JPS604050A - High heat-resistant load member - Google Patents

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 〔発明の技術分野〕 本発明は熱伝導特性が良好で、且つ、高熱流速負荷下で
の熱応力、変形などの発生の少ないＣＬＩ−Ｍｏ合金複
合構造体で構成された耐高熱負荷部材に関する。[Detailed Description of the Invention] [Technical Field of the Invention] The present invention is composed of a CLI-Mo alloy composite structure that has good thermal conductivity and is less prone to thermal stress, deformation, etc. under high heat flow rate loads. The present invention relates to a high heat load resistant member.

〔発明の技術的背景とその問題点〕[Technical background of the invention and its problems]

高温で高熱流速負荷を受ける部品、たとえばプラズマ発
生装置の不純物除去板において、耐熱性あるいは耐スパ
ツタ性の観点から、直接高熱流速負荷を受ける表層部に
はＭｏ層が用いられる。一方、負荷されを熱を効果的に
冷却、除去するためには冷却部分にＣｕ　又はＣｕ合金
を使用する必要があシ、このためにＣｕ−Ｍｏの複合構
造体で構成された耐高熱負荷部材の使用が試られ、くい
だ。この際Ｃｕ層とＭｏ層との接合方法としては、ボル
ト締めなどの機械的な結合法か、あるいは銀ろう。In components that are subjected to high heat flux loads at high temperatures, such as impurity removal plates for plasma generators, from the viewpoint of heat resistance or spatter resistance, a Mo layer is used in the surface layer that is directly subjected to high heat flow velocity loads. On the other hand, in order to effectively cool and remove the heat under load, it is necessary to use Cu or a Cu alloy in the cooling part, and for this purpose high heat load resistant members made of a Cu-Mo composite structure are used. The use of was tried and failed. At this time, the Cu layer and the Mo layer can be joined by a mechanical joining method such as bolt tightening, or by silver soldering.

銅ろう付けなどの冶金的な接合法が知られている。Metallurgical joining methods such as copper brazing are known.

しかしながらＣｕ　とＭＯとは熱膨張係数が例えば温度
範囲２０℃〜６００℃の間でＣｕ　：　１４．７ｘｌＯ
。However, the thermal expansion coefficient of Cu and MO is, for example, 14.7xlO in the temperature range of 20°C to 600°C.
.

Ｍ　ｏ　：　５．４　Ｘ　１０′（単位ｄｅｇ−’　）
の如く大きな差があるため、Ｃｕ−Ｍｏの接合体では温
度変化により大きな熱応力が接合部に発生するという欠
点があった〇 また、この熱応力のために、通常温度をあげて行なわれ
る冶金的接合の形成自体が困難であつ九なお機械的な結
合法においては、結合部の形状。Mo: 5.4 x 10' (unit deg-')
Because of this large difference, Cu-Mo bonded bodies had the disadvantage that large thermal stress was generated in the bonded area due to temperature changes. Also, due to this thermal stress, metallurgy, which is usually carried out at elevated temperatures, However, in mechanical bonding methods, it is difficult to form a bond itself, and the shape of the bond.

間隔などの考慮によシ、熱膨張差を逃がし、熱応力の発
生をさけることが可能であるが、結合部における熱伝達
の効率は悪く、このため効果的な熱負荷の除去が困難で
あり、プラズマ発生装置において、プラズマディスラプ
ションなどの大きな入熱が生じた場合には表面温度が上
昇し、表面溶融などの破損を生ずる恐れがある。一方、
冶金的接合法を採用すれば、当初は熱の除去は有効に行
なわれるが、熱膨張差によシ熱応力が接合面に発生し、
特に間欠的な運転モードをとるトカマク型プラズマ発生
装置などにおいては、熱応力の変動およびプラズマから
の電磁力も重量され、特に強度の弱い接合部等に疲労ク
ラックを生ずるに至る。Although it is possible to release the difference in thermal expansion and avoid the generation of thermal stress by considering the spacing, etc., the efficiency of heat transfer at the joint is poor, making it difficult to effectively remove the heat load. In a plasma generating device, when a large heat input such as plasma disruption occurs, the surface temperature increases, and there is a possibility that damage such as surface melting may occur. on the other hand,
If a metallurgical bonding method is used, heat is initially removed effectively, but thermal stress is generated on the bonding surface due to the difference in thermal expansion.
Particularly in tokamak-type plasma generators that operate in an intermittent operation mode, fluctuations in thermal stress and electromagnetic force from the plasma are also significant, leading to fatigue cracks, especially in weak joints.

そしてこのクラック発生によυ熱伝達の効率は劣化し、
同様に表面温度の上昇によシ、最終的には表面溶融など
の損傷を生ずるという欠点があった〔発明の目的〕 本発明は以上の欠点の改良した、熱伝導が良好で、且つ
、熱応力発生の少ないＣｕ−Ｍｏ合金の複合構造体で構
成された耐高熱負荷部材を提供することを目的とする。Due to the occurrence of this crack, the efficiency of υ heat transfer deteriorates,
Similarly, there is a drawback that an increase in surface temperature ultimately causes damage such as surface melting.[Object of the Invention] The present invention aims to improve the above-mentioned drawbacks and to provide a heat conductive material with good heat conductivity. It is an object of the present invention to provide a high heat load resistant member made of a Cu-Mo alloy composite structure that generates less stress.

〔発明の概要〕 本発明の耐高熱負荷部材は第１図の複合構造体の断面図
に示される表層部がＭｏ層（１）、他端部がＣｕ層（４
）で構成され、その両者の中間層部分は、Ｍｏ層（１）
に近い側（２）でＭｏ含有量がＣｕ層（４）端部に近い
側（３）におけるＭｏ含有量よりも多い、いいかえれば
Ｍｏからなる表層部に近い側（２）からＣｕからなる他
端部に近い側（３）までのＭｏ含有比率が１００〜Ｏｗ
ｔ％まで変化したＣｕ−Ｍｏ合金層で構成されている。[Summary of the Invention] The high heat load resistant member of the present invention has a Mo layer (1) on the surface layer and a Cu layer (4) on the other end as shown in the cross-sectional view of the composite structure in FIG.
), and the intermediate layer between them is a Mo layer (1).
The Mo content on the side (2) near the Cu layer (4) is higher than the Mo content on the side (3) near the end of the Cu layer (4), in other words, from the side (2) near the surface layer made of Mo, Mo content ratio up to the side (3) near the end is 100~Ow
It is composed of a Cu-Mo alloy layer with a content of up to t%.

本発明に係る耐高熱負荷部材を構成するＣｕ　−Ｍ。Cu-M constituting the high heat load resistant member according to the present invention.

合金の複合構造体は複合構造体の中間部分をＭ。For alloy composite structures, the middle part of the composite structure is M.

およびＣｕの中間の熱膨張係数を有するＣｕ　−Ｍ。and Cu-M, which has a coefficient of thermal expansion intermediate to that of Cu.

合金層とし高熱負荷時の熱膨張係数差による熱応力発生
を小さくできること、また従来法によるＣｕとＭｏとの
接合面における熱伝達効率の劣化を防止できることを究
明してなされたものである。This was achieved after discovering that the alloy layer can reduce the generation of thermal stress due to the difference in thermal expansion coefficients during high heat loads, and that it can prevent the deterioration of heat transfer efficiency at the bonding surface between Cu and Mo, which is caused by conventional methods.

〔発明の実施例〕[Embodiments of the invention]

実施例１　平均粒径５μｍのＭｏ粉末を金型の下面に所
定の厚さｔｌだけ入れる。Example 1 Mo powder having an average particle size of 5 μm is put into the lower surface of a mold to a predetermined thickness tl.

次に、この上面に平均粒径２５μｍのＭｏ粉末を　１厚
さｔ！たけ入れる。さらにこのｔ２の上面に平均粒径５
０μｍのＭｏ粉末を厚さｔ、だけ入れ、１ｔｏｎ／ｃＪ
の圧力で成形、厚さ２０ｓ＋ａの板状圧粉体を成形した
。Next, Mo powder with an average particle size of 25 μm is coated on this top surface to a thickness of 1 t! Put it in. Furthermore, on the upper surface of this t2, an average grain size of 5
Add 0 μm Mo powder to a thickness of t, 1 ton/cJ
A plate-shaped green compact with a thickness of 20 s+a was formed at a pressure of .

ついで、板状圧粉体の平均径５μｍのＭｏ粉末側を１８
５０℃、他端を１３００℃に保ち、水素気流中にて５ｈ
ｒ　の焼結を行なった。焼結体をついで、カーボンるつ
は中に高温で焼結され密度の上った側（平均粒径５μｍ
のＭｏ粉末側）を下方にして設置し、為雰囲気中で１１
５０℃に昇温した後、カーボンるつぼ上部にＣｕ　を装
入溶融し、Ｍｏ焼結体中に含浸せしめた。Ｃｕ　は多め
に加え、圧粉焼結体の上部さらに２５■のＣｕ層を形成
せしめ、冷却固化させた。Next, the Mo powder side of the plate-shaped powder compact with an average diameter of 5 μm was
Keep the other end at 50℃ and 1300℃ for 5 hours in a hydrogen stream.
sintering of r. After the sintered body is placed, the carbon melt is sintered at high temperature to increase the density (average grain size 5 μm).
(Mo powder side) facing downward, and 11
After raising the temperature to 50° C., Cu was charged into the upper part of the carbon crucible and melted to impregnate it into the Mo sintered body. A large amount of Cu was added to form an additional 25 cm Cu layer on the top of the compacted sintered body, which was then cooled and solidified.

得られたＣＵを含浸させたＣｕ−Ｍｏ合金の複合構造体
は第２図に示されるように、Ｃｕ層（４）中に水冷用の
孔（５）をあけて、Ｃ（１−Ｍｏ合金の複合構造体で形
成された耐高熱負荷部材（６）とした。As shown in Fig. 2, the resulting composite structure of Cu-Mo alloy impregnated with CU is prepared by making holes (5) for water cooling in the Cu layer (4). A high heat load resistant member (6) was formed from a composite structure of.

なお、Ｃｕ−Ｍｏ合金の複合構造体のＭＯ焼結体部分に
おいて表層部である平均粒径５μｍのＭｏ粉末焼結体側
（２）、すなわち高温焼結側でのＭｏ含有量は重量％で
約９５％、低温焼結側（３）でのＭｏ含有比率は重量％
で約６０％であった。In addition, in the MO sintered body part of the Cu-Mo alloy composite structure, the Mo content on the surface layer side (2) of the Mo powder sintered body with an average grain size of 5 μm, that is, on the high temperature sintered side, is about % by weight. 95%, Mo content ratio on low temperature sintering side (3) is wt%
It was about 60%.

（比較例１）　厚１１０ｍ＋の粉末冶金法によシ製造し
たＭｏ層（１′）の片面に１０μｍの厚さにＣｕメッキ
（８）を行なった後、冷却水用円孔を設けた厚さ３０ｓ
ａｍのＣｕ層（４１）との間に厚さ２５μｍの銀ろう箔
（９）をおいて重ね、２＃／−の荷重のもとでＨ１気流
中で８５０℃に加熱、徐冷してＣｕ−Ｍｏ複合体で形成
された第３図に示す耐高熱負荷部材（ｌＣＪとした。(Comparative Example 1) One side of a Mo layer (1') manufactured by powder metallurgy with a thickness of 110 m+ was plated with Cu (8) to a thickness of 10 μm, and then a circular hole for cooling water was provided. 30s
A silver soldering foil (9) with a thickness of 25 μm is placed between the Cu layer (41) of am and the Cu layer (41) is stacked, heated to 850°C in H1 air flow under a load of 2#/-, and slowly cooled to form a Cu layer. A high heat load resistant member (1CJ) shown in FIG. 3 was formed of a -Mo composite.

以上の実施例１および比較例１の製法による耐高熱負荷
部材を冷却水を通しつつ、そのＭＯ表面に電子ビームに
よｐｓｏｏＷ／ｄの熱流束を６０秒加え、３０秒休止す
る加熱サイクル試駆を５０回行なった。A heating cycle trial run in which a heat flux of psooW/d was applied to the MO surface of the MO surface by an electron beam for 60 seconds, and then paused for 30 seconds, while cooling water was passed through the high heat load resistant member produced by the manufacturing methods of Example 1 and Comparative Example 1. was performed 50 times.

そして、加熱の６０秒終了時のＭＯ表面温度の測定およ
び加熱サイクル試験後の接合部のはがれや割れ等の発生
状況を観察した。Then, the MO surface temperature was measured at the end of 60 seconds of heating, and the occurrence of peeling, cracking, etc. at the joint after the heating cycle test was observed.

これらの試験結果を第１表に示す。The results of these tests are shown in Table 1.

以下ｆ、臼 第　１　表 以上のように本発明によるＣｕ−Ｍｏ合金の複合構造体
から成る本発明例の高耐熱負荷部材は良好な熱伝導度を
もち、また熱応力の発生が少ないため高耐熱負荷部材と
して用いるのに十分適している。As shown in Table 1, the high heat-resistant load member of the present invention, which is made of a composite structure of Cu-Mo alloy according to the present invention, has good thermal conductivity and generates little thermal stress, so it has high heat resistance. It is fully suitable for use as a heat-resistant load member.

〔発明の効果〕〔Effect of the invention〕

以上説明したようにＣｕ−Ｍｏ合金の複合構造体よシ成
る耐高熱負荷部材は、熱膨張係数の大きく異なるＭｏ　
とＣｕ　との間にその両者の中間の熱膨張係数を有する
Ｃｕ−Ｍｏ合金層を有するため、高熱負荷の繰返しにお
いても、接合部が無いため、接合部のはがれが起らず、
充分な除熱効果がある。As explained above, a high heat load resistant member made of a composite structure of Cu-Mo alloy is made of Mo
Since there is a Cu-Mo alloy layer with a thermal expansion coefficient between the two and Cu, there is no joint, even under repeated high heat loads, so the joint does not peel off.
Has sufficient heat removal effect.

さらに、本発明に係る耐高熱負荷部材は、Ｍｏ　とＣｕ
　との中間層のＣｕ−Ｍｏ合金の熱膨張係数が連続的に
変化するため高熱負荷の繰返しに伴なうＭＯとＣｕ　Ｏ
熱膨張係数の差から生ずる熱応力あるいは熱ひずみが小
さくなｐ、Ｍｏ表面の割れ発生を押さえることも可能と
なシ、工業上類る有用である。Furthermore, the high heat load resistant member according to the present invention includes Mo and Cu.
Due to the continuous change in the thermal expansion coefficient of the Cu-Mo alloy in the intermediate layer between MO and CuO,
It is also industrially useful because it is possible to suppress the occurrence of cracks on the surface of P and Mo, which have small thermal stress or thermal strain caused by the difference in thermal expansion coefficients.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本発明の耐高熱負荷部材の断面図、第２図は本
発明の耐高熱負荷部材の断面図、第３図は従来例の耐高
熱負荷部材の断面図、（１１、（１つはＭｏ　、　（２
）　、　（３１は組成の変化するＣｕ−Ｍｏ合金層、（
４１、（４’）はｃｕ　、　（６）　、　Ｑｌは耐高熱
負荷部材。 代理人　弁理士　則　近　憲　佑　（他１名））Fig. 1 is a sectional view of a high heat load resistant member of the present invention, Fig. 2 is a sectional view of a high heat load resistant member of the present invention, and Fig. 3 is a sectional view of a conventional high heat load resistant member. One is Mo, (2
), (31 is a Cu-Mo alloy layer whose composition changes, (
41, (4') is cu, (6), Ql is a high heat load resistant member. Agent: Patent attorney Kensuke Chika (and 1 other person)

Claims (1)

【特許請求の範囲】[Claims] Ｍｏ層とＣｕ層とが前記Ｍｏ層側からＣｕ層側までＭｏ
含有比率が重量％で１００〜０チまで変化したＣｕ−Ｍ
ｏ合金層を介して積層された複合構造体で構成されてい
ることを特徴とする高耐熱負荷部材。The Mo layer and the Cu layer are Mo layered from the Mo layer side to the Cu layer side.
Cu-M whose content ratio changed from 100 to 0% by weight
o A high heat-resistant load member comprising a composite structure laminated with an alloy layer interposed therebetween.