JPS6118850A - Humidity and dew condensation detection element - Google Patents
Humidity and dew condensation detection elementInfo
- Publication number
- JPS6118850A JPS6118850A JP14029984A JP14029984A JPS6118850A JP S6118850 A JPS6118850 A JP S6118850A JP 14029984 A JP14029984 A JP 14029984A JP 14029984 A JP14029984 A JP 14029984A JP S6118850 A JPS6118850 A JP S6118850A
- Authority
- JP
- Japan
- Prior art keywords
- humidity
- electrodes
- electrode
- dew condensation
- detection element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
- G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
- G01N27/225—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity by using hygroscopic materials
Abstract
Description
【発明の詳細な説明】
（１）発明の分野
この発明は、湿度および結露の両方の測定・検出を行う
ことができる湿度・結露検出素子に関するものである。DETAILED DESCRIPTION OF THE INVENTION (1) Field of the Invention The present invention relates to a humidity/condensation detection element capable of measuring and detecting both humidity and dew condensation.
（２）従来技術
湿度素子として、金属酸化物、高分子膜等を用いたもの
が知られでいるが、９０ＸＲＨ以上での校正は難しく、
９０ＸＲＨ以上での誤差が不明確であり、結露が１００
Ｘ ＲＨで発生するとしても、その誤差のため、実際
に結露したかどうかあいまいな場合がある。(2) Conventional technology Humidity elements using metal oxides, polymer membranes, etc. are known, but calibration at 90XRH or higher is difficult;
The error is unclear at 90XRH or higher, and the condensation is 100XRH or higher.
Even if condensation occurs at X RH, it may be unclear whether condensation actually occurred due to the error.
（３）発明の目的。(3) Purpose of the invention.
この発明の目的は２以上の点に鑑み、湿度素子の誤差に
影響されることなく実際の結露の検出も可能とした湿度
−Ｍ露検出素子を提供することである。SUMMARY OF THE INVENTION In view of two or more points, it is an object of the present invention to provide a humidity-M dew detection element that is capable of detecting actual dew condensation without being affected by errors in the humidity element.
（４）発明の概要
この発明は、感湿膜の一方の側に第１の電極を形成し、
他方の側に第２．第３の電極を形成し。(4) Summary of the invention This invention forms a first electrode on one side of a moisture-sensitive membrane,
2nd on the other side. forming a third electrode;
この第２．第３の電極間の容量値変化から湿度を。This second. Humidity is detected from the change in capacitance value between the third electrode.
インピーダンス変化から結露を検出するようにした湿度
−結露検出素子である。This is a humidity-condensation detection element that detects dew condensation from changes in impedance.
（５ン発明の実施例
第１図は、この発明の一実施例を示す構成説明図、第２
図は、同断面説明図であるっ
図において、感湿膜１の一方の側に例えば円状の透湿性
の第１の電極２が形成され、感湿膜工の他の側には、第
１の電極２に対向するとともに互いに間隔を設けて対向
して形成された半円状部をもつ透湿性の第２の電極３１
．第３の電極３２が形成されている。この素子は図示し
ないが、感湿膜１の外周を適当な保持部材で固定され、
第２．第３の電極３１ 、３２間の容量変化、抵抗値変
化等の電気的変化が外部に取り出せるようになっている
。(Embodiment 5 of the Invention Fig. 1 is a configuration explanatory diagram showing an embodiment of the invention, Fig. 2
The figure is an explanatory cross-sectional view of the same. In the figure, for example, a circular moisture permeable first electrode 2 is formed on one side of the moisture sensitive membrane 1, and a second electrode 2 is formed on the other side of the moisture sensitive membrane. a moisture-permeable second electrode 31 having a semicircular portion facing the first electrode 2 and facing each other with an interval therebetween;
．． A third electrode 32 is formed. Although this element is not shown, the outer periphery of the moisture sensitive membrane 1 is fixed with a suitable holding member.
Second. Electrical changes such as changes in capacitance and changes in resistance between the third electrodes 31 and 32 can be extracted to the outside.
第３図で示すように、この素子の第１の電極２と第２の
電極３１間に容量Ｃ１，第１の電極２と第３の電極３２
間に容量Ｃ２があり、また、第２．第３の藺
電極ａ１．ａ？ｐａ抵抗几があると考えられ、第２．第
３の電極３１ 、３２間に、直列接続された容量Ｃｔ
、 Ｃ２とこれに並列接続された抵抗Ｒがあることにな
る。As shown in FIG. 3, a capacitance C1 exists between the first electrode 2 and the second electrode 31 of this element, and a capacitance C1 exists between the first electrode 2 and the third electrode 32.
There is a capacitor C2 between the second . Third electrode a1. a? It is thought that there is a PA resistance, and the second. A capacitance Ct connected in series between the third electrodes 31 and 32
, C2 and a resistor R connected in parallel with it.
湿度を測定する場合、感湿膜１は湿度変化に応じて水分
を脱出、吸着して誘電率を変化させ、第２、第３の電極
３１ 、３２間の容量値も変化するので。When measuring humidity, the moisture sensitive membrane 1 releases and adsorbs moisture in response to changes in humidity, changing its dielectric constant, and the capacitance value between the second and third electrodes 31 and 32 also changes.
この容量値変化から湿度を測定することができる。Humidity can be measured from this change in capacitance value.
なお、第２．第３の電極３１ 、３２は、結露しない状
態では、水により短絡されないので非常に大きな抵抗値
をもつ。In addition, the second. The third electrodes 31 and 32 have a very large resistance value because they are not short-circuited by water in a non-condensing state.
湿度がきわめて高く、結露状態となると、第２゜第３の
電極３１．３２間に水分が付着し１両電極３１゜３２間
は導通状態となるので、抵抗値はきわめで小１丁
さくなり、また容量値を急激に大きくなり、このインピ
ーダンス変化から結露を検出することができる。When the humidity is extremely high and condensation occurs, moisture adheres between the second and third electrodes 31 and 32, and conduction occurs between the first and second electrodes 31 and 32, so the resistance value becomes extremely small. , the capacitance value increases rapidly, and dew condensation can be detected from this impedance change.
このように、感湿膜１をはぎんで、一方の側に第１の電
極２．他方の側に対向した第２．第３の電極３１ 、３
２を設け、第２．第３の電極３１ 、３２間より、湿度
および結露を測定することができる。In this way, the moisture sensitive membrane 1 is sandwiched and the first electrode 2 is placed on one side. The second one facing the other side. Third electrode 31 , 3
2, and the second. Humidity and dew condensation can be measured from between the third electrodes 31 and 32.
第４図は、この発明の他の一実施例を示す構成説明図、
第５図は同断面説明図である。FIG. 4 is a configuration explanatory diagram showing another embodiment of the present invention;
FIG. 5 is an explanatory cross-sectional view of the same.
この例では、平板状の絶縁性の支持基板４に第１の電極
２を形成し、その上に感湿膜１．その上にくし形の対向
する第２．第３の電極、３１．３２を形成し、第２．第
３の電極３１．３２にリード線５１．５２を接続してい
る。In this example, a first electrode 2 is formed on a flat insulating support substrate 4, and a moisture sensitive film 1. Above it is a comb-shaped opposing second. forming a third electrode, 31.32; A lead wire 51.52 is connected to the third electrode 31.32.
同様に、第２．第３の電極３１ 、３２間の容量値変化
から湿度を、抵抗値変化から結露を測定することができ
る。Similarly, the second. Humidity can be measured from the change in capacitance value between the third electrodes 31 and 32, and dew condensation can be measured from the change in resistance value.
第６図は、この発明の他の一実施例を示す構成説明図、
第７図−は、同断面説明図である。FIG. 6 is a configuration explanatory diagram showing another embodiment of the present invention;
FIG. 7 is an explanatory cross-sectional view of the same.
この例では、棒状または円筒状の支持部材４の上に、第
１の電極２．感湿膜工、対向する第２゜第３の電極３１
．３２を順に円筒状に形成し、第２゜第３の電極３１
、３２にリード線を形成している。In this example, a first electrode 2. Moisture sensitive membrane, opposing second and third electrodes 31
．． 32 are sequentially formed into a cylindrical shape, and the second and third electrodes 31
, 32 are provided with lead wires.
同様に、第２．第３の電極３１ 、３２間の電気的変化
から湿度・結露の検出ができる。Similarly, the second. Humidity and dew condensation can be detected from electrical changes between the third electrodes 31 and 32.
（６）発明の効果
この発明は、感湿膜をはさんで一方の側に第１の電極、
他方の側に対向して形成された第２．第３の電極を設け
、この第２．第３の電極間の電気的変化を、測定すると
いう簡単な構成により、湿度および結露の測定が単一の
素子で可能となる。特に湿度が９０％凡Ｈ以上での誤差
に関係なく、確実に結露状態の検出が可能となる。(6) Effects of the invention This invention provides a first electrode on one side of the moisture-sensitive membrane,
A second . formed oppositely on the other side. A third electrode is provided, and the second electrode is provided. A simple configuration in which electrical changes between the third electrodes are measured allows measurement of humidity and dew condensation with a single element. In particular, it is possible to reliably detect the dew condensation state regardless of the error when the humidity is about 90% H or higher.
第１図、第２図、第３図、第４図、第５図、第６図、第
７図は、この発明の一実施例を示す説明図である。
１・・・感湿膜、２・・・第１の電極、３１・・・第２
の電極、３２・・・第妾の電極FIG. 1, FIG. 2, FIG. 3, FIG. 4, FIG. 5, FIG. 6, and FIG. 7 are explanatory diagrams showing one embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Moisture-sensitive film, 2... First electrode, 31... Second
electrode, 32... electrode of the concubine
Claims (2)
感湿膜の他方の側に対向して形成された第２，第３の電
極とを備え，前記第２，第３の電極間の容量値変化から
湿度を測定するとともに前記第２，第３の第極間のイン
ピーダンス変化から結露を検出することを特徴とする湿
度・結露検出素子。1. A first electrode formed on one side of the humidity sensitive film, and second and third electrodes formed oppositely on the other side of the humidity sensitive film, and the second and third electrodes are formed on the other side of the humidity sensitive film. A humidity/condensation detection element, characterized in that humidity is measured from a change in capacitance between electrodes, and condensation is detected from a change in impedance between the second and third electrodes.
部材に形成したことを特徴とする特許請求の範囲第１項
記載の湿度・結露検出素子。2. 2. The humidity/condensation detection element according to claim 1, wherein the first electrode is formed as a planar, rod-shaped, or cylindrical support member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14029984A JPS6118850A (en) | 1984-07-06 | 1984-07-06 | Humidity and dew condensation detection element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14029984A JPS6118850A (en) | 1984-07-06 | 1984-07-06 | Humidity and dew condensation detection element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6118850A true JPS6118850A (en) | 1986-01-27 |
Family
ID=15265554
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14029984A Pending JPS6118850A (en) | 1984-07-06 | 1984-07-06 | Humidity and dew condensation detection element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6118850A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01167646A (en) * | 1987-12-23 | 1989-07-03 | Tekune Yoko:Kk | Electric capacity type hygrometer |
| US5402075A (en) * | 1992-09-29 | 1995-03-28 | Prospects Corporation | Capacitive moisture sensor |
| US6575621B1 (en) * | 1998-10-30 | 2003-06-10 | Optiguide Ltd. | Dew point hygrometers and dew sensors |
| EP1387164A1 (en) * | 2002-07-29 | 2004-02-04 | Yamatake Corporation | Capacitive type sensor |
| US6926439B2 (en) | 1998-10-30 | 2005-08-09 | Optiguide Ltd. | Dew point hygrometers and dew sensors |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57165751A (en) * | 1981-04-03 | 1982-10-12 | Marcon Electronics Co Ltd | Humidity-sensitive element |
-
1984
- 1984-07-06 JP JP14029984A patent/JPS6118850A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57165751A (en) * | 1981-04-03 | 1982-10-12 | Marcon Electronics Co Ltd | Humidity-sensitive element |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01167646A (en) * | 1987-12-23 | 1989-07-03 | Tekune Yoko:Kk | Electric capacity type hygrometer |
| US5402075A (en) * | 1992-09-29 | 1995-03-28 | Prospects Corporation | Capacitive moisture sensor |
| US6575621B1 (en) * | 1998-10-30 | 2003-06-10 | Optiguide Ltd. | Dew point hygrometers and dew sensors |
| US6926439B2 (en) | 1998-10-30 | 2005-08-09 | Optiguide Ltd. | Dew point hygrometers and dew sensors |
| EP1387164A1 (en) * | 2002-07-29 | 2004-02-04 | Yamatake Corporation | Capacitive type sensor |
| US6882165B2 (en) | 2002-07-29 | 2005-04-19 | Yamatake Corporation | Capacitive type sensor |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5969231A (en) | Sensor for monitoring concentration of gaseous substances | |
| EP2203738B1 (en) | Improved structure for capacitive balancing of integrated relative humidity sensor and manufacturing method | |
| JPH0365643A (en) | Capacitance humidity sensor | |
| US4858063A (en) | Spiral configuration of electrodes and dielectric material for sensing an environmental property | |
| JPS6263852A (en) | Capacity type humidity sensor compensating temperature | |
| JPS6156952A (en) | Moisture sensitive resistor element | |
| JPS6118850A (en) | Humidity and dew condensation detection element | |
| US7295126B2 (en) | Perforated plane moisture sensor | |
| JPH11160266A (en) | Gas sensor | |
| JPH0523124U (en) | Capacitance type humidity sensor | |
| KR100363687B1 (en) | Sensor of fabrication of onebodied temperature/humidity sensor | |
| JPS5967445A (en) | Humidity sensor | |
| JP2813423B2 (en) | Electrochemical gas sensor | |
| JPS6117945A (en) | Humidity element | |
| JPS62156551A (en) | Temperature/humidity sensor | |
| JPH0228443Y2 (en) | ||
| JP2813424B2 (en) | Electrochemical gas sensor device | |
| JP2959122B2 (en) | Moisture sensitive element | |
| JPS58166248A (en) | Temperature-and humidity-sensitive element | |
| JPS58151549A (en) | Electrostatic capacity type humidity sensitive element | |
| JPH04208849A (en) | Electrochemical gas sensor | |
| JPS5812129Y2 (en) | Dew point detection element | |
| JPS63134944A (en) | Humidity detecter | |
| JPS61112953A (en) | Apparatus for detecting external atmosphere | |
| JPS61277046A (en) | Humidity element |