JPS59124997U - vacuum baking oven - Google Patents

vacuum baking oven

Info

Publication number
JPS59124997U
JPS59124997U JP1962083U JP1962083U JPS59124997U JP S59124997 U JPS59124997 U JP S59124997U JP 1962083 U JP1962083 U JP 1962083U JP 1962083 U JP1962083 U JP 1962083U JP S59124997 U JPS59124997 U JP S59124997U
Authority
JP
Japan
Prior art keywords
vacuum
vacuum chamber
chamber
baking oven
cases
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1962083U
Other languages
Japanese (ja)
Inventor
藤崎　博
Original Assignee
日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電気株式会社 filed Critical 日本電気株式会社
Priority to JP1962083U priority Critical patent/JPS59124997U/en
Publication of JPS59124997U publication Critical patent/JPS59124997U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の実施例を示す構成図、第２図は製品及
びケースをトレーにセットする場合の詳細図である。 １・・・・・・油回転ポンプ、２・・・・・・クライオ
ポンプ、３・・・・・・ターボブロアー、４・・・・・
・冷却チラー、５・・・・・・流量調節用バルブ、６・
・・・・・主バルブ、７・・・・・・粗引バルブ、８・
・・・・・ガス導入バルブ、９・・・・・・ガス導入バ
ルブ、１０・・・・・・チャンバー内ガス導入バルブ、
１１・・・・・・ガス導入バルブ、１２・・・・・・ブ
ロアー内粗引バルブ、１３・・・・・・クライオ内粗引
バルブ、１４ａ、１４ｂ・・・・・・連成計、１５・・
・・・・電離真空計、１６・・・・・−Ｃ−Ａ熱電対、
１７・・・・・・棚板、１８・・・・・・シーズヒータ
ー、１９・・・・・・トレー、２０・・・・・・製品或
はケース、２１・・・・・・冷却パイプ、２２ａ。 ２２ｂ、２２ｃ、２２ｄ・・・・・・ピラニ真空計、２
３・・・・・・チャンバーリークバルブ、２４・・・・
・・真空槽。FIG. 1 is a configuration diagram showing an embodiment of the present invention, and FIG. 2 is a detailed diagram of the case where a product and a case are set on a tray. 1...Oil rotary pump, 2...Cryopump, 3...Turbo blower, 4...
・Cooling chiller, 5...Flow rate adjustment valve, 6.
...Main valve, 7...Roughing valve, 8.
...Gas introduction valve, 9...Gas introduction valve, 10...Chamber gas introduction valve,
11...Gas introduction valve, 12...Roughing valve in blower, 13...Roughing valve in cryo, 14a, 14b...Compound meter, 15...
...Ionization vacuum gauge, 16...-C-A thermocouple,
17...Shelf board, 18...Sheathed heater, 19...Tray, 20...Product or case, 21...Cooling pipe , 22a. 22b, 22c, 22d...Pirani vacuum gauge, 2
3...Chamber leak valve, 24...
...Vacuum chamber.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 半導体製品及びケースの封入前ベーク工程で、真空槽内
に真空すべき製品及びケースをセットし、真空槽内を真
空減圧し、内部に配設されたシーズヒーターによって一
定時間加熱処理する真空ベーク炉において、真空槽内と
核種に連結された強制冷却用ブロアー配管内とを不活性
ガスで置換し、かつその両者を同圧にし、真空状態で不
活性ガスを循環させて槽内を強制冷却する強制冷却機構
を装備したことを特徴とする真空ベーク炉。In the pre-encapsulation baking process for semiconductor products and cases, the products and cases to be evacuated are set in a vacuum chamber, the pressure inside the vacuum chamber is reduced, and a sheathed heater installed inside is used to heat the product for a certain period of time. In this process, the inside of the vacuum chamber and the inside of the forced cooling blower piping connected to the nuclide are replaced with inert gas, and both are made to have the same pressure, and the inside of the chamber is forcedly cooled by circulating the inert gas in a vacuum state. A vacuum baking furnace characterized by being equipped with a forced cooling mechanism.
JP1962083U 1983-02-14 1983-02-14 vacuum baking oven Pending JPS59124997U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1962083U JPS59124997U (en) 1983-02-14 1983-02-14 vacuum baking oven

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1962083U JPS59124997U (en) 1983-02-14 1983-02-14 vacuum baking oven

Publications (1)

Publication Number Publication Date
JPS59124997U true JPS59124997U (en) 1984-08-22

Family

ID=30150760

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1962083U Pending JPS59124997U (en) 1983-02-14 1983-02-14 vacuum baking oven

Country Status (1)

Country Link
JP (1) JPS59124997U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001249620A (en) * 2000-03-02 2001-09-14 Showa Mfg Co Ltd Multistage infrared cooling furnace for flat panel display

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53120611A (en) * 1977-03-30 1978-10-21 Sumitomo Electric Ind Ltd Sintering furnace for powder metallurgy

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53120611A (en) * 1977-03-30 1978-10-21 Sumitomo Electric Ind Ltd Sintering furnace for powder metallurgy

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001249620A (en) * 2000-03-02 2001-09-14 Showa Mfg Co Ltd Multistage infrared cooling furnace for flat panel display

Similar Documents

Publication Publication Date Title
GB1517650A (en) Cooling of electronic devices
GB1312356A (en) Magnetic recording apparatus
GB915598A (en) Improvements relating to closed cycle refrigeration systems
JPS59124997U (en) vacuum baking oven
GB1215731A (en) Cyclic desorption refrigerator
GB939395A (en) Sorption pump apparatus
GB1277846A (en) Improvements in or relating to furnaces
US2192851A (en) Refrigerating apparatus
ES400166A1 (en) Vacuum furnace
GB1323307A (en) Thermostatic expansion valve for refrigerating equipment
GB849158A (en) Refrigeration
JPS5224357A (en) Defrosting method for a heat pump type cooling and heating apparatus
Hao et al. Correction-Microbial Amylase Preparations
JPS5855296U (en) Vacuum heat treatment furnace
DAVENPORT et al. The effect of transverse temperature gradients on the heat transfer and friction for laminar flow of gases(Transverse temperature gradients effect on heat transfer rates and friction for laminar gas flow)
JPS5826873U (en) rack oven
JPS58184168U (en) Heat pump type refrigeration equipment
JPS58111882U (en) Condensation prevention control circuit for refrigerators, etc.
JPS6077980U (en) Refrigeration equipment such as refrigerators
FR2339363A1 (en) Storage cabinet for wine - has cooling system with free space formed between bottle supports and wall to give temperature gradient
SE327235B (en)
JPH01132239U (en)
KASCIC et al. Asymptotic and numerical solutions for nonlinear conduction in radiating heat shields(Boundary value problem of nonlinear one dimensional conduction in radiating heat shields, using perturbation and numerical methods)
JPS5886441U (en) Intake precooling gas turbine
JPS58124679U (en) cryopump