JPS5784925A - Flow rate control apparatus - Google Patents

Flow rate control apparatus

Info

Publication number
JPS5784925A
JPS5784925A JP16040980A JP16040980A JPS5784925A JP S5784925 A JPS5784925 A JP S5784925A JP 16040980 A JP16040980 A JP 16040980A JP 16040980 A JP16040980 A JP 16040980A JP S5784925 A JPS5784925 A JP S5784925A
Authority
JP
Japan
Prior art keywords
valve
pressure
flow rate
responsive member
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16040980A
Other languages
Japanese (ja)
Inventor
Tadashi Kojima
Tetsuo Uchihama
Kazuyoshi Tanaka
Eiichi Morozumi
Kentaro Inoue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azbil Corp
Original Assignee
Azbil Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Azbil Corp filed Critical Azbil Corp
Priority to JP16040980A priority Critical patent/JPS5784925A/en
Publication of JPS5784925A publication Critical patent/JPS5784925A/en
Pending legal-status Critical Current

Links

Landscapes

  • Fluid-Driven Valves (AREA)
  • Magnetically Actuated Valves (AREA)
  • Feeding And Controlling Fuel (AREA)

Abstract

PURPOSE: To make it possible to control the flow rate of a fluid accurately through an electrical signal by a method wherein the operations of an ON-OFF controller and a proportional controller are controlled by a fluid pressure in a pressure chamber due to the action of an electromagnetic pressure supply apparatus.
CONSTITUTION: When the pressure in a second chamber 8 rises up to a first set value due to the action of an electromagnetic pump 2, a responsive member 13 is displaced to a predetermined position to move a first valve 24 away from a second valve 25 so that a gas within a communication passage 20 flows through a gap between the two valves into an outlet passage 28 at a limited flow rate. Further, when the pressure in the second chamber 8 increases higher than the first set value, the responsive member 13 and a rod 23 lowers further and the second valve 25 is lowered to move away from a valve sheet 29 by the engagement of the responsive member 13 with an engaging section 23a so that the gas flows into the outlet passage 28 at a rate proportional to the degree of opening between the valve 25 and the valve sheet 29.
COPYRIGHT: (C)1982,JPO&Japio
JP16040980A 1980-11-14 1980-11-14 Flow rate control apparatus Pending JPS5784925A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16040980A JPS5784925A (en) 1980-11-14 1980-11-14 Flow rate control apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16040980A JPS5784925A (en) 1980-11-14 1980-11-14 Flow rate control apparatus

Publications (1)

Publication Number Publication Date
JPS5784925A true JPS5784925A (en) 1982-05-27

Family

ID=15714306

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16040980A Pending JPS5784925A (en) 1980-11-14 1980-11-14 Flow rate control apparatus

Country Status (1)

Country Link
JP (1) JPS5784925A (en)

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