JPS59213186A - Laser oscillator - Google Patents
Laser oscillatorInfo
- Publication number
- JPS59213186A JPS59213186A JP8841483A JP8841483A JPS59213186A JP S59213186 A JPS59213186 A JP S59213186A JP 8841483 A JP8841483 A JP 8841483A JP 8841483 A JP8841483 A JP 8841483A JP S59213186 A JPS59213186 A JP S59213186A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- gas
- oscillator
- laser gas
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
この発明は、レーザー発振器に関するものであり、さら
に詳しくいうと、一定の圧力でレーザーガスが充填され
た発振器本体を有するレーザー発振器に関するものであ
る。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a laser oscillator, and more particularly to a laser oscillator having an oscillator body filled with laser gas at a constant pressure.
従来、この種の装置として第1図に示すものがあった。Conventionally, there has been a device of this type as shown in FIG.
図において発振器本体lの対向する壁に部分透過鏡コと
全反射鏡3が設けられ、その間圧放電管りが配置され、
発振器本体lに充填されたレーザーガス3を循環させる
送風機6およびレーザーガスSを冷却する冷却器7が発
振器本体/内に収納されてなるものである。In the figure, a partially transmitting mirror 1 and a total reflecting mirror 3 are provided on opposite walls of the oscillator main body 1, and a pressure discharge tube is arranged between them.
A blower 6 for circulating the laser gas 3 filled in the oscillator body 1 and a cooler 7 for cooling the laser gas S are housed within the oscillator body.
以上の構成により、発振器本体l内のレーザーガスSは
放電管ケの放電により励起され、部分透過鏡λと全反射
鏡3間で増幅されたレーデ−光は部分透過鏡コを通り発
振器本体l外へ放出される。With the above configuration, the laser gas S in the oscillator body l is excited by the discharge of the discharge tube, and the radar light amplified between the partially transmitting mirror λ and the total reflecting mirror 3 passes through the partially transmitting mirror l. released outside.
一方、放電により加熱されたレーザーガスSは冷却器7
によって冷却される。送風機6はレーザーガスタを循環
させてレーザーガスjの冷却効果を助長する。このとき
、レーザーガス圧は大気に(らべ低圧に保たれている。On the other hand, the laser gas S heated by the discharge is transferred to the cooler 7.
cooled by The blower 6 circulates the laser gas and promotes the cooling effect of the laser gas j. At this time, the laser gas pressure is kept at a low pressure (compared to the atmosphere).
また、発振器本体l内の部品を点検するため、発振器本
体lは7ランジ等で分解可能な構造となっている。Furthermore, in order to inspect the parts inside the oscillator body 1, the oscillator body 1 has a structure that can be disassembled using seven lunges or the like.
しかし、以上の構成になる従来のレーザー発振器は、発
振器本体/外部と内部の気密保持が、7ラン9部分、送
風機6、冷却器7等の配線、配管の外部への接続部があ
るため不十分となり、発振器本体/内部に外気が注入し
、レーザーガスSの成分が変化し、圧力も高くなり、結
果としてレーザー出力の低下をまね(という欠点があっ
た。However, in the conventional laser oscillator with the above configuration, it is difficult to maintain airtightness between the oscillator body/exterior and interior because there are 7 runs, 9 parts, wiring for the blower 6, cooler 7, etc., and connections to the outside of the piping. When this happens, outside air is injected into the oscillator main body/inside, the composition of the laser gas S changes, the pressure increases, and as a result, the laser output decreases.
この発明は、上記のような従来のものの欠点を除去する
ためになされたもので、発振器を二重構造とし、外箱と
その内側の発振器本体の空間をレーザーガス圧より低圧
に保ち、レーザーガスに外から他のガスが注入するのを
防止し、かつ、発振器本体内のレーザーガスの外部への
ガス洩出によるレーザーガスの圧力低下を防止するよう
にしたレーザー発振器を提供することを目的とするもの
である。This invention was made to eliminate the drawbacks of the conventional ones as described above.The oscillator has a double structure, and the space between the outer box and the oscillator body inside the box is kept at a pressure lower than the laser gas pressure. It is an object of the present invention to provide a laser oscillator that prevents other gases from being injected into the oscillator body from the outside and prevents a drop in pressure of the laser gas due to leakage of the laser gas inside the oscillator body to the outside. It is something to do.
以下、この発明の一実施例を第コ1罠ついて説明する。Hereinafter, one embodiment of the present invention will be described with reference to the first trap.
図において発振器本体/との間に適宜の空間gを形成し
て発振器本体lを包む外箱デを配設し、外箱9にはレー
ザー光を取り出すウィンドウ10を設ける。空間gの圧
力を検知する第1の圧力検知器//は空間gのガスを外
部に排出する排気ポンプ/−に指令信号を与える。発振
器本体/内のガス圧力を検知する第5の圧力検知器/3
はレーザーガスボンベllIの電磁弁/Sを制御して発
m器本体/内のレーザーガス圧力を調節する。In the figure, an outer box 9 is provided to enclose the oscillator main body 1 with an appropriate space g formed between the oscillator main body 1 and the oscillator main body 1, and a window 10 for taking out the laser beam is provided in the outer box 9. A first pressure sensor // which detects the pressure in the space g gives a command signal to the exhaust pump // which discharges the gas in the space g to the outside. Fifth pressure detector/3 for detecting gas pressure inside the oscillator body/
controls the electromagnetic valve /S of the laser gas cylinder III to adjust the laser gas pressure inside the generator body.
その他、第1図におけると同一部分には同一符号を付し
、説明を省略する。Other parts that are the same as those in FIG. 1 are designated by the same reference numerals, and their explanations will be omitted.
次に動作について説明する。発振器本体/内のレーザー
ガスタは放電管グの放電により励起され、部分透過鏡コ
・と全反射鏡3間で増幅されたレーザー光は部分透過鏡
コかもウィンドウ10を通って放出される。外箱9は発
振器本体lを完全に包むように構成されており、外箱9
と発振器本体1間の空間gのガスは排気ポンプlΩによ
って発振器本体l内のガス圧力より低(するように調節
される。空間tは外箱?の外側の圧力および発振器本体
l内の圧力より低く保持されていて、外箱tの外側およ
び発振器本体/よりガスの注入が生じガス圧が上昇する
と、第1の圧力検知器//によって再び規定のガス圧力
になるまで排気ポンプ12が作動する。発振器本体/内
のレーザーガスタが洩出により圧力が低下すると、この
圧力低下を第一の圧力検知器/3で検知し、電磁弁/S
を操作してレーザーガスボンベ/41から新しいレーザ
ーガスな発振器本体/に注入し発振器本体/内のレーザ
ーガス圧を一定に保つようになっている。Next, the operation will be explained. The laser gas in the oscillator body is excited by the discharge of the discharge tube, and the laser beam amplified between the partially transmitting mirror 1 and the total reflecting mirror 3 is emitted through the partially transmitting mirror 10 and the window 10. The outer box 9 is configured to completely enclose the oscillator main body l.
The gas in the space g between the oscillator body 1 and the oscillator body 1 is adjusted to be lower than the gas pressure inside the oscillator body l by the exhaust pump lΩ. When gas is injected from the outside of the outer box t and the oscillator body and the gas pressure rises, the exhaust pump 12 is operated by the first pressure detector until the specified gas pressure is reached again. .When the pressure decreases due to leakage of the laser gas star inside the oscillator body, this pressure decrease is detected by the first pressure detector /3, and the solenoid valve /S
The new laser gas is injected from the laser gas cylinder 41 into the oscillator body to maintain a constant laser gas pressure inside the oscillator body.
以上のように、この発明によれば、発振器本体内の圧力
より低い圧力の空間がその周囲にあるため、発振器本体
内に外部からの大気の注入がない。As described above, according to the present invention, there is a space around the oscillator body whose pressure is lower than the pressure inside the oscillator body, so that there is no air injected into the oscillator body from the outside.
さら圧、逆に圧力の低い空間へのガス洩出を補充するた
めの新しいレーザーガスが注入されろためレーザーガス
圧が一定で、ガス成分も一定に保つことができ、レーザ
ー出力の低下を防止する効果を奏する。Further pressure, or conversely, new laser gas is injected to replenish gas leaking into a space with low pressure, so the laser gas pressure remains constant and the gas composition can also be kept constant, preventing a drop in laser output. It has the effect of
第1図は従来のものの概略正断面図、第一図はこの発明
の一実施例の概略正断面図である。
/・・発振器本体、λ・・部分透過鏡、3・・全反射鏡
、y・・放電管、S・・レーザーガス、6・・送風機、
7・・冷却器、8・・空間、り・・外箱、10・・ウィ
ンドウ、//・・第1の圧力検知器、/2・・排気ポン
プ、/3・・第一の圧力検知器、/</・・レーザーガ
スボンベ、/S・・電磁弁。
なお、各図中、同一符号は同−又は相当部分を示す。
代理人 大 岩 増 雄FIG. 1 is a schematic front sectional view of a conventional device, and FIG. 1 is a schematic front sectional view of an embodiment of the present invention. /...Oscillator body, λ...Partially transmitting mirror, 3...Total reflection mirror, y...Discharge tube, S...Laser gas, 6...Blower,
7. Cooler, 8. Space, Ri... Outer box, 10. Window, //. First pressure detector, /2.. Exhaust pump, /3.. First pressure detector. , /</... Laser gas cylinder, /S... Solenoid valve. In each figure, the same reference numerals indicate the same or corresponding parts. Agent Masuo Oiwa
Claims (1)
の発振器本体を収納した密封形の外箱と、前記てなるレ
ーザー発振器。 (,2)空間の圧力を検知する第1の圧力検知器と、前
記空間に接続され前記第1の圧力検知器からり信号によ
り動作する排気ポンプを備えた特許請求の範囲第7項記
載のレーザー発振器。 (3)発振器本体内の圧力を検知する第2の圧力検知器
と、この圧力検知器からの信号により前記発振器本体に
レーザーガスな補充する電磁弁を備えた特許請求の範囲
第1項記載のレーザー発振器。[Scope of Claims] (1) An oscillator body containing laser gas, a sealed outer box housing the oscillator body, and a laser oscillator comprising the above. (,2) Claim 7, comprising: a first pressure detector that detects the pressure in the space; and an exhaust pump connected to the space and operated by a signal from the first pressure detector. laser oscillator. (3) A second pressure detector for detecting the pressure inside the oscillator body, and an electromagnetic valve for replenishing the oscillator body with laser gas based on a signal from the pressure detector. laser oscillator.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8841483A JPS59213186A (en) | 1983-05-18 | 1983-05-18 | Laser oscillator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8841483A JPS59213186A (en) | 1983-05-18 | 1983-05-18 | Laser oscillator |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS59213186A true JPS59213186A (en) | 1984-12-03 |
Family
ID=13942133
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8841483A Pending JPS59213186A (en) | 1983-05-18 | 1983-05-18 | Laser oscillator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59213186A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60154583A (en) * | 1984-01-25 | 1985-08-14 | Toshiba Corp | Gas laser device |
JPS61188986A (en) * | 1985-02-18 | 1986-08-22 | Matsushita Electric Ind Co Ltd | Gas laser oscillator |
-
1983
- 1983-05-18 JP JP8841483A patent/JPS59213186A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60154583A (en) * | 1984-01-25 | 1985-08-14 | Toshiba Corp | Gas laser device |
JPH0239869B2 (en) * | 1984-01-25 | 1990-09-07 | Tokyo Shibaura Electric Co | |
JPS61188986A (en) * | 1985-02-18 | 1986-08-22 | Matsushita Electric Ind Co Ltd | Gas laser oscillator |
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