JPS5987610U - X-ray film thickness meter - Google Patents

X-ray film thickness meter

Info

Publication number
JPS5987610U
JPS5987610U JP18333282U JP18333282U JPS5987610U JP S5987610 U JPS5987610 U JP S5987610U JP 18333282 U JP18333282 U JP 18333282U JP 18333282 U JP18333282 U JP 18333282U JP S5987610 U JPS5987610 U JP S5987610U
Authority
JP
Japan
Prior art keywords
sample
light
film thickness
thickness meter
ray film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18333282U
Other languages
Japanese (ja)
Inventor
宏青 山中
Original Assignee
セイコーインスツルメンツ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by セイコーインスツルメンツ株式会社 filed Critical セイコーインスツルメンツ株式会社
Priority to JP18333282U priority Critical patent/JPS5987610U/en
Publication of JPS5987610U publication Critical patent/JPS5987610U/en
Pending legal-status Critical Current

Links

Landscapes

  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

図面は本考案に関わるＸ線膜厚計の構成を示す側面ブロ
ック図である。 １・・・・・・Ｘ線管、２・・・・・・コリメータ、３
・・−試ｎ、４・・・・・・試料台、５・・・・・・放
射線検出器、６・・・・・・試料位置検出用発光器、７
・・・・・・試料位置検出用受光器、８・・・・・・Ｃ
ＰＵ、　９・・・・・・モータードライバー、１゜・・
・・・・試料台駆動用モーター。The drawing is a side block diagram showing the configuration of an X-ray film thickness meter related to the present invention. 1...X-ray tube, 2...Collimator, 3
...-sample n, 4... sample stand, 5... radiation detector, 6... light emitter for sample position detection, 7
・・・・・・Receiver for sample position detection, 8・・・・・・C
PU, 9... Motor driver, 1°...
...Motor for driving the sample stage.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] Ｘ線管と、このＸ線管からのＸ線が照射される試料を載
置するための試料台と、前記試料からの螢光Ｘ線を検出
する放射線検出器とからなるものにおいて、前記照射Ｘ
線の軸を含む平面上で角度θをもってそれぞれ対称とな
る位置に設けられた兇光器および該発光器からの光を前
記試料を介した反射光として受光する受光器と、この受
光器からの検出信号を入力するＣＴ）Ｕと、このＣＰＵ
により駆動され前記試料台を上下動するモータとを備え
、前記受光器が試料からの反射光を検出したときに前記
モータを停止する構成としたことを特徴とするＸ線膜厚
計。An X-ray tube, a sample stage for placing a sample to be irradiated with X-rays from the X-ray tube, and a radiation detector for detecting fluorescent X-rays from the sample. X
A light receiver that receives light from the light emitter and the light emitter as reflected light via the sample, which are provided at symmetrical positions with an angle θ on a plane including the axis of the line; CT) U that inputs the detection signal and this CPU
an X-ray film thickness meter, comprising: a motor driven by a motor that moves the sample stage up and down, and the motor is configured to stop when the light receiver detects reflected light from the sample.
JP18333282U 1982-12-03 1982-12-03 X-ray film thickness meter Pending JPS5987610U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18333282U JPS5987610U (en) 1982-12-03 1982-12-03 X-ray film thickness meter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18333282U JPS5987610U (en) 1982-12-03 1982-12-03 X-ray film thickness meter

Publications (1)

Publication Number Publication Date
JPS5987610U true JPS5987610U (en) 1984-06-13

Family

ID=30396796

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18333282U Pending JPS5987610U (en) 1982-12-03 1982-12-03 X-ray film thickness meter

Country Status (1)

Country Link
JP (1) JPS5987610U (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5616806A (en) * 1979-07-20 1981-02-18 Hitachi Ltd Surface roughness measuring unit
JPS56128408A (en) * 1980-03-13 1981-10-07 Rigaku Denki Kogyo Kk X-ray thickness gauge

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5616806A (en) * 1979-07-20 1981-02-18 Hitachi Ltd Surface roughness measuring unit
JPS56128408A (en) * 1980-03-13 1981-10-07 Rigaku Denki Kogyo Kk X-ray thickness gauge

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