JPS6133517Y2 - - Google Patents
Info
- Publication number
- JPS6133517Y2 JPS6133517Y2 JP1983081661U JP8166183U JPS6133517Y2 JP S6133517 Y2 JPS6133517 Y2 JP S6133517Y2 JP 1983081661 U JP1983081661 U JP 1983081661U JP 8166183 U JP8166183 U JP 8166183U JP S6133517 Y2 JPS6133517 Y2 JP S6133517Y2
- Authority
- JP
- Japan
- Prior art keywords
- radiant tube
- heater
- furnace
- gas
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010438 heat treatment Methods 0.000 claims description 21
- 239000011261 inert gas Substances 0.000 claims description 9
- 239000011810 insulating material Substances 0.000 claims description 6
- 238000005485 electric heating Methods 0.000 claims description 5
- 239000000919 ceramic Substances 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 25
- 239000002184 metal Substances 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 238000001816 cooling Methods 0.000 description 5
- 238000005255 carburizing Methods 0.000 description 3
- 238000005219 brazing Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000005496 tempering Methods 0.000 description 1
Landscapes
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
- Furnace Details (AREA)
Description
【考案の詳細な説明】
本考案は金属の焼入れ、焼戻し、焼ならし、焼
結及びろう付等の熱処理のための金属加熱装置や
該熱処理炉の炉内加熱装置とか、金属の浸炭、窒
化、浸硫、浸ホウ等の熱処理を行うための予熱装
置とか、加熱装置の腐蝕性ガスに対する保護装置
及び保護ガスの予熱装置、等の如き雰囲気炉とか
真空炉で用いる電熱装置に関するものである。[Detailed description of the invention] The present invention is a metal heating device for heat treatment such as quenching, tempering, normalizing, sintering, and brazing of metal, an in-furnace heating device of the heat treatment furnace, and a metal carburizing and nitriding device. The present invention relates to electric heating devices used in atmospheric furnaces and vacuum furnaces, such as preheating devices for heat treatments such as sulfurizing and brazing, protective devices for corrosive gases in heating devices, and protective gas preheating devices.
従来この種電熱装置の一例を示する、第１図に
示す如く、炉体ａに気密に取り付けたヒータノズ
ルｂの内部に、金属製のラジアントチユーブｃを
挿入し、該ラジアントチユーブｃの中に、Ni−
Cr鋼を使用してなるヒータｄを挿入し、且つ上
記ヒータノズルｂ及びラジアントチユーブｃの上
端を大気に出した構成とし、炉内に設置される処
理品ｅの熱処理に際して炉内を加熱できるように
してある。ｆはガスの流れを案内すると共にヒー
タｄからの直熱を緩和するためのマツフル、ｇは
ガス循環フアン、ｈはフアン駆動用の電動機、ｉ
は真空排ガスポンプに通じているガスの排出口で
ある。 As shown in FIG. 1, which shows an example of a conventional electric heating device of this type, a metal radiant tube c is inserted into a heater nozzle b that is airtightly attached to a furnace body a, and into the radiant tube c, Ni−
A heater d made of Cr steel is inserted, and the upper ends of the heater nozzle b and radiant tube c are exposed to the atmosphere, so that the inside of the furnace can be heated during heat treatment of the processed product e installed in the furnace. There is. f is a matsufuru for guiding the flow of gas and alleviating direct heat from heater d, g is a gas circulation fan, h is an electric motor for driving the fan, i
is the gas outlet leading to the vacuum exhaust gas pump.
上記従来方式では、処理品ｅをたとえば真空加
熱等をする目的で炉内を真空にする場合におい
て、炉内を真空にしても、ラジアントチユーブｃ
内への給気、排気の手段がないので、ラジアント
チユーブｃ内は真空にならず、又、炉内に給気し
ても、ラジアントチユーブ内へは給気されない構
成となつているため、次のような欠点がある。 In the above conventional method, when the inside of the furnace is evacuated for the purpose of vacuum heating the processed product e, even if the inside of the furnace is evacuated, the radiant tube c
Since there is no means for supplying or exhausting air into the furnace, the inside of radiant tube C does not become a vacuum, and even if air is supplied into the furnace, it is not supplied into the radiant tube. There are drawbacks such as.
ヒータｄ及びラジアントチユーブｃのほとん
どが金属製であるため、腐食性雰囲気によりラ
ジアントチユーブｃの損耗が激しく寿命が低下
し、特に、高温浸炭性雰囲気ガス熱処理に不適
である。又、寿命が短いため、連続操作業時間
が短く、コストアツプとなる。 Since most of the heater d and the radiant tube c are made of metal, the radiant tube c is subject to severe wear and tear due to the corrosive atmosphere, shortening its life, and is particularly unsuitable for high-temperature carburizing atmosphere gas heat treatment. Furthermore, since the life is short, continuous operation time is short, which increases costs.
ヒータｄが金属製である、高温が得られず、
炉温を高くできず、高温操業による操業時間の
短縮ができない。 Heater d is made of metal, high temperature cannot be obtained,
Furnace temperature cannot be raised, and operating time cannot be shortened by high-temperature operation.
真空炉においては、ヒータ端子の炉体貫通部
が昇温し、真空シールが不能となるため、端子
部を水冷等に冷却することが必要となり、メイ
ンテナンス性が悪く、コストアツプにもなる。 In a vacuum furnace, the temperature of the heater terminal penetrating portion of the furnace body increases and vacuum sealing becomes impossible, so the terminal portion must be cooled by water cooling or the like, resulting in poor maintenance and increased costs.
ラジアントチユーブｃ内へのガス給気、排気
装置として何も設けられていないので、ラジア
ントチユーブｃ内は常時大気圧相当の圧力とな
つている。そのため、炉内を真空にした場合の
ラジアントチユーブｃは特に昇温時において、
耐圧強度が得られない。したがつて、真空熱処
理炉や真空浸炭炉等のように炉内を減圧して使
用する炉には使用することができない。すなわ
ち、ラジアントチユーブの厚みを増して高温下
の耐圧強度を得るには非常にコストアツプとな
るため、実用化されていない。 Since nothing is provided as a gas supply or exhaust device into the radiant tube c, the pressure inside the radiant tube c is always equal to atmospheric pressure. Therefore, when the inside of the furnace is evacuated, the radiant tube c, especially when the temperature rises,
Compressive strength cannot be obtained. Therefore, it cannot be used in a furnace where the pressure inside the furnace is reduced, such as a vacuum heat treatment furnace or a vacuum carburizing furnace. That is, increasing the thickness of the radiant tube to obtain pressure resistance at high temperatures would result in a significant increase in cost, and this has not been put to practical use.
本考案はかかる従来の欠点に鑑み、近年ますま
す要求されつつある高温熱処理炉へ即応させるこ
と、腐食性ガスよりヒータ部を保護して寿命延長
を図ること、加熱装置に高価な特殊金属を使用し
ないようにしてコストダウンを図ること、冷ガス
を直接炉内へ導入せず、炉内温度分布の向上を図
ること、ヒータ端子部の水冷等による冷却を不要
とし、冷ガスの予熱に使用して省エネルギー化を
図ること、等を目的としてなしたものである。 In view of these conventional drawbacks, the present invention has been developed to be able to quickly respond to high-temperature heat treatment furnaces that have been increasingly required in recent years, to extend the life of the heater by protecting it from corrosive gases, and to use expensive special metals for the heating device. To reduce costs by not introducing cold gas directly into the furnace, to improve the temperature distribution in the furnace, to eliminate the need for water cooling of the heater terminal, and to use it for preheating the cold gas. This was done with the aim of saving energy.
以下、図面にもとずき本考案の実施例を説明す
る。 Embodiments of the present invention will be described below with reference to the drawings.
第２図は本考案の電熱装置を冷却装置がない真
空熱処理又は雰囲ガス熱処理の場合の炉に適用し
た場合を示す。 FIG. 2 shows the case where the electric heating device of the present invention is applied to a furnace for vacuum heat treatment or ambient gas heat treatment without a cooling device.
炉体１にヒータノズル２を気密状態で一体的に
取り付け、該ヒータノズル２の内部に、両端が開
放しているセラミツク製の円筒型ラジアントチユ
ーブ３に挿入させ、且つ該ラジアントチユーブ３
の中に、グラフアイト等による非金属のヒータ４
を入れ、上記ヒータ４は、気密シールフランジ５
を介して炉外のヒータ端子６へ導かれるようにす
ると共に、ラジアントチユーブ３内に、ヒータ４
の両端部位置にセラミツクフアイバー製等の通気
性の断熱材７を入れて、該ラジアントチユーブ３
とヒータ４との間に介在させる。又、上記ヒータ
ノズル２には、給排気ノズル８を設け、該ノズル
２を図示しない真空排気ポンプ及び不活性ガスの
給気装置への管路９及び１０に自動切替弁１１を
介して接続し、ラジアントチユーブ３内へ給気で
きたり、あるいは真空にできるようにする。 A heater nozzle 2 is integrally attached to the furnace body 1 in an airtight state, and a cylindrical radiant tube 3 made of ceramic with both ends open is inserted into the heater nozzle 2.
There is a non-metallic heater 4 made of graphite etc.
and the heater 4 has an airtight seal flange 5.
The heater 4 is connected to the heater terminal 6 outside the furnace through the radiant tube 3.
A breathable heat insulating material 7 made of ceramic fiber or the like is inserted at both ends of the radiant tube 3.
and the heater 4. Further, the heater nozzle 2 is provided with a supply/exhaust nozzle 8, and the nozzle 2 is connected via an automatic switching valve 11 to conduits 9 and 10 to a vacuum pump and an inert gas supply device (not shown). It is possible to supply air into the radiant tube 3 or create a vacuum.
１２は処理品、１３はガス循環フアン、１４は
フアン１３の駆動用電動機、１５はガスの流れを
案内すると共にヒータからの直熱を緩和するため
のマツフルである。 12 is a processed product, 13 is a gas circulation fan, 14 is an electric motor for driving the fan 13, and 15 is a pinewood for guiding the flow of gas and alleviating direct heat from the heater.
本考案の電熱装置は、上記構成としてあるの
で、図示の如き真空処理炉に処理品１２の加熱装
置として用いた場合、次のような運転を行う。 Since the electric heating device of the present invention has the above-described configuration, when it is used as a heating device for the processed product 12 in a vacuum processing furnace as shown in the figure, the following operation is performed.
真空加熱等の目的で炉内を真空にする場合は、
炉内を真空引きするが、この場合同時に給排気ノ
ズル８よりラジアントチユーブ３内を真空引き
し、ラジアントチユーブ３内には可及的速かに微
量の残留ガスがないようにする。これにより高真
空の炉に適用が可能になる。 When creating a vacuum inside the furnace for purposes such as vacuum heating,
The inside of the furnace is evacuated, and at the same time, the inside of the radiant tube 3 is also evacuated through the supply/exhaust nozzle 8, so that there is no trace of residual gas in the radiant tube 3 as quickly as possible. This makes it possible to apply it to high vacuum furnaces.
一方、炉内に給気する場合には、同時に給排気
ノズル８よりラジアントチユーブ３内へ窒素ガス
等の不活性ガスを導入させる。ラジアントチユー
ブ３内には先端部（下端部）にも断熱材７がある
が、この断熱材７は通気性であるため、上記ラジ
アントチユーブ３内に導入された不活性ガスは、
ヒータ４で予熱されて断熱材７を通しラジアント
チユーブ３下部より炉内へ少しずつ流出させられ
る。これにより炉内ガスがラジアントチユーブ３
内に侵入するのを防止する作用が行われ、酸化、
浸炭等の腐食性雰囲気からヒータ４を保護するこ
とができる。この際、ラジアントチユーブ３内に
流し込むガスの量は、ラジアントチユーブ３の先
端より流出するガスの流速が炉内ガスの拡散速度
よりも速くなるような条件となる流量とする。 On the other hand, when supplying air into the furnace, an inert gas such as nitrogen gas is introduced into the radiant tube 3 from the supply/exhaust nozzle 8 at the same time. Inside the radiant tube 3, there is also a heat insulating material 7 at the tip (lower end), but since this heat insulating material 7 is breathable, the inert gas introduced into the radiant tube 3 is
It is preheated by the heater 4 and gradually flows into the furnace from the lower part of the radiant tube 3 through the heat insulating material 7. This allows the gas in the furnace to flow into the radiant tube 3.
It acts to prevent oxidation and
The heater 4 can be protected from corrosive atmosphere such as carburization. At this time, the amount of gas flowing into the radiant tube 3 is set to such a flow rate that the flow rate of the gas flowing out from the tip of the radiant tube 3 becomes faster than the diffusion rate of the gas in the furnace.
本考案においては、炉内を真空にするときはラ
ジアントチユーブ３内も真空にし、炉内に給気す
るときはラジアントチユーブ３内にも不活性ガス
を導入させることから、前記以外に更に炉内とラ
ジアントチユーブ３内との間に常時圧力差が生じ
ないため、ラジアントチユーブ３自体の保護も図
られている。 In this invention, when the inside of the furnace is evacuated, the radiant tube 3 is also evacuated, and when air is supplied to the furnace, inert gas is also introduced into the radiant tube 3. Since there is no constant pressure difference between the inside of the radiant tube 3 and the inside of the radiant tube 3, the radiant tube 3 itself is also protected.
なお、本考案の装置は第２図に示す炉のみなら
ず、冷却装置を炉内に設けている炉の場合でも同
様に適用できること、又、加熱装置としてでなく
予熱装置としても適用できるものである。 It should be noted that the device of the present invention can be applied not only to the furnace shown in Fig. 2, but also to a furnace equipped with a cooling device inside the furnace, and can also be applied not only as a heating device but also as a preheating device. be.
以上述べた如く、本考案の装置によれば下記の
如き優れた効果を奏し得る。 As described above, the apparatus of the present invention can achieve the following excellent effects.
(i) ラジアントチユーブ内への腐食性ガスの侵入
を防止できてヒータが保護されているので寿命
の大幅な延長が図れる。(i) Since the heater is protected by preventing corrosive gases from entering the radiant tube, its life can be significantly extended.
(ii) ヒータを非金属製とし、ラジアントチユーブ
をセラミツク製としているので、従来の金属製
では得られない高温が得られ、炉温を高くでき
て高温操業が可能となり、操業時間の短縮と性
能アツプが図れる。(ii) Since the heater is made of non-metallic material and the radiant tube is made of ceramic material, it is possible to obtain high temperatures that cannot be obtained with conventional metal materials, and the furnace temperature can be raised to enable high-temperature operation, reducing operating time and improving performance. You can improve your skills.
(iii) 上記(i)のラジアントチユーブへの腐食性ガス
の侵入防止と上記(ii)の高温操業が得られること
から、近年の高温化熱処理の要求に即応でき
る。(iii) Since it is possible to prevent corrosive gases from entering the radiant tube as described in (i) above and to operate at high temperatures as described in (ii) above, it is possible to immediately meet recent demands for high-temperature heat treatment.
(iv) ラジアントチユーブ内を給排気できるので、
ラジアントチユーブ内ガスを交換できて常に新
しい不活性ガスでヒータを保護できると共に、
ラジアントチユーブ内と炉内の圧力差がない状
態にできるためにラジアントチユーブの保護が
図れ、寿命延長が図れる。(iv) Since the inside of the radiant tube can be supplied and exhausted,
The gas inside the radiant tube can be replaced and the heater can always be protected with fresh inert gas.
Since there is no pressure difference between the inside of the radiant tube and the inside of the furnace, the radiant tube can be protected and its life can be extended.
(v) ラジアントチユーブへ導入される不活性ガス
はヒータで予熱されるので、温度分布が向上
し、同時に、ラジアントチユーブへ導入される
冷えた不活性ガスによりヒータ端子部の気密シ
ール材や絶縁材は冷却されるので、ヒータ端子
部への別途冷却装置も不溶にでき、又気密シー
ルや絶縁部の構造が簡単に済む等対熱保護や部
材寿命の向上が図れると共に熱回収になる、更
に真空熱処理炉と雰囲気ガス熱処理炉のいずれ
にも使用できること、等の操業上の効果があ
る。(v) Since the inert gas introduced into the radiant tube is preheated by the heater, the temperature distribution is improved, and at the same time, the cold inert gas introduced into the radiant tube also protects the airtight sealing material and insulation material at the heater terminal. Since it is cooled, a separate cooling device for the heater terminal can be made insoluble, and the structure of the airtight seal and insulating part can be simplified, which improves heat protection and component life, and allows for heat recovery. It has operational effects such as being able to be used in both a heat treatment furnace and an atmospheric gas heat treatment furnace.
(vi) ヒータやラジアントチユーブに廉価な材料を
使用しており、且つラジアントチユーブの損耗
による取替えが少なくなることから、コストダ
ウンが図れる。(vi) Since inexpensive materials are used for the heater and the radiant tube, and the radiant tube is less likely to be replaced due to wear and tear, costs can be reduced.
(vii) 炉内とラジアントチユーブ内を同時に真空引
きすることが出来るので短時間でガス置換出来
ると共に、消費するガスは炉内容積の一回分で
良く従来の1/7〜1/10で済む。(vii) Since the inside of the furnace and the radiant tube can be evacuated at the same time, gas can be replaced in a short time, and the amount of gas consumed is only 1/7 to 1/10 of the conventional volume.
第１図は従来の一例を示す断熱図、第２図は本
考案の装置の一実施例図である。
１……炉内、２……ヒータノズル、３……ラジ
アントチユーブ、４……ヒータ、５……気密シー
ルフランジ、６……ヒータ端子、７……断熱材、
８……給排気ノズル、１１……自動切替弁。
FIG. 1 is a heat insulation diagram showing a conventional example, and FIG. 2 is a diagram showing an embodiment of the device of the present invention. 1...Furnace interior, 2...Heater nozzle, 3...Radiant tube, 4...Heater, 5...Airtight seal flange, 6...Heater terminal, 7...Insulating material,
8... Supply/exhaust nozzle, 11... Automatic switching valve.
Claims (1)
密に設け、真空排気ポンプへの管路及び不活性ガ
スの給気装置への管路を、自動切替弁を介して該
給排気ノズルに接続し、該ヒータノズルの内側に
両端が開放しているセラミツク製のラジアントチ
ユーブを挿入し、該ラジアントチユーブの中に挿
入した非金属性のヒータを、外気に対し真空シー
ルされたヒータ端子に接続し、且つ少なくとも上
記ラジアントチユーブの先端部に、該ラジアント
チユーブ内で上記ヒータにより予熱された不活性
ガスを炉内に導入する通気性の断熱材を充填させ
たことを特徴とする高温熱処理炉用電熱装置。 A heater nozzle having a supply/exhaust nozzle is airtightly provided in the furnace body, and a pipe line to a vacuum pump and a pipe line to an inert gas supply device are connected to the supply/exhaust nozzle via an automatic switching valve. A ceramic radiant tube with both ends open is inserted inside the heater nozzle, and a non-metallic heater inserted into the radiant tube is connected to a heater terminal that is vacuum-sealed to the outside air, and at least the above An electric heating device for a high-temperature heat treatment furnace, characterized in that the tip of the radiant tube is filled with an air-permeable heat insulating material that introduces the inert gas preheated by the heater in the radiant tube into the furnace.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8166183U JPS59186799U (en) | 1983-05-30 | 1983-05-30 | Electric heating device for high temperature heat treatment furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8166183U JPS59186799U (en) | 1983-05-30 | 1983-05-30 | Electric heating device for high temperature heat treatment furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59186799U JPS59186799U (en) | 1984-12-11 |
| JPS6133517Y2 true JPS6133517Y2 (en) | 1986-09-30 |
Family
ID=30211625
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8166183U Granted JPS59186799U (en) | 1983-05-30 | 1983-05-30 | Electric heating device for high temperature heat treatment furnace |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59186799U (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0657844B2 (en) * | 1985-06-30 | 1994-08-03 | 株式会社島津製作所 | Vacuum heat treatment furnace safety device |
| SE532190C2 (en) * | 2007-09-25 | 2009-11-10 | Sandvik Intellectual Property | Conductor for electrical resistance elements |
| JP6436000B2 (en) * | 2015-06-18 | 2018-12-12 | トヨタ自動車株式会社 | Carburizing equipment |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5644349A (en) * | 1979-08-31 | 1981-04-23 | Barmag Barmer Maschf | Shaft for high speed rotation |
-
1983
- 1983-05-30 JP JP8166183U patent/JPS59186799U/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5644349A (en) * | 1979-08-31 | 1981-04-23 | Barmag Barmer Maschf | Shaft for high speed rotation |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59186799U (en) | 1984-12-11 |
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