JPS5812653B2 - How to manufacture stylus parts - Google Patents
How to manufacture stylus partsInfo
- Publication number
- JPS5812653B2 JPS5812653B2 JP50056958A JP5695875A JPS5812653B2 JP S5812653 B2 JPS5812653 B2 JP S5812653B2 JP 50056958 A JP50056958 A JP 50056958A JP 5695875 A JP5695875 A JP 5695875A JP S5812653 B2 JPS5812653 B2 JP S5812653B2
- Authority
- JP
- Japan
- Prior art keywords
- molybdenum
- alloys containing
- chromium
- titanium
- stylus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
- G11B9/06—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using record carriers having variable electrical capacitance; Record carriers therefor
- G11B9/07—Heads for reproducing capacitive information
- G11B9/075—Heads for reproducing capacitive information using mechanical contact with record carrier, e.g. by stylus
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Elimination Of Static Electricity (AREA)
Description
【発明の詳細な説明】
本発明は、静電方式のビデオディスク装置に用いるスタ
イラス部品の製造方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method of manufacturing a stylus component used in an electrostatic video disk device.
画像再生装置として静電方式のビデオディスク装置が用
いられている。An electrostatic video disk device is used as an image reproducing device.
このビデオディスク装置は、回転可能な円盤状の記録板
に螺旋状の溝を設け、この溝の内部に信号となる複数個
の凸状部を設け、少くとも上記凸状部を有する溝の表面
を導電層電極で被覆し、この導電層電極の表面を誘電体
層で被覆し、上記構内を追跡し上記複数個の凸状部と選
択的に接触し、静電容量の変化を出力信号として検出す
るダイヤモンドスタイラスを備え、このダイヤモンドス
タイラスの少くとも先端表面部に導電層電極を設けたも
のである。This video disc device has a rotatable disk-shaped recording plate provided with a spiral groove, a plurality of convex portions serving as signals inside the groove, and at least a surface of the groove having the convex portions. is covered with a conductive layer electrode, and the surface of this conductive layer electrode is covered with a dielectric layer, which traces the above structure and selectively contacts the plurality of convex portions, and changes in capacitance are used as an output signal. It is equipped with a diamond stylus for detection, and a conductive layer electrode is provided on at least the surface of the tip of the diamond stylus.
この種の装置において、従来、ダイヤモンドスタイラス
先端表面部に設ける導電層電極は、例えば真空蒸着によ
りアルミニウム膜をダイヤモンドスタイラス先端表面に
付着させて形成していたが、付着性が極めて悪く、剥離
する上、演奏により摩耗消滅する欠点があった。Conventionally, in this type of device, the conductive layer electrode provided on the surface of the tip of the diamond stylus was formed by adhering an aluminum film to the surface of the tip of the diamond stylus, for example, by vacuum evaporation, but the adhesion was extremely poor and it often peeled off. However, it had the disadvantage of being worn out by playing.
本発明はこのような従来の欠点を解消したもので、以下
その一実施例について図面を用いて説明する。The present invention eliminates these conventional drawbacks, and one embodiment thereof will be described below with reference to the drawings.
図において１は矢印７方向へ回転可能な円盤状の記録板
であり、表面に螺旋状の溝が形成され、この溝の底面に
は記録すべき信号に応じ間隔が相隣る同士異なる凸状部
６を複数個形成する。In the figure, 1 is a disc-shaped recording plate that can be rotated in the direction of arrow 7, and has a spiral groove formed on its surface, and the bottom of this groove has convex shapes arranged at different intervals depending on the signal to be recorded. A plurality of portions 6 are formed.
この記録板１の表面、あるいは少くとも上記凸状部６を
含む溝の表面には導電層電極４が被覆され、かつこの導
電層電極４の表面には誘電体層５が被覆されている。The surface of the recording plate 1, or at least the surface of the groove including the convex portion 6, is coated with a conductive layer electrode 4, and the surface of the conductive layer electrode 4 is coated with a dielectric layer 5.
一方、従来のレコードスタイラスと同様、溝内を追跡す
る一本のダイヤモンドスタイラス２は少くとも先端表面
部にチタン合金からなる導電層電極３が被覆されている
。On the other hand, like a conventional record stylus, a single diamond stylus 2 that tracks inside the groove has at least its tip surface covered with a conductive layer electrode 3 made of a titanium alloy.
したがって記録板１の回転に従い上記ダイヤモンドスタ
イラス２は溝をトレースし、凸状部６と選択的に接触し
、ダイヤモンドスタイラス２の導電層電極３と記録板１
の導電層電極４との間隔の変化によって生ずる静電容量
の変化を出力信号として検出する。Therefore, as the recording plate 1 rotates, the diamond stylus 2 traces the groove and selectively contacts the convex portion 6, and the conductive layer electrode 3 of the diamond stylus 2 and the recording plate 1
A change in capacitance caused by a change in the distance between the conductive layer electrode 4 and the conductive layer electrode 4 is detected as an output signal.
上記導電層電極３のチタン合金として、例えばＴｉ−５
Ａｌ−２Ｃｒ−１Ｆｅ合金を上記ダイヤモンドスタイラ
ス２上にスパッタリング蒸着し、真空中において８００
〜２０００℃の温度でたとえば１時間熱処理を行なうと
、硬く付着性、耐磨耗性の大きい導電層電極３がダイヤ
モンドスタイラス２上に形成される事を見い出した。As the titanium alloy of the conductive layer electrode 3, for example, Ti-5
An Al-2Cr-1Fe alloy was sputter-deposited on the diamond stylus 2 and heated to 800°C in vacuum.
It has been found that a conductive layer electrode 3 that is hard, adhesive, and highly abrasion resistant is formed on the diamond stylus 2 by heat treatment at a temperature of -2000 DEG C. for, for example, one hour.
その導電層電極は５ｋｇ／ｍｍ２以上の引張り力でも剥
離しないすぐれた特性を示し、ダイヤモンドスタイラス
２の寿命は数１００時間以上に達する。The conductive layer electrode exhibits an excellent property of not peeling off even with a tensile force of 5 kg/mm2 or more, and the life of the diamond stylus 2 reaches several hundred hours or more.
この付着力の大きい理由は、上記ダイヤモンドスタイラ
ス２表面層に上記チタン合金成分中のチタンが拡散した
り、あるいはスタイラス表面層のダイヤモンドと上記チ
タンが化学反応したためと考えられる。The reason for this large adhesion force is thought to be that titanium in the titanium alloy component diffuses into the surface layer of the diamond stylus 2, or that the diamond in the stylus surface layer and the titanium undergo a chemical reaction.
また上記電極の優れた耐摩耗性は、上記チタン合金スパ
ツタ膜が機械的強度、および耐熱特性共に優れている事
に起因している。Further, the excellent wear resistance of the electrode is due to the fact that the titanium alloy sputtered film has excellent mechanical strength and heat resistance.
なおこの場合、熱処理雰囲気、温度が重要である。In this case, the heat treatment atmosphere and temperature are important.
すなわちダイヤモンドスタイラス２が熱処理により酸化
されないために、雰囲気は非酸化性雰囲気たとえば真空
、アルゴンガス雰囲気でなければならない。That is, in order that the diamond stylus 2 is not oxidized by heat treatment, the atmosphere must be a non-oxidizing atmosphere, such as a vacuum or an argon gas atmosphere.
また熱処理温度が８００℃未満では、上記蒸着金属のダ
イヤモンドへの拡散あるいはダイヤモンド表面層におけ
る化学結合が行なわれず、上記蒸着金属の付着性が悪い
。If the heat treatment temperature is less than 800° C., the vapor-deposited metal will not diffuse into the diamond or chemically bond in the diamond surface layer, resulting in poor adhesion of the vapor-deposited metal.
また熱処理温度が２０００℃を超えると、たとえば極く
微量の酸素ガスが雰囲気に存在しても、ダイヤモンドス
タイラスの表面あるいは全体が酸化し、実用に供しない
。Furthermore, if the heat treatment temperature exceeds 2000° C., even if a very small amount of oxygen gas is present in the atmosphere, the surface or the entire diamond stylus will be oxidized, making it unusable.
この場合、チタン合金として上記の実施例に限らず、パ
ラジウム、アルミニウム、銅、スズ、クロム、モリブデ
ン、鉄、バナジウム、マンガンのうちの一種または数種
を含むチタンの合金であれば付着性、耐摩耗性共に優れ
ている。In this case, the titanium alloy is not limited to the above examples, but any titanium alloy containing one or more of palladium, aluminum, copper, tin, chromium, molybdenum, iron, vanadium, and manganese has good adhesion and resistance. Excellent wear resistance.
すなわち、その組成の具体例を示すと、Ｔｉ−０．５Ｐ
ｄ、Ｔｉ−５Ａｌ−２．５Ｓｎ，Ｔｉ−５Ａｌ−２Ｃｒ
−１Ｍｏ，Ｔｉ−２Ａｌ−２Ｆｅ，Ｔｉ−５Ａｌ−１Ｍ
ｏ，Ｔｉ−６Ａｌ−４Ｖ，Ｔｉ−４Ａｌ−４Ｍｎ，Ｔｉ
−４Ａｌ−３Ｍｏ−１Ｖ，Ｔｉ−８Ａｌ−１Ｍｏ−１Ｖ
，Ｔｉ−７Ａｌ−４Ｍｏ．Ｔｉ−８Ｍｎ．Ｔｉ−１３Ｖ
−１１Ｃｒ−３Ａｌ等である。That is, to give a specific example of its composition, Ti-0.5P
d, Ti-5Al-2.5Sn, Ti-5Al-2Cr
-1Mo, Ti-2Al-2Fe, Ti-5Al-1M
o, Ti-6Al-4V, Ti-4Al-4Mn, Ti
-4Al-3Mo-1V, Ti-8Al-1Mo-1V
, Ti-7Al-4Mo. Ti-8Mn. Ti-13V
-11Cr-3Al, etc.
以上の実施例ではチタン合金を示したが、チタン合金以
外にクロム合金、モリブデン合金、タングステン合金、
ニオブ合金、タンタル合金、ジルコニウム合金も有効で
ある。In the above examples, titanium alloy was shown, but in addition to titanium alloy, chromium alloy, molybdenum alloy, tungsten alloy,
Niobium alloys, tantalum alloys, and zirconium alloys are also effective.
すなわちモリブデン、鉄、コバルト、チタンのうちの一
種または数種を含むクロム合金、アルミニウム、クロム
、シリコン、ニッケル、硼素のうちの一種または数種を
含むモリブデン合金、モリブデン、ジルコニウム、ニオ
ブ、タンタルのうちの一種または数種を含むタングステ
ン合金、タングステン、チタン、バナシウム、モリブデ
ン、ジルコニウムの一種または数種を含むニオブ合金、
チタン、ハフニウム、タングステン、二オ
リブデン、バナジウムのうちの一種または数種を含むタ
ンタル合金、錫、鉄、ニッケル、クロム、ニオブ、銅、
モリブデンのうちの一種または数種を含むジルコニウム
合金が有効である。Namely, chromium alloys containing one or more of molybdenum, iron, cobalt, and titanium, molybdenum alloys containing one or more of aluminum, chromium, silicon, nickel, and boron, molybdenum, zirconium, niobium, and tantalum. Tungsten alloys containing one or more of tungsten, titanium, vanadium, molybdenum, niobium alloys containing one or more of zirconium,
Tantalum alloys containing one or more of titanium, hafnium, tungsten, diolibdenum, vanadium, tin, iron, nickel, chromium, niobium, copper,
Zirconium alloys containing one or more molybdenum are effective.
これらの合金膜の形成は、上記実施例ではスパッタリン
グ蒸着を用いよが、これは合金膜の蒸着が組成の変化少
なく実現出来るためで、これに類似した構成であればい
ずれの構成でもよく、スパッタリング蒸着に限定しない
。In the above embodiments, sputtering deposition is used to form these alloy films, but this is because the alloy film can be deposited with little change in composition, and any structure similar to this may be used. It is not limited to vapor deposition.
例えばイオンビーム蒸着でも可能である。For example, ion beam evaporation is also possible.
なお、熱処理を上記実施例では真空中で行なったが、炭
化性雰囲気例えばメタンガス中、あるいは窒化性雰囲気
例えばアンモニア中で行なうと、上記合金層の表面がそ
れぞれ炭化および窒化し機械的強度がより改良される。In the above examples, the heat treatment was carried out in vacuum, but if the heat treatment is carried out in a carbonizing atmosphere such as methane gas or in a nitriding atmosphere such as ammonia, the surface of the alloy layer will be carbonized and nitrided, respectively, and the mechanical strength will be further improved. be done.
以上のように本発明によれば、実用寿命の着るしく長い
ダイヤモンドスタイラスを提供でき、ビデオディスク装
置に用いて大なる効果を奏する。As described above, according to the present invention, it is possible to provide a diamond stylus with a comfortable and long practical life, and it can be used in a video disc device with great effects.
図は本発明により得られるスタイラス部品を用いたビデ
オディスク装置の一例を示す要部断面図である。
１・・・・・・記録板、２・・・・・・ダイヤモンドス
タイラス、３・・・・・・導電層電極、４・・・・・・
導電層電極、５・・・・・・誘電体層、６・・・・・・
凸状部。The figure is a sectional view of essential parts showing an example of a video disc device using a stylus component obtained according to the present invention. 1... Recording plate, 2... Diamond stylus, 3... Conductive layer electrode, 4...
Conductive layer electrode, 5...Dielectric layer, 6...
Convex part.
Claims (1)
着により、パラジウム、アルミニウム、銅、スズ、クロ
ム、モリブデン、鉄、バナジウム、マンガンのうちの一
種または数種を含むチタン合金、モリブデン、鉄、コバ
ルト、チタンのうちの一種または数種を含むクロム合金
、アルミニウム、クロム、シリコン、ニッケル、硼素の
うちの一種または数種を含むモリブデン合金、モリブデ
ン、ジルコニウム、ニオブ、タンタルのうちの一種また
は数種を含むタングステン合金、タングステン、チタン
、バナジウム、モリブデン、ジルコニウムの一種または
数種を含むニオブ合金、チタン、ハフニウム、タングス
テン、ニオフ、ジルコニウム、クロム、モリブデン、バ
ナジウムのうちの一種または数種を含むタンタル合金、
錫、鉄、ニッケル、クロム、ニオブ、銅、モリブデンの
うちの一種または数種を含むジルコニウム合金から選ば
れた一種よりなる導電層を形成した後、これを非酸化性
雰囲気において８００〜２０００℃の温度で熱処理する
ことを特徴とするスタイラス部品の製造方法。1 Titanium alloys containing one or more of palladium, aluminum, copper, tin, chromium, molybdenum, iron, vanadium, and manganese, molybdenum, iron, cobalt, and titanium are deposited on at least the tip surface of the diamond stylus. Chromium alloys containing one or more of these; molybdenum alloys containing one or more of aluminum, chromium, silicon, nickel, and boron; tungsten alloys containing one or more of molybdenum, zirconium, niobium, and tantalum; , niobium alloys containing one or more of tungsten, titanium, vanadium, molybdenum, and zirconium; tantalum alloys containing one or more of titanium, hafnium, tungsten, nioff, zirconium, chromium, molybdenum, and vanadium;
After forming a conductive layer made of one selected from zirconium alloys containing one or more of tin, iron, nickel, chromium, niobium, copper, and molybdenum, this is heated at 800 to 2000°C in a non-oxidizing atmosphere. A method for manufacturing a stylus component characterized by heat treatment at a temperature.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50056958A JPS5812653B2 (en) | 1975-05-13 | 1975-05-13 | How to manufacture stylus parts |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50056958A JPS5812653B2 (en) | 1975-05-13 | 1975-05-13 | How to manufacture stylus parts |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51131622A JPS51131622A (en) | 1976-11-16 |
| JPS5812653B2 true JPS5812653B2 (en) | 1983-03-09 |
Family
ID=13042036
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50056958A Expired JPS5812653B2 (en) | 1975-05-13 | 1975-05-13 | How to manufacture stylus parts |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5812653B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4315358A (en) * | 1980-04-21 | 1982-02-16 | Rca Corporation | Method for the manufacture of capacitive pickup styli |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4966102A (en) * | 1972-09-06 | 1974-06-26 |
-
1975
- 1975-05-13 JP JP50056958A patent/JPS5812653B2/en not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4966102A (en) * | 1972-09-06 | 1974-06-26 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51131622A (en) | 1976-11-16 |
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