JPS57208180A - Manufacture of photoconductive film - Google Patents

Manufacture of photoconductive film

Info

Publication number
JPS57208180A
JPS57208180A JP56092299A JP9229981A JPS57208180A JP S57208180 A JPS57208180 A JP S57208180A JP 56092299 A JP56092299 A JP 56092299A JP 9229981 A JP9229981 A JP 9229981A JP S57208180 A JPS57208180 A JP S57208180A
Authority
JP
Japan
Prior art keywords
plate
sputtering
substrate
container
photoconductive film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56092299A
Other languages
Japanese (ja)
Inventor
Haruo Matsumaru
Taiji Shimomoto
Yukio Takasaki
Toshihisa Tsukada
Akira Sasano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP56092299A priority Critical patent/JPS57208180A/en
Publication of JPS57208180A publication Critical patent/JPS57208180A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Light Receiving Elements (AREA)

Abstract

PURPOSE:To improve the photocurrent characteristics of a photoconductive film by shielding completely the region exposed with an anode plate by a secondary sputtering preventive plate after the step of placing a substrate on the anode plate and sputtering it. CONSTITUTION:A glass substrate 52 is placed on an anode plate 51 at the prescribed position in a vacuum container 50. A secondary sputtering preventive plate 53 which is covered on the entire upper surface exposed with the plate 51 and which is partly covered on the peripheral edge region of a substrate 52 is provided. A cathode plate 54 having a target 55 and a shield 541 are provided on the surface oppositely to the plate 51. The container 50 is evacuated in vacuum, a high frequency magnetic field is formed between the electrodes 51 and 54, the prescribed gas atmosphere is prepared in the container 50, and the region exposed with the plate 51 is shielded by the plate 53. In this manner, sputtering electron is emitted to the metal electrode such as stainless steel, thereby affecting no influence such as the generation of the secondary sputtering electron to the substrate 52.
JP56092299A 1981-06-17 1981-06-17 Manufacture of photoconductive film Pending JPS57208180A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56092299A JPS57208180A (en) 1981-06-17 1981-06-17 Manufacture of photoconductive film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56092299A JPS57208180A (en) 1981-06-17 1981-06-17 Manufacture of photoconductive film

Publications (1)

Publication Number Publication Date
JPS57208180A true JPS57208180A (en) 1982-12-21

Family

ID=14050524

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56092299A Pending JPS57208180A (en) 1981-06-17 1981-06-17 Manufacture of photoconductive film

Country Status (1)

Country Link
JP (1) JPS57208180A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59204282A (en) * 1983-05-06 1984-11-19 Fuji Xerox Co Ltd Formation of thin film

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59204282A (en) * 1983-05-06 1984-11-19 Fuji Xerox Co Ltd Formation of thin film
JPH0445972B2 (en) * 1983-05-06 1992-07-28 Fuji Xerox Co Ltd

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