JPS5782954A - X-ray window - Google Patents

X-ray window

Info

Publication number
JPS5782954A
JPS5782954A JP55158728A JP15872880A JPS5782954A JP S5782954 A JPS5782954 A JP S5782954A JP 55158728 A JP55158728 A JP 55158728A JP 15872880 A JP15872880 A JP 15872880A JP S5782954 A JPS5782954 A JP S5782954A
Authority
JP
Japan
Prior art keywords
ray window
ray
berylium
foil
window
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55158728A
Other languages
Japanese (ja)
Other versions
JPH0335774B2 (en
Inventor
Katsumi Suzuki
Yasunao Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Nippon Telegraph and Telephone Corp
Original Assignee
NEC Corp
Nippon Telegraph and Telephone Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Telegraph and Telephone Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP55158728A priority Critical patent/JPS5782954A/en
Publication of JPS5782954A publication Critical patent/JPS5782954A/en
Publication of JPH0335774B2 publication Critical patent/JPH0335774B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/16—Vessels; Containers; Shields associated therewith
    • H01J35/18—Windows
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/18—Windows, e.g. for X-ray transmission
    • H01J2235/183—Multi-layer structures

Abstract

PURPOSE:To prevent the occurrence of a pin hole in an X-ray window after using it in the air for a long period by accumulating the preventing film of silicone nitride or the like on one surface or both surfaces of berylium foil forming the X-ray window. CONSTITUTION:The X-ray window of an X-ray diffraction device or the like which permits transmission of an X-ray is formed by accumulating a layer 12 of silicone nitride or silicone oxide on the surface of flat berylium foil, of which both surfaces are polished and thickness is several mum to scores of mum, to the thickness of hundreds Angstrom to thousands Angstrom by a CVD method or a plasma CVD method. As silicone nitride or the like has small gas permeability and arrests a reaction occurring between oxygen in the air and impurities in the berylium foil 11, the occurrence of a pin hole in the X-ray window at the time of exposing the X-ray window can be prevented, and the X-ray window can be used for a long period.
JP55158728A 1980-11-11 1980-11-11 X-ray window Granted JPS5782954A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55158728A JPS5782954A (en) 1980-11-11 1980-11-11 X-ray window

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55158728A JPS5782954A (en) 1980-11-11 1980-11-11 X-ray window

Publications (2)

Publication Number Publication Date
JPS5782954A true JPS5782954A (en) 1982-05-24
JPH0335774B2 JPH0335774B2 (en) 1991-05-29

Family

ID=15678030

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55158728A Granted JPS5782954A (en) 1980-11-11 1980-11-11 X-ray window

Country Status (1)

Country Link
JP (1) JPS5782954A (en)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61163547A (en) * 1985-01-14 1986-07-24 Nippon Telegr & Teleph Corp <Ntt> X-ray pickup window
JPS61162000U (en) * 1985-03-28 1986-10-07
JPS6391944A (en) * 1986-10-03 1988-04-22 Nec Corp Berylium window for x-ray
JPH0375600A (en) * 1989-08-18 1991-03-29 Nikon Corp Multi layered film reflecting mirror
EP0757362A1 (en) * 1995-08-02 1997-02-05 INSTITUT FÜR MIKROTECHNIK MAINZ GmbH X-ray transmitting coating material, its manufacturing method and its use
EP1547116A1 (en) * 2002-09-13 2005-06-29 Moxtek, Inc. Radiation window and method of manufacture
JP2008124495A (en) * 2003-07-25 2008-05-29 Asml Netherlands Bv Filter window, lithographic projection apparatus, methods of manufacturing filter window and device, and device manufactured thereby
US7382862B2 (en) 2005-09-30 2008-06-03 Moxtek, Inc. X-ray tube cathode with reduced unintended electrical field emission
US7428298B2 (en) 2005-03-31 2008-09-23 Moxtek, Inc. Magnetic head for X-ray source
US8995621B2 (en) 2010-09-24 2015-03-31 Moxtek, Inc. Compact X-ray source
US9076628B2 (en) 2011-05-16 2015-07-07 Brigham Young University Variable radius taper x-ray window support structure
WO2019073262A1 (en) * 2017-10-13 2019-04-18 Oxford Instruments X-ray Technology Inc. Window member for an x-ray device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53133386A (en) * 1977-04-25 1978-11-21 Philips Nv Xxray tube

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53133386A (en) * 1977-04-25 1978-11-21 Philips Nv Xxray tube

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61163547A (en) * 1985-01-14 1986-07-24 Nippon Telegr & Teleph Corp <Ntt> X-ray pickup window
JPH0372183B2 (en) * 1985-01-14 1991-11-15 Nippon Telegraph & Telephone
JPS61162000U (en) * 1985-03-28 1986-10-07
JPH0350606Y2 (en) * 1985-03-28 1991-10-29
JPS6391944A (en) * 1986-10-03 1988-04-22 Nec Corp Berylium window for x-ray
JPH0375600A (en) * 1989-08-18 1991-03-29 Nikon Corp Multi layered film reflecting mirror
EP0757362A1 (en) * 1995-08-02 1997-02-05 INSTITUT FÜR MIKROTECHNIK MAINZ GmbH X-ray transmitting coating material, its manufacturing method and its use
US5740228A (en) * 1995-08-02 1998-04-14 Institut Fur Mikrotechnik Mainz Gmbh X-ray radiolucent material, method for its manufacture, and its use
DE19528329B4 (en) * 1995-08-02 2009-12-10 INSTITUT FüR MIKROTECHNIK MAINZ GMBH Mask blank and process for its preparation
US7233647B2 (en) 2002-09-13 2007-06-19 Moxtek, Inc. Radiation window and method of manufacture
EP1547116A4 (en) * 2002-09-13 2006-05-24 Moxtek Inc Radiation window and method of manufacture
EP1547116A1 (en) * 2002-09-13 2005-06-29 Moxtek, Inc. Radiation window and method of manufacture
JP2008124495A (en) * 2003-07-25 2008-05-29 Asml Netherlands Bv Filter window, lithographic projection apparatus, methods of manufacturing filter window and device, and device manufactured thereby
JP4546547B2 (en) * 2003-07-25 2010-09-15 エーエスエムエル ネザーランズ ビー．ブイ． Filter window manufacturing method
US7428298B2 (en) 2005-03-31 2008-09-23 Moxtek, Inc. Magnetic head for X-ray source
US7382862B2 (en) 2005-09-30 2008-06-03 Moxtek, Inc. X-ray tube cathode with reduced unintended electrical field emission
US8995621B2 (en) 2010-09-24 2015-03-31 Moxtek, Inc. Compact X-ray source
US9076628B2 (en) 2011-05-16 2015-07-07 Brigham Young University Variable radius taper x-ray window support structure
WO2019073262A1 (en) * 2017-10-13 2019-04-18 Oxford Instruments X-ray Technology Inc. Window member for an x-ray device
US11094494B2 (en) 2017-10-13 2021-08-17 Oxford Instruments X-ray Technology Inc. Window member for an x-ray device

Also Published As

Publication number Publication date
JPH0335774B2 (en) 1991-05-29

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