JPS5788411A - Forming method of optical waveguide - Google Patents

Forming method of optical waveguide

Info

Publication number
JPS5788411A
JPS5788411A JP55164093A JP16409380A JPS5788411A JP S5788411 A JPS5788411 A JP S5788411A JP 55164093 A JP55164093 A JP 55164093A JP 16409380 A JP16409380 A JP 16409380A JP S5788411 A JPS5788411 A JP S5788411A
Authority
JP
Japan
Prior art keywords
waveguide
layer
refractive index
forming
diffusion part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55164093A
Other languages
Japanese (ja)
Other versions
JPH041323B2 (en
Inventor
Minoru Kiyono
Hiroki Nakajima
Ippei Sawaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP55164093A priority Critical patent/JPS5788411A/en
Publication of JPS5788411A publication Critical patent/JPS5788411A/en
Publication of JPH041323B2 publication Critical patent/JPH041323B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/134—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms
    • G02B6/1342—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms using diffusion

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

PURPOSE:To obtain a waveguide having an optional optical distribution structure, by forming a diffusion substance to a multistage in accordance with a refractive index distribution of a desired waveguide and performing its thermal diffusion, when forming an optical waveguide. CONSTITUTION:A Ti layer 2 of the first stage is obtained by forming the Ti layer on an LiNbO3 substrate 1 by means of vapor-deposition or sputtering, and patterning the Ti layer in accordance with a waveguide. Width of the waveguide is decided by width of the Ti layer 2. Subsequently, a Ti layer 12 of the second stage is formed in the same way by applying a resist on the whole surface and patterning the resist layer. Thereafter, when the substrate 1 is treated by heating for 4-11 hours at 950-1,050 deg.C, a single diffusion part 2' whose refractive index is varied slightly and a double diffusion part 12' whose refractive index is varied remarkably are obtained. In the same way, a multistage diffusion part is formed. In this way, a waveguide having an optional optical distribution structure is obtained.
JP55164093A 1980-11-21 1980-11-21 Forming method of optical waveguide Granted JPS5788411A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55164093A JPS5788411A (en) 1980-11-21 1980-11-21 Forming method of optical waveguide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55164093A JPS5788411A (en) 1980-11-21 1980-11-21 Forming method of optical waveguide

Publications (2)

Publication Number Publication Date
JPS5788411A true JPS5788411A (en) 1982-06-02
JPH041323B2 JPH041323B2 (en) 1992-01-10

Family

ID=15786631

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55164093A Granted JPS5788411A (en) 1980-11-21 1980-11-21 Forming method of optical waveguide

Country Status (1)

Country Link
JP (1) JPS5788411A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2615006A1 (en) * 1987-05-04 1988-11-10 Thomson Csf INTEGRATED OPTICAL WAVEGUIDE, ITS MANUFACTURING METHOD, AND ITS USE IN AN ELECTRO-OPTICAL MODULATOR
JPH01134402A (en) * 1987-11-20 1989-05-26 Nippon Telegr & Teleph Corp <Ntt> Light guide
FR2839559A1 (en) * 2002-05-13 2003-11-14 Teem Photonics Integrated optical wavelength multiplexer/demultiplexer has an optical cladding surrounding at least one portion of each core so as to define interaction zones comprising diffraction gratings

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5353342A (en) * 1976-10-26 1978-05-15 Nippon Telegr & Teleph Corp <Ntt> Optical waveguide formation method
JPS5533042A (en) * 1978-08-29 1980-03-08 Toshiba Mach Co Ltd Temperature-compenstated solenoid

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5353342A (en) * 1976-10-26 1978-05-15 Nippon Telegr & Teleph Corp <Ntt> Optical waveguide formation method
JPS5533042A (en) * 1978-08-29 1980-03-08 Toshiba Mach Co Ltd Temperature-compenstated solenoid

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2615006A1 (en) * 1987-05-04 1988-11-10 Thomson Csf INTEGRATED OPTICAL WAVEGUIDE, ITS MANUFACTURING METHOD, AND ITS USE IN AN ELECTRO-OPTICAL MODULATOR
JPS63298309A (en) * 1987-05-04 1988-12-06 トムソン−セエスエフ Integrated light waveguide, manufacture thereof and use in electrooptical modulator
US4880288A (en) * 1987-05-04 1989-11-14 Thomson-Csf Integrated optical waveguide, method for its manufacture, and its use in an electro-optical modulator
JPH01134402A (en) * 1987-11-20 1989-05-26 Nippon Telegr & Teleph Corp <Ntt> Light guide
FR2839559A1 (en) * 2002-05-13 2003-11-14 Teem Photonics Integrated optical wavelength multiplexer/demultiplexer has an optical cladding surrounding at least one portion of each core so as to define interaction zones comprising diffraction gratings

Also Published As

Publication number Publication date
JPH041323B2 (en) 1992-01-10

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