JPS5754333A - Handotaisochitosonoseizohoho - Google Patents
HandotaisochitosonoseizohohoInfo
- Publication number
- JPS5754333A JPS5754333A JP12922280A JP12922280A JPS5754333A JP S5754333 A JPS5754333 A JP S5754333A JP 12922280 A JP12922280 A JP 12922280A JP 12922280 A JP12922280 A JP 12922280A JP S5754333 A JPS5754333 A JP S5754333A
- Authority
- JP
- Japan
- Prior art keywords
- region
- concentration
- oxygen
- constitution
- occurrence
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 3
- 229910052760 oxygen Inorganic materials 0.000 abstract 3
- 239000001301 oxygen Substances 0.000 abstract 3
- 230000007547 defect Effects 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 1
- 230000000694 effects Effects 0.000 abstract 1
- 238000005247 gettering Methods 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 239000012535 impurity Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/322—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections
- H01L21/3221—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections of silicon bodies, e.g. for gettering
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Element Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12922280A JPS5754333A (ja) | 1980-09-19 | 1980-09-19 | Handotaisochitosonoseizohoho |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12922280A JPS5754333A (ja) | 1980-09-19 | 1980-09-19 | Handotaisochitosonoseizohoho |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5754333A true JPS5754333A (ja) | 1982-03-31 |
Family
ID=15004158
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12922280A Pending JPS5754333A (ja) | 1980-09-19 | 1980-09-19 | Handotaisochitosonoseizohoho |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5754333A (ja) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59142132U (ja) * | 1983-03-14 | 1984-09-22 | 三菱自動車工業株式会社 | 車両用駆動輪数切換装置 |
| JPS601027A (ja) * | 1983-06-20 | 1985-01-07 | Aisin Seiki Co Ltd | トランスフア付変速装置 |
| US4678055A (en) * | 1985-10-16 | 1987-07-07 | Toyota Jidosha Kabushiki Kaisha | Four-wheel vehicle drive system |
| US4723459A (en) * | 1985-05-11 | 1988-02-09 | Toyota Jidosha Kabushiki Kaisha | Power transfer device for automotive vehicles |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5717125A (en) * | 1980-07-04 | 1982-01-28 | Oki Electric Ind Co Ltd | Manufacture of semiconductor device |
-
1980
- 1980-09-19 JP JP12922280A patent/JPS5754333A/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5717125A (en) * | 1980-07-04 | 1982-01-28 | Oki Electric Ind Co Ltd | Manufacture of semiconductor device |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59142132U (ja) * | 1983-03-14 | 1984-09-22 | 三菱自動車工業株式会社 | 車両用駆動輪数切換装置 |
| JPS601027A (ja) * | 1983-06-20 | 1985-01-07 | Aisin Seiki Co Ltd | トランスフア付変速装置 |
| JPH0517050B2 (ja) * | 1983-06-20 | 1993-03-08 | Aisin Seiki | |
| US4723459A (en) * | 1985-05-11 | 1988-02-09 | Toyota Jidosha Kabushiki Kaisha | Power transfer device for automotive vehicles |
| US4678055A (en) * | 1985-10-16 | 1987-07-07 | Toyota Jidosha Kabushiki Kaisha | Four-wheel vehicle drive system |
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