicon carbide, micro silicon nitride, metal silicon and silicon chloride

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