JPS57119307A - Forming method of optical waveguide path - Google Patents
Forming method of optical waveguide pathInfo
- Publication number
- JPS57119307A JPS57119307A JP56005590A JP559081A JPS57119307A JP S57119307 A JPS57119307 A JP S57119307A JP 56005590 A JP56005590 A JP 56005590A JP 559081 A JP559081 A JP 559081A JP S57119307 A JPS57119307 A JP S57119307A
- Authority
- JP
- Japan
- Prior art keywords
- crystal
- source
- optical waveguide
- waveguide path
- edge part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/134—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms
- G02B6/1342—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms using diffusion
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
- Optical Couplings Of Light Guides (AREA)
Abstract
PURPOSE:To facilitate the easy matching of position to an optical fiber or a semiconductor laser, by setting larger thickness at the edge of an optical waveguide path than other areas. CONSTITUTION:A diffusion source 2 of Ti, etc. is coated thick only at the edge part on an optical crystal 1 of LiNbO3, etc. by the vapor deposition or sputtering method. In the same way, the source 2 is evenly coated thick on the entire surface of the crystal 1. Such crystal 1 is heat treated at a prescribed temperature to diffuse the source 2 into the crystal 1. As a result, a stepped optical waveguide path 3 having a large thickness at its edge part is formed due to the different thicknesses of film of the source 2. The thickness of such path 3 is set larger at its edge part than other areas to facilitate the easy matching of position to an optical fiber or a semiconductor laser.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56005590A JPS57119307A (en) | 1981-01-16 | 1981-01-16 | Forming method of optical waveguide path |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56005590A JPS57119307A (en) | 1981-01-16 | 1981-01-16 | Forming method of optical waveguide path |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57119307A true JPS57119307A (en) | 1982-07-24 |
Family
ID=11615446
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56005590A Pending JPS57119307A (en) | 1981-01-16 | 1981-01-16 | Forming method of optical waveguide path |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57119307A (en) |
-
1981
- 1981-01-16 JP JP56005590A patent/JPS57119307A/en active Pending
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