JPS5764930A - Carrying apparatus for glass substrate - Google Patents

Carrying apparatus for glass substrate

Info

Publication number
JPS5764930A
JPS5764930A JP55140334A JP14033480A JPS5764930A JP S5764930 A JPS5764930 A JP S5764930A JP 55140334 A JP55140334 A JP 55140334A JP 14033480 A JP14033480 A JP 14033480A JP S5764930 A JPS5764930 A JP S5764930A
Authority
JP
Japan
Prior art keywords
substrate
loader part
pawls
sucked
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55140334A
Other languages
Japanese (ja)
Other versions
JPH03783B2 (en
Inventor
Yukio Kakizaki
Nobutoshi Abe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp, Nippon Kogaku KK filed Critical Nikon Corp
Priority to JP55140334A priority Critical patent/JPS5764930A/en
Publication of JPS5764930A publication Critical patent/JPS5764930A/en
Publication of JPH03783B2 publication Critical patent/JPH03783B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
    • G03F7/70741—Handling masks outside exposure position, e.g. reticle libraries

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Library & Information Science (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE:To transfer a glass substrate as a mask or the like to such a designation as an aligner without rubbing, by a method wherein a carrying arm on which the substrate is mounted is drawn out of a substrate container and raised, and the substrate is abutted against a loader part and positioned before being sucked to be suspended. CONSTITUTION:A loader part 62 is disposed through a moving member 61 on a guide member 60 provided above a cartridge loaded with a container. When reaching a position below the loader part, an arm 16 drawn out with a substrate 10 mounted thereon stops its horizontal movement and moves upward. The loader part 62 is provided with pawl members 65 ar the four sides of a supporting plate 63 and a suction plate 64 on the lower surface thereof, and the lower part of each of the pawls 65 closed by the operation of cylinders 67 respectively is a roller 69 made of resin. With end surface sections of the raised substrate 10 crossing each other at right angles positioned by the pawls 65a, 65b provided with stoppers 66a, 66b respectively, the substrate 10 is received by means of the rolles 69 and sucked to be transferred to a destionation. Thereby, it is possible to carry the substrate as a mask or the like without any damage.
JP55140334A 1980-10-07 1980-10-07 Carrying apparatus for glass substrate Granted JPS5764930A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55140334A JPS5764930A (en) 1980-10-07 1980-10-07 Carrying apparatus for glass substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55140334A JPS5764930A (en) 1980-10-07 1980-10-07 Carrying apparatus for glass substrate

Publications (2)

Publication Number Publication Date
JPS5764930A true JPS5764930A (en) 1982-04-20
JPH03783B2 JPH03783B2 (en) 1991-01-08

Family

ID=15266402

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55140334A Granted JPS5764930A (en) 1980-10-07 1980-10-07 Carrying apparatus for glass substrate

Country Status (1)

Country Link
JP (1) JPS5764930A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5981074A (en) * 1982-10-30 1984-05-10 住友金属鉱山株式会社 Automatic feeder for tabular body
JPS6477140A (en) * 1987-09-18 1989-03-23 Olympus Optical Co Wafer taking out/housing device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5032767U (en) * 1973-07-20 1975-04-09
JPS5116572A (en) * 1974-07-30 1976-02-09 Mitsubishi Heavy Ind Ltd RITSUTAIJIDOSOKO
JPS5592683U (en) * 1978-12-22 1980-06-26

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5032767U (en) * 1973-07-20 1975-04-09
JPS5116572A (en) * 1974-07-30 1976-02-09 Mitsubishi Heavy Ind Ltd RITSUTAIJIDOSOKO
JPS5592683U (en) * 1978-12-22 1980-06-26

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5981074A (en) * 1982-10-30 1984-05-10 住友金属鉱山株式会社 Automatic feeder for tabular body
JPS6477140A (en) * 1987-09-18 1989-03-23 Olympus Optical Co Wafer taking out/housing device
JP2514214B2 (en) * 1987-09-18 1996-07-10 オリンパス光学工業株式会社 Wafer take-out and storage device

Also Published As

Publication number Publication date
JPH03783B2 (en) 1991-01-08

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