JPS59172713A - Portable clean container - Google Patents

Portable clean container

Info

Publication number
JPS59172713A
JPS59172713A JP4742783A JP4742783A JPS59172713A JP S59172713 A JPS59172713 A JP S59172713A JP 4742783 A JP4742783 A JP 4742783A JP 4742783 A JP4742783 A JP 4742783A JP S59172713 A JPS59172713 A JP S59172713A
Authority
JP
Japan
Prior art keywords
air
container
transported
reservoir
transportation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4742783A
Other languages
Japanese (ja)
Inventor
Isao Nishigaya
西ケ谷　勲
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP4742783A priority Critical patent/JPS59172713A/en
Publication of JPS59172713A publication Critical patent/JPS59172713A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

PURPOSE:To provide a portable container by which the transportation between the manufacturing processes of a semiconductor element without requiring the super cleaness of a whole room. CONSTITUTION:Air is introduced from an air reservoir 2 into an air chamber 6 of a container through an air filter 4 and blows out of fine holes 7. The blowing air passes through a space in which transported objects are contained and through holes provided to a bottom plate 8 and is discharged into the atmosphere through an exhaust hole 9. If the air stored in the air reservoir 2 is inert gas or the like, transportation of chemically unstable objects can be transported.

Description

【発明の詳細な説明】 本発明は可搬型清浄容器にかかり、とくに外気中に浮遊
する塵埃が搬送物に付着する事、及び搬送物自身から発
生する塵埃が搬送物に付着する事を防止する為の可搬型
清浄容器に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention is applied to a portable clean container, and particularly prevents dust floating in the outside air from adhering to the transported object, and dust generated from the transported object itself from adhering to the transported object. Regarding a portable clean container for use.

塵埃を極度にきらう製造工程として半導体素子製造工程
等あげることが出来るが、従来この種の製造工程におい
ては、搬送物の工程間の搬送範囲全域を超清浄度に保つ
必要から部屋全体を超清浄度に維持しなくてはならなか
った。したがって製造工程現場の建設費、及び超清浄度
維持にかかる費用は美大なものとなる。Semiconductor device manufacturing processes can be cited as manufacturing processes that are extremely dust-free, but conventionally, in this type of manufacturing process, the entire room must be kept ultra-clean because it is necessary to maintain ultra-cleanliness over the entire transport area between processes. had to be maintained at all times. Therefore, the construction cost of the manufacturing process site and the cost of maintaining ultra-cleanliness are enormous.

本発明の目的は部屋全体の超清浄変化を必要とせずに製
造工程間の搬送を行う為の可搬型の清浄容器を提供する
事である。It is an object of the present invention to provide a portable clean container for transportation between manufacturing processes without requiring ultra-clean changes to the entire room.

本発明の特徴は外気圧力に対し容器内部を常に陽圧（外
気圧力より高い圧力）に保持する為の、空気供給源とし
ての空気溜、圧力調整器、空気吹出面及びそれらを接続
する為の手段と、前記空気吹出面よシ供給された空気を
容器外部に排出する孔を有する可搬型清浄容器にある。The features of the present invention include an air reservoir as an air supply source, a pressure regulator, an air blowing surface, and an air blowing surface for connecting them, in order to always maintain the inside of the container at a positive pressure (higher pressure than the outside air pressure) with respect to outside air pressure. and a hole for discharging the air supplied from the air blowing surface to the outside of the container.

このような本発明は単なる加圧された密閉容器とは異な
り外気中の塵埃から搬送物を保護する事及び、搬送中搬
送物から発生する塵埃、その細微粒子等による相互汚染
を防止する為に搬送中宮に清浄な空気を搬送物に供給出
来る。Unlike a mere pressurized airtight container, the present invention is designed to protect transported objects from dust in the outside air, and to prevent mutual contamination due to dust and fine particles generated from transported objects during transportation. Clean air can be supplied to the conveyance medium.

以下本発明の詳細な説明する。The present invention will be explained in detail below.

第１図は本発明による可搬型清浄容器の外形図で図中１
は搬送物を出し入れする為の扉である。Figure 1 is an external view of the portable clean container according to the present invention.
is a door for loading and unloading transported items.

第２図は可搬型清浄容器の内部を表わす図である。FIG. 2 is a diagram showing the inside of the portable clean container.

図中１は第１図の説明と同様扉を示す。２は空気溜めで
あり、内部に圧縮空気が充填されている。1 in the figure indicates a door as in the explanation of FIG. 2 is an air reservoir, the inside of which is filled with compressed air.

３は圧力調整器で容器内の圧力を一定に保つように２の
空気溜めから流出する空気を制御する。４は空気濾過器
で２の空気溜めから流出する空気の清浄化を行う。５は
空気濾過器を経た空気を容器内に導く管である。容器内
に導かれた空気は６の空気室に入り、７の微小孔よシ噴
出する。７の微小孔は多数形成されていて空気の噴出は
微小孔７の形成されている面全面から行われる。噴出し
た空気は搬送物が収納される空間を通過し８の底板に形
成された孔を経て９の排気孔より外気に放出される。１
０は空気溜めに外部より空気を充填する為に用いる充填
口である。尚２の空気溜め内に不活性ガス等を充填する
事によって化学的に不安定な物質の搬送も行う事が可能
である。3 is a pressure regulator that controls the air flowing out from the air reservoir 2 so as to keep the pressure inside the container constant. 4 is an air filter that cleans the air flowing out from the air reservoir in 2. 5 is a pipe that guides the air that has passed through the air filter into the container. The air introduced into the container enters the air chamber 6 and blows out through the micropores 7. A large number of micropores 7 are formed, and air is ejected from the entire surface where the micropores 7 are formed. The ejected air passes through the space in which the transported objects are stored, passes through a hole formed in the bottom plate 8, and is discharged to the outside air from an exhaust hole 9. 1
0 is a filling port used to fill the air reservoir with air from the outside. It is also possible to transport chemically unstable substances by filling the second air reservoir with an inert gas or the like.

【図面の簡単な説明】 第１図、第２図は本発明の実施例を示す図、第１図は外
形図、第２図は内部を表わす図である。 、１：搬送物出し入れ用層、２：空気溜め、３：圧力調
整器、４：空気濾過器、５：導管、６：空気室、７：微
少孔、８：底板に形成された孔、９：排気孔、１０：充
填口０BRIEF DESCRIPTION OF THE DRAWINGS FIGS. 1 and 2 are views showing an embodiment of the present invention, FIG. 1 is an external view, and FIG. 2 is a view showing the inside. , 1: Layer for loading and unloading conveyed objects, 2: Air reservoir, 3: Pressure regulator, 4: Air filter, 5: Conduit, 6: Air chamber, 7: Micro holes, 8: Holes formed in the bottom plate, 9 : Exhaust hole, 10: Filling port 0

Claims (1)

【特許請求の範囲】[Claims] 外気圧力に対し容器内部を常に高い圧力に保持する為の
、空気供給源としての空気溜、圧力調整器、空気吹出面
及びそれらを接続する為の手段と、前記空気吹出面よシ
供給された空気を容器外部に排出する孔とを有すること
を特徴とする可搬型清浄容器。An air reservoir as an air supply source, a pressure regulator, an air blowing surface, and a means for connecting them, in order to maintain the inside of the container at a constant high pressure relative to the outside air pressure, and an air reservoir supplied from the air blowing surface. A portable clean container characterized by having a hole for discharging air to the outside of the container.
JP4742783A 1983-03-22 1983-03-22 Portable clean container Pending JPS59172713A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4742783A JPS59172713A (en) 1983-03-22 1983-03-22 Portable clean container

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4742783A JPS59172713A (en) 1983-03-22 1983-03-22 Portable clean container

Publications (1)

Publication Number Publication Date
JPS59172713A true JPS59172713A (en) 1984-09-29

Family

ID=12774851

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4742783A Pending JPS59172713A (en) 1983-03-22 1983-03-22 Portable clean container

Country Status (1)

Country Link
JP (1) JPS59172713A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4770680A (en) * 1986-05-19 1988-09-13 Fujitsu Limited Wafer carrier for a semiconductor device fabrication, having means for sending clean air stream to the wafers stored therein
AU700700B2 (en) * 1995-09-08 1999-01-14 Astra Aktiebolag Aseptic transfer
EP1075023A1 (en) * 1998-04-16 2001-02-07 Tokyo Electron Limited Unprocessed material storing device and carry-in/out stage
JP2016122346A (en) * 2014-12-25 2016-07-07 株式会社東芝 Air supply system

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4770680A (en) * 1986-05-19 1988-09-13 Fujitsu Limited Wafer carrier for a semiconductor device fabrication, having means for sending clean air stream to the wafers stored therein
AU700700B2 (en) * 1995-09-08 1999-01-14 Astra Aktiebolag Aseptic transfer
EP1075023A1 (en) * 1998-04-16 2001-02-07 Tokyo Electron Limited Unprocessed material storing device and carry-in/out stage
EP1075023A4 (en) * 1998-04-16 2004-11-17 Tokyo Electron Ltd Unprocessed material storing device and carry-in/out stage
JP2016122346A (en) * 2014-12-25 2016-07-07 株式会社東芝 Air supply system

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