JPS57119307A - Forming method of optical waveguide path - Google Patents

Forming method of optical waveguide path

Info

Publication number
JPS57119307A
JPS57119307A JP56005590A JP559081A JPS57119307A JP S57119307 A JPS57119307 A JP S57119307A JP 56005590 A JP56005590 A JP 56005590A JP 559081 A JP559081 A JP 559081A JP S57119307 A JPS57119307 A JP S57119307A
Authority
JP
Japan
Prior art keywords
crystal
source
optical waveguide
waveguide path
edge part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56005590A
Other languages
Japanese (ja)
Inventor
Maki Yamashita
Masaharu Matano
Kazuhiko Mori
Norihiro Ota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Tateisi Electronics Co
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tateisi Electronics Co, Omron Tateisi Electronics Co filed Critical Tateisi Electronics Co
Priority to JP56005590A priority Critical patent/JPS57119307A/en
Publication of JPS57119307A publication Critical patent/JPS57119307A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/134—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms
    • G02B6/1342—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms using diffusion

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Couplings Of Light Guides (AREA)

Abstract

PURPOSE:To facilitate the easy matching of position to an optical fiber or a semiconductor laser, by setting larger thickness at the edge of an optical waveguide path than other areas. CONSTITUTION:A diffusion source 2 of Ti, etc. is coated thick only at the edge part on an optical crystal 1 of LiNbO3, etc. by the vapor deposition or sputtering method. In the same way, the source 2 is evenly coated thick on the entire surface of the crystal 1. Such crystal 1 is heat treated at a prescribed temperature to diffuse the source 2 into the crystal 1. As a result, a stepped optical waveguide path 3 having a large thickness at its edge part is formed due to the different thicknesses of film of the source 2. The thickness of such path 3 is set larger at its edge part than other areas to facilitate the easy matching of position to an optical fiber or a semiconductor laser.
JP56005590A 1981-01-16 1981-01-16 Forming method of optical waveguide path Pending JPS57119307A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56005590A JPS57119307A (en) 1981-01-16 1981-01-16 Forming method of optical waveguide path

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56005590A JPS57119307A (en) 1981-01-16 1981-01-16 Forming method of optical waveguide path

Publications (1)

Publication Number Publication Date
JPS57119307A true JPS57119307A (en) 1982-07-24

Family

ID=11615446

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56005590A Pending JPS57119307A (en) 1981-01-16 1981-01-16 Forming method of optical waveguide path

Country Status (1)

Country Link
JP (1) JPS57119307A (en)

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