JPS5795633A - Etching method - Google Patents
Etching methodInfo
- Publication number
- JPS5795633A JPS5795633A JP17170180A JP17170180A JPS5795633A JP S5795633 A JPS5795633 A JP S5795633A JP 17170180 A JP17170180 A JP 17170180A JP 17170180 A JP17170180 A JP 17170180A JP S5795633 A JPS5795633 A JP S5795633A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- region
- etching
- oxide film
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 title abstract 6
- 238000000034 method Methods 0.000 title abstract 3
- 239000000758 substrate Substances 0.000 abstract 5
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 abstract 2
- 229910052596 spinel Inorganic materials 0.000 abstract 2
- 239000011029 spinel Substances 0.000 abstract 2
- 239000007788 liquid Substances 0.000 abstract 1
- 239000000395 magnesium oxide Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- ing And Chemical Polishing (AREA)
Abstract
PURPOSE:To form concave parts having different depths or concave parts having stepped parts in a substrate by selectively forming a film whose etching speed is slower than that of the substrate on a plurality of regions on the surface of of the substrate with the thickness being changed. CONSTITUTION:In the process of preparing the element separating substrate of e.g. magnesia spinel, an oxide film 2 of 6,000Angstrom is formed on the (100) substrate 1. Then the film 2 in a low voltage withstanding element forming region is etched and removed, and the oxide film of 2,000Angstrom is formd in a hole. Thereafter the film 2 on a high voltage withstanding region 5 is etched and removed. Then, e.g., the etching of the region 5 and etching of the oxide film in the hole and its lower region are performed by anisotropic etching by using e.g. KOH liquid. Thus the concave parts 6 and 8 having different depths are formed. Or thin oxide film is partially provided in the hole region, and the structure having the step in the concave part is formed. Thereafter, a spinel layer 9 and an Si layer are sequentially grown epitaxially in the concave parts 6 and 8, and a transistor and the like are formed in the Si layer. Thus the element forming region having different voltage withstanding properties can be formed by one etching process.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17170180A JPS5795633A (en) | 1980-12-05 | 1980-12-05 | Etching method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17170180A JPS5795633A (en) | 1980-12-05 | 1980-12-05 | Etching method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5795633A true JPS5795633A (en) | 1982-06-14 |
Family
ID=15928071
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17170180A Pending JPS5795633A (en) | 1980-12-05 | 1980-12-05 | Etching method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5795633A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4861731A (en) * | 1988-02-02 | 1989-08-29 | General Motors Corporation | Method of fabricating a lateral dual gate thyristor |
US4882294A (en) * | 1988-08-17 | 1989-11-21 | Delco Electronics Corporation | Process for forming an epitaxial layer having portions of different thicknesses |
US5049522A (en) * | 1990-02-09 | 1991-09-17 | Hughes Aircraft Company | Semiconductive arrangement having dissimilar, laterally spaced layer structures, and process for fabricating the same |
DE4132105A1 (en) * | 1990-09-26 | 1992-04-09 | Hitachi Ltd | Prodn. of curved structure for e.g. semiconductor accelerometer - comprises two=stage anisotropic etching of wafer using different masks |
US6693045B2 (en) | 2001-03-02 | 2004-02-17 | Benq Corporation | High density wafer production method |
US7485238B2 (en) * | 2001-08-31 | 2009-02-03 | Daishinku Corporation | Etching method, etched product formed by the same, and piezoelectric vibration device, method for producing the same |
-
1980
- 1980-12-05 JP JP17170180A patent/JPS5795633A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4861731A (en) * | 1988-02-02 | 1989-08-29 | General Motors Corporation | Method of fabricating a lateral dual gate thyristor |
US4882294A (en) * | 1988-08-17 | 1989-11-21 | Delco Electronics Corporation | Process for forming an epitaxial layer having portions of different thicknesses |
US5049522A (en) * | 1990-02-09 | 1991-09-17 | Hughes Aircraft Company | Semiconductive arrangement having dissimilar, laterally spaced layer structures, and process for fabricating the same |
DE4132105A1 (en) * | 1990-09-26 | 1992-04-09 | Hitachi Ltd | Prodn. of curved structure for e.g. semiconductor accelerometer - comprises two=stage anisotropic etching of wafer using different masks |
US6693045B2 (en) | 2001-03-02 | 2004-02-17 | Benq Corporation | High density wafer production method |
US7485238B2 (en) * | 2001-08-31 | 2009-02-03 | Daishinku Corporation | Etching method, etched product formed by the same, and piezoelectric vibration device, method for producing the same |
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