JPS61187283A - Josephson regulator - Google Patents
Josephson regulatorInfo
- Publication number
- JPS61187283A JPS61187283A JP60025246A JP2524685A JPS61187283A JP S61187283 A JPS61187283 A JP S61187283A JP 60025246 A JP60025246 A JP 60025246A JP 2524685 A JP2524685 A JP 2524685A JP S61187283 A JPS61187283 A JP S61187283A
- Authority
- JP
- Japan
- Prior art keywords
- josephson
- junction
- small
- area
- regulator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Control Of Voltage And Current In General (AREA)
- Logic Circuits (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明はジョセフソンレギュレータに係り、特にＮｂ系
ジミセフソン論理回路に好適なジョセフソンレギュレー
タに関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a Josephson regulator, and particularly to a Josephson regulator suitable for an Nb-based Jimisefson logic circuit.
ジョセフソン論理回路は、論理動作終了毎に電源を切断
する交流電源で駆動される。第１図は交流電力を供給す
る方法を示す図である。第１図（ａ）に示すＶ （ｔ：
）は外部から供給される正弦波交流電圧であり、これを
第１図（ｂ）に示すレギュレータで第１図（ｃ）に示す
Ｖ’（ｔ、）の台形波にし、この台形波で論理回路を駆
動する。The Josephson logic circuit is driven by an AC power source that turns off the power every time a logic operation is completed. FIG. 1 is a diagram showing a method of supplying AC power. V (t:
) is a sinusoidal AC voltage supplied from the outside, which is converted into a trapezoidal wave of V'(t, ) shown in FIG. 1(c) using the regulator shown in FIG. 1(b), and this trapezoidal wave is used to perform logic Drive the circuit.
ジョセフソンレギュレータは第２図に示すジョセフソン
接合（１）の電圧電流特性の電流ステップ部（第２図に
おけるｌ５ｔｅｐ）を利用して第１図（ｃ）に示すｖ’
（ｔ）の台形波を得るものである。The Josephson regulator utilizes the current step part (l5tep in FIG. 2) of the voltage-current characteristic of the Josephson junction (1) shown in FIG.
(t) to obtain a trapezoidal wave.
このジョセフソンレギュレータにおけるジョセフソン接
合は、電圧状態で大電流を流すので発熱が大きい。この
発熱を効率良く発散しなければ、準粒子の発生によって
ギャップ電圧Ｖｇが低下し、規定の出力電圧を得られな
くなる。従来においてはこの発熱をジョセフソン接合の
」二部電極に付加した放熱フィンによって液体ヘリウム
へ熱拡散させていた（例えば特開昭５９−１７２２８２
号）。The Josephson junction in this Josephson regulator allows a large current to flow in a voltage state, so it generates a large amount of heat. If this heat generation is not efficiently dissipated, the gap voltage Vg will decrease due to the generation of quasiparticles, making it impossible to obtain a specified output voltage. Conventionally, this heat generation was diffused into liquid helium by heat dissipation fins attached to the two-part electrode of the Josephson junction (for example, Japanese Patent Application Laid-Open No. 172-282-1982).
issue).
この放熱フィンによる冷却によって、ジョセフソン接合
の電流密度が１０００Ａ／ｄ程度まで規定の出力電圧を
得ることができた。しかし、Ｎｂ系ジョセフソン論理回
路のように電流密度が３０００〜５０００Ａ／ｃＪと極
端に高い場合には、放熱フィンによる冷極のみでは不十
分であり、発熱によってギャップ電圧が低下する恐れが
ある。By cooling with this radiation fin, it was possible to obtain a specified output voltage up to a current density of approximately 1000 A/d at the Josephson junction. However, when the current density is extremely high, such as in a Nb-based Josephson logic circuit of 3000 to 5000 A/cJ, the cold electrode provided by the radiation fins alone is insufficient, and the gap voltage may decrease due to heat generation.
本発明の目的は、ジョセフソン論理回路に規定の電圧の
電力を供給することが可能なジョセフソンレギュレータ
を提供することにある。An object of the present invention is to provide a Josephson regulator capable of supplying power at a specified voltage to a Josephson logic circuit.
本発明は、１個のジョセフソン接合の接合長がジョセフ
ソン侵入距離λ、（通常、数μｍ以下）以下となるよう
に小面積のジョセフソン接合に分割し、該小面積のジョ
セフソン接合を並列に接続することにより発熱を抑制し
ようとするものである。すなわち、従来のジョセフソン
レギュレータのジョセフソン接合の接合長がジョセフソ
ン侵入距離の数倍以上あるために、接合面内の電流分布
が一様にならず、電流の入力端と出力端に集中している
。このためこの端部において発熱が熱中的に起きている
。本発明者らはこれらのことに着目し、ジョセフソン接
合を上記のように分割することにより接合面内の電流分
布を一様にし、上記端部における発熱を抑制してギャッ
プ電圧Ｖｇの低下を防止しようとするものである。The present invention divides one Josephson junction into small-area Josephson junctions such that the junction length is less than the Josephson penetration distance λ (usually several μm or less), and divides the small-area Josephson junction into The idea is to suppress heat generation by connecting them in parallel. In other words, because the length of the Josephson junction in a conventional Josephson regulator is several times greater than the Josephson penetration distance, the current distribution within the junction surface is not uniform, and the current is concentrated at the input and output ends. ing. Therefore, heat is generated enthusiastically at this end. The inventors of the present invention have focused on these points, and by dividing the Josephson junction as described above, the current distribution within the junction surface is made uniform, heat generation at the ends is suppressed, and the gap voltage Vg is reduced. This is what we are trying to prevent.
さらに、ジョセフソン接合の周囲に放熱のための余地を
残すよう、ジョセフソン接合の分布を形成することによ
り、放熱効果が十分となり、正常なギャップ電圧Ｖｇを
得ることができる。Furthermore, by forming a distribution of Josephson junctions so as to leave room for heat radiation around the Josephson junctions, the heat radiation effect becomes sufficient and a normal gap voltage Vg can be obtained.
以下、本発明の実施例を図面により説明する。 Embodiments of the present invention will be described below with reference to the drawings.
第３図において、レギュレータ用のジョセフソン接合は
小面積接合窓５によって分割されている。In FIG. 3, the Josephson junction for the regulator is divided by small area junction windows 5. In FIG.
この小面積接合窓５は下部電極４上に形成された層間絶
縁膜３によって形成される。この小面積接合窓５の中に
は薄いトンネル障壁層が形成されており、その上に形成
された上部電極２と前記下部電極４によってジョセフソ
ン接合を構成している。This small area junction window 5 is formed by the interlayer insulating film 3 formed on the lower electrode 4. A thin tunnel barrier layer is formed in this small-area junction window 5, and a Josephson junction is formed by the upper electrode 2 and the lower electrode 4 formed thereon.
この小面積接合の接合長はジョセフソン侵入長（通常、
数μｍ）より十分小さく、接合面内で電流が均一に分布
している。また、この接合の周囲に放熱用の余地を設け
ている。このため、従来の長い接合と異り、電流の入力
端と出力端（第３図においては上部と下部）での集中的
な発熱がなく、発生した熱も周囲の放熱用の余地により
冷却される。従って、準粒子の発生によるギャップ電圧
の低下が起こらず、ジョセフソン論理回路に規定電圧の
電力を供給できる。第４図に本発明の他の実施例を示す
。この実施例では、上部電極に冷却部分を付けた冷却用
大面積上部電極６を用いてレギュレータを構成している
。この実施例は第３図の実施例よりも、さらに大きな冷
却効果があり、より高い電流密度の接合に対してもギャ
ップ電圧の低下が起らない。第５図、第６図に本発明の
他の実施例を示す。これらの実施例は、小面積接合の分
布を変えたものである。第５図の実施例では、電流の入
力端と出力端で接合の数を少なくするとともに、冷却用
の余地を大きくとっており、この数の少ない接合部分に
電流が集中しても十分に冷却できる構造となっている。The junction length of this small area junction is the Josephson penetration length (usually
(several μm), and the current is uniformly distributed within the bonding surface. Further, a space for heat dissipation is provided around this junction. Therefore, unlike conventional long junctions, there is no concentrated heat generation at the current input and output ends (top and bottom in Figure 3), and the generated heat is cooled down by the surrounding space for heat radiation. Ru. Therefore, the drop in gap voltage due to the generation of quasiparticles does not occur, and power at a specified voltage can be supplied to the Josephson logic circuit. FIG. 4 shows another embodiment of the invention. In this embodiment, the regulator is constructed using a large-area cooling upper electrode 6 in which a cooling portion is attached to the upper electrode. This embodiment has an even greater cooling effect than the embodiment of FIG. 3, and no drop in gap voltage occurs even for higher current density junctions. Other embodiments of the present invention are shown in FIGS. 5 and 6. These embodiments vary the distribution of small area junctions. In the embodiment shown in Fig. 5, the number of junctions is reduced at the current input end and the output end, and a large space for cooling is provided, so that even if the current concentrates on the few junctions, there will be sufficient cooling. The structure is such that it can be done.
第６図の実施例では、電流の入出力端で接合の数が最大
になっており。In the embodiment shown in FIG. 6, the number of junctions is maximized at the current input and output terminals.
入出力端に電流が集中しても多数の接合に電流が分配さ
れるため発熱が起らない構造となっている。Even if current is concentrated at the input/output terminals, the current is distributed across multiple junctions, so no heat is generated.
第５図、第６図の実施例ともギャップ電圧の低下を防止
することができる。Both the embodiments shown in FIGS. 5 and 6 can prevent the gap voltage from decreasing.
尚、上述した実施例においては、従来の大面積接合作製
の際に起る接合の短絡を低減でき、歩留りが向上すると
いう効果がある。このため、ジョセフソンＬＳＩ製造の
歩留りの向上や、ＬＳＩの高集積化に大きな効果がある
。Note that the above-described embodiments have the effect of reducing short circuits in the bonding that occur during conventional large-area bonding production, and improving yield. Therefore, it has a great effect on improving the yield of Josephson LSI manufacturing and increasing the integration density of LSI.
本発明によれば、ジョセフソンレギュレータにおけるジ
ョセフソン接合長をジョセフソン侵入距離以下、すなわ
ち、従来の大面積接合を小面積接合に分割することによ
りジョセフソン接合からの発熱を抑えることができ、ギ
ャップ電圧の低下を防ぐことができる。従って、高速化
のため電流密度を高くする場合であってもジョセフソン
論理回路に規定電圧の電力を供給することが可能となる
。According to the present invention, heat generation from the Josephson junction can be suppressed by making the length of the Josephson junction in the Josephson regulator equal to or less than the Josephson penetration distance, that is, by dividing the conventional large-area junction into small-area junctions. Voltage drop can be prevented. Therefore, even when the current density is increased to increase speed, it is possible to supply power at a specified voltage to the Josephson logic circuit.
第１図（ａ）はジョセフソンレギュレータへ入力する交
流正弦波を示す図、第１図（ｂ）はジョセフソンレギュ
レータの等価回路を示す図、第１図（Ｃ）はジョセフソ
ンレギュレータの出力の交流台形波を示す図、第２図は
ジョセフソン接合の電圧電流特性を示図、第３図（ａ）
は本発明によるジョセフソンレギュレータの平面図、第
３図（ｂ）はその断面図、第・４図（ａ）は本発明によ
るジョセフソンレギュレータの平面図、第４図（ｂ）は
その断面図、第５図、第６図は本発明によるジョセフソ
ンレギュレータの平面図である。
■・・・ジョセフソン接合、２・・・上部電極、３・・
・接合窓用層間絶縁膜、４・・・下部電極、５・・・小
面積接合窓、６・・・冷却用大面積上部電極。Figure 1 (a) shows the AC sine wave input to the Josephson regulator, Figure 1 (b) shows the equivalent circuit of the Josephson regulator, and Figure 1 (C) shows the output of the Josephson regulator. Figure 2 shows the AC trapezoidal wave, Figure 2 shows the voltage-current characteristics of a Josephson junction, Figure 3 (a)
is a plan view of the Josephson regulator according to the present invention, FIG. 3(b) is a cross-sectional view thereof, FIG. 4(a) is a plan view of the Josephson regulator according to the present invention, and FIG. 4(b) is a cross-sectional view thereof. , 5 and 6 are plan views of the Josephson regulator according to the present invention. ■...Josephson junction, 2...upper electrode, 3...
- Interlayer insulating film for bonding window, 4...lower electrode, 5...small area bonding window, 6...large area upper electrode for cooling.
Claims (2)
ジョセフソン接合を用いたジョセフソンレギュレータに
おいて、前記ジョセフソン接合は接合長がジョセフソン
侵入距離以下であるジョセフソン接合を並列接続したも
のから成ることを特徴とるすジョセフソンレギュレータ
。1. A Josephson regulator using a Josephson junction consisting of a lower electrode, a tunnel barrier layer, and an upper electrode, characterized in that the Josephson junction is composed of parallel-connected Josephson junctions whose junction length is less than or equal to the Josephson penetration distance. Torus Josephson regulator.
接合の並列接続の分布をジョセフソンレギュレータの入
力端と出力端の方向に沿って変化させたことを特徴とす
るジョセフソンレギュレータ。2. 2. The Josephson regulator according to claim 1, wherein the distribution of the parallel connections of the Josephson junctions is varied along the direction of the input end and the output end of the Josephson regulator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60025246A JPS61187283A (en) | 1985-02-14 | 1985-02-14 | Josephson regulator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60025246A JPS61187283A (en) | 1985-02-14 | 1985-02-14 | Josephson regulator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61187283A true JPS61187283A (en) | 1986-08-20 |
| JPH038118B2 JPH038118B2 (en) | 1991-02-05 |
Family
ID=12160628
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60025246A Granted JPS61187283A (en) | 1985-02-14 | 1985-02-14 | Josephson regulator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61187283A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6059633B2 (en) | 2013-11-05 | 2017-01-11 | 本田技研工業株式会社 | Vehicle seat |
-
1985
- 1985-02-14 JP JP60025246A patent/JPS61187283A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH038118B2 (en) | 1991-02-05 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |