JPS598143A - Production of magnetic recording medium - Google Patents

Abstract

PURPOSE:To make the composition of a magnetic thin film uniform, by depositing a steam current, which is obtained by heating and evaporating an alloy consisting essentially of Co or Fe, and a steam current, which is obtained by heating and evaporating a non-subliming alloy including Cr, to a nonmagnetic supporting material. CONSTITUTION:A Co evaporating source 4 of metallic Co or an alloy consisting essentially of Co and a Cr evaporating source 5 of a non-subliming alloy consisting essentially of Cr which are stored in cases 3 and 3 of high-fusing point materials which are arranged under a nonmagnetic supporting material 2 supported and guided by a cylindrical can 1 in a casing kept in a vacuum are heated and fused by an electron beam 6, and a steam current 7 consisting essentially of Co and a steam current 8 consisting essentially of Cr which are discharged from these evaporating sources are allowed to go to the supporting material 2 through a mask 9 simultaneously, and a Co-Cr vertical magnetized film is formed. The non-subliming alloy including Cr does not show sublimation as metallic Cr and is fused, and only Cr is evaporated and is deposited to the supporting material together with the steam of Co.

Description

【発明の詳細な説明】 本発明は真空蒸着又はイオンブレーティングによる所謂
、非塗布型の磁気記録媒体の製造方法に関する。、特に
本発明はＣｏ−０ｒ系又はＦｅ−Ｏｒ系合金薄膜層を有
する磁気記録媒体の製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method of manufacturing a so-called non-coated magnetic recording medium by vacuum deposition or ion blating. In particular, the present invention relates to a method of manufacturing a magnetic recording medium having a Co-Or-based or Fe-Or-based alloy thin film layer.

従来の磁気記録媒体の多くは、一般に塗布型と称されて
いるものに属し、通常、非磁性支持体上に、１−Ｆｅ２
Ｏ３＋　Ｃｏ　　をドープしたγ−Ｆｅ２Ｏ３゜Ｆｅ３
Ｏ４＋　　Ｃｏ　　をドープしたＦｅ３Ｏ４，１−Ｆｅ
２Ｏ３とＦｅ３Ｏ４のベルトライド化合物、Ｃｏ　をド
ープしたベルトライド化合物、（！ｒ０２　等の酸化物
磁性粉末あるいはＦｅ、　Ｎｉ、　　Ｃｏ等を主成分と
する合金磁性粉末等から成る磁性体粉末：を塩化ビニル
酢酸ビニル共重合体、スチレンブタジェン共重合体、エ
ポキシ樹脂、ポリウレタン樹脂等の有機バインダー中に
分散して成る塗液を塗着、乾燥して磁性膜を形成する製
造方法及び装置によって生産されたものである。Most conventional magnetic recording media belong to what is generally called a coated type, and are usually coated with 1-Fe2 on a non-magnetic support.
γ-Fe2O3°Fe3 doped with O3+ Co
Fe3O4,1-Fe doped with O4+ Co
Magnetic powder consisting of 2O3 and Fe3O4 bertolide compounds, Co-doped bertolide compounds, oxide magnetic powders such as (!r02), or alloy magnetic powders whose main components are Fe, Ni, Co, etc. Produced using a manufacturing method and device that involves applying a coating liquid dispersed in an organic binder such as vinyl acetate copolymer, styrene-butadiene copolymer, epoxy resin, or polyurethane resin, and drying it to form a magnetic film. It is something.

近年、記録すべき情報量の増加に伴い、高密度記録に適
する磁気記録媒体の実用化が一層強く望まれるに至り、
前述したバインダーゝ゛を使用せずに、ｘ空蒸ｓ、スパ
ッタリング、イオンブレーティング、等の方法により強
磁性金属薄膜を前記支持体上に形成した、所謂、非塗布
型磁気記録媒体が着目され、その開発、研究の推進に伴
って、実用化のための諸提案がなされつつある。Ｊ 非塗布型磁気記録体の強磁性金属薄膜の材料としてはＤ
ｏ−Ｃ！ｒ系合金及びＦｅ−Ｃｒ系合金が主として用い
られ、！持にＣｏ−Ｃｒ系合金は最近、高密度記録の点
で注目され始めている垂直磁化型磁気配録媒体の材料と
して用いられている。In recent years, as the amount of information to be recorded has increased, there has been a strong desire to put magnetic recording media suitable for high-density recording into practical use.
Attention has been focused on so-called non-coating type magnetic recording media in which a ferromagnetic metal thin film is formed on the support by methods such as air vaporization, sputtering, and ion blating without using the binder described above. As development and research progresses, various proposals for practical application are being made. J The material for the ferromagnetic metal thin film of the non-coated magnetic recording medium is D.
O-C! R-based alloys and Fe-Cr-based alloys are mainly used. In particular, Co--Cr alloys have recently been used as materials for perpendicular magnetization type magnetic recording media, which have begun to attract attention in terms of high-density recording.

この上うなＣｏ−０ｒ系又はＦｅ−Ｃｒ系の磁性合金薄
膜層の形成は、Ｃｏ−Ｃｒ系合金又はＦｅ−Ｃｒ系合金
を蒸発源とするか、ＣＯ及びＯｒがＦｅ及びＯｒを蒸発
源としく２元共蒸着）、上記の真空蒸着、スパッタリン
グ又はイオンブレーティング等によって行っている。In addition, the formation of a Co-0r-based or Fe-Cr-based magnetic alloy thin film layer can be performed by using a Co-Cr-based alloy or a Fe-Cr-based alloy as an evaporation source, or by using CO and Or as an evaporation source and using Fe and Or as an evaporation source. This is carried out by the above-mentioned vacuum evaporation, sputtering, ion blating, etc.

上記の中でスパッタリング法によるときは形成される磁
性合金薄膜の組成がほぼ一定しているが、膜形成速度が
小であシ、真空蒸着法やイオンブレーティング法による
ときは膜形成速度は大であるが、以下に述べるように形
成される膜の組成ずれが大となる欠点がある。Among the above methods, when using the sputtering method, the composition of the formed magnetic alloy thin film is almost constant, but the film formation rate is slow, and when using the vacuum evaporation method or ion blating method, the film formation speed is high. However, as described below, there is a drawback that the composition of the formed film is largely inconsistent.

すなわち、真空蒸着やイオンブレーティングに熱方式に
よって加熱、蒸発させるのであるが、この場合、例えば
Ｃｏ−Ｃｒ系合金Ｎ膜を形成するのにＣｏ−Ｃｒ合金を
蒸発源に用いると、ｃｏに較べてＯｒの蒸発速度が早い
ので、形成される金ｐＡ薄膜の組成が次第に変化してく
る。従って、このような系で組成を一定に保つには、適
量のＯｒを常時補給する等の面倒な操作を必要とする。In other words, heating and evaporation are performed using a thermal method in vacuum evaporation or ion blating, but in this case, for example, if a Co-Cr alloy is used as an evaporation source to form a Co-Cr based alloy N film, it is less expensive than co. Since the evaporation rate of Or is fast, the composition of the formed gold pA thin film gradually changes. Therefore, in order to maintain a constant composition in such a system, troublesome operations such as constantly replenishing an appropriate amount of Or are required.

また、ｃｏ　とＣｒ　　を別々の蒸発源として用いる場
合（２元共蒸着）にはＣｏは融解して蒸発するがｃｒは
昇華性を示し、蒸着中に蒸発面の形状が変化し、Ｏｒの
蒸着速度が変り、形成される金属膜のｃｏとＯｒの組成
が変ってくる。上記の問題はＦｅ−ｃｒ系蒸着膜を形成
する場合にも全く同様である。In addition, when co and Cr are used as separate evaporation sources (binary co-evaporation), Co melts and evaporates, but Cr exhibits sublimation, and the shape of the evaporation surface changes during evaporation, causing Or to evaporate. As the speed changes, the composition of Co and Or of the metal film that is formed changes. The above problem is exactly the same when forming a Fe-Cr based vapor deposited film.

従って、Ｃｏ−Ｃ！ｒ系及びＦｅ−Ｃｒ系磁性合金薄膜
を安定した組成で且つ大きい膜形成速度で形成できる方
式が要望されている。Therefore, Co-C! There is a need for a method that can form r-based and Fe-Cr-based magnetic alloy thin films with stable compositions and at a high film formation rate.

本発明の目的は、従って、膜形成速度が大きい真空蒸着
法又はイオンブレーティング法にょシ、安定した組成で
Ｃｏ−０ｒ系又はＦｅ”Ｃｒ系の磁性合金台Ｈ・戸を形
成できる磁気記録媒体の製造方法を提供することにある
。Therefore, an object of the present invention is to provide a magnetic recording medium that can form a Co-0r-based or Fe"Cr-based magnetic alloy base with a stable composition using a vacuum evaporation method or an ion-blating method that has a high film formation rate. The purpose of this invention is to provide a method for manufacturing the same.

本発明の他の目的は安定した組成のＣｏ−０ｒ系又はＦ
ｅ−Ｃｒ系磁性合金薄膜を２元共蒸着によシ形成する磁
気記録媒体の製造方法全提供することにある。Another object of the present invention is to provide a stable composition of Co-Or system or F
An object of the present invention is to provide an entire method for manufacturing a magnetic recording medium in which an e-Cr magnetic alloy thin film is formed by binary co-evaporation.

本発明者らは種々検討の結果、真空蒸着又幻、イオンブ
レーテインク゛によシ２２元共蒸によってＣｏ−０ｒ系
又はＦｅ−０ｒ系蒸着膜を形成するに際し、蒸発源とし
てＯｒの代シにＯｒを含む非昇華性合金を用いることに
より上記目的を達成できることを見出し、本発明を完成
した。１ すなわち、本発明はＣＯ又はＦＯを主成分とする金属又
は今金相料を加熱蒸発して得られるＣＯ又はＦｅを主成
分とする蒸気流と、Ｏｒを含む非昇華性合金を加熱蒸発
させて得られるＯｒを主成分とする蒸気流を同時に非磁
性支持体に向けることによシ支持体にＣｏ−０ｒ系又は
Ｆｅ−Ｃｒ系合金薄膜を形成することを特徴とする磁気
記録媒体の製造方法である。As a result of various studies, the present inventors found that when forming Co-0r-based or Fe-0r-based deposited films by 22-element co-evaporation using vacuum evaporation or ion-blast ink, we decided to use Or as an evaporation source instead of Or. The present invention was completed based on the discovery that the above object can be achieved by using a non-sublimable alloy containing Or. 1 That is, the present invention uses a vapor flow mainly composed of CO or Fe obtained by heating and evaporating a metal containing CO or FO as a main component or a metal phase charge, and a non-sublimable alloy containing Or. Production of a magnetic recording medium characterized by forming a Co-Or-based or Fe-Cr-based alloy thin film on a non-magnetic support by simultaneously directing a vapor flow mainly composed of Or obtained by It's a method.

、以下、本発明を詳述する。, the present invention will be described in detail below.

本発明の２元共蒸着法は、真空蒸着及びイオンブレーテ
ィング何れにも適用でき、従って大きい膜形成速度が確
保できる。又斜蒸着は勿論Ｃｏ−０ｒ系の場合には垂直
磁化膜の形成も適用することができる。The binary co-evaporation method of the present invention can be applied to both vacuum deposition and ion blating, and therefore a high film formation rate can be ensured. In addition, not only oblique vapor deposition but also formation of a perpendicular magnetization film can be applied in the case of a Co-0r type material.

本発明に用いられる非磁性支持体としては、ポリエチレ
ンテレフタレート、ポリイミド、ポリアミド、ポリ塩化
ビニル、三酢酸セルロース、ポリカーボネート、ポリエ
チレンナフタレート等の如きプラスチックベースが好ま
しいが、Ａ　ｔ　＋　　Ｏｕ　＋ＳＵＳ等の如き非磁性
金属やガラス、セラミックス等の無機質の基体も使用で
きる。The non-magnetic support used in the present invention is preferably a plastic base such as polyethylene terephthalate, polyimide, polyamide, polyvinyl chloride, cellulose triacetate, polycarbonate, polyethylene naphthalate, etc. Inorganic substrates such as magnetic metals, glass, and ceramics can also be used.

本発明で用いられるｃｏ蒸発源としては、Ｃ。The co evaporation source used in the present invention is C.

金属または、Ｃｏ　　を主成分としたＣｏ−Ｎｉ　、　
　０ｏ−Ｃｕ　、　　Ｃｏ−Ｙ　、　　Ｃｏ−Ｌａ　、
　　Ｃｏ−Ｇｄ等の合金が用いられる。又Ｆｅ蒸発源と
しては、Ｆｅ金属または、Ｆｅ　を主成分としたＦｅ−
Ｎｉ　、　　Ｆｅ−０ｕ　、　　Ｆｅ−Ｒｈ等の合金が
用いられる。Metal or Co-Ni whose main component is Co,
0o-Cu, Co-Y, Co-La,
An alloy such as Co-Gd is used. In addition, as the Fe evaporation source, Fe metal or Fe-based material mainly composed of Fe is used.
Alloys such as Ni, Fe-0u, Fe-Rh, etc. are used.

本発明Ｃｒ蒸発源としてはＯｒを主体として含む非昇華
性合金が用いられ、具体的にはＣｒ−Ｗ。As the Cr evaporation source of the present invention, a non-sublimable alloy containing Or as a main ingredient is used, specifically Cr-W.

０ｒ−Ｔａ　　、　　Ｏｒ−Ｍｏ　　、　　０ｒ−Ｎｂ
　　、　　Ｃｒ−Ｔｈ　、　　０ｒ−Ｚｒ　　＊０ｒ−
Ｉｒ　、　０ｒ−Ｐｔ　、　０ｒ−Ｖ　、　Ｃｒ−Ｔｉ
　、　０ｒ−Ｃ等の如き合金があり、特に０ｒ−Ｗ　、
　　０ｒ−Ｔａ　、　　Ｃｒ　−Ｔａ　、　　Ｏｒ−Ｍ
ｏ　、　　Ｃｒ−Ｎｂ　、及び０ｒ−Ｔｈ　が好ましい
。0r-Ta, Or-Mo, 0r-Nb
, Cr-Th, 0r-Zr *0r-
Ir, 0r-Pt, 0r-V, Cr-Ti
, 0r-C, etc., especially 0r-W,
0r-Ta, Cr-Ta, Or-M
o, Cr-Nb, and Or-Th are preferred.

これらのＯｒ金合金真空蒸着又はイオンブレーティング
の蒸発源として用いる場合にはＣｒ金属の如き昇華性を
示さず融解し、Ｏｒ　のみが蒸発し、他の蒸発源からの
ｃｏ又はＦｅ　の蒸気と共に支持体に蒸着しＣｏ−Ｃｒ
系又はＦｅ−Ｃｔｒ系の合金尚膜を形成する。When these Or gold alloys are used as evaporation sources for vacuum evaporation or ion blating, they do not exhibit sublimation properties like Cr metals and melt, and only Or evaporates, supporting them together with Co or Fe vapor from other evaporation sources. Co-Cr deposited on the body
or Fe-Ctr alloy film is formed.

本発明によるときは、上記の如く真空蒸着又はイオンブ
レーティングによってＣｏ−０ｒ系又はＦｅ−Ｏｒ　系
磁性合金薄膜層を有する磁気記録媒体を製造するに際し
、Ｏｒ蒸発源として前記の如きＯｒを主体とする非昇華
性合金を用いているので、加熱時に昇華することなく融
解し、Ｏｒが蒸発するので蒸着中、に蒸発面が変ること
なく、Ｃｒの蒸発速度はほぼ一定であるので、支持体上
にＣｏ−０ｒ系又ｉｊ　Ｆｅ−Ｃｒ系の合金薄膜を安定
した組成で形成することができる、３ 第１図は、本発明を真空蒸着に応用し、Ｃ０−０ｒ系垂
直磁化膜層を形成する場合の説明図であって、１０−’
　〜１０−”　Ｔｏｒｒ程度の真空に保たれたケーシン
グ（図示せず）内で円筒状キャン１に支持案内される非
磁性支持体２の下方に配設された高融点材料のハース６
．３に収められたｃｏ金金属はＣＯを主体とする合金か
らなるＣＯ蒸発源４と前記の如きＯｒ　を主体とする非
昇華性合金からなるＯｒ蒸発源５を電子ビーム６によυ
加熱融解し、これから放出されるｃｏを主体とする蒸気
流７及びＣｒを主体とする蒸気流８を同時にマスク９を
通って支持体２に垂直に向かわせ、Ｃｏ−０ｒ系垂直磁
化層を形成させる。この場合マス７９と支持体１との間
に磁場の方向が支持体と垂直になるように磁場を印加す
ることもできる。According to the present invention, when producing a magnetic recording medium having a Co-Or-based or Fe-Or-based magnetic alloy thin film layer by vacuum evaporation or ion blating as described above, the above-mentioned Or is mainly used as an Or evaporation source. Since a non-sublimable alloy is used, it melts without subliming when heated, and since Or evaporates, the evaporation surface does not change during the evaporation, and the evaporation rate of Cr is almost constant, so it melts without sublimating on the support. It is possible to form a Co-0r based or ij Fe-Cr based alloy thin film with a stable composition.3 Figure 1 shows the application of the present invention to vacuum evaporation to form a Co-0r based perpendicularly magnetized film layer. 10-'
A hearth 6 made of a high melting point material is disposed below a non-magnetic support 2 that is supported and guided by a cylindrical can 1 in a casing (not shown) maintained at a vacuum of about 10-” Torr.
．． The co-gold metal contained in 3 is evaporated by an electron beam 6 into a CO evaporation source 4 made of an alloy mainly composed of CO and an Or evaporation source 5 made of a non-sublimable alloy mainly composed of Or as described above.
A vapor flow 7 mainly composed of Co and a vapor flow 8 mainly composed of Cr released by heating and melting are simultaneously directed perpendicularly to the support 2 through a mask 9 to form a Co-0r perpendicular magnetization layer. let In this case, a magnetic field can also be applied between the mass 79 and the support 1 such that the direction of the magnetic field is perpendicular to the support.

第２図は本発明を真空蒸着に適用してＣｏ−０ｒ系又は
Ｆｅ−０ｒ系の斜蒸着薄膜を形成する場合の説明図であ
って、第１図の場合と同様高真空に保たれたケーシング
内のクーリングキャン１１に案内される非磁性支持体１
２の下方に配設されたハース１３．１３内のＣｏ又はＦ
ｅ　を主体とする蒸発源１４及びＯｒを主体とする非昇
化性合金よりなる蒸発源１５を電子ビーム１６．１６に
よって夫々加熱、融解し、放出された両金属を主体とす
る蒸気１７．１８を所定の斜めの角度を持って支持体に
向かわせ、これにＣｏ−０ｒ系又はＦｅ−０ｒ系の蒸着
層を形成させる。なお、１９はクリーニングキャン１１
の下方において、支持体１１の下方面に蒸気流１７．１
８が規定外の角度で蒸着しないように設けられたマスク
である。FIG. 2 is an explanatory diagram of the case where the present invention is applied to vacuum evaporation to form a Co-0r-based or Fe-0r-based oblique evaporation thin film, and the same high vacuum as in the case of FIG. 1 is maintained. Non-magnetic support 1 guided by cooling can 11 inside the casing
Co or F in the hearth 13.13 located below 2
An evaporation source 14 mainly composed of e and an evaporation source 15 made of a non-elevation alloy mainly composed of Or are respectively heated and melted by an electron beam 16.16, and a vapor 17.18 mainly composed of both metals is released. is directed toward the support at a predetermined oblique angle, and a Co-Or type or Fe-0r type vapor deposited layer is formed thereon. In addition, 19 is cleaning can 11
17.1 below the lower surface of the support 11
8 is a mask provided to prevent vapor deposition at an angle other than the specified one.

以上、本発明を真空蒸着に適用する場合について説明し
たが、本発明“□は同様にイオンブレーティングにも適
用可能である、。Although the present invention has been described above in the case where it is applied to vacuum evaporation, the present invention "□" can be similarly applied to ion blating.

以下、本発明を実施例について説明する。Hereinafter, the present invention will be explained with reference to examples.

実施例１ ２５μ厚のポリアミドフィルムを支持体とし、第１図に
示す真空蒸着系により、３　Ｘ　１０−’　Ｔｏｒｒの
真空度、Ｏｏ金金属（！ｏＷ　（７０：　３０　）合金
を夫々蒸発源とし、ｘｏｏｏＸ厚のＣｏ−０ｒ垂直磁化
膜を約２０００　Ａ　／　ＢｅＣの早さで９０−の支持
体に形成した。得られた垂直磁化膜の（！ｏ−Ｏｒ　（
８０：２０）の組成比のずれは最初と最後で±２チ内に
収めることができ、良好な垂直磁化膜が得られた。Example 1 A polyamide film with a thickness of 25 μm was used as a support, and a vacuum evaporation system shown in FIG. A Co-0r perpendicularly magnetized film with a thickness of
The difference in composition ratio (80:20) between the beginning and the end could be kept within ±2 inches, and a good perpendicular magnetization film was obtained.

実施例２ ２５μ厚のポリエチレンテレフタレート（ＰＥＴ　）を
支持体として用い、第２図の真空蒸着糸を用い、３　Ｘ
　１０−’　Ｔｏｒｒの真空度で、Ｆｅ金属と、ＯｒＭ
。Example 2 Using polyethylene terephthalate (PET) with a thickness of 25μ as a support and using the vacuum-deposited thread shown in FIG.
At a vacuum level of 10-' Torr, Fe metal and OrM
.

（８０：２０）合金を夫々蒸発源とし、入射角７０°で
厚さ２００ｏ″Ａの斜蒸着膜を１ｏｏｏＸ／　ｓｅｃの
早さで形成した。１５０＝の支持体にこのようなＦｅＯ
ｒ　（ｑ　ｓ　：　ｓ　）の蒸着膜を形成したところ、
組成比のずれを最初と最後で±３％以内に収め、良好な
斜蒸着膜を形成することができた。(80:20) alloys were used as evaporation sources, and an obliquely deposited film with a thickness of 200°A was formed at a rate of 1oooX/sec at an incident angle of 70°.
When a vapor deposited film of r (qs : s) was formed,
The difference in composition ratio between the beginning and the end was kept within ±3%, and a good obliquely deposited film could be formed.

実施例６ ＣＯ蒸発源として０ｏＮｉ　　（８０：２０）、Ｏｒ蒸
発源として０ｒＴａ　　（８０：２０）を用い、入射角
を６０°とした以外は実施例２と同様な斜蒸着を行い、
２０００ＯＡ厚のＣｏ）Ｉｉ−Ｏｒ　　（９０：１０）
の斜蒸着膜を形成した０、支持体１０ｇＬにこのよう々
膜を形成したところ、組成比のずれ±２チ内で良好な斜
蒸着膜が借られ／ｊ。Example 6 Oblique evaporation was performed in the same manner as in Example 2, except that 0oNi (80:20) was used as the CO evaporation source and 0rTa (80:20) was used as the Or evaporation source, and the incident angle was set to 60°.
2000OA thickness Co)Ii-Or (90:10)
When a film was formed in this manner on 10 gL of support, a good oblique vapor deposition film was obtained within ±2 inches of deviation in composition ratio.

比較例 Ｃｒ蒸発源としてＯｒ金金属用い実施例１と同様な真空
蒸着によって垂直磁化膜を形成した。このような膜を支
持体１０．に形成したところ、最初と最後のＣｏ−０ｒ
の組成比のずれは６０％にも及び、垂直磁気異方性を示
した膜は１０情中わずかに約２ｍに過ぎなかった。Comparative Example A perpendicularly magnetized film was formed by vacuum evaporation in the same manner as in Example 1 using Or gold metal as a Cr evaporation source. Such a membrane is used as a support 10. When formed, the first and last Co-0r
The deviation in the composition ratio was as much as 60%, and the length of the film that showed perpendicular magnetic anisotropy was only about 2 m out of 10.

【図面の簡単な説明】[Brief explanation of drawings]

第１図は真空蒸着によシＣｏ−０ｒ系垂直磁化膜を形成
する説明図、第２図は＾空蒸着によりＣｏ−０ｒ系又は
Ｆｅ−Ｏｒ系斜蒸着膜を形成する説明図である。 １・・・キャン、　　　　　２・−支持体４＠一会ＣＯ
蒸発源、　　　５・拳・Ｃｒ蒸発源７・・・Ｃｏ蒸気流
、　　　８・・・Ｏｒ蒸気流９・ｅ・マスク、　　　　
　１１−・・クーリングキャン１２・・・支持体、　　
　　１４・・・ＣＯ又はＦｅ蒸発源１５１１ｅｅＣｒ蒸
発□源、　　　　１７　ｏ＠＠Ｃｏ又はＦｅ蒸気流１８
・＠１１Ｃｒ蒸気流、　　　１９−−−マスク代理人　
弁理士（８１０７）　　佐々木　清　隆（ほか３名） 手続補ｉ１Ｅ書 昭ｒｌｌ　５７　＋ｉ　　Ｊ’　１１　ｘｉ−ｒ＋昭「
ｌｌ　５７’１４”Ｊｆｌ’ｌ（・ｌｉ第１１６８６１
　１；２　発明の名称 磁気記録媒体の製造法 ３７商にをする名 巾Ｉ’］、！：　ｏ）関係’　持ｉｔ’Ｆｆ：１．１１
７ｆ１人名称　（５２０）富士写亘フィルム株式会社霞
が関ヒル内郵便局　私Ｐ１箱第４９８８、補ｉｆ−の内
容 ２）０明ｉｑｌ　ｉｌ第４　ｊ４１１行目」、［形状が
変化し、１を］−肘状がψ、ニイ１．シ易く、弔了二つ
で−１と７１１ｉ　Ｆ　−１−る、１ ０　凹　ｉ、　４ピコ１２１斤目、　１・・・がメ゛す
」を（−・・・７１″ｔ、・ふ二巾力し、」とイ山１１
モする。 Ｑ　同　第４頁１３行目　　ｒ組１ｊ３ｊが忍−ってく
る。」を「組成変動が生ずる。」と補正する。 ０　回　第５頁下から４行目、「非磁性支持体」ケ「支
持体」と袖ＩＦする。 Ｏ同　εず一６頁７行目、［−非磁性支持体」欠「支持
体」と補正する。 ０　回　第６頁１３イ１目、「°匣用できる。」の後に
１また支持体としＣ＆：１．、上ｒ記の非磁性支持体上
に磁性層を設りたものでもよい。」を加入“ｒる。 ０　同　第６頁最干イ）、［一本発明」ｔ′１一本発明
の」と補正する。 ０　同　第７ｊ４１行１＝Ｉ　〜５イｊ目、［Ｃｒ−Ｗ
。 Ｃｒ−Ｔａ、　Ｃｒ−Ｍｏ、　Ｃｒ−Ｎｂ　、Ｃｒ　−
Ｔｈ　、　Ｃｒ−Ｚｒ。 Ｃｒ−Ｉ　ｒ　、　Ｃ：　ｒ　−１）ｔ　ｒ　ｔ−ｒ　
−Ｖ　１　（−ｒ　−’［’　Ｉ＋　Ｃｒ　−（−’専
の如き４１全があり、特にｔ：：ｒ−’ＩＶ、　Ｃｒ−
Ｔａ　。 Ｃｒ−Ｔａ　、Ｃｒ−Ｍｏ　、Ｃｒ−Ｎｂ　、及びＣｒ
　−’１．’ｈ　Ｊ　Ｙｒ’　Ｃｒ−Ｗ〒：、Ｃｒ−Ｔ
Ａ系＋　Ｃｒ　Ｍｏ系＊　Ｃｒ−Ｎ’ｂ系。 Ｃｒ−Ｔｈ系、Ｃｒ−７，ｒ系、Ｃｒ−１ｒ糸、Ｃｒ−
Ｐｔ系。 Ｃｒ−Ｖ系、Ｃｒ−Ｔｌ系＋Ｃｒ−Ｃ系等の如き台金が
あり、特にＣｒ−Ｗ系、Ｃｒ−Ｔａ系、ｅｒ−Ｔａ系。 Ｃｒ−Ｍｏ系、Ｃｒ−Ｎｂ系、及びＣｒ−Ｔｈ系」と補
正する。 ０　同　第７頁６行目、「い。」の後に「また必要ＶＣ
応じて、他の元素乞添加してもよい。」を加入する。 ０　同　第７頁１行目、「用いられ、」欠「用いられる
。Ｃｒを含む非ケ１華性合金としては、Ｃｒの蒸渚温度
領域において、Ｃｒに比べて、蒸気圧の１１−い少くと
も１糧の元素とＣｒから構成され、上記元素の添加によ
り、Ｃｒが昇華性から融解性に変化するものが望ましい
。 好まり、＜は、Ｃｒの蒸府温度領域において、Ｃｒに比
べて１／１０μ下特に好ましくは１　／　１００以下の
蒸気圧を有する元素から成る合金系が望ましい。」と補
正する。 Ｏ同　第７頁９行目、１−Ｃｒのみが一１５寸主として
ＣｒがＪと補ｉＥする。 ０　同　第８頁下から６行目、「マス７９」不・「マス
ク９」と補正する。 ・・　同　第９頁４行目、「非昇化＋／１」ケ「非昇華
性」と補正する。 以　　上 ２、特許請求の範囲 １）Ｃｏ又−１Ｆｅケ主成分とする金属又に１−合金月
料を加熱蒸発して得られるＣｏ又ｉｊ：　Ｆ　ｅを主Ｉ
ｉｙ分とする蒸気流と、Ｃｒケ沈む非昇華性合金を加熱
蒸発させて得られるＣｒ’、？主成分とする蒸気流ケ同
時に支持体に向けることにより支持体にＣｏ−Ｃｒ系又
はＦｅ−Ｃｒ系合金薄膜を形成すること化特徴とする磁
気記録媒体の製造方法。 ２）Ｃｒ’Ｙ含む非昇華性合金がＣｒ−Ｗ糸、Ｃｒ−Ｔ
ａ系。 記載の磁気記録媒体の製造方法。FIG. 1 is an explanatory diagram of forming a Co-Or system perpendicularly magnetized film by vacuum evaporation, and FIG. 2 is an explanatory diagram of forming a Co-Or system or Fe-Or system obliquely evaporated film by vacuum evaporation. 1...Can, 2.-Support 4@Ichie CO
Evaporation source, 5. Fist, Cr evaporation source 7... Co vapor flow, 8... Or vapor flow 9. e. mask,
11-... Cooling can 12... Support body,
14...CO or Fe evaporation source 1511eeCr evaporation □ source, 17 o@@Co or Fe vapor flow 18
・@11Cr vapor flow, 19---Mask agent
Patent Attorney (8107) Kiyotaka Sasaki (and 3 others) Procedure Supplement i1E Sho rll 57 +i J' 11 xi-r+Aki
ll 57'14"Jfl'l(・li No. 116861
1;2 Title of the invention Method for manufacturing magnetic recording media 37 Famous products I'],! : o) Relation'It'Ff: 1.11
7f1 Person Name (520) Fuji Photo Film Co., Ltd. Kasumigaseki Hill Post Office I P1 Box No. 4988, Supplementary if- Contents 2) 0 light iql il 4th j411th line", [shape changes, 1] - elbow shape is ψ, knee 1. It is easy to write, and the two words -1 and 711i F -1-, 10 concave i, 4 pico 121st loaf, 1... is main'' are (-...71''t,... ``Strong two swaths,'' said Isan 11.
Mo. Q Same page 4 line 13 Group r 1j3j sneaks in. " is corrected to "compositional fluctuation occurs." 0 times Page 5, 4th line from the bottom, "Non-magnetic support" is written as "Support" in the sleeve IF. O ditto, page 6, line 7, [-nonmagnetic support] is corrected to ``support''. 0 No. 6, page 13, item 1, ``Can be used as a box'' followed by 1 again as a support C&:1. , a magnetic layer may be provided on the nonmagnetic support described above. 0 same, page 6, bottom a), and amend it to read "one invention"t'1 one invention. 0 Same 7j 41st line 1=I ~ 5th j, [Cr-W
. Cr-Ta, Cr-Mo, Cr-Nb, Cr-
Th, Cr-Zr. Cr-I r, C: r -1) t r t-r
-V 1 (-r -'[' I+ Cr -(-'There are 41 such as exclusive, especially t::r-'IV, Cr-
Ta. Cr-Ta, Cr-Mo, Cr-Nb, and Cr
-'1. 'h J Yr' Cr-W〒:, Cr-T
A system + Cr Mo system * Cr-N'b system. Cr-Th series, Cr-7,r series, Cr-1r yarn, Cr-
Pt-based. There are base metals such as Cr-V series, Cr-Tl series + Cr-C series, etc., especially Cr-W series, Cr-Ta series, and er-Ta series. Cr-Mo system, Cr-Nb system, and Cr-Th system". 0 Same page 7, line 6, after “I.” “I also need VC.”
Other elements may be added as required. ” to join. 0 Same page 7, line 1, "used," omitted "used." As a non-ferrous alloy containing Cr, it has a vapor pressure of 11- It is desirable that the material is composed of at least one element and Cr, and that Cr changes from sublimation to melting property by adding the above element. An alloy system consisting of an element having a vapor pressure of 1/10μ or less, particularly 1/100 or less is desirable.” O same page 7 line 9, only 1-Cr is 115 dimensions, and Cr complements J and iE. 0 Same page 8th line, 6th line from the bottom, correct "Mask 9" to "Mask 9". ... On page 9, line 4, "non-sublimation +/1" is corrected to "non-sublimation". Above 2, Claims 1) Co or ij obtained by heating and evaporating a metal or 1-alloy containing Fe as the main component:
Cr' obtained by heating and vaporizing a non-sublimable alloy in which Cr precipitates with a vapor flow of iy minutes, ? A method for producing a magnetic recording medium, characterized in that a Co--Cr or Fe--Cr alloy thin film is formed on a support by simultaneously directing a stream of vapor as a main component toward the support. 2) Non-sublimable alloy containing Cr'Y is Cr-W yarn, Cr-T
A system. A method of manufacturing the magnetic recording medium described above.

Claims (1)

【特許請求の範囲】 １）　　Ｃｏ又はＦｅを主成分とする金属又は合金材料
を加熱蒸発して得られるＣＯ又はＦｅを主成分とする蒸
気流と、Ｏｒ　　を含む非昇華性合金を加熱蒸発させて
得られるＯｒを主成分とする蒸気流を同時に非磁性支持
体に向けることによシ支持体に０ｏ−Ｏｒ　系又はＦｅ
−０ｒ系合金薄膜を形成することを特徴とする磁気記録
媒体の製造方法。 ２）　　Ｏｒ　を含む非昇華性合金が０ｒ−Ｗ　、　　
０ｒ−Ｔａ　。 Ｏｒ−Ｍｏ　　、　　　０ｒ−Ｔｈ　　、　　０ｒ−Ｉ
Ｊｂ　、　　　０ｒ−Ｔｈ　　、　　０ｒ−Ｚｒ　　。 Ｏｒ−■ｒ　、　０ｒ−Ｐｔ　、　Ｏｒ−■ｒ　、　（
！ｒ−Ｖ　、　０ｒ−Ｔｉ又はＣ！ｒ−０である特ｆｒ
’ＮＷ求の範囲第（１）項に記載の磁気記録媒体の製造
方法。[Claims] 1) A vapor flow mainly composed of CO or Fe obtained by heating and evaporating a metal or alloy material mainly composed of Co or Fe, and a non-sublimable alloy containing Or. By simultaneously directing the vapor flow mainly composed of Or obtained by
A method for manufacturing a magnetic recording medium, comprising forming a -0r alloy thin film. 2) The non-sublimable alloy containing Or is 0r-W,
0r-Ta. Or-Mo, 0r-Th, 0r-I
Jb, 0r-Th, 0r-Zr. Or-■r, 0r-Pt, Or-■r, (
! r-V, 0r-Ti or C! The special fr which is r-0
'A method for manufacturing a magnetic recording medium according to item (1) of NW requirements.