JPS5987610U - X-ray film thickness meter - Google Patents
X-ray film thickness meterInfo
- Publication number
- JPS5987610U JPS5987610U JP18333282U JP18333282U JPS5987610U JP S5987610 U JPS5987610 U JP S5987610U JP 18333282 U JP18333282 U JP 18333282U JP 18333282 U JP18333282 U JP 18333282U JP S5987610 U JPS5987610 U JP S5987610U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- light
- film thickness
- thickness meter
- ray film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
図面は本考案に関わるX線膜厚計の構成を示す側面ブロ
ック図である。
1・・・・・・X線管、2・・・・・・コリメータ、3
・・−試n、4・・・・・・試料台、5・・・・・・放
射線検出器、6・・・・・・試料位置検出用発光器、7
・・・・・・試料位置検出用受光器、8・・・・・・C
PU、 9・・・・・・モータードライバー、1゜・・
・・・・試料台駆動用モーター。The drawing is a side block diagram showing the configuration of an X-ray film thickness meter related to the present invention. 1...X-ray tube, 2...Collimator, 3
...-sample n, 4... sample stand, 5... radiation detector, 6... light emitter for sample position detection, 7
・・・・・・Receiver for sample position detection, 8・・・・・・C
PU, 9... Motor driver, 1°...
...Motor for driving the sample stage.
Claims (1)
置するための試料台と、前記試料からの螢光X線を検出
する放射線検出器とからなるものにおいて、前記照射X
線の軸を含む平面上で角度θをもってそれぞれ対称とな
る位置に設けられた兇光器および該発光器からの光を前
記試料を介した反射光として受光する受光器と、この受
光器からの検出信号を入力するCT)Uと、このCPU
により駆動され前記試料台を上下動するモータとを備え
、前記受光器が試料からの反射光を検出したときに前記
モータを停止する構成としたことを特徴とするX線膜厚
計。An X-ray tube, a sample stage for placing a sample to be irradiated with X-rays from the X-ray tube, and a radiation detector for detecting fluorescent X-rays from the sample. X
A light receiver that receives light from the light emitter and the light emitter as reflected light via the sample, which are provided at symmetrical positions with an angle θ on a plane including the axis of the line; CT) U that inputs the detection signal and this CPU
an X-ray film thickness meter, comprising: a motor driven by a motor that moves the sample stage up and down, and the motor is configured to stop when the light receiver detects reflected light from the sample.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18333282U JPS5987610U (en) | 1982-12-03 | 1982-12-03 | X-ray film thickness meter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18333282U JPS5987610U (en) | 1982-12-03 | 1982-12-03 | X-ray film thickness meter |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5987610U true JPS5987610U (en) | 1984-06-13 |
Family
ID=30396796
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18333282U Pending JPS5987610U (en) | 1982-12-03 | 1982-12-03 | X-ray film thickness meter |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5987610U (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5616806A (en) * | 1979-07-20 | 1981-02-18 | Hitachi Ltd | Surface roughness measuring unit |
JPS56128408A (en) * | 1980-03-13 | 1981-10-07 | Rigaku Denki Kogyo Kk | X-ray thickness gauge |
-
1982
- 1982-12-03 JP JP18333282U patent/JPS5987610U/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5616806A (en) * | 1979-07-20 | 1981-02-18 | Hitachi Ltd | Surface roughness measuring unit |
JPS56128408A (en) * | 1980-03-13 | 1981-10-07 | Rigaku Denki Kogyo Kk | X-ray thickness gauge |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5987610U (en) | X-ray film thickness meter | |
CN213933548U (en) | Defect detection device of in-vitro detection test paper | |
JPS58112909U (en) | X-ray film thickness device | |
CN219206982U (en) | Ox head rotation angle feedback device | |
CN219715237U (en) | Infrared light-emitting light path system for eliminating atmospheric absorption interference | |
JPS58112908U (en) | X-ray film thickness device | |
JPS5980709U (en) | Altitude angle measuring device | |
JPS58132810U (en) | optical position measuring device | |
JPS58115208U (en) | CT device | |
JPS59103260U (en) | Radiation applied measurement device | |
JPS6092507U (en) | mammography device | |
JPS60141583U (en) | gamma camera | |
JPS6132984U (en) | Radiation detector for ECT | |
JPS62115190U (en) | ||
JPS60154804U (en) | distance measuring device | |
JPS60102605U (en) | Light spot position measuring device | |
JPS59154602U (en) | Film thickness measuring device | |
JPS6134204U (en) | X-ray tomography device | |
JPS59172402U (en) | X-ray field adjustment mechanism of X-ray CT device | |
JPS6134409U (en) | distance measuring device | |
JPS5971107U (en) | Steel strip width measuring device | |
JPS6167549U (en) | ||
JPS58175418U (en) | Pointer position detection device | |
JPS598109U (en) | Plate thickness measuring device | |
JPS603458U (en) | Fluorescent X-ray intensity measurement system holder for EXAFS measurement |