JPH0657844B2 - Vacuum heat treatment furnace safety device - Google Patents
Vacuum heat treatment furnace safety deviceInfo
- Publication number
- JPH0657844B2 JPH0657844B2 JP60143654A JP14365485A JPH0657844B2 JP H0657844 B2 JPH0657844 B2 JP H0657844B2 JP 60143654 A JP60143654 A JP 60143654A JP 14365485 A JP14365485 A JP 14365485A JP H0657844 B2 JPH0657844 B2 JP H0657844B2
- Authority
- JP
- Japan
- Prior art keywords
- valve
- vacuum pump
- inert gas
- exhaust system
- system passage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Furnace Details (AREA)
Description
【発明の詳細な説明】 ［産業上の利用分野］ 本発明は、爆発性ガスを使用する真空焼結炉の安全装置
に関するものである。Description: TECHNICAL FIELD The present invention relates to a safety device for a vacuum sintering furnace that uses an explosive gas.
［従来の技術］ 例えば、超硬合金の焼結には、近年、その雰囲気ガスと
してＨ2、COその他の爆発性を有するガスを使用するこ
とが多くなって来ている。かかる爆発性ガスを用いる焼
結作業は、通常真空焼結炉内で適当な減圧状態の下で実
施されるため、炉内に大気リーク等を生じると爆発事故
の危険がある。そこで、この種の真空炉では、リークの
発生を炉内圧の変化や雰囲気ガス中の酸素濃度の変化な
どをセンシングして絶えず監視し、爆発事故を未然に防
止するための細心の配慮が払われている。[Prior Art] For example, in sintering of cemented carbide, in recent years, as an atmosphere gas, H 2 , CO, and other explosive gases are often used. Since the sintering work using such explosive gas is usually carried out in a vacuum sintering furnace under an appropriately reduced pressure, there is a danger of an explosion accident if an atmospheric leak or the like occurs in the furnace. Therefore, in this type of vacuum furnace, the occurrence of leaks is constantly monitored by sensing changes in the furnace pressure or changes in the oxygen concentration in the atmosphere gas, and careful attention is paid to prevent explosion accidents. ing.
［発明が解決しようとする問題点］ しかし、現状では焼結炉本体についての安全性について
は対策が講じられているものの、炉内の爆発性ガスを真
空ポンプで吸引し排気するその排気ラインについては余
り注意が払われておらず、このためこの種焼結炉による
操業の安全性の確保は必ずしも完全なものとは言えない
情況にある。具体的に言えば、特に焼結炉から爆発性ガ
スを吸引する真空ポンプの停止時または始動時乃至運転
中に排気ライン中で一時的に爆発性ガスと空気（酸素）
とが混合し、両者の危険な混合状態を呈する可能性があ
ることである。そして、このような危険性は真空焼結炉
の場合のみならず、爆発性ガスを雰囲気ガスとして使用
する真空熱処理炉一般に共通する問題として提起され
る。[Problems to be solved by the invention] However, although safety measures are currently taken for the main body of the sintering furnace, the exhaust line for sucking and discharging explosive gas in the furnace with a vacuum pump Has not been paid much attention to, and therefore the safety of operation by this kind of sintering furnace is not always perfect. Specifically, especially when the vacuum pump that sucks explosive gas from the sintering furnace is stopped, started, or operated, the explosive gas and air (oxygen) are temporarily transferred in the exhaust line.
It is possible that and will mix and present a dangerous mixture of the two. Then, such a danger is raised not only in the case of the vacuum sintering furnace but also as a problem common to general vacuum heat treatment furnaces in which an explosive gas is used as an atmosphere gas.
本発明は、かかる問題点に着目し、真空熱処理炉の排気
系路で爆発性ガスと酸素とが混合するおそれを確実に防
止でき、爆発事故の危険性を完全に排除できるようにし
た安全装置を提供する目的でなされたものである。The present invention pays attention to such a problem, and can surely prevent the risk of mixing explosive gas and oxygen in the exhaust system passage of the vacuum heat treatment furnace, and completely eliminate the risk of explosion accident. It was made for the purpose of providing.
［問題点を解決するための手段］ 本発明は、このような目的を達成するために、爆発性ガ
スを含む熱処理炉内からの排ガスを真空ポンプで吸引し
て大気中に放出せしめるようにした真空熱処理炉の排気
システムにおいて、前記熱処理炉内の排気口と前記真空
ポンプの吸気口とをメインバルブを介して連通する上流
側配気系路と、一端が前記真空ポンプの排気口と連通さ
れ他端に大気放出口を有する下流側排気系路と、この下
流側排気系路に第１バルブを介して連通され不活性ガス
供給手段から該下流側排気系路に不活性ガスを流入させ
る第１不活性ガス供給系路と、前記メインバルブと前記
真空ポンプとの間の上流側排気系路に第２バルブを介し
て連通され前記不活性ガス供給手段から該上流側排気系
路に不活性ガスを流入させる、真空ポンプを運転してい
るときにはメインバルブおよび第１バルブを開にすると
ともに第２バルブを閉にし、真空ポンプの運転を停止す
るときにはメインバルブを閉にするとともに第１バルブ
および第２バルブを開にする制御を行う制御手段とを設
けたことを特徴としている。[Means for Solving the Problems] In order to achieve such an object, the present invention is designed so that exhaust gas from the heat treatment furnace containing explosive gas is sucked by a vacuum pump and released into the atmosphere. In an exhaust system of a vacuum heat treatment furnace, an upstream air distribution system passage that connects an exhaust port in the heat treatment furnace and an intake port of the vacuum pump via a main valve, and one end thereof communicates with an exhaust port of the vacuum pump. A downstream side exhaust system passage having an air outlet at the other end, and a downstream side exhaust system passage communicating with the downstream side exhaust system passage through a first valve to allow an inert gas to flow into the downstream side exhaust system passage from the inert gas supply means. (1) An inert gas supply system passage and an upstream exhaust system passage between the main valve and the vacuum pump are communicated with each other through a second valve, and the inert gas supply means is inert to the upstream exhaust system passage. Vacuum pump that allows gas to flow in Open the main valve and the first valve and close the second valve when operating the pump, and close the main valve and open the first valve and the second valve when stopping the operation of the vacuum pump. It is characterized in that it is provided with a control means for carrying out control.
［作用］ 真空熱処理炉の排気システムに、このような第１、第２
の不活性ガス供給系路を付設したものであれば、メイン
バルブを開にして真空ポンプを運転しているときには、
その第１バルブを開にして第１不活性ガス供給系路から
下流側排気系路に不活性ガスを流入せしめ、該下流側排
気系路内を正圧域におくようにする。すると、真空ポン
プの運転中に下流側排気系路にその大気放出口から空気
が逆流してきて、該下流側排気系路内で危険な爆発性ガ
スと酸素の混合が確実に防止できる。また、真空ポンプ
の運転を停止するときには、メインバルブを閉じるとと
もに、第１、第２バルブを共に開にして第１、第２の不
活性ガス供給系路から下流側配気系路と真空ポンプ側の
上流側配気系路とにそれぞれ不活性ガスを流入せしめ
る。すなわち、こうすれば下流側配気系路と上流側配気
系路に残存する爆発性ガスを不活性ガスで瞬時にガスパ
ージすることができるのである。なお、以上の制御は制
御手段を通じて自動的に行われるものとなる。[Operation] In the exhaust system of the vacuum heat treatment furnace, the first and second
If the inert gas supply system is attached, the main valve is opened and the vacuum pump is operating.
The first valve is opened to allow the inert gas to flow from the first inert gas supply system passage to the downstream side exhaust system passage so that the inside of the downstream side exhaust system passage is in the positive pressure region. Then, during operation of the vacuum pump, air flows back to the downstream side exhaust system passage from its atmospheric emission port, so that dangerous mixture of explosive gas and oxygen can be surely prevented in the downstream side exhaust system passage. Further, when the operation of the vacuum pump is stopped, the main valve is closed and the first and second valves are both opened to open the first and second inert gas supply system passages to the downstream air distribution system passage and the vacuum pump. Inert gas is made to flow into the upstream side air distribution system passage on each side. That is, in this way, the explosive gas remaining in the downstream air distribution system passage and the upstream air distribution system passage can be instantly purged with an inert gas. The above control is automatically performed by the control means.
［実施例］ 以下、本発明の一実施例を図面に参照して説明する。[Embodiment] An embodiment of the present invention will be described below with reference to the drawings.
添付図は、本発明に係る真空焼結炉の排気システムの概
要を図示しており、図において１は、チャンバー２内で
処理物ａを収納するためのタイトボックス３と、このタ
イトボックス３内を加熱するためのヒータ４等を設けて
構成される真空焼結炉を示す。この真空焼結炉１には、
雰囲気ガスとしてＨ2やCOなどの爆発性ガスを炉内に流
入させるガス導入口１ａと、この爆発性ガスを含む排ガ
スを外部に排気するための排気口１ｂとを設けている。
５は真空ポンプ（ロータリポンプ）であり、真空焼結炉
１内から爆発性ガスを含んだ排ガスを真空吸引して大気
中に放出せしめる。そして、このために、前記真空焼結
炉１の排気口１ｂと真空ポンプ５の吸気口５ａとを接続
連通する上流側排気系路６と、一端が真空ポンプ５の排
気口５ｂに接続連通され他端に大気放出口８を有する下
流側排気系路７とを配設している。そして、上流側排気
系路６にはこの排気システムのメインバルブ９が介設さ
れ、真空ポンプ５の運転作動時のみ炉１内と排気ライン
との接続を行なわしめるように開閉状態が切換えられ
る。The attached drawing shows an outline of an exhaust system of a vacuum sintering furnace according to the present invention. In the drawing, 1 is a tight box 3 for accommodating a processed material a in a chamber 2, and a tight box 3 in the tight box 3. 1 shows a vacuum sintering furnace configured by providing a heater 4 and the like for heating. In this vacuum sintering furnace 1,
A gas inlet 1a for introducing an explosive gas such as H 2 or CO into the furnace as an atmosphere gas, and an exhaust port 1b for exhausting the exhaust gas containing the explosive gas to the outside are provided.
Reference numeral 5 denotes a vacuum pump (rotary pump), which sucks the exhaust gas containing the explosive gas in vacuum from the vacuum sintering furnace 1 and discharges it into the atmosphere. Therefore, for this purpose, the upstream exhaust system passage 6 that connects the exhaust port 1b of the vacuum sintering furnace 1 and the intake port 5a of the vacuum pump 5 is connected, and one end is connected to the exhaust port 5b of the vacuum pump 5. A downstream side exhaust system passage 7 having an air outlet 8 is arranged at the other end. A main valve 9 of this exhaust system is provided in the upstream exhaust system passage 6, and the open / close state is switched so that the inside of the furnace 1 and the exhaust line are connected only when the vacuum pump 5 is in operation.
しかして、かかる真空焼結炉１の排気システムにおい
て、次のような構成を付加している。すなわち、まず前
記下流側排気系路７に、その真空ポンプ５の排気口５ｂ
近傍位置で第１不活性ガス供給系路１１を接続して連通
させるようにしている。この第１不活性ガス供給系路１
１は、ガス貯留器のような不活性ガス供給手段１０から
該下流側排気系路７にＮ2その他の不活性ガスを流入さ
せるためのもので、その途中に介設した第１バルブ１２
の開度調整によりガス流入量を自在に可変できるものと
している。また、前記メインバルブ９と前記真空ポンプ
５の吸気口５ａとの間の上流側排気系路６ｂに、前記第
１不活性ガス供給系路１１から分岐する第２不活性ガス
供給系路１３を接続して連通させるようにしている。こ
の第２不活性ガス供給系路１３は、共通の前記不活性ガ
ス供給手段１０から該上流側排気系路６ｂに不活性ガス
を必要なときのみ流入させるためのもので、その途中に
介設した第２バルブ１４の開閉で所定のタイミングで不
活性ガスを流入できるようにしている。そして、これら
第１、第２不活性ガス供給系路１１、１３に設けられた
バルブ１２、１４は、前記メインバルブ９と共に制御手
段１５によりバルブの開閉切換または開度調整が自動制
御される。すなわち、メインバルブ９は制御手段１５か
らの指令信号Ｃｏを入力して真空ポンプ５の運転開始−
運転停止に連動して開閉される。また、第１バルブ１１
は制御手段１５からの指令信号Ｃ1を入力して、真空ポ
ンプ５の運転作動中は下流側排気系路７を正圧域にする
小流量の不活性ガスを絶えず下流側排気系路７に流入さ
せるバルブ開度に制御され、真空ポンプ５の運転停止時
には一定時間下流側排気系路７に大流量の不活性ガスを
流入させるバルブ開度に制御されるようになっている。
そして又、第２バルブ１４は制御手段１５からの指令信
号Ｃ2を入力して、真空ポンプ５の運転作動中は閉止状
態に保持され、真空ポンプ５の運転停止時のみ一定時間
上流側排気系路６ｂに所定量の不活性ガスを流入させる
バルブ開成状態に切換えられるように制御される。Therefore, the following configuration is added to the exhaust system of the vacuum sintering furnace 1. That is, first, the exhaust port 5b of the vacuum pump 5 is installed in the downstream exhaust system passage 7.
The first inert gas supply system passage 11 is connected and communicated at a nearby position. This first inert gas supply system path 1
Reference numeral 1 is for allowing N 2 or other inert gas to flow into the downstream side exhaust system passage 7 from an inert gas supply means 10 such as a gas reservoir, and a first valve 12 provided in the middle thereof.
The amount of gas inflow can be freely changed by adjusting the opening degree. In addition, a second inert gas supply system path 13 branched from the first inert gas supply system path 11 is provided in the upstream exhaust system path 6b between the main valve 9 and the intake port 5a of the vacuum pump 5. I am trying to connect and communicate. The second inert gas supply system passage 13 is for allowing an inert gas to flow from the common inert gas supply means 10 to the upstream side exhaust system passage 6b only when necessary, and is provided in the middle thereof. By opening and closing the second valve 14, the inert gas can be introduced at a predetermined timing. The valves 12 and 14 provided in the first and second inert gas supply system passages 11 and 13 are automatically controlled by the control means 15 together with the main valve 9 so as to switch the valve between open and closed states or adjust the opening degree. That is, the main valve 9 inputs the command signal Co from the control means 15 to start the operation of the vacuum pump 5.
It opens and closes in conjunction with the operation stop. In addition, the first valve 11
Inputs the command signal C 1 from the control means 15 and continuously supplies a small flow rate of the inert gas which makes the downstream side exhaust system passage 7 to the positive pressure region to the downstream side exhaust system passage 7 during the operation of the vacuum pump 5. The opening degree of the valve is controlled so that when the vacuum pump 5 is stopped, the opening degree of the inert gas is controlled to flow into the downstream exhaust system passage 7 for a certain period of time.
Further, the second valve 14 receives the command signal C 2 from the control means 15 and is kept closed during the operation of the vacuum pump 5, and the upstream side exhaust system is kept for a certain time only when the operation of the vacuum pump 5 is stopped. It is controlled so that it can be switched to a valve open state in which a predetermined amount of inert gas is allowed to flow into the passage 6b.
以上のような機構の安全装置を具備したものであれば、
次のようにしてその排気ラインにおける爆発事故の危険
が取り除かれるものとなる。すなわち、メインバルブ９
を開にして真空ポンプ５の運転の開始したときには、そ
の第１バルブ１２が開成され第１不活性ガス供給系路１
１から下流側排気系路７に不活性ガスを流入されてその
内部が正圧域におかれるから、真空ポンプ５の運転開始
時乃至運転中に下流側排気系路７内にその大気放出口８
から空気が逆流してきて、該下流側排気系路７内での爆
発性ガスと酸素との危険な混合が確実に防止できる。次
いで、真空ポンプ５の運転を停止する（停電等の原因で
不慮に停止されるときを含む）には、メインバルブ９が
閉じられるとともに、第１、第２バルブ１２、１４が同
時に開成され第１、第２の不活性ガス供給系路１１、１
３から下流側配気系路７と真空ポンプ側の上流側配気系
路６ｂとに同時にそれらの内容積に相当する大流量の不
活性ガスが一時的に流入されるから、メインバルブ９以
降の排気ラインに残存する爆発性ガスが不活性ガスで瞬
時にガスパージされ、下流側配気系路７と上流側配気系
路６ｂの内部が即座に不活性ガスで置換されることにな
る。なお、必要に応じ真空ポンプ５の停止後も引き続き
第１不活性ガス供給系路１１から下流側排気系路７に不
活性ガスを流し続けるようにしてもよい。If it is equipped with the safety device of the above mechanism,
The danger of an explosion accident in the exhaust line is eliminated as follows. That is, the main valve 9
Is opened to start the operation of the vacuum pump 5, the first valve 12 thereof is opened and the first inert gas supply system passage 1 is opened.
Since the inert gas is flown into the downstream side exhaust system passage 7 from 1 and the inside thereof is placed in the positive pressure region, the atmosphere discharge port in the downstream side exhaust system passage 7 at the start or during the operation of the vacuum pump 5. 8
The air flows backward from the device, and dangerous mixing of the explosive gas and oxygen in the downstream side exhaust system passage 7 can be reliably prevented. Then, in order to stop the operation of the vacuum pump 5 (including the case where the vacuum pump 5 is inadvertently stopped due to a power failure or the like), the main valve 9 is closed, and the first and second valves 12 and 14 are simultaneously opened. 1, second inert gas supply system passage 11, 1
3 from the main valve 9 to the downstream side air distribution system passage 7 and the vacuum pump side upstream air distribution system passage 6b at the same time because a large flow rate of the inert gas corresponding to the internal volume thereof is temporarily introduced. The explosive gas remaining in the exhaust line is instantly purged with an inert gas, and the insides of the downstream air distribution system passage 7 and the upstream air distribution system passage 6b are immediately replaced with the inert gas. Note that, if necessary, the inert gas may be continuously flown from the first inert gas supply system passage 11 to the downstream side exhaust system passage 7 even after the vacuum pump 5 is stopped.
したがって、このシステムを採用すれば、真空ポンプ５
の運転中、停止時のいずれのときでも、その排気系路６
ｂ、７内で爆発性ガスと大気放出口８から逆流する空気
（酸素）とが混合したり或いは排気系路６ｂ、７内に爆
発性ガスが滞留する危険な状態を惹起するおそれが完全
に回避できるものとなり、この種焼結炉の操業の安全性
に万全を期することができるものとなる。また、このシ
ステムでは、真空ポンプ５の停止時には同時に上流側排
気系路６ｂへも不活性ガスを流入してガスパージするよ
うにしているので、ポンプ停止に伴ないその下流側排気
系路７から該真空ポンプ５内を通過したオイルを含むガ
スが逆流して、上流側の炉１等をオイルで汚染する心配
もない。Therefore, if this system is adopted, the vacuum pump 5
Exhaust system path 6
There is a risk that the explosive gas may mix with the air (oxygen) flowing back from the air discharge port 8 in b, 7 or cause a dangerous state in which the explosive gas stays in the exhaust system passages 6b, 7 This can be avoided, and the safety of the operation of this kind of sintering furnace can be ensured. Further, in this system, when the vacuum pump 5 is stopped, the inert gas is also made to flow into the upstream side exhaust system passage 6b at the same time to perform gas purging. There is no fear that the oil-containing gas that has passed through the vacuum pump 5 will flow back and contaminate the upstream furnace 1 and the like with oil.
本発明は、以上の如くして真空焼結炉における排気シス
テムでの爆発事故の危険性を排除できるものである。そ
して、本発明は真空焼結炉のみならず、雰囲気ガスとし
て爆発性ガスを使用するその他の真空熱処理炉の場合に
ついても同様に利用可能な汎用性をもったものであるこ
とは言うまでもない。なお、第１、第２不活性ガス供給
系路１１、１３に設けたバルブ１２、１４の開閉切換や
開度調整の具体的な制御の内容、またメインバルブ９を
含めてそれらの具体的な制御方式等は、上記実施例に拘
束されず、必要に応じ様々に改良、変更等を加えること
ができる。As described above, the present invention can eliminate the risk of explosion accident in the exhaust system in the vacuum sintering furnace. Needless to say, the present invention has general versatility that can be used not only in the vacuum sintering furnace but also in other vacuum heat treatment furnaces that use an explosive gas as an atmosphere gas. It should be noted that the specific contents of the control of opening / closing switching and opening adjustment of the valves 12 and 14 provided in the first and second inert gas supply system passages 11 and 13, and the specific contents thereof including the main valve 9. The control method and the like are not limited to the above-described embodiment, and various improvements and changes can be added as necessary.
［発明の効果］ 以上に説明したように、本発明は真空熱処理炉の排気系
路で爆発性ガスと酸素とが混合するおそれを確実に防止
できて爆発事故の危険性を排除でき、併せてガスの逆流
に伴なう真空ポンプ上流側でのオイルによる汚染問題も
解消できる安全装置を提供することができたものであ
る。[Effects of the Invention] As described above, the present invention can reliably prevent the risk of mixing explosive gas and oxygen in the exhaust system passage of a vacuum heat treatment furnace, and eliminate the risk of an explosion accident. It is possible to provide a safety device capable of solving the problem of oil contamination on the upstream side of the vacuum pump due to the backflow of gas.
添付図は本発明の一実施例を示す真空焼結炉における排
気システムの概略説明図である。 １……真空焼結炉 １ａ……ガス導入口、１ｂ……排気口 ５……真空ポンプ（ロータリポンプ） ５ａ……吸気口、５ｂ……排気口 ６……上流側排気系路 ６ｂ……真空ポンプ側の上流側排気系路 ７……下流側排気系路 ８……大気放出口 ９……メインバルブ １０……不活性ガス供給手段 １１……第１不活性ガス供給系路 １２……第１バルブ １３……第２不活性ガス供給系路 １４……第２バルブ １５……制御手段The attached drawings are schematic explanatory views of an exhaust system in a vacuum sintering furnace showing an embodiment of the present invention. 1 ... Vacuum sintering furnace 1a ... Gas inlet, 1b ... Exhaust port 5 ... Vacuum pump (rotary pump) 5a ... Intake port, 5b ... Exhaust port 6 ... Upstream exhaust system passage 6b .... Upstream exhaust system passage on the vacuum pump side 7 ... Downstream exhaust system passage 8 ... Atmosphere discharge port 9 ... Main valve 10 ... Inert gas supply means 11 ... First inert gas supply system passage 12 ... 1st valve 13 ... 2nd inert gas supply system path 14 ... 2nd valve 15 ... control means
Claims (1)
を真空ポンプで吸引して大気中に放出せしめるようにし
た真空熱処理炉の排気システムにおいて、前記熱処理炉
内の排気口と前記真空ポンプの吸気口とをメインバルブ
を介して連通する上流側排気系路と、一端が前記真空ポ
ンプの排気口と連通され他端に大気放出口を有する下流
側排気系路と、この下流側排気系路に第１バルブを介し
て連通され不活性ガス供給手段から該下流側排気系路に
不活性ガスを流入させる第１不活性ガス供給系路と、前
記メインバルブと前記真空ポンプとの間の上流側排気系
路に第２バルブを介して連通され前記不活性ガス供給手
段から該上流側排気系路に不活性ガスを流入させる第２
不活性ガス供給系路と、真空ポンプを運転しているとき
にはメインバルブおよび第１バルブを開にするとともに
第２バルブを閉にし、真空ポンプの運転を停止するとき
にはメインバルブを閉にするとともに第１バルブおよび
第２バルブを開にする制御を行う制御手段とを設けたこ
とを特徴とする真空熱処理炉の安全装置。1. An exhaust system of a vacuum heat treatment furnace in which exhaust gas containing explosive gas from the heat treatment furnace is sucked by a vacuum pump and released into the atmosphere, the exhaust port in the heat treatment furnace and the vacuum pump. Upstream exhaust system passage communicating with the intake port of the vacuum pump through a main valve, a downstream exhaust system passage having one end communicating with the exhaust port of the vacuum pump and an atmosphere discharge port at the other end, and the downstream exhaust system Between the main valve and the vacuum pump; and a first inert gas supply system passage that is in communication with the passage through a first valve and allows an inert gas to flow into the downstream exhaust system passage from the inert gas supply means. A second valve that is connected to the upstream exhaust system passage through a second valve and allows an inert gas to flow from the inert gas supply means into the upstream exhaust system passage.
When the inert gas supply system and the vacuum pump are operating, the main valve and the first valve are opened and the second valve is closed, and when the operation of the vacuum pump is stopped, the main valve is closed and the first valve is closed. A safety device for a vacuum heat treatment furnace, comprising: a control means for controlling the opening of the first valve and the second valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60143654A JPH0657844B2 (en) | 1985-06-30 | 1985-06-30 | Vacuum heat treatment furnace safety device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60143654A JPH0657844B2 (en) | 1985-06-30 | 1985-06-30 | Vacuum heat treatment furnace safety device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS624803A JPS624803A (en) | 1987-01-10 |
| JPH0657844B2 true JPH0657844B2 (en) | 1994-08-03 |
Family
ID=15343817
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60143654A Expired - Fee Related JPH0657844B2 (en) | 1985-06-30 | 1985-06-30 | Vacuum heat treatment furnace safety device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0657844B2 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2655171B2 (en) * | 1988-06-30 | 1997-09-17 | 昭和電線電纜株式会社 | Watertight electric wire manufacturing method |
| JP6252748B2 (en) * | 2013-11-29 | 2017-12-27 | 日立工機株式会社 | Centrifuge and method for opening rotor chamber in centrifuge |
| CN107254573A (en) * | 2017-06-14 | 2017-10-17 | 沈阳航空航天大学 | Atmosphere control device and method for sensing heating local heat treatmet |
| CN110686518A (en) * | 2019-10-11 | 2020-01-14 | 江苏智冷物联技术有限公司 | Intelligent vacuum-pumping system |
| CN113736982A (en) * | 2020-05-27 | 2021-12-03 | 中国科学院上海应用物理研究所 | Gas protection device for post-welding online heat treatment and use method thereof |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5364122U (en) * | 1976-11-02 | 1978-05-30 | ||
| JPS59186799U (en) * | 1983-05-30 | 1984-12-11 | 石川島播磨重工業株式会社 | Electric heating device for high temperature heat treatment furnace |
-
1985
- 1985-06-30 JP JP60143654A patent/JPH0657844B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPS624803A (en) | 1987-01-10 |
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| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |