JPH06101029A - Production of magnetic recording medium - Google Patents
Production of magnetic recording mediumInfo
- Publication number
- JPH06101029A JPH06101029A JP24934392A JP24934392A JPH06101029A JP H06101029 A JPH06101029 A JP H06101029A JP 24934392 A JP24934392 A JP 24934392A JP 24934392 A JP24934392 A JP 24934392A JP H06101029 A JPH06101029 A JP H06101029A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- recording medium
- magnetic recording
- crucible
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- Physical Vapour Deposition (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、磁気記録媒体の製造装
置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic recording medium manufacturing apparatus.
【０００２】[0002]
【発明の背景】磁気テープ等の磁気記録媒体において
は、高密度記録化の要請から、非磁性支持体上に設けら
れる磁性層として、バインダ樹脂を用いた塗布型のもの
ではなく、バインダ樹脂を用いない金属薄膜型のものが
提案されていることは周知の通りである。BACKGROUND OF THE INVENTION In a magnetic recording medium such as a magnetic tape, due to a demand for high density recording, a binder resin is not used as a magnetic layer provided on a non-magnetic support, instead of a coating type using a binder resin. It is well known that a metal thin film type that is not used has been proposed.
【０００３】すなわち、無電解メッキといった湿式メッ
キ手段、真空蒸着、スパッタリングあるいはイオンプレ
ーティングといった乾式メッキ手段により磁性層を構成
した磁気記録媒体が提案されている。そして、この種の
磁気記録媒体は磁性体の充填密度が高いことから、高密
度記録に適したものである。特に、蒸着手段により磁性
膜を構成する手段は、スパッタリングによる場合よりも
成膜速度が速いことから好ましいものと言われている。That is, there has been proposed a magnetic recording medium having a magnetic layer formed by a wet plating means such as electroless plating, or a dry plating means such as vacuum deposition, sputtering or ion plating. Since the magnetic recording medium of this type has a high packing density of magnetic material, it is suitable for high-density recording. In particular, means for forming a magnetic film by vapor deposition means is said to be preferable because the film formation rate is faster than that by sputtering.
【０００４】このような蒸着手段による磁気記録媒体の
製造装置は、図４のように構成されているものが一般的
である。尚、図４中、２１は冷却キャン、２２はポリエ
チレンテレフタレート（ＰＥＴ）フィルムの供給側ロー
ル、２３はＰＥＴフィルムの巻取側ロール、２４は遮蔽
板、２５はルツボ、２６は磁性合金、２７は電子銃、２
８は真空容器である。すなわち、真空容器２８内を所定
の真空度のものに排気した後、電子銃２７を作動させて
ルツボ２５内の磁性合金２６を蒸発させ、ＰＥＴフィル
ムに対して磁性合金２６を堆積（蒸着）させることによ
って磁気記録媒体が製造されている。A magnetic recording medium manufacturing apparatus using such a vapor deposition means is generally constructed as shown in FIG. In FIG. 4, 21 is a cooling can, 22 is a polyethylene terephthalate (PET) film supply side roll, 23 is a PET film winding side roll, 24 is a shield plate, 25 is a crucible, 26 is a magnetic alloy, and 27 is Electron gun, 2
8 is a vacuum container. That is, after the vacuum container 28 is evacuated to a predetermined vacuum degree, the electron gun 27 is operated to evaporate the magnetic alloy 26 in the crucible 25 and deposit (evaporate) the magnetic alloy 26 on the PET film. Thus, the magnetic recording medium is manufactured.
【０００５】ところで、このようにして磁気記録媒体が
製造されるにつれて、ルツボ２５内の磁性合金２６は蒸
発して減少して行くから、連続製造するにはルツボ２５
内に磁性合金２６を徐々に供給していかねばならない。
すなわち、このようなことに鑑み、従来より、ルツボ２
５内に磁性合金２６を徐々に供給する技術思想が提案
（特開昭５９−７７６３２号公報、特開昭５９−９２４
４０号公報、特開昭５９−９２４４１号公報）されてい
る。By the way, since the magnetic alloy 26 in the crucible 25 evaporates and decreases as the magnetic recording medium is manufactured in this way, the crucible 25 can be continuously manufactured.
The magnetic alloy 26 must be gradually supplied in the inside.
That is, in view of such a situation, the crucible 2 has been conventionally used.
A technical idea of gradually supplying the magnetic alloy 26 into the No. 5 is proposed (JP-A-59-77632 and JP-A-59-924).
40, JP-A-59-92441).
【０００６】これらの提案はそれなりに特長を有したも
のではあるが、充分なものではなかった。すなわち、ル
ツボ２５内に磁性合金２６が徐々に供給されて行くので
あるが、蒸着した磁性膜の特性にバラツキが認められ、
満足できないものであった。Although these proposals have some features, they have not been sufficient. That is, the magnetic alloy 26 is gradually supplied into the crucible 25, but variations in the characteristics of the evaporated magnetic film are recognized,
It was unsatisfactory.
【０００７】[0007]
【発明の開示】前記の問題点に対する研究が鋭意押し進
められて行った結果、蒸着した磁性膜の特性にバラツキ
が認められた位置は磁性金属の供給時点に対応している
ことが究明されるに至り、この点について更なる研究が
進められた結果、磁性金属のペレットがルツボに投入さ
れると、これによって一時的にではあるが温度が低下
し、蒸発現象に乱れが起きたこと、又、ペレットの投入
によって蒸発液面に小波が立ち、これに起因しての蒸発
現象に乱れが起きたことによるものと推定されるに至っ
た。DISCLOSURE OF THE INVENTION As a result of intensive research on the above-mentioned problems, it was revealed that the position where the characteristics of the vapor-deposited magnetic film were found to correspond to the time when the magnetic metal was supplied. As a result of further research on this point, when pellets of magnetic metal were put into the crucible, the temperature temporarily dropped, which disturbed the evaporation phenomenon. It was presumed that a small wave was generated on the surface of the evaporating liquid due to the injection of the pellet, and the evaporation phenomenon was disturbed due to this.
【０００８】このような知見に基づいて本発明が達成さ
れたものであり、本発明の目的は、バラツキの少ない磁
性膜を効率良く形成する技術を提供することにある。こ
の本発明の目的は、容器に入れられた磁性材料を蒸発さ
せ、基体に堆積させることにより磁性膜を構成する磁気
記録媒体の製造装置であって、前記容器は磁性材料蒸発
開口部と磁性材料供給開口部とが連通部を介してつなが
った構成であることを特徴とする磁気記録媒体の製造装
置によって達成される。The present invention has been achieved on the basis of such knowledge, and an object of the present invention is to provide a technique for efficiently forming a magnetic film with less variation. An object of the present invention is an apparatus for producing a magnetic recording medium that forms a magnetic film by evaporating a magnetic material contained in a container and depositing the magnetic material on a substrate, wherein the container comprises a magnetic material evaporation opening and a magnetic material. This is achieved by an apparatus for manufacturing a magnetic recording medium, which has a structure in which the supply opening is connected via a communication section.
【０００９】尚、上記の磁気記録媒体の製造装置におい
て、容器には予備加熱機構が磁性材料供給開口部から連
通部にかけて設けられていることが好ましいものであ
る。以下、本発明について更に詳しく説明する。図１は
磁気記録媒体の製造装置（蒸着装置）であり、１は冷却
キャン、２はＰＥＴフィルム等の基板１１の供給側ロー
ル、３はＰＥＴフィルム１１の巻取側ロール、４は遮蔽
板、５はルツボ、６はＣｏ−Ｎｉなどの磁性金属、７は
電子銃、８は真空容器である。In the above magnetic recording medium manufacturing apparatus, it is preferable that the container is provided with a preheating mechanism from the magnetic material supply opening to the communicating portion. Hereinafter, the present invention will be described in more detail. FIG. 1 shows a magnetic recording medium manufacturing apparatus (vapor deposition apparatus), 1 is a cooling can, 2 is a supply side roll of a substrate 11 such as a PET film, 3 is a winding side roll of the PET film 11, 4 is a shielding plate, Reference numeral 5 is a crucible, 6 is a magnetic metal such as Co—Ni, 7 is an electron gun, and 8 is a vacuum container.
【００１０】ところで、ルツボ５は、例えばＭｇＯ，Ｚ
ｒＯ，ＢｅＯ，Ａｌ2 Ｏ3 ，Ｓｉ3Ｎ4 ，ＢＮ，ＴｈＯ
2 ，ＣａＯ，ＳｉＯ2 等のセラミックス材料を用いて所
定の形状に成形した内型と外型との間に炭素系繊維材
料、特に炭素系繊維布を配設し、加圧・加熱・焼成する
ことにより構成されたものであり、その形状として図２
に示される如く連通タイプの形状、すなわち磁性金属が
蒸発して行く開口部５ａと磁性金属のペレットが供給さ
れて来る開口部５ｂとが形成されており、双方の空間が
連通孔５ｃを介してつながったものとなっている。By the way, the crucible 5 is made of, for example, MgO, Z.
rO, BeO, Al 2 O 3 , Si 3 N 4 , BN, ThO
A carbon fiber material, especially a carbon fiber cloth, is placed between an inner mold and an outer mold, which are molded into a predetermined shape using a ceramic material such as 2 , CaO, or SiO 2 , and pressure, heating, and firing are performed. It is configured by the above, and its shape is shown in FIG.
As shown in FIG. 3, a communication type shape is formed, that is, an opening 5a through which magnetic metal evaporates and an opening 5b into which pellets of magnetic metal are supplied are formed, and both spaces are connected through a communication hole 5c. It is connected.
【００１１】連通孔５ｃから開口部５ｂの部分における
ルツボ５には誘導加熱コイル９ａ，９ｂが配設されてお
り、これによって開口部５ｂから供給されて来た磁性金
属のペレットが予備加熱され、開口部５ａ側に移動して
行く間に徐々に蒸発温度に近付くようになっている。１
０は、磁性金属ペレットを開口部５ｂからルツボ５内に
供給する供給機構である。Induction heating coils 9a and 9b are provided in the crucible 5 in the portion from the communication hole 5c to the opening 5b, whereby the magnetic metal pellets supplied from the opening 5b are preheated. It gradually approaches the evaporation temperature while moving to the opening 5a side. 1
Reference numeral 0 is a supply mechanism for supplying the magnetic metal pellets into the crucible 5 through the opening 5b.
【００１２】上記のように構成させた装置において、真
空容器８内を所定の真空度のものに排気した後、電子銃
７を作動させてルツボ５内の磁性金属６を蒸発させ、Ｐ
ＥＴフィルム等の基板１１に対して磁性金属６を斜め蒸
着させることによって磁気記録媒体が製造される。とこ
ろで、蒸着（蒸発）の進行につれてルツボ５内の磁性金
属６は減少して行くのであるが、これにつれて磁性金属
６のペレットが供給され、開口部５ａにおける液面面積
や液面高さが一定のものとなるようになっている。か
つ、この供給に際して、蒸発部にペレットを直接供給す
るのではなく、別の部分に供給し、徐々に加熱・溶融
し、この状態のものを蒸発部に補充するようにしたか
ら、蒸発部における溶融磁性金属の変動が起き難く、蒸
発現象に乱れが起きず、蒸着によって構成された磁性膜
の特性に変動が極めて少ないものであった。In the apparatus configured as described above, after the vacuum container 8 is evacuated to a predetermined vacuum degree, the electron gun 7 is operated to evaporate the magnetic metal 6 in the crucible 5,
A magnetic recording medium is manufactured by obliquely depositing the magnetic metal 6 on the substrate 11 such as an ET film. By the way, as the vapor deposition (evaporation) progresses, the magnetic metal 6 in the crucible 5 decreases, but along with this, the pellets of the magnetic metal 6 are supplied, and the liquid surface area and the liquid height in the opening 5a become constant. It is supposed to be one of. Moreover, at the time of this supply, the pellets are not directly supplied to the evaporation part, but are supplied to another part and gradually heated and melted so that the evaporation part is replenished in this state. It was difficult for the molten magnetic metal to fluctuate, the evaporation phenomenon was not disturbed, and the characteristics of the magnetic film formed by vapor deposition had very little fluctuation.
【００１３】このようにして得られる磁気記録媒体の概
略断面図を図３に示す。同図中、１１は非磁性の基板で
あり、この基板１１はＰＥＴ等のポリエステル、ポリア
ミド、ポリイミド、ポリスルフォン、ポリカーボネー
ト、ポリプロピレン等のオレフィン系の樹脂、セルロー
ス系の樹脂、塩化ビニル系の樹脂といった高分子材料、
ガラスやセラミック等の無機系材料、アルミニウム合金
などの金属材料が用いられる。FIG. 3 is a schematic sectional view of the magnetic recording medium thus obtained. In the figure, 11 is a non-magnetic substrate, and this substrate 11 is made of polyester such as PET, polyamide, polyimide, polysulfone, polycarbonate, olefin resin such as polypropylene, cellulose resin, vinyl chloride resin, etc. Polymeric materials,
Inorganic materials such as glass and ceramics, and metal materials such as aluminum alloys are used.
【００１４】基板１１面上には磁性層の密着性を向上さ
せる為のアンダーコート層１２が設けられている。すな
わち、表面の粗さを適度に粗すことにより斜め蒸着法に
より構成される磁性層の密着性を向上させ、さらに磁気
記録媒体表面の表面粗さを適度なものとして走行性を改
善する為、例えばＳｉＯ2 等の粒子を含有させた厚さが
０．０１〜０．５μｍの塗膜を設けることによってアン
ダーコート層１２が構成されている。An undercoat layer 12 for improving the adhesion of the magnetic layer is provided on the surface of the substrate 11. That is, to improve the adhesion of the magnetic layer formed by the oblique vapor deposition method by appropriately roughening the surface roughness, and further to improve the runnability by making the surface roughness of the magnetic recording medium surface moderate. For example, the undercoat layer 12 is formed by providing a coating film containing particles such as SiO 2 and having a thickness of 0.01 to 0.5 μm.
【００１５】アンダーコート層１２の上に、上記した蒸
着装置により金属薄膜型の磁性層１３が設けられる。例
えば、１０-4〜１０-6Ｔｏｒｒ程度の真空雰囲気下で強
磁性金属材料を抵抗加熱、高周波加熱、電子ビーム加熱
などにより蒸発させ、基板１１のアンダーコート層１２
面上に蒸着させることにより、磁性層１３が０．０４〜
１μｍ厚形成される。尚、より高い保磁力を得る為、基
板に対して強磁性金属材料を斜めに蒸着させる斜め蒸着
法によることが好ましい。A metal thin film type magnetic layer 13 is provided on the undercoat layer 12 by the vapor deposition apparatus described above. For example, the ferromagnetic metal material is evaporated by resistance heating, high frequency heating, electron beam heating or the like in a vacuum atmosphere of about 10 −4 to 10 −6 Torr, and the undercoat layer 12 of the substrate 11 is evaporated.
The magnetic layer 13 has a thickness of 0.04 to
It is formed with a thickness of 1 μm. In order to obtain a higher coercive force, it is preferable to use the oblique vapor deposition method in which the ferromagnetic metal material is obliquely vapor-deposited on the substrate.
【００１６】磁性層１３を構成する材料としては、例え
ばＦｅ，Ｃｏ，Ｎｉ等の金属の他に、Ｃｏ−Ｎｉ合金、
Ｃｏ−Ｐｔ合金、Ｃｏ−Ｎｉ−Ｐｔ合金、Ｆｅ−Ｃｏ合
金、Ｆｅ−Ｎｉ合金、Ｆｅ−Ｃｏ−Ｎｉ合金、Ｆｅ−Ｃ
ｏ−Ｂ合金、Ｃｏ−Ｎｉ−Ｆｅ−Ｂ合金、Ｃｏ−Ｃｒ合
金、あるいはこれらにＡｌ等の金属を含有させたもの等
が挙げられる。As a material for forming the magnetic layer 13, for example, in addition to metals such as Fe, Co and Ni, a Co--Ni alloy,
Co-Pt alloy, Co-Ni-Pt alloy, Fe-Co alloy, Fe-Ni alloy, Fe-Co-Ni alloy, Fe-C
Examples thereof include o-B alloys, Co-Ni-Fe-B alloys, Co-Cr alloys, and alloys containing a metal such as Al.
【００１７】磁性層１３の形成に際して、蒸着部分に酸
素を供給し、強制酸化させることによって磁性層１３の
表層部分を酸化させ、酸化膜による保護層１４を形成す
る。尚、この酸化膜から構成される保護層１４の厚さは
数十Å程度のものであり、この程度の厚さの酸化膜は自
然酸化で構成される場合もあり、このような時には強制
酸化の手段を講じなくても良い場合がある。At the time of forming the magnetic layer 13, oxygen is supplied to the vapor deposition portion and is forcedly oxidized to oxidize the surface layer portion of the magnetic layer 13 to form a protective layer 14 made of an oxide film. The thickness of the protective layer 14 composed of this oxide film is about several tens of liters, and an oxide film of this thickness may be composed of natural oxidation. It may not be necessary to take the measures of.
【００１８】１５は酸化膜からなる保護層１４の上に設
けられた潤滑剤層である。すなわち、潤滑剤層１５が、
潤滑剤を含有させた塗料を所定の手段で塗布することに
より、約５〜５０Å、好ましくは約１０〜３０Å程度の
厚さ設けられる。１６は、基板１１の他面に設けられた
カーボンブラック等を含有させたバックコート層であ
る。Reference numeral 15 is a lubricant layer provided on the protective layer 14 made of an oxide film. That is, the lubricant layer 15 is
By applying a coating material containing a lubricant by a predetermined means, a thickness of about 5 to 50Å, preferably about 10 to 30Å is provided. Reference numeral 16 is a back coat layer provided on the other surface of the substrate 11 and containing carbon black or the like.
【００１９】以下、具体的な実施例を挙げて説明する。A specific example will be described below.
【００２０】[0020]
〔実施例１〕図１に示される如くの真空蒸着装置に厚さ
９．３μｍのＰＥＴフィルム１１を装着した。そして、
真空容器８内を所定の真空度のものに排気した後、電子
銃７を作動させてルツボ５内の磁性金属（Ｃｏ−Ｎｉ磁
性合金）６を蒸発させ、斜め蒸着法によりＰＥＴフィル
ム１１に対して磁性金属６を１５００Å厚蒸着させた。
そして、酸素ガス導入管より酸素を供給し、蒸着膜の表
面層を強制酸化させ、数十Å厚の酸化膜による表面保護
層を形成した。Example 1 A PET film 11 having a thickness of 9.3 μm was mounted on the vacuum vapor deposition apparatus as shown in FIG. And
After evacuating the vacuum container 8 to a predetermined vacuum degree, the electron gun 7 is operated to evaporate the magnetic metal (Co-Ni magnetic alloy) 6 in the crucible 5 and to the PET film 11 by the oblique vapor deposition method. Magnetic metal 6 was deposited to a thickness of 1500 Å.
Then, oxygen was supplied from an oxygen gas introduction pipe to forcibly oxidize the surface layer of the vapor deposition film to form a surface protective layer of an oxide film having a thickness of several tens of liters.
【００２１】この後、テープを取り出し、平均粒径２０
ｎｍのカーボンブラック及び塩化ビニル系樹脂とウレタ
ンプレポリマーとからなるバインダ樹脂を分散させてな
るバックコート用の塗料をダイレクトグラビア法により
磁性層とは反対側のＰＥＴフィルム１１に塗布し、乾燥
厚さが０．５μｍのバックコート層を設けた。この後、
フッ素パーフルオロポリエーテル（グレード：ＦＯＭＢ
ＬＩＮ ＺＤＩＡＣ カルボキシル基変性、日本モンテ
ジソン社製）をフッ素不活性液体（フロリナート、ＦＣ
−８４、住友スリーエム社製）に０．１％となるよう希
釈・分散させた塗料をダイ塗工方式により乾燥後の厚さ
が２０Å程度となるように塗布し、７０℃で乾燥させ
た。Then, the tape was taken out and the average particle size was 20
nm carbon black and a back coat coating composition in which a binder resin composed of a vinyl chloride resin and a urethane prepolymer are dispersed are applied to the PET film 11 on the side opposite to the magnetic layer by a direct gravure method, and the dry thickness is applied. Was provided with a back coat layer having a thickness of 0.5 μm. After this,
Fluorine perfluoropolyether (grade: FOMB
LIN ZDIAC Carboxyl group modified, manufactured by Nippon Montedison Co., Ltd. is a fluorine-inert liquid (Fluorinert, FC
-84, manufactured by Sumitomo 3M Co., Ltd.) was coated with a coating composition diluted and dispersed so as to have a concentration of 0.1% by a die coating method so that the thickness after drying would be about 20Å, and dried at 70 ° C.
【００２２】この後、所定の幅にスリットし、図３に示
す如くの磁気テープを作製した。上記の工程において、
磁性金属の蒸発につれてペレット供給機構で磁性金属を
開口部５ｂからルツボ５内に供給し、この際誘導加熱コ
イル９ａによって１４００℃程度に、誘導加熱コイル９
ｂによって１６００℃程度に加熱しているから、ペレッ
ト供給時に開口部５ａ面（蒸発面）には温度変動が起き
ても極めて小さいものであり、しかもペレット供給によ
る外力が緩和・吸収され、開口部５ａ面に小波は立って
おらず、蒸発特性に変動が認められなかった。After that, a slit was formed into a predetermined width to produce a magnetic tape as shown in FIG. In the above process,
As the magnetic metal evaporates, the pellet supplying mechanism supplies the magnetic metal into the crucible 5 through the opening 5b. At this time, the induction heating coil 9a heats the induction metal to about 1400 ° C.
Since it is heated to about 1600 ° C. by b, even if the temperature of the opening 5a surface (evaporation surface) fluctuates during pellet feeding, it is extremely small, and the external force due to pellet feeding is absorbed and absorbed, No wavelets were formed on the 5a surface, and no change was observed in the evaporation characteristics.
【００２３】そして、成膜された磁気テープの磁気特性
に変動が殆ど認められず、均一で高性能な磁気記録媒体
を効率良く製造出来たのである。The magnetic characteristics of the formed magnetic tape showed almost no change, and a uniform and high-performance magnetic recording medium could be efficiently manufactured.
【００２４】[0024]
【効果】本発明によれば、低コストで高性能な磁気記録
媒体を効率良く提供できる。According to the present invention, it is possible to efficiently provide a high-performance magnetic recording medium at low cost.
【図１】本発明になる磁気記録媒体の製造装置の一実施
例の概略説明図FIG. 1 is a schematic explanatory view of an embodiment of an apparatus for manufacturing a magnetic recording medium according to the present invention.
【図２】本発明になる磁気記録媒体の製造装置の要部部
品の断面図FIG. 2 is a sectional view of essential parts of a magnetic recording medium manufacturing apparatus according to the present invention.
【図３】本発明による磁気記録媒体の概略断面図FIG. 3 is a schematic sectional view of a magnetic recording medium according to the present invention.
【図４】従来の磁気記録媒体の製造装置の概略説明図FIG. 4 is a schematic explanatory view of a conventional magnetic recording medium manufacturing apparatus.
１ 冷却キャン ２ 供給側ロール ３ 巻取側ロール ４ 遮蔽板 ５ ルツボ ５ａ 開口部（蒸発部） ５ｂ 開口部（供給部） ５ｃ 連通孔 ６ 磁性金属 ７ 電子銃 ８ 真空容器 ９ａ，９ｂ 誘導加熱コイル １０ ペレット供給機構 DESCRIPTION OF SYMBOLS 1 Cooling can 2 Supply side roll 3 Winding side roll 4 Shielding plate 5 Crucible 5a Opening part (evaporating part) 5b Opening part (supplying part) 5c Communication hole 6 Magnetic metal 7 Electron gun 8 Vacuum container 9a, 9b Induction heating coil 10 Pellet supply mechanism
Claims (2)
基体に堆積させることにより磁性膜を構成する磁気記録
媒体の製造装置であって、前記容器は磁性材料蒸発開口
部と磁性材料供給開口部とが連通部を介してつながった
構成であることを特徴とする磁気記録媒体の製造装置。1. Evaporating the magnetic material contained in a container,
A device for manufacturing a magnetic recording medium that forms a magnetic film by depositing on a substrate, wherein the container has a structure in which a magnetic material evaporation opening and a magnetic material supply opening are connected via a communication part. An apparatus for manufacturing a magnetic recording medium.
口部から連通部にかけて設けられてなることを特徴とす
る請求項１の磁気記録媒体の製造装置。2. The magnetic recording medium manufacturing apparatus according to claim 1, wherein the container is provided with a preheating mechanism from the magnetic material supply opening to the communicating portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24934392A JPH06101029A (en) | 1992-09-18 | 1992-09-18 | Production of magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24934392A JPH06101029A (en) | 1992-09-18 | 1992-09-18 | Production of magnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06101029A true JPH06101029A (en) | 1994-04-12 |
Family
ID=17191615
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24934392A Pending JPH06101029A (en) | 1992-09-18 | 1992-09-18 | Production of magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06101029A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20210005938A (en) * | 2018-06-04 | 2021-01-15 | 다이슨 테크놀러지 리미티드 | Vapor deposition evaporator device |
| CN112236543A (en) * | 2018-06-04 | 2021-01-15 | 戴森技术有限公司 | Vapor deposition evaporator device |
-
1992
- 1992-09-18 JP JP24934392A patent/JPH06101029A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20210005938A (en) * | 2018-06-04 | 2021-01-15 | 다이슨 테크놀러지 리미티드 | Vapor deposition evaporator device |
| CN112236543A (en) * | 2018-06-04 | 2021-01-15 | 戴森技术有限公司 | Vapor deposition evaporator device |
| CN112236542A (en) * | 2018-06-04 | 2021-01-15 | 戴森技术有限公司 | Vapor deposition evaporator device |
| JP2021525830A (en) * | 2018-06-04 | 2021-09-27 | ダイソン・テクノロジー・リミテッド | device |
| JP2021526186A (en) * | 2018-06-04 | 2021-09-30 | ダイソン・テクノロジー・リミテッド | device |
| US11613804B2 (en) | 2018-06-04 | 2023-03-28 | Dyson Technology Limited | Vapour deposition evaporator device |
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