JPS5764929A - Carrying apparatus for glass substrate - Google Patents
Carrying apparatus for glass substrateInfo
- Publication number
- JPS5764929A JPS5764929A JP55140333A JP14033380A JPS5764929A JP S5764929 A JPS5764929 A JP S5764929A JP 55140333 A JP55140333 A JP 55140333A JP 14033380 A JP14033380 A JP 14033380A JP S5764929 A JPS5764929 A JP S5764929A
- Authority
- JP
- Japan
- Prior art keywords
- arm
- substrate
- moved downward
- given amount
- cassette
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
- G03F7/70741—Handling masks outside exposure position, e.g. reticle libraries
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Library & Information Science (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE:To enable a substrate to be removed from a container without rubbing against the same, by a method wherein the end part of a carrying arm is abutted against a reference position near the opening of a substrate container, and the arm is moved downward to a given position and moved upward by a given amount after the fact that the arm has moved downward by a given amount is detected. CONSTITUTION:A glass substrate 10 as a mask or the like is horizontally housed in each of a plurality of cassettes held being vertically aligned with each other by means of a cartidge. Fork portions 16a, 16b of an arm 16 are inserted into the space between a bottom lid 3 of the cassette and the substrate 10 by driving a two- dimensional moving means, and the substrate 10 is sucked through suction holes 17 provided in the fork portions and drawn out. In this inserting and removing operation, with the fork ends slightly inserted, the arm is moved downward. When a limit switch 50 detects that the arm 16 has moved downward by a given amount (h), the downward movement of the arm 16 is stopped. Then, the arm 16 is moved upward to a halfway position of the gap (t) between the substrate 10 and the upper surface 3c of the bottom lid. Thereby, it is possible to remove the substrate 10 from the cassette for transfer without rubbing, thereby to prevent dust from adhering to a mask or the like as well as production of flaws thereon.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55140333A JPS5764929A (en) | 1980-10-07 | 1980-10-07 | Carrying apparatus for glass substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55140333A JPS5764929A (en) | 1980-10-07 | 1980-10-07 | Carrying apparatus for glass substrate |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5764929A true JPS5764929A (en) | 1982-04-20 |
JPH0245323B2 JPH0245323B2 (en) | 1990-10-09 |
Family
ID=15266379
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP55140333A Granted JPS5764929A (en) | 1980-10-07 | 1980-10-07 | Carrying apparatus for glass substrate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5764929A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS616826A (en) * | 1984-06-20 | 1986-01-13 | Canon Inc | Positioning apparatus |
JPS616825A (en) * | 1984-06-20 | 1986-01-13 | Canon Inc | Positioning apparatus |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5320263A (en) * | 1976-08-06 | 1978-02-24 | Komatsu Ltd | Automatic fork positioning apparatus for use in fork lift |
JPS54109760A (en) * | 1978-02-16 | 1979-08-28 | Toshiba Corp | Carrier for semiconductor wafer |
-
1980
- 1980-10-07 JP JP55140333A patent/JPS5764929A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5320263A (en) * | 1976-08-06 | 1978-02-24 | Komatsu Ltd | Automatic fork positioning apparatus for use in fork lift |
JPS54109760A (en) * | 1978-02-16 | 1979-08-28 | Toshiba Corp | Carrier for semiconductor wafer |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS616826A (en) * | 1984-06-20 | 1986-01-13 | Canon Inc | Positioning apparatus |
JPS616825A (en) * | 1984-06-20 | 1986-01-13 | Canon Inc | Positioning apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPH0245323B2 (en) | 1990-10-09 |
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