JPS603457U - Defect detection device - Google Patents

Defect detection device

Info

Publication number
JPS603457U
JPS603457U JP9421983U JP9421983U JPS603457U JP S603457 U JPS603457 U JP S603457U JP 9421983 U JP9421983 U JP 9421983U JP 9421983 U JP9421983 U JP 9421983U JP S603457 U JPS603457 U JP S603457U
Authority
JP
Japan
Prior art keywords
light
detection device
defect detection
optical fiber
end surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9421983U
Other languages
Japanese (ja)
Inventor
隈井 文生
宮野 光男
Original Assignee
株式会社安川電機
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社安川電機 filed Critical 株式会社安川電機
Priority to JP9421983U priority Critical patent/JPS603457U/en
Publication of JPS603457U publication Critical patent/JPS603457U/en
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図aは、従来の欠点検出装置の構成図、第1図すは
、第1図aのAからみた光学繊維め光出射端面の説明端
面図、第1図Cは、第1図aのBからみた受光素子の受
光面の端面図、第2図aは、本考案の一実施例の構成図
、第2図すは、第2図aの受光素子により検知される光
量と時間のグラフである。 1・・・・・・走査光、2・・・・・・被検査材、3・
・・・・・光学繊維、4・・・・・・受光素子、7・・
・・・・光結合器。 第1図 第2図
FIG. 1a is a block diagram of a conventional defect detection device, FIG. Figure 2a is an end view of the light-receiving surface of the light-receiving element as seen from B in Fig. It is a graph. 1... Scanning light, 2... Material to be inspected, 3.
...Optical fiber, 4... Light receiving element, 7...
...Optical coupler. Figure 1 Figure 2

Claims (1)

【実用新案登録請求の範囲】 走査光を被検査材に照射し、この被検査材からの透過光
あるいは反射光を、光学繊維の一端面で受光し、該光学
繊維の他端面から出射した光を受光器で受光する前記被
検査材の欠点検出装置において、 前記光学繊維の他端面と前記受光器の受光面との間に、
光結合器を備え、該光結合器は、前記光学繊維の他端面
からの光を拡散均一化して、前記受光器の受光面に導く
ようにしたことを特徴とする欠点検出装置。
[Claims for Utility Model Registration] Scanning light is irradiated onto a material to be inspected, the transmitted light or reflected light from the material to be inspected is received by one end surface of an optical fiber, and the light is emitted from the other end surface of the optical fiber. In the defect detection device for the inspected material that receives light with a light receiver, between the other end surface of the optical fiber and the light receiving surface of the light receiver,
A defect detection device comprising an optical coupler, the optical coupler diffusing and homogenizing the light from the other end surface of the optical fiber and guiding it to the light receiving surface of the light receiver.
JP9421983U 1983-06-21 1983-06-21 Defect detection device Pending JPS603457U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9421983U JPS603457U (en) 1983-06-21 1983-06-21 Defect detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9421983U JPS603457U (en) 1983-06-21 1983-06-21 Defect detection device

Publications (1)

Publication Number Publication Date
JPS603457U true JPS603457U (en) 1985-01-11

Family

ID=30225631

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9421983U Pending JPS603457U (en) 1983-06-21 1983-06-21 Defect detection device

Country Status (1)

Country Link
JP (1) JPS603457U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003502634A (en) * 1999-06-10 2003-01-21 アプライド マテリアルズ インコーポレイテッド Optical inspection method and apparatus using variable angle design

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50151590A (en) * 1974-05-27 1975-12-05
JPS5137684A (en) * 1974-09-27 1976-03-30 Yaskawa Denki Seisakusho Kk KETSUKANKENSHUTSUSOCHI

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50151590A (en) * 1974-05-27 1975-12-05
JPS5137684A (en) * 1974-09-27 1976-03-30 Yaskawa Denki Seisakusho Kk KETSUKANKENSHUTSUSOCHI

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003502634A (en) * 1999-06-10 2003-01-21 アプライド マテリアルズ インコーポレイテッド Optical inspection method and apparatus using variable angle design

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