JPS5789480A - Etchant for transparent electric conductive film - Google Patents
Etchant for transparent electric conductive filmInfo
- Publication number
- JPS5789480A JPS5789480A JP16619780A JP16619780A JPS5789480A JP S5789480 A JPS5789480 A JP S5789480A JP 16619780 A JP16619780 A JP 16619780A JP 16619780 A JP16619780 A JP 16619780A JP S5789480 A JPS5789480 A JP S5789480A
- Authority
- JP
- Japan
- Prior art keywords
- acid
- etchant
- conductive film
- electric conductive
- transparent electric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To perform etching excellent in accuracy at a high speed, by using an acidic water solution containing a specified metal ion and an organic acid as an etchant for a SnO2 type transparent electric conductive film for use as a display electrode.
CONSTITUTION: A transparent electric conductive film based on SnO2 to which 0.01W1.0mol% of a pentavalent oxide such as Sb2O5 or P2O5 is used as a display electrode. An acidic water solution containing 0.5N or more of one or more inorganic acids such as hydrochloric acid, hydrobromic acid, hydroiodic acid, nitric acid, sulfuric acid and phosphoric acid, a metal ion having a reduction.oxidation potential of -0.2V(vs.NHE) or less and 5g/l or more of an organic acid such as tartaric acid, malonic acid, lactic acid or stearic acid, is used as an etchant when the display electrode is patterned by etching. The etchant assures high speed etching with high accuracy for a long period.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16619780A JPS5789480A (en) | 1980-11-26 | 1980-11-26 | Etchant for transparent electric conductive film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16619780A JPS5789480A (en) | 1980-11-26 | 1980-11-26 | Etchant for transparent electric conductive film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5789480A true JPS5789480A (en) | 1982-06-03 |
| JPS6211071B2 JPS6211071B2 (en) | 1987-03-10 |
Family
ID=15826883
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16619780A Granted JPS5789480A (en) | 1980-11-26 | 1980-11-26 | Etchant for transparent electric conductive film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5789480A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61145529A (en) * | 1984-12-19 | 1986-07-03 | Matsushita Electric Ind Co Ltd | Formation of transparent electrode pattern |
| US5514293A (en) * | 1993-03-26 | 1996-05-07 | Nippon Paint Co., Ltd. | Acidic cleaning aqueous solution for aluminum and aluminum alloy and process for cleaning the same |
| JP2009503825A (en) * | 2005-07-25 | 2009-01-29 | メルク パテント ゲゼルシャフト ミット ベシュレンクテル ハフトング | Etching medium for etching a transparent conductive layer of oxide |
-
1980
- 1980-11-26 JP JP16619780A patent/JPS5789480A/en active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61145529A (en) * | 1984-12-19 | 1986-07-03 | Matsushita Electric Ind Co Ltd | Formation of transparent electrode pattern |
| JPH0318737B2 (en) * | 1984-12-19 | 1991-03-13 | Matsushita Electric Ind Co Ltd | |
| US5514293A (en) * | 1993-03-26 | 1996-05-07 | Nippon Paint Co., Ltd. | Acidic cleaning aqueous solution for aluminum and aluminum alloy and process for cleaning the same |
| JP2009503825A (en) * | 2005-07-25 | 2009-01-29 | メルク パテント ゲゼルシャフト ミット ベシュレンクテル ハフトング | Etching medium for etching a transparent conductive layer of oxide |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6211071B2 (en) | 1987-03-10 |
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