JPS5883151U - wafer blower - Google Patents

wafer blower

Info

Publication number
JPS5883151U
JPS5883151U JP17897581U JP17897581U JPS5883151U JP S5883151 U JPS5883151 U JP S5883151U JP 17897581 U JP17897581 U JP 17897581U JP 17897581 U JP17897581 U JP 17897581U JP S5883151 U JPS5883151 U JP S5883151U
Authority
JP
Japan
Prior art keywords
wafer
stage
wafer prober
wafer blower
blower
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17897581U
Other languages
Japanese (ja)
Inventor
中川　啓一
Original Assignee
日本電気ホームエレクトロニクス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電気ホームエレクトロニクス株式会社 filed Critical 日本電気ホームエレクトロニクス株式会社
Priority to JP17897581U priority Critical patent/JPS5883151U/en
Publication of JPS5883151U publication Critical patent/JPS5883151U/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案装置の上面図、第２図はその正面図であ
る。また第３図はウェハー上に載置される半導体ペレッ
トの拡大上面図である。 １・・・・・・基準面、２・・・・・・ステージ、３・
・・・・・測定針、４・・・・・・プローブヘッド、５
・・・・・・プローブヘッド保持リング、６・・・・・
・ウェハー、７・・・・・・ウェハー支持装置、９・・
・・・・ウェハープローバ一本体、Ｅ・・・・・・エミ
ッタ、Ｂ・・・・・・ベース。FIG. 1 is a top view of the device of the present invention, and FIG. 2 is a front view thereof. Further, FIG. 3 is an enlarged top view of a semiconductor pellet placed on a wafer. 1... Reference plane, 2... Stage, 3...
...Measuring needle, 4...Probe head, 5
...Probe head retaining ring, 6...
・Wafer, 7...Wafer support device, 9...
...Wafer prober body, E...emitter, B...base.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ステージ上に測定針取付用のプローブヘッドを設けたウ
ェハープローバーであって、該プローブヘッド番な測定
針の配設個数に応じて複数個に分割されたリング状部材
に敢行けられており、該リング状部材は前記ステージ上
で半径方向および円周方向に沿って移動自在に形成され
ていることを特徴とする前記ウェハープローバー。This is a wafer prober with a probe head for attaching measuring needles on a stage. The wafer prober, wherein the ring-shaped member is formed to be movable along the radial direction and the circumferential direction on the stage.
JP17897581U 1981-11-30 1981-11-30 wafer blower Pending JPS5883151U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17897581U JPS5883151U (en) 1981-11-30 1981-11-30 wafer blower

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17897581U JPS5883151U (en) 1981-11-30 1981-11-30 wafer blower

Publications (1)

Publication Number Publication Date
JPS5883151U true JPS5883151U (en) 1983-06-06

Family

ID=29974252

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17897581U Pending JPS5883151U (en) 1981-11-30 1981-11-30 wafer blower

Country Status (1)

Country Link
JP (1) JPS5883151U (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4530337Y1 (en) * 1967-12-04 1970-11-20
JPS4873081A (en) * 1971-12-17 1973-10-02

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4530337Y1 (en) * 1967-12-04 1970-11-20
JPS4873081A (en) * 1971-12-17 1973-10-02

Similar Documents

Publication Publication Date Title
JPS5883151U (en) wafer blower
JPS58144617U (en) Magnetic head device for flexible magnetic disk
JPS58127369U (en) Measuring device for PNP transistor
JPS5895840U (en) Air needle using a syringe needle
JPS6355175U (en)
JPS60122010U (en) Structure of sliding body
JPS5897838U (en) semiconductor element
JPS5915906U (en) measurement table
JPS5968403U (en) Eyelet fitting
JPS5966105U (en) touch sensor
JPS5889937U (en) semiconductor equipment
JPS5876187U (en) Timer operating device
JPS59143668U (en) Retaining ring assembly machine
JPS5966956U (en) Record size detection device
JPS58142955U (en) thermocut pull
JPS5862267U (en) suction discharge nozzle
JPS6192878U (en)
JPS6336042U (en)
JPS6080353U (en) Measuring instrument probe
JPS59189240U (en) die bonding equipment
JPS5812938U (en) semiconductor wafer
JPS58116607U (en) Air micrometer measuring head for outer diameter measurement equipped with air cutoff device
JPS60173001U (en) Comparative measurement tool presetter
JPS6064246U (en) Sample stand for thermogravimetric measuring device
JPS5960549U (en) Body fluid component measuring device