JPS5829851U - 半導体素子 - Google Patents

半導体素子

Info

Publication number
JPS5829851U
JPS5829851U JP12423581U JP12423581U JPS5829851U JP S5829851 U JPS5829851 U JP S5829851U JP 12423581 U JP12423581 U JP 12423581U JP 12423581 U JP12423581 U JP 12423581U JP S5829851 U JPS5829851 U JP S5829851U
Authority
JP
Japan
Prior art keywords
titanium
semiconductor element
layer
thickness
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12423581U
Other languages
English (en)
Inventor
日比野 光利
Original Assignee
三菱電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 三菱電機株式会社 filed Critical 三菱電機株式会社
Priority to JP12423581U priority Critical patent/JPS5829851U/ja
Publication of JPS5829851U publication Critical patent/JPS5829851U/ja
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/8319Arrangement of the layer connectors prior to mounting
    • H01L2224/83191Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on the semiconductor or solid-state body

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Die Bonding (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【図面の簡単な説明】
第1図はバックメタライズに金電極構造を用いた従来の
半導体素子の要部のみを示す断面図、第2図はこの考案
の一実施例の要部のみを示す断面図である。 図において、1はシリコンチップ(シリコン基、体)、
2はチタン層、3は金電極、4は窒化チタン層である。 なお、図中同一符号は同一または相当部分を示す。

Claims (2)

    【実用新案登録請求の範囲】
  1. (1)シリコン基体上にチタン層を形成し、このチタン
    層上に窒化チタン層を介して金電極を形成してなること
    を特徴とする半導体素子。
  2. (2)窒化チタン層の厚さをチタン層の厚さより大きく
    したことを特徴とする実用新案登録請求の範囲第1項記
    載の半導体素子。
JP12423581U 1981-08-21 1981-08-21 半導体素子 Pending JPS5829851U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12423581U JPS5829851U (ja) 1981-08-21 1981-08-21 半導体素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12423581U JPS5829851U (ja) 1981-08-21 1981-08-21 半導体素子

Publications (1)

Publication Number Publication Date
JPS5829851U true JPS5829851U (ja) 1983-02-26

Family

ID=29918113

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12423581U Pending JPS5829851U (ja) 1981-08-21 1981-08-21 半導体素子

Country Status (1)

Country Link
JP (1) JPS5829851U (ja)

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