JPS5774671A - Surface acoustic wave element inspecting device - Google Patents

Surface acoustic wave element inspecting device

Info

Publication number
JPS5774671A
JPS5774671A JP13284881A JP13284881A JPS5774671A JP S5774671 A JPS5774671 A JP S5774671A JP 13284881 A JP13284881 A JP 13284881A JP 13284881 A JP13284881 A JP 13284881A JP S5774671 A JPS5774671 A JP S5774671A
Authority
JP
Japan
Prior art keywords
acoustic wave
surface acoustic
wave element
inspecting device
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13284881A
Other languages
Japanese (ja)
Inventor
Tsuneo Mitsuyu
Kenzo Ochi
Osamu Yamazaki
Kiyotaka Wasa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP13284881A priority Critical patent/JPS5774671A/en
Publication of JPS5774671A publication Critical patent/JPS5774671A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
    • G01R31/2829—Testing of circuits in sensor or actuator systems

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)

Abstract

PURPOSE:To inspect a surface acoustic wave element with facibility and rapidity, by determining whether or not interelectrode capacitance of the surface acoustic wave element is in a satisfactory condition by measuring it with a searching probe. CONSTITUTION:When a probe 4 is connected to electrodes 2 and 2' of a surface acoustic wave element 1 mounted on a specimen holding table 5 of a movable device 6 which is designed capable of freely moving in horizontal and vertical directions, a capacity between the electrodes 2 and 2' is measured by an electrostatic capacity meter 10. By making a judgement on the interelectrode capacitance, which sensitively varies in accordance with abnormality of pattern of this element 1, by measuring it, it is possible to easily and quickly inspect the surface acoustic wave element to determine whether or not it is in a satisfactory condition.
JP13284881A 1981-08-25 1981-08-25 Surface acoustic wave element inspecting device Pending JPS5774671A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13284881A JPS5774671A (en) 1981-08-25 1981-08-25 Surface acoustic wave element inspecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13284881A JPS5774671A (en) 1981-08-25 1981-08-25 Surface acoustic wave element inspecting device

Publications (1)

Publication Number Publication Date
JPS5774671A true JPS5774671A (en) 1982-05-10

Family

ID=15090925

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13284881A Pending JPS5774671A (en) 1981-08-25 1981-08-25 Surface acoustic wave element inspecting device

Country Status (1)

Country Link
JP (1) JPS5774671A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62233776A (en) * 1986-04-03 1987-10-14 Matsushita Electric Ind Co Ltd Electric characteristic measuring instrument

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62233776A (en) * 1986-04-03 1987-10-14 Matsushita Electric Ind Co Ltd Electric characteristic measuring instrument

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