JPS5786679A - Servo type proportional pressure control valve - Google Patents

Servo type proportional pressure control valve

Info

Publication number
JPS5786679A
JPS5786679A JP16040480A JP16040480A JPS5786679A JP S5786679 A JPS5786679 A JP S5786679A JP 16040480 A JP16040480 A JP 16040480A JP 16040480 A JP16040480 A JP 16040480A JP S5786679 A JPS5786679 A JP S5786679A
Authority
JP
Japan
Prior art keywords
pressure
elastic member
outlet path
feedback
pressure control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16040480A
Other languages
Japanese (ja)
Other versions
JPS6044542B2 (en
Inventor
Tadashi Kojima
Tetsuo Uchihama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azbil Corp
Original Assignee
Azbil Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Azbil Corp filed Critical Azbil Corp
Priority to JP16040480A priority Critical patent/JPS6044542B2/en
Publication of JPS5786679A publication Critical patent/JPS5786679A/en
Publication of JPS6044542B2 publication Critical patent/JPS6044542B2/en
Expired legal-status Critical Current

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  • Fluid-Driven Valves (AREA)

Abstract

PURPOSE: To prevent emission of raw gas caused by blowoff by bringing an elastic member in contact with a feedback diaphragm and keeping the gas flow rate an outlet path above the predetermined value while the main valve is being closed.
CONSTITUTION: An upward feedback pressure, a downward magnetic force, and a downward minimum pressure control force by means of an elastic member 23 are applied to a feedback diaphragm 19. The energizing force applied by means of the elastic member 23 can be adjusted by a regulating screw 24 depending upon the minimum pressure value in a combustion unit. Suppose that the minimum pressure is P1, the demand of heat is decreased and plunger 21 moves upward. Also, the feedback diaphragm 19 is balanced at a location where the pressure in an outlet path 3 becomes P1. As a reult, the pressure in the outlet path 3 is kept in P1, and the emission of raw gas caused by blowoff is prevented.
COPYRIGHT: (C)1982,JPO&Japio
JP16040480A 1980-11-14 1980-11-14 Servo type proportional pressure control valve Expired JPS6044542B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16040480A JPS6044542B2 (en) 1980-11-14 1980-11-14 Servo type proportional pressure control valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16040480A JPS6044542B2 (en) 1980-11-14 1980-11-14 Servo type proportional pressure control valve

Publications (2)

Publication Number Publication Date
JPS5786679A true JPS5786679A (en) 1982-05-29
JPS6044542B2 JPS6044542B2 (en) 1985-10-04

Family

ID=15714200

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16040480A Expired JPS6044542B2 (en) 1980-11-14 1980-11-14 Servo type proportional pressure control valve

Country Status (1)

Country Link
JP (1) JPS6044542B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59177877U (en) * 1983-05-13 1984-11-28 ダイヤモンド電機株式会社 proportional control valve
JP2008049263A (en) * 2006-08-24 2008-03-06 Hitachi High-Technologies Corp Substrate washing apparatus, substrate washing method, and manufacturing method of substrate

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59177877U (en) * 1983-05-13 1984-11-28 ダイヤモンド電機株式会社 proportional control valve
JP2008049263A (en) * 2006-08-24 2008-03-06 Hitachi High-Technologies Corp Substrate washing apparatus, substrate washing method, and manufacturing method of substrate

Also Published As

Publication number Publication date
JPS6044542B2 (en) 1985-10-04

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