JPS59107857A - Grinding machine - Google Patents

Abstract

PURPOSE:To permit constant dimension and constant pressure cut-in working by a method wherein a feeding device, feeding a work forcibly by a constant amount through a screwed groove, and a pushing device, pushing by a constant force, are provided and the work is attached to the feeding device while the grindstone is attached to the pushing device respectively. CONSTITUTION:A grindstone shaft head 1 is provided with a rotatable spindle head 3 and the cup-type grindstone 2 is mounted at the tip end of the spindle. A base 4, securing the head 1, is connected to a flat slide unit 5 through connecting means 6, 7 and the head 1 is constituted so as to be movable axially by a linear motor 8. On the other hand, a work head 9 is provided with a rotatable spindle 10 and a chuck 11 for attaching the work is mounted at the axial tip end thereof. The base 12, securing the head 9, is supported by a linear way 13 through a bracket 16 and a ball screw 15 is screwed to a nut 14 for the bracket 16 while the ball screw 15 is pivoted by a pulse motor 20.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は固定砥粒による研磨加工機に関するものである
。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a polishing machine using fixed abrasive grains.

従来例の構成とその問題点 従来、フェライトの如き硬脆機の微細な平面鏡面加工は
、荒研磨加工、仕上げ研磨加工、ラップ加工及びポリシ
ング加工等の数工程を各専用加工機で加工していた。こ
の場合、数種の専用加工機が必要なことと、被加工物の
各専用加工機への着脱等の手間が掛り、コスト高の要因
にもなっている。また、平面の加工精度（表面粗さ、平
面度。Conventional structure and its problems Conventionally, fine plane mirror finishing of hard and brittle machines such as ferrite requires several steps such as rough polishing, final polishing, lapping, and polishing to be performed using dedicated processing machines. Ta. In this case, several types of dedicated processing machines are required, and it takes time and effort to attach and detach the workpiece to each dedicated processing machine, which also causes high costs. Also, the machining accuracy of flat surfaces (surface roughness, flatness).

加工変質層）についても技術的課題があった。すなわち
、ラッピング加工やポリシング加工の遊離砥粒加工にお
いては、その加工メカニズムは砥粒の押し割りや、引掻
き作用によって被加工物を塑性変形、あるいは切削して
ゆくものであるが、砥粒の被加工物に対する作用力が大
きくなったり、変動したりすると被加工物の表面に深い
スラッチを生じたり、硬脆材料の場合は容易に脆性破壊
を生じチッピングやクラックの発生を伴なう。また被加
工物の表面下にもマイクロクラック層や有否層を形成し
製品特性の劣化を招くことも多かった。There were also technical issues regarding the process-altered layer. In other words, in free abrasive processing such as lapping and polishing, the processing mechanism is to plastically deform or cut the workpiece by pushing and scratching the abrasive grains. When the force acting on an object becomes large or fluctuates, deep scratches occur on the surface of the workpiece, and in the case of hard and brittle materials, brittle fracture easily occurs, accompanied by chipping and cracking. Furthermore, a microcrack layer or a non-containing layer is often formed under the surface of the workpiece, resulting in deterioration of product characteristics.

発明の目的 本発明は上記の欠点を解消するもので、固定砥粒による
定寸切込み加工と定圧切込み加工の２工法を同一機械で
同時または単独で行なわせしめ、工程の省略と加工精度
の向上をはかる研磨加工機を提供するものである。Purpose of the Invention The present invention solves the above-mentioned drawbacks by allowing the same machine to simultaneously or independently perform two methods, ie, constant size cutting using fixed abrasive grains and constant pressure cutting, thereby omitting steps and improving machining accuracy. The present invention provides a measuring and polishing machine.

発明の構成 本発明は工作物ヘッドと砥石軸ヘッドとを対向し、回転
せしめ、螺旋溝より成る定寸送り装置と、抑圧装置より
成る定圧送り装置により、定寸送り、またけ、定圧送り
により、工作物ヘッド先端の被加工物と砥石軸ヘッド先
端の砥石を接触せしめ、研削加工ができるように構成さ
れており、定寸送りによる定寸切込み、定圧ａりによる
定圧切込みの切込み手段の同時または単独の切換えによ
り荒研磨仕上げより鏡面仕上げまで、同一機械で、短時
間に高精度で微細な加工面が容易に得られ、加工能率の
上昇により加工コストの低減もはかれるものである。Structure of the Invention The present invention has a workpiece head and a grindstone shaft head facing each other and are rotated, and a constant-pressure feed device consisting of a constant-size feed device consisting of a spiral groove and a suppression device is used to perform constant-size feed, straddling, and constant-pressure feed. , the workpiece at the tip of the workpiece head is brought into contact with the grindstone at the tip of the grindstone shaft head, and the grinding process can be performed. Alternatively, by single switching, it is possible to easily obtain finely machined surfaces with high precision from rough polishing to mirror finishing in a short time using the same machine, and it is also possible to reduce processing costs by increasing processing efficiency.

実施例の説明 以下、本発明の一実施例について説明する。第１図〜３
図において１は砥疲軸ヘッドで、回転速度可変のモータ
を内蔵一体化し、空気軸受で軸支され回動自在なスピン
ドル３を有している。砥石軸ヘッド１の軸方向先端部に
は微細固定砥粒より成る椀形砥石２が装着されている。DESCRIPTION OF EMBODIMENTS An embodiment of the present invention will be described below. Figures 1-3
In the figure, reference numeral 1 denotes an abrasive shaft head, which has a built-in and integrated motor with variable rotational speed and a rotatable spindle 3 supported by an air bearing. A bowl-shaped grindstone 2 made of fine fixed abrasive grains is attached to the axial tip of the grindstone shaft head 1.

４は砥石軸ヘッド１を搭載固定しているベースで、該ベ
ース４は砥石軸ヘッド１が砥石軸ヘッド１軸方向に移動
できるように平行に配設されている空気軸受で軸支され
微小な摺動抵抗の平面スライドニーニット５に端部で跨
座している。平行に配設されている平面スライドユニッ
ト６の中間にはベース４の下部に固着され下方に突出し
たＬ形の掛金具６と該掛金具６に隙間嵌合しているコ形
の連結子７を先端に装着し、連結子７と掛金具６とベー
ス４と平面スライドユニット６を介して砥石軸ヘッド１
を移動せしめる＋７　ニアモータ８が配設されている。Reference numeral 4 denotes a base on which the grinding wheel head 1 is mounted and fixed, and the base 4 is rotatably supported by air bearings arranged in parallel so that the grinding wheel head 1 can move in the axial direction of the grinding wheel head 1. The end part straddles the flat sliding knee knit 5 with sliding resistance. In the middle of the plane slide units 6 arranged in parallel, there is an L-shaped latch 6 that is fixed to the lower part of the base 4 and protrudes downward, and a U-shaped connector 7 that fits into the latch 6 with a gap. is attached to the tip, and the grinding wheel shaft head 1 is attached via the connector 7, latch 6, base 4, and flat slide unit 6.
A +7 near motor 8 is provided to move the .

該リニアモータ８は第３図の如く供給電流変化に応じて
推力が変化する、その推力は数ｇｒより約２に７まで可
変でき、反力にはフレキシブルである。As shown in FIG. 3, the thrust of the linear motor 8 changes according to changes in the supplied current.The thrust can be varied from several gr to about 2 to 7, and the reaction force is flexible.

１９は砥石軸ヘッド１の後退限を確定するストッパーテ
する。９は工作物ヘッドで回転速度可変のモータを内蔵
一体化し、空気軸受で軸支され回動自在なスピンドル１
０を有している。該工作物ヘッド９は軸方向先端に被加
工物を取付けるチャック１１が、椀形砥石２で被加工物
が研削される様に装着され、軸方向中心と砥石軸ヘッド
１の軸方向中心とが平行で第２図の如く偏心し、軸方向
に移動できるように平行に配設されているリニアウェイ
７３に両端部を跨座しているヘッドベース１２上に配設
されている。Reference numeral 19 denotes a stopper that determines the retraction limit of the grindstone shaft head 1. 9 is a workpiece head, which has a built-in and integrated motor with variable rotational speed, and a spindle 1 which is rotatably supported by an air bearing.
It has 0. A chuck 11 for attaching a workpiece to the axial tip of the workpiece head 9 is attached so that the workpiece is ground by the bowl-shaped grindstone 2, and the axial center of the grindstone shaft head 1 is aligned with the chuck 11. The head base 12 is disposed on the head base 12, which is parallel to the linear way 73, which is eccentric as shown in FIG.

前記平行に配設されているリニアウェイ１３の中間には
、ヘッドベース１２の下部に固着され、下方に突出し、
ボールネジ１６と螺合しているナツト１４を装着してい
るＬ４のプラケット１６が配設されている。１６はパル
スモータで減速機１７を介してボールネジ１５を回動せ
しめる様に配設されている。１８はパルスモータ１６を
保持しているモータブラケットである。In the middle of the linear ways 13 disposed in parallel, a ring is fixed to the lower part of the head base 12 and protrudes downward.
An L4 placket 16 is provided which is fitted with a nut 14 that is screwed into a ball screw 16. A pulse motor 16 is arranged to rotate the ball screw 15 via a speed reducer 17. 18 is a motor bracket that holds the pulse motor 16.

次に作用を第１〜４図により説明する。被加工物を取付
けだ工作物へノド９と砥石軸ヘッド１を相対回転せしめ
、工作物ヘッド９を被加工物と椀形砥石２が接触直前ま
でパルスモータ１６を急速回転せしめ早送りを行なう。Next, the operation will be explained with reference to FIGS. 1 to 4. The throat 9 and the grindstone shaft head 1 are rotated relative to the workpiece to which the workpiece is attached, and the pulse motor 16 is rapidly rotated to rapidly rotate the workpiece head 9 until just before the workpiece and the bowl-shaped grindstone 2 come into contact with each other.

続いて、第４図の如くパルスモータ１６を間歇回転せし
め、ボールネ少６ナツト１４による強制切込みによる定
寸切込み研削を行なう。定寸切込、っまり定寸ピッチ送
シとは切込み量Δ分に相当するパルスモータ１６の回転
後一定時間を停止の繰返しで、微小な切込み量Δ、例え
ば２００パルス、乍賑のパルスモータ１６、減速比％の
減速機１７．リード２間のボールネジ１５を使用すれば
切込み量Δ１　μｍも容易である。さらに面粗度のレベ
ルアップと寸法精度を更に向上させる為、定寸切込みを
停止し、リニアモータ８を起動し、一定推力を発生せし
め砥石の研削に応じた速度で研削加工が行なはれる。Subsequently, as shown in FIG. 4, the pulse motor 16 is rotated intermittently, and grinding is carried out by forced cutting using the ball screw nut 14. Constant depth of cut, fixed pitch feed is the repeated rotation of the pulse motor 16 corresponding to the depth of cut Δ, and then stopping for a certain period of time. 16. Reduction gear with reduction ratio %17. If the ball screw 15 between the leads 2 is used, the depth of cut Δ1 μm can be easily achieved. Furthermore, in order to further improve the level of surface roughness and dimensional accuracy, the fixed size cut is stopped, the linear motor 8 is activated, a constant thrust is generated, and the grinding process is performed at a speed corresponding to the grinding speed of the grinding wheel. .

定寸切込みの切込み量Δ、停止時間ｔ、及び定圧切込み
の推力下は被加工物の材質２寸法精度。The depth of cut Δ for constant size cut, the stop time t, and the thrust force for constant pressure cut are based on the dimensional accuracy of the material of the workpiece.

及び砥石軸ヘッド１と工作物ヘッド９との相対回転速度
に応じて適宜変えればよい。所定の定圧切込み研削が終
了すれば砥石軸ヘッド１はリニアモータ８で、工作物ヘ
ッド９はパルスモータ１６の駆動で早戻りし砥石軸ヘッ
ド１．工作物ヘッド９とも相対回転を停止し研削加工は
終了する。It may be changed as appropriate depending on the relative rotational speed between the grindstone head 1 and the workpiece head 9. When the predetermined constant pressure cutting grinding is completed, the grindstone head 1 is driven by the linear motor 8 and the workpiece head 9 is quickly returned by the pulse motor 16. The relative rotation with the workpiece head 9 is also stopped, and the grinding process is completed.

以下、本発明の第２の実施例を第５図により説明すると
、砥石軸ヘッド１に微小固定砥粒よりなる円筒形砥石２
１を装着し工作物へンド９の軸心の１点と砥石軸ヘッド
１の軸心が交叉する様に配設し、前記の軸心方向に砥石
軸ヘッド１と工作物ヘッド９に本発明筒１の実施例の定
寸送り装置と定圧送り装置をそれぞれ配設すると球面を
要するワーク２２の様な球面加工も微細で高精度な加工
が容易にできるものである。Hereinafter, a second embodiment of the present invention will be described with reference to FIG.
1 is mounted so that one point of the axis of the workpiece head 9 intersects with the axis of the grindstone shaft head 1, and the present invention is attached to the grindstone shaft head 1 and the workpiece head 9 in the axial direction. When the constant size feed device and the constant pressure feed device of the embodiment of the cylinder 1 are respectively provided, fine and highly accurate machining of a spherical surface such as the workpiece 22 which requires a spherical surface can be easily performed.

発明の効果 以上の様に本発明は回転式平面研磨加工機に螺旋溝によ
る定寸送り装置と押圧装置を設ける事により定寸切込み
による平面研削加工と定圧切込みによるラップ類似加工
、ボリシング類似加工が一台の機械により行なえ、工程
の省略化と微小送り量のコントロールにより低加工歪の
加工と寸法精度の向上がはかれその効果は大なるもので
ある。Effects of the Invention As described above, the present invention provides a rotary surface polishing machine with a fixed size feeding device and a pressing device using a spiral groove, so that surface grinding with a fixed size cut, lapping-like processing and boring-like processing with a constant pressure cut can be performed. It can be carried out with a single machine, and by simplifying the process and controlling the minute feed amount, it is possible to achieve processing with low machining distortion and improvement of dimensional accuracy, which has great effects.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本発明の第１の実施例における研磨加工機の主
要部の断面図、第２図は同平面図、第３図はリニアモー
タの電流−推力の関係図、第４図は定寸切込み、定圧切
込みを示す図、第５図は本発明の第２の実施例における
研磨加工機の主要部の平面図である。 １・・・・・・砥石軸ヘッド、８・・・・・・リニアモ
ータ、９・・・・・・工作物ヘッド、１４・・・・・ナ
ツト、１５・・・・・ボールネジ、２０・・・・・・パ
ルスモータ。 代理人の氏名　弁理士　中　尾　敏　男　ほか１名第３
図 うＱアうＬｔ 第４図 第５図FIG. 1 is a sectional view of the main parts of a polishing machine according to the first embodiment of the present invention, FIG. 2 is a plan view of the same, FIG. 3 is a diagram of the relationship between linear motor current and thrust, and FIG. FIG. 5 is a plan view of the main parts of a polishing machine according to a second embodiment of the present invention. 1... Grinding wheel shaft head, 8... Linear motor, 9... Workpiece head, 14... Nut, 15... Ball screw, 20. ...Pulse motor. Name of agent: Patent attorney Toshio Nakao and 1 other person No. 3
Figure 4 Figure 5

Claims (2)

【特許請求の範囲】[Claims] （１）螺旋溝によシ一定量だけ強制して送る送り装置と
、一定の力で押圧する抑圧装置とからなり、前記送り装
置および抑圧装置の一方に被加工物を設け、かつ他方に
前記被加工物を研磨する砥石を設けた研磨加工機。(1) Consisting of a feeding device that forcibly feeds the spiral groove by a certain amount, and a suppressing device that presses with a certain force, one of the feeding device and the suppressing device is provided with the workpiece, and the other is provided with the workpiece. A polishing machine equipped with a whetstone to polish the workpiece. （２）前記抑圧装置がリニアモータよ構成る装置である
特許請求の範囲第１項記載の研磨加工機。(2) The polishing machine according to claim 1, wherein the suppression device is a device constituted by a linear motor.