JPS5759153A - Detector for surface characteristic - Google Patents

Detector for surface characteristic

Info

Publication number
JPS5759153A
JPS5759153A JP13382080A JP13382080A JPS5759153A JP S5759153 A JPS5759153 A JP S5759153A JP 13382080 A JP13382080 A JP 13382080A JP 13382080 A JP13382080 A JP 13382080A JP S5759153 A JPS5759153 A JP S5759153A
Authority
JP
Japan
Prior art keywords
deflector
reflected
flaws
detector
specimen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13382080A
Other languages
English (en)
Inventor
Mamoru Kawahara
Hisao Matsui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Zosen Corp
Original Assignee
Hitachi Zosen Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Zosen Corp filed Critical Hitachi Zosen Corp
Priority to JP13382080A priority Critical patent/JPS5759153A/ja
Publication of JPS5759153A publication Critical patent/JPS5759153A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP13382080A 1980-09-25 1980-09-25 Detector for surface characteristic Pending JPS5759153A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13382080A JPS5759153A (en) 1980-09-25 1980-09-25 Detector for surface characteristic

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13382080A JPS5759153A (en) 1980-09-25 1980-09-25 Detector for surface characteristic

Publications (1)

Publication Number Publication Date
JPS5759153A true JPS5759153A (en) 1982-04-09

Family

ID=15113798

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13382080A Pending JPS5759153A (en) 1980-09-25 1980-09-25 Detector for surface characteristic

Country Status (1)

Country Link
JP (1) JPS5759153A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0624787A1 (de) * 1993-03-29 1994-11-17 Tencor Instruments Verfahren und Einrichtung zur zerstörungsfreien Oberflächen-Inspektion

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5129988A (ja) * 1974-09-06 1976-03-13 Canon Kk Hyomenkensahoho
JPS5224554A (en) * 1975-08-20 1977-02-24 Hitachi Ltd Surface inspection device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5129988A (ja) * 1974-09-06 1976-03-13 Canon Kk Hyomenkensahoho
JPS5224554A (en) * 1975-08-20 1977-02-24 Hitachi Ltd Surface inspection device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0624787A1 (de) * 1993-03-29 1994-11-17 Tencor Instruments Verfahren und Einrichtung zur zerstörungsfreien Oberflächen-Inspektion

Similar Documents

Publication Publication Date Title
JPS6435246A (en) Apparatus and method for measuring nature of surface
NZ228526A (en) Measuring curvature of transparent tube by reflection/refraction of incident light
EP0360126A3 (de) Verfahren zum Betrieb eines optischen Rauchmelders sowie Rauchmelder zur Durchführung des Verfahrens
ES8500445A1 (es) Procedimiento y aparato para la deteccion optica de defectos radiales reflectantes en recipientes traslucidos
JPS56126747A (en) Inspecting method for flaw, alien substance and the like on surface of sample and device therefor
FI103076B (fi) Menetelmä ja laite kuoren detektoimiseksi ja puun ja hakkeen kuorinta- asteen mittaamiseksi
DE3270640D1 (en) Off-axis light beam defect detector
JPS54101390A (en) Foreign matter inspector
JPS5759153A (en) Detector for surface characteristic
JPS5599049A (en) Defect detector
JPS54124780A (en) Surface inspection apparatus
JPS5667739A (en) Defect inspecting apparatus
JPH0228815B2 (ja)
DE69728253D1 (de) Vorrichtung und verfahren zum prüfen einer oberfläche einer runden glasscheibe
JPS5593003A (en) Measuring method for plate thickness of plate-shape transparent body
ATE26893T1 (de) Vorrichtung zum erkennen von dokumenten mittels modulierten reflektierten lichtes.
JPS56126745A (en) Automatic inspecting device for surface of plate material
JPS6428512A (en) Surface defect detecting device
JPS57130416A (en) Apparatus for processing projecting substance
JPS6441847A (en) Surface defect detection system for metallic product
JPS5756704A (en) Detector for surface flaw of bloom
JPS5710171A (en) Original size detecting method of copying machine
JPS5599735A (en) Testing method for foreign material on wafer
JPS57135343A (en) Surface defect inspecting device
JPS5497469A (en) Laser speed measuring apparatus