JPS5616806A - Surface roughness measuring unit - Google Patents
Surface roughness measuring unitInfo
- Publication number
- JPS5616806A JPS5616806A JP9149679A JP9149679A JPS5616806A JP S5616806 A JPS5616806 A JP S5616806A JP 9149679 A JP9149679 A JP 9149679A JP 9149679 A JP9149679 A JP 9149679A JP S5616806 A JPS5616806 A JP S5616806A
- Authority
- JP
- Japan
- Prior art keywords
- onto
- array
- shaped detector
- reflection light
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Automatic Focus Adjustment (AREA)
Abstract
PURPOSE: To make it possible to measure minute ruggedness on the surface of an object without contact in a high speed with a high precision, by focusing the reflection light pattern for the projection pattern from the measured object onto an array- shaped detector.
CONSTITUTION: The white light from light source 1 through optical pattern 2 is projected onto the surface of measured object 4 in an optical pattern form and becomes a reflection light corresponding to the optical property of the surface and is focused onto array-shaped detector 60 and is picked up. Meanwhile, the radiant light of semiconductor laser 10 is irradiated onto object 4 from the oblique direction, and the reflection light is incident onto position sensor 62, and rough adjustment for defocusing can be performed by defocusing detection signal IP. Further, the detection signal dependent upon one one-dimensional scanning of array-shaped detector 60 is taken out into read circuit 6 and is processed by contrast detecting circuit 7, and focusing driving circuit 8 is driven to perform fine adjustment. Thus, the focusing operation is performed in a high speed, and high-precision measurement is possible.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9149679A JPS5616806A (en) | 1979-07-20 | 1979-07-20 | Surface roughness measuring unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9149679A JPS5616806A (en) | 1979-07-20 | 1979-07-20 | Surface roughness measuring unit |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5616806A true JPS5616806A (en) | 1981-02-18 |
JPS6243482B2 JPS6243482B2 (en) | 1987-09-14 |
Family
ID=14028015
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9149679A Granted JPS5616806A (en) | 1979-07-20 | 1979-07-20 | Surface roughness measuring unit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5616806A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57211506A (en) * | 1981-06-24 | 1982-12-25 | Hitachi Ltd | Non-contact type measuring device for shape of surface |
JPS5987610U (en) * | 1982-12-03 | 1984-06-13 | セイコーインスツルメンツ株式会社 | X-ray film thickness meter |
US4827301A (en) * | 1984-12-11 | 1989-05-02 | Minolta Camera Kabushiki Kaisha | Focus detection system and lighting device therefor |
JPH01191817A (en) * | 1988-01-28 | 1989-08-01 | Mitsutoyo Corp | Automatic focusing detection controller |
WO2002005005A1 (en) * | 2000-07-10 | 2002-01-17 | Zsp Geodätische Systeme Gmbh | Autofocussing method for telescopes pertaining to surveying equipment |
JP2007171710A (en) * | 2005-12-26 | 2007-07-05 | Hitachi Kokusai Electric Inc | Focusing apparatus |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50103366A (en) * | 1974-01-14 | 1975-08-15 |
-
1979
- 1979-07-20 JP JP9149679A patent/JPS5616806A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50103366A (en) * | 1974-01-14 | 1975-08-15 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57211506A (en) * | 1981-06-24 | 1982-12-25 | Hitachi Ltd | Non-contact type measuring device for shape of surface |
JPS5987610U (en) * | 1982-12-03 | 1984-06-13 | セイコーインスツルメンツ株式会社 | X-ray film thickness meter |
US4827301A (en) * | 1984-12-11 | 1989-05-02 | Minolta Camera Kabushiki Kaisha | Focus detection system and lighting device therefor |
JPH01191817A (en) * | 1988-01-28 | 1989-08-01 | Mitsutoyo Corp | Automatic focusing detection controller |
WO2002005005A1 (en) * | 2000-07-10 | 2002-01-17 | Zsp Geodätische Systeme Gmbh | Autofocussing method for telescopes pertaining to surveying equipment |
US6927376B2 (en) | 2000-07-10 | 2005-08-09 | Trimble Jena Gmbh | Autofocusing method for telescopes pertaining to surveying equipment |
JP2007171710A (en) * | 2005-12-26 | 2007-07-05 | Hitachi Kokusai Electric Inc | Focusing apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPS6243482B2 (en) | 1987-09-14 |
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