JPS5952887A - Laser generator - Google Patents
Laser generatorInfo
- Publication number
- JPS5952887A JPS5952887A JP16237482A JP16237482A JPS5952887A JP S5952887 A JPS5952887 A JP S5952887A JP 16237482 A JP16237482 A JP 16237482A JP 16237482 A JP16237482 A JP 16237482A JP S5952887 A JPS5952887 A JP S5952887A
- Authority
- JP
- Japan
- Prior art keywords
- supporting frame
- support frame
- supporting
- extension
- attached
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
- H01S3/139—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Lasers (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明はレーザ発生装置に係り、光共振器を構成する反
射鏡の支持枠の改良に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a laser generator, and more particularly, to an improvement of a support frame for a reflecting mirror constituting an optical resonator.
１砺出力のガスレーザ装置、例えばＣＯ２レーザでは、
内部にＣＯ２＋ Ｎ ２１ Ｈｅ等のガス媒体を充填し
た放電庁に設けた電極でグロー放電を起して、ガス媒体
を励起する。このとき放電管の両端に一対の反射鏡を対
向して配置すると、反射鐘間でレーザ光は往復反射を繰
り返して増幅され、一方の反射鏡の半透明部を介して外
部に取り出され、切断や溶接等、の加工用熱源などに使
用される。In a gas laser device with a 1-power output, such as a CO2 laser,
Glow discharge is caused by an electrode provided in a discharge chamber filled with a gaseous medium such as CO2+N21He to excite the gaseous medium. At this time, if a pair of reflecting mirrors are placed facing each other at both ends of the discharge tube, the laser beam is amplified by repeating back-and-forth reflection between the reflecting bells, is taken out to the outside through the semi-transparent part of one of the reflecting mirrors, and is cut. It is used as a heat source for processing such as welding and welding.
ところで、一般にレーザ装置付近の大気は、高さ方向に
温度勾配をもっており、レーザ発振時にはグロー放電に
よる熱源が加わるので、レーザ装置を構成する各部材自
体及び各部材間には太きい温度勾配が生じる。したがっ
て、各部材は【黒度差による熱膨張の差だけ変形する。By the way, the atmosphere near a laser device generally has a temperature gradient in the height direction, and since a heat source due to glow discharge is added during laser oscillation, a large temperature gradient occurs between each member making up the laser device itself and between each member. . Therefore, each member deforms by the difference in thermal expansion due to the difference in blackness.
これを第１図ないし第２Ａ、２Ｂ図に示すガスレーザ発
生装置ＩＡによシ説明する。This will be explained with reference to the gas laser generator IA shown in FIGS. 1 to 2A and 2B.
第１保持部２は架台１上に取付けられていると共に、第
１保持部２の上面にＶ字溝２人を形成している。Ｖ字溝
内に収納された摺動部３は第２保持部４に支持され、第
２保持部４は矩形型状の支持枠５に支持されている。支
持枠は放電管本体６を支持している。The first holding part 2 is mounted on the pedestal 1, and has two V-shaped grooves formed on the upper surface of the first holding part 2. The sliding part 3 housed in the V-shaped groove is supported by a second holding part 4, and the second holding part 4 is supported by a rectangular support frame 5. The support frame supports the discharge tube body 6.
両端に反射鏡６Ａおよび出力鏡６Ｂを有する放水
電焦体６は、ガス供給容器７およびガス吐出容器８と連
通し、これらの供給容器７、吐出容器８は架台内に設置
された冷却路に連通し、冷却路内に設けたブロアーで混
合ガスたとえばＣＯ２＋ Ｎ ｅ＋Ｈｅを供給容器７を
介して、放電管本体に送る。The water discharging electrofocal body 6, which has a reflecting mirror 6A and an output mirror 6B at both ends, communicates with a gas supply container 7 and a gas discharge container 8, and these supply containers 7 and discharge containers 8 are connected to a cooling path installed in a frame. A blower provided in the cooling path sends a mixed gas, for example, CO2+Ne+He, to the discharge tube body via the supply container 7.
供給容器７および吐出容器８と支持枠５との間の放電管
本体内は、可撓性部材たとえばベローズ９を設けている
。放電管本体内に配設した少なくとも一対の咀極たとえ
ば陰極と陽極（図示せず）との間に直流電圧を印加し、
グロー放電を行なえば、混合ガスは励起されて、レーザ
光ＩＣ，（ｉ発生する。A flexible member such as a bellows 9 is provided inside the discharge tube body between the supply container 7 and the discharge container 8 and the support frame 5. Applying a DC voltage between at least a pair of masticating electrodes, such as a cathode and an anode (not shown), disposed within the discharge tube body;
When glow discharge is performed, the mixed gas is excited and a laser beam IC,(i) is generated.
レーザ光ＩＣは反射鏡６Ａと出力鏡６Ｂとの間で共振し
、出力鏡６Ｂより外部に取出される。The laser beam IC resonates between the reflecting mirror 6A and the output mirror 6B, and is extracted to the outside from the output mirror 6B.
ところで、放電′Ｕ本体内でグロー放電を行なったり、
或いはレーザ光ＩＣを発生したりするので、放電管本体
内での温度は、架台ｌより高い。したがって、温度上昇
した混合ガスは、放電管本体６→吐出容器８→冷却路→
供給容器７→放ＷＬ管本体６間を循環して、冷却してい
る。この循環系での＠度について検討すると、放電管本
体６および支持枠５での温度は、架台１よシ高い。この
ため、放電管本体１および支持枠５の長手方向への延び
は、架台１のそれよシ大きい。放′Ｉｔ青本体６の延び
は、ベローズ９により吸収する。支持枠５の延びは、摺
動部］がＶ字溝２人内を摺動することにより吸収してい
も。By the way, if a glow discharge is performed within the discharge 'U body,
Alternatively, since a laser beam IC is generated, the temperature inside the discharge tube body is higher than that in the pedestal l. Therefore, the mixed gas whose temperature has increased is transferred from the discharge tube body 6 to the discharge container 8 to the cooling path.
The water is circulated between the supply container 7 and the discharge WL pipe body 6 for cooling. Considering the temperature in this circulation system, the temperature in the discharge tube body 6 and the support frame 5 is higher than that in the pedestal 1. Therefore, the lengthwise extension of the discharge tube body 1 and the support frame 5 is larger than that of the pedestal 1. The extension of the body 6 is absorbed by the bellows 9. Even if the extension of the support frame 5 is absorbed by the sliding part sliding within the two V-shaped grooves.
更に、供給容器７および吐出容器８と支持枠５との温度
について検電する。前者は直接レーザ光、混合ガスと接
触するので、前者の温度は後者の温度より温度が高い温
度勾配を生ずる。このため、供給容器７および吐出容器
８の高さ方向の延びは、支持枠５のそれより大きいので
、第２Ｂ図に示す如くベローズ９が供給容器側に持ち上
げられ、光軸１０がずれる。この結果、供給容器７と支
持枠５を連結するベローズ９にせん断方向の力が作用し
、矢印で示すように支持枠５に曲げ力Ｐが働き、支持枠
５が曲がって、光軸１０がずれを眩じることが判明した
。Further, the temperatures of the supply container 7, the discharge container 8, and the support frame 5 are checked. Since the former comes into direct contact with the laser beam and the mixed gas, a temperature gradient occurs in which the temperature of the former is higher than that of the latter. Therefore, since the extension in the height direction of the supply container 7 and the discharge container 8 is larger than that of the support frame 5, the bellows 9 is lifted toward the supply container as shown in FIG. 2B, and the optical axis 10 is shifted. As a result, a force in the shearing direction acts on the bellows 9 that connects the supply container 7 and the support frame 5, and a bending force P acts on the support frame 5 as shown by the arrow, causing the support frame 5 to bend and the optical axis 10 to be It turned out that the discrepancy was noticeable.
本発明の目的は、熱変形による光軸のずれを防止してレ
ーザ出力を安定させたレーザ装置を提供することにある
。SUMMARY OF THE INVENTION An object of the present invention is to provide a laser device that stabilizes laser output by preventing deviation of the optical axis due to thermal deformation.
本発明では放電管本体に設けた第１保持部上に第２保持
部を載置し、第２保持部を支持枠に取付けて構成すれば
、放電管本体の熱的影曽によシ、第１保持部が高さ方向
に伸縮しても、それに追従して第２保持部も伸縮して、
支持枠に曲げ力が動かないので、光軸ずれを生ずること
がない。In the present invention, if the second holding part is placed on the first holding part provided on the discharge tube main body and the second holding part is attached to the support frame, thermal effects on the discharge tube main body can be reduced. Even if the first holding part expands and contracts in the height direction, the second holding part also expands and contracts accordingly,
Since no bending force is applied to the support frame, optical axis misalignment will not occur.
以下、本発明の実施例を第３Ａ、３Ｂ図により説明する
。Embodiments of the present invention will be described below with reference to FIGS. 3A and 3B.
架台１上に設置された供給容器７、吐出容器８とこれら
の容器と対応する支持枠５との間に伸縮吸収手段２０を
設ける。伸縮吸収手段２０の詳細構造は、第３Ｂ図によ
シ説明するが、供給容器側および吐出容゛器側も構造が
同じなので、供給容器側について説明し、吐出容器側の
説明は省略する。A stretch absorbing means 20 is provided between the supply container 7 and the discharge container 8 installed on the pedestal 1 and the support frame 5 corresponding to these containers. The detailed structure of the expansion and contraction absorbing means 20 will be explained with reference to FIG. 3B, but since the structure is the same on the supply container side and the discharge container side, the explanation on the supply container side will be explained, and the explanation on the discharge container side will be omitted.
支持枠５と対応する供給容器側面に第１保持部２１を取
付け、第１保持部２１の上面側から下面側に向ってＶ字
溝２２を形成する。Ｖ字溝２２と対応する第２保持部２
３は、支持枠５に取付けられ、第２保持部２３に取付け
られた摺動部２４は、７字溝内に収納している。２４は
光軸と一致とする中心線である。したがって、第１およ
び第２保持部２１．２３と摺動部２４の中心部は、中心
線２４と一致している。The first holding part 21 is attached to the side surface of the supply container corresponding to the support frame 5, and a V-shaped groove 22 is formed from the top side to the bottom side of the first holding part 21. Second holding part 2 corresponding to the V-shaped groove 22
3 is attached to the support frame 5, and the sliding portion 24 attached to the second holding portion 23 is housed in the 7-shaped groove. 24 is a center line that coincides with the optical axis. Therefore, the centers of the first and second holding parts 21.23 and the sliding part 24 coincide with the center line 24.
本発明の伸縮吸収手段２０によれば、ガスレーザ発生装
置ＩＡの起動時などのように供給および吐出容器７，８
が急激に温度上昇して、高さ方向に呻びても、支持枠５
もこれに追従するので、ベローズ９にはせん断方向の力
が作用せず、支持枠５の傾きが非常に小さくなる。ま友
、支持枠５と供給および吐出容器７，８との間には摺動
部２４を設けているので、支持枠５は温度変化とともに
長手方向に伸縮するだけで曲げ力が作用せず、支持枠５
は傾かない。この結果、熱平衡に達しなくとも光軸のず
れが極めて小さく、安定なレーザ出力が得られる効果が
ある。According to the expansion/contraction absorption means 20 of the present invention, the supply and discharge containers 7 and 8 can be
Even if the temperature rises suddenly and the support frame 5 groans in the height direction,
Since the bellows 9 also follows this, no force in the shearing direction acts on the bellows 9, and the inclination of the support frame 5 becomes extremely small. Since the sliding part 24 is provided between the support frame 5 and the supply and discharge containers 7 and 8, the support frame 5 only expands and contracts in the longitudinal direction with temperature changes, and no bending force is applied. Support frame 5
does not tilt. As a result, even if thermal equilibrium is not reached, the deviation of the optical axis is extremely small and stable laser output can be obtained.
一方、ガスレーザ発生装置１ｆｆｉｌＡの組立て後にガ
ス媒体を封入したときに、圧力差による変形で生じる光
軸ずれを防止できる。即ち、ガス媒体は数１０Ｔｏｒｒ
のガス圧力で封入され、大気との圧力差を生じる。この
ため、容器７．８は［側で冷却路にＪり２続されている
結果、下方に引張られ、架台の上面がたわんで、第１図
のＡ−Ａ断面図で示したのと全く逆方向の変形を生じ、
支持枠５が曲がる。従来は、大気中で組立てて調整した
後で所要のガス圧に真空引き１１、反射鏡を再度調整す
る必要があった。本発明によれば、圧力差による架台上
面のたわみで容器が下方に沈んでも、支持枠５も追従し
、支持枠５には曲げ力が生じることなく反射鏡６Ａおよ
び出力鏡６Ｂの再調整が不要となる。また、圧力差によ
る架台上面のたわみを小さくするために、従来は、非常
に強固な架台が必要であったが、本発明によれば、架台
はそれ程強固にする必要はなく、小形軽°贋化が図れる
効果がある。On the other hand, when the gas medium is sealed after the gas laser generator 1ffilA is assembled, it is possible to prevent the optical axis from shifting due to deformation due to the pressure difference. That is, the gas medium has a pressure of several tens of Torr.
The gas is sealed at a pressure of 1, creating a pressure difference with the atmosphere. As a result, the container 7.8 is connected to the cooling path on the side, and as a result, it is pulled downward, and the top surface of the pedestal is bent, resulting in the same shape as shown in the A-A cross-sectional view in Figure 1. causing deformation in the opposite direction,
The support frame 5 is bent. Conventionally, after assembling and adjusting in the atmosphere, it was necessary to evacuate the gas pressure 11 and adjust the reflector again to the required gas pressure. According to the present invention, even if the container sinks downward due to the bending of the top surface of the pedestal due to the pressure difference, the support frame 5 follows suit, and the reflector 6A and output mirror 6B can be readjusted without any bending force being generated on the support frame 5. No longer needed. In addition, in order to reduce the deflection of the top surface of the pedestal due to the pressure difference, a very strong pedestal was required in the past, but according to the present invention, the pedestal does not need to be so strong and can be made smaller and lighter. This has the effect of increasing the
上述では、第１保持部を容器に設ける場合について説明
したが、放電管本体の１部に設けてもよい。また、」二
連では放電管本体が１個の場合について述べたが、第４
図に示す如く多重折返し形ガスレーザ発生装置にも適用
できる。この場合、伸縮吸収手段２０は、３ケ所以上あ
ればよく、この内２ケ所以上の保持部を摺動可能にすれ
ば、本目的を達成できる。更に、上述の実施例では、軸
流型ガスレーザ発生装置について述べたが、３軸型ガス
レ一ザ発生装置等の他のレーザ発生装置にも使用できる
ことは、勿論である。In the above description, a case has been described in which the first holding part is provided in the container, but it may be provided in a part of the discharge tube main body. In addition, although we have described the case where there is only one discharge tube body in the case of ``2 series,''
As shown in the figure, it can also be applied to a multiple folded gas laser generator. In this case, the expandable/contractable absorbing means 20 may be provided at three or more locations, and the present objective can be achieved by making the holding portions at two or more of these locations slidable. Further, in the above-described embodiments, an axial flow type gas laser generator has been described, but it goes without saying that the present invention can also be used in other laser generators such as a triaxial type gas laser generator.
以上のように、本発明では伸縮吸収手段全般けて、熱変
形により支持枠の傾きは卵重に小さくなり、反射鏡、出
力鏡の光軸ずれかなくなったので、極めて安定なレーザ
出力を得ることができるようになった。As described above, in the present invention, the inclination of the support frame is reduced to about the weight of an egg due to thermal deformation of the expansion/contraction absorbing means in general, and the optical axis of the reflecting mirror and output mirror is no longer misaligned, resulting in extremely stable laser output. Now I can do it.
第１図は従来のガスレーザ発生装置の争１視図、第２Ａ
図および第２Ｂ図は第１図のＡ−Ａ線およびＢＩｌａ断
面図の１部を省略した部分断面図、第３Ａ図および第４
図は本発明の実施例として示した平面図、第３１３図は
第３Ａ図の部分側断面図である。Figure 1 is a perspective view of a conventional gas laser generator, and Figure 2A is a perspective view of a conventional gas laser generator.
Figures 2B and 2B are partial cross-sectional views taken along line A-A and BIla in Figure 1, with parts omitted, and Figures 3A and 4.
The figure is a plan view showing an embodiment of the present invention, and FIG. 313 is a partial side sectional view of FIG. 3A.
Claims (1)
管本体と、放電管本体を支持する支持枠とから成るもの
において、上記放電管本体と支持枠との間に伸縮吸収手
段を設けることを特徴とするレーザ発生装置。 ２、上記伸縮吸収手段は、放電管本体に設けた第１保持
部と、第１保持部の上面側に載置され、かつ支持枠に取
付けられた第２保持部とから構成することを特徴とする
特許請求の範囲第１項記載のレーザ発生４ｆｔ置。[Claims] 1. A discharge tube body that generates laser light and communicates with a cooling path, and a support frame that supports the discharge tube body, wherein the discharge tube body and the support frame are connected to each other. A laser generator characterized in that an expansion/contraction absorbing means is provided between the laser generators. 2. The expansion/contraction absorbing means is comprised of a first holding part provided on the discharge tube main body, and a second holding part placed on the upper surface side of the first holding part and attached to the support frame. A 4ft laser generator according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16237482A JPS5952887A (en) | 1982-09-20 | 1982-09-20 | Laser generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16237482A JPS5952887A (en) | 1982-09-20 | 1982-09-20 | Laser generator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5952887A true JPS5952887A (en) | 1984-03-27 |
| JPS6366435B2 JPS6366435B2 (en) | 1988-12-20 |
Family
ID=15753356
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16237482A Granted JPS5952887A (en) | 1982-09-20 | 1982-09-20 | Laser generator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5952887A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61228013A (en) * | 1985-04-01 | 1986-10-11 | Mitsubishi Gas Chem Co Inc | Production of highly reactive aromatic hydrocarbon-formaldehyde resin |
| JPS6231183A (en) * | 1985-08-02 | 1987-02-10 | Matsushita Electric Ind Co Ltd | Gas laser device |
| WO2004105200A1 (en) * | 2003-05-20 | 2004-12-02 | Mitsubishi Denki Kabushiki Kaisha | Laser transmitter |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5651885A (en) * | 1979-10-05 | 1981-05-09 | Hitachi Ltd | Laser device |
-
1982
- 1982-09-20 JP JP16237482A patent/JPS5952887A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5651885A (en) * | 1979-10-05 | 1981-05-09 | Hitachi Ltd | Laser device |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61228013A (en) * | 1985-04-01 | 1986-10-11 | Mitsubishi Gas Chem Co Inc | Production of highly reactive aromatic hydrocarbon-formaldehyde resin |
| JPS6231183A (en) * | 1985-08-02 | 1987-02-10 | Matsushita Electric Ind Co Ltd | Gas laser device |
| WO2004105200A1 (en) * | 2003-05-20 | 2004-12-02 | Mitsubishi Denki Kabushiki Kaisha | Laser transmitter |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6366435B2 (en) | 1988-12-20 |
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