JPS603457U - Defect detection device - Google Patents
Defect detection deviceInfo
- Publication number
- JPS603457U JPS603457U JP9421983U JP9421983U JPS603457U JP S603457 U JPS603457 U JP S603457U JP 9421983 U JP9421983 U JP 9421983U JP 9421983 U JP9421983 U JP 9421983U JP S603457 U JPS603457 U JP S603457U
- Authority
- JP
- Japan
- Prior art keywords
- light
- detection device
- defect detection
- optical fiber
- end surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図aは、従来の欠点検出装置の構成図、第1図すは
、第1図aのAからみた光学繊維め光出射端面の説明端
面図、第1図Cは、第1図aのBからみた受光素子の受
光面の端面図、第2図aは、本考案の一実施例の構成図
、第2図すは、第2図aの受光素子により検知される光
量と時間のグラフである。
1・・・・・・走査光、2・・・・・・被検査材、3・
・・・・・光学繊維、4・・・・・・受光素子、7・・
・・・・光結合器。
第1図
第2図FIG. 1a is a block diagram of a conventional defect detection device, FIG. Figure 2a is an end view of the light-receiving surface of the light-receiving element as seen from B in Fig. It is a graph. 1... Scanning light, 2... Material to be inspected, 3.
...Optical fiber, 4... Light receiving element, 7...
...Optical coupler. Figure 1 Figure 2
Claims (1)
あるいは反射光を、光学繊維の一端面で受光し、該光学
繊維の他端面から出射した光を受光器で受光する前記被
検査材の欠点検出装置において、 前記光学繊維の他端面と前記受光器の受光面との間に、
光結合器を備え、該光結合器は、前記光学繊維の他端面
からの光を拡散均一化して、前記受光器の受光面に導く
ようにしたことを特徴とする欠点検出装置。[Claims for Utility Model Registration] Scanning light is irradiated onto a material to be inspected, the transmitted light or reflected light from the material to be inspected is received by one end surface of an optical fiber, and the light is emitted from the other end surface of the optical fiber. In the defect detection device for the inspected material that receives light with a light receiver, between the other end surface of the optical fiber and the light receiving surface of the light receiver,
A defect detection device comprising an optical coupler, the optical coupler diffusing and homogenizing the light from the other end surface of the optical fiber and guiding it to the light receiving surface of the light receiver.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9421983U JPS603457U (en) | 1983-06-21 | 1983-06-21 | Defect detection device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9421983U JPS603457U (en) | 1983-06-21 | 1983-06-21 | Defect detection device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS603457U true JPS603457U (en) | 1985-01-11 |
Family
ID=30225631
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9421983U Pending JPS603457U (en) | 1983-06-21 | 1983-06-21 | Defect detection device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS603457U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003502634A (en) * | 1999-06-10 | 2003-01-21 | アプライド マテリアルズ インコーポレイテッド | Optical inspection method and apparatus using variable angle design |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50151590A (en) * | 1974-05-27 | 1975-12-05 | ||
JPS5137684A (en) * | 1974-09-27 | 1976-03-30 | Yaskawa Denki Seisakusho Kk | KETSUKANKENSHUTSUSOCHI |
-
1983
- 1983-06-21 JP JP9421983U patent/JPS603457U/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50151590A (en) * | 1974-05-27 | 1975-12-05 | ||
JPS5137684A (en) * | 1974-09-27 | 1976-03-30 | Yaskawa Denki Seisakusho Kk | KETSUKANKENSHUTSUSOCHI |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003502634A (en) * | 1999-06-10 | 2003-01-21 | アプライド マテリアルズ インコーポレイテッド | Optical inspection method and apparatus using variable angle design |
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