JPS5776432A - Measuring device for degree of vacuum - Google Patents

Measuring device for degree of vacuum

Info

Publication number
JPS5776432A
JPS5776432A JP15266380A JP15266380A JPS5776432A JP S5776432 A JPS5776432 A JP S5776432A JP 15266380 A JP15266380 A JP 15266380A JP 15266380 A JP15266380 A JP 15266380A JP S5776432 A JPS5776432 A JP S5776432A
Authority
JP
Japan
Prior art keywords
vacuum
degree
discharge
current
measured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15266380A
Other languages
Japanese (ja)
Inventor
Tatsuaki Niide
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP15266380A priority Critical patent/JPS5776432A/en
Publication of JPS5776432A publication Critical patent/JPS5776432A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE:To indicate the degree of vacuum in a wide range precisely only by one discharge by measuring the discharge current in a vacuum valve to be measured after amplifying the current with a logarithmic amplifier and them indicating the measured result on an indicator. CONSTITUTION:A discharge current detecting part 1 detects the current produced when magnetron discharge occurs in a vacuum valve to be measured. The detected value is amplified by a logarithmic amplifier composed of a feedback element D with logarithmic characteristic and an amplifier A and measured by a measuring circuit 6 and then the degree of vacuum found by the measuring circuit 6 is indicated by an indicator according to the correlation between the current and the degree of vacuum which has been previously found. Thus, discharge having influence to the degree of vacuum is limited only once to indicate the degree of vacuum in a wide range precisely.
JP15266380A 1980-10-30 1980-10-30 Measuring device for degree of vacuum Pending JPS5776432A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15266380A JPS5776432A (en) 1980-10-30 1980-10-30 Measuring device for degree of vacuum

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15266380A JPS5776432A (en) 1980-10-30 1980-10-30 Measuring device for degree of vacuum

Publications (1)

Publication Number Publication Date
JPS5776432A true JPS5776432A (en) 1982-05-13

Family

ID=15545358

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15266380A Pending JPS5776432A (en) 1980-10-30 1980-10-30 Measuring device for degree of vacuum

Country Status (1)

Country Link
JP (1) JPS5776432A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4656866A (en) * 1984-04-11 1987-04-14 Douwe Egberts Koninklijke Tabaksfabriek-Koffiebranderijen-Theehandel N.V. Method of measuring the pressure in a vacuum package

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4656866A (en) * 1984-04-11 1987-04-14 Douwe Egberts Koninklijke Tabaksfabriek-Koffiebranderijen-Theehandel N.V. Method of measuring the pressure in a vacuum package

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