JPS5720486A - Superconductive integrated circuit and preparation thereof - Google Patents

Superconductive integrated circuit and preparation thereof

Info

Publication number
JPS5720486A
JPS5720486A JP9480880A JP9480880A JPS5720486A JP S5720486 A JPS5720486 A JP S5720486A JP 9480880 A JP9480880 A JP 9480880A JP 9480880 A JP9480880 A JP 9480880A JP S5720486 A JPS5720486 A JP S5720486A
Authority
JP
Japan
Prior art keywords
layer
wiring
layers
superconductor
likewise
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9480880A
Other languages
Japanese (ja)
Other versions
JPS5845194B2 (en
Inventor
Toshiaki Murakami
Takahiro Inamura
Yoichi Enomoto
Minoru Suzuki
Takashi Inukai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP55094808A priority Critical patent/JPS5845194B2/en
Publication of JPS5720486A publication Critical patent/JPS5720486A/en
Publication of JPS5845194B2 publication Critical patent/JPS5845194B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N69/00—Integrated devices, or assemblies of multiple devices, comprising at least one superconducting element covered by group H10N60/00
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0912—Manufacture or treatment of Josephson-effect devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)

Abstract

PURPOSE:To stack josephson devices in multilayers through a flat-face layer insulation without use of resist by employing an oxide material which can be converted from an insulator to a superconductor by a laser annealing. CONSTITUTION:When a BaPb1-xBixO3 (0.05<=x<=0.30) or Lii+xTi2-4O4 (0.2<=x <=0.3) is evaporated on a normal temperature Si substrate 1, it takes amorphous form but can be converted to a superconductor or a semiconductor (resistor) by laser annealing. According to this method, first, a wiring layer 2 is formed. Then, layers 3 of this composition are piled and undergoes annealing to make an electrode 4 and a wiring 4'. Subsequently, layers 7 of the same composition are piled again through a tunnel barrier layer 6 made of a specified material to provide an upper electrode 8, a wiring 8' and a layer connectin 9 likewise. Thereafter, likewise, a control line 11, a layer connection 12 and a wiring layer 2 are formed in sequence on the layers 10 and 13 of the same composition. With such an arrangement, a multilayer stacking is possible because of the flat surface of the circuit thereby enabling integration.
JP55094808A 1980-07-11 1980-07-11 Superconducting integrated circuit and its manufacturing method Expired JPS5845194B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55094808A JPS5845194B2 (en) 1980-07-11 1980-07-11 Superconducting integrated circuit and its manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55094808A JPS5845194B2 (en) 1980-07-11 1980-07-11 Superconducting integrated circuit and its manufacturing method

Publications (2)

Publication Number Publication Date
JPS5720486A true JPS5720486A (en) 1982-02-02
JPS5845194B2 JPS5845194B2 (en) 1983-10-07

Family

ID=14120349

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55094808A Expired JPS5845194B2 (en) 1980-07-11 1980-07-11 Superconducting integrated circuit and its manufacturing method

Country Status (1)

Country Link
JP (1) JPS5845194B2 (en)

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59144190A (en) * 1983-02-08 1984-08-18 Agency Of Ind Science & Technol Mounting substrate for superconductive circuit
JPS59147472A (en) * 1983-02-10 1984-08-23 Agency Of Ind Science & Technol Superconductive integrated circuit
JPS62232981A (en) * 1986-04-02 1987-10-13 Nec Corp Josephson junction device
JPS62237778A (en) * 1986-04-08 1987-10-17 Nec Corp 3-dimensional josephson junction device
JPS63224271A (en) * 1987-11-11 1988-09-19 Semiconductor Energy Lab Co Ltd Superconductor
JPS63224270A (en) * 1987-11-11 1988-09-19 Semiconductor Energy Lab Co Ltd Manufacture of superconductor device
JPS63250881A (en) * 1987-04-07 1988-10-18 Semiconductor Energy Lab Co Ltd Manufacture of superconductor
JPS6433006A (en) * 1987-04-08 1989-02-02 Hitachi Ltd Production of superconducting oxide and superconducting device
JPS6456359A (en) * 1987-08-28 1989-03-03 Sumitomo Electric Industries Production of superconductive material
JPH01119076A (en) * 1987-10-30 1989-05-11 Nec Corp Manufacture of oxide superconductive film
JPH01183177A (en) * 1988-01-18 1989-07-20 Agency Of Ind Science & Technol Superconducting ceramic element
JPH01235287A (en) * 1988-03-15 1989-09-20 Fujitsu Ltd Patterning method for high-temperature superconducting thin-film
JPH01276679A (en) * 1988-04-27 1989-11-07 Fujitsu Ltd Superconducting ceramic line
US5026682A (en) * 1987-04-13 1991-06-25 International Business Machines Corporation Devices using high Tc superconductors
US5108984A (en) * 1987-03-30 1992-04-28 Sumitomo Electric Industries, Ltd. Method for producing thin film of oxide superconductor
US5143894A (en) * 1987-10-14 1992-09-01 Mordechai Rothschild Formation and high resolution patterning of superconductors

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0440791A1 (en) * 1987-09-29 1991-08-14 Mitsubishi Materials Corporation Structure of superconductor wiring and process for its production

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59144190A (en) * 1983-02-08 1984-08-18 Agency Of Ind Science & Technol Mounting substrate for superconductive circuit
JPS59147472A (en) * 1983-02-10 1984-08-23 Agency Of Ind Science & Technol Superconductive integrated circuit
JPS62232981A (en) * 1986-04-02 1987-10-13 Nec Corp Josephson junction device
JPH0545075B2 (en) * 1986-04-02 1993-07-08 Nippon Electric Co
JPH0565069B2 (en) * 1986-04-08 1993-09-16 Nippon Electric Co
JPS62237778A (en) * 1986-04-08 1987-10-17 Nec Corp 3-dimensional josephson junction device
US5108984A (en) * 1987-03-30 1992-04-28 Sumitomo Electric Industries, Ltd. Method for producing thin film of oxide superconductor
JPS63250881A (en) * 1987-04-07 1988-10-18 Semiconductor Energy Lab Co Ltd Manufacture of superconductor
US4957900A (en) * 1987-04-07 1990-09-18 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing a superconducting pattern by light irradiation
JPS6433006A (en) * 1987-04-08 1989-02-02 Hitachi Ltd Production of superconducting oxide and superconducting device
US6982240B1 (en) 1987-04-13 2006-01-03 International Business Machines Corporation Method for making a superconductor device
US5026682A (en) * 1987-04-13 1991-06-25 International Business Machines Corporation Devices using high Tc superconductors
JPS6456359A (en) * 1987-08-28 1989-03-03 Sumitomo Electric Industries Production of superconductive material
US5143894A (en) * 1987-10-14 1992-09-01 Mordechai Rothschild Formation and high resolution patterning of superconductors
JPH01119076A (en) * 1987-10-30 1989-05-11 Nec Corp Manufacture of oxide superconductive film
JPS63224270A (en) * 1987-11-11 1988-09-19 Semiconductor Energy Lab Co Ltd Manufacture of superconductor device
JPS63224271A (en) * 1987-11-11 1988-09-19 Semiconductor Energy Lab Co Ltd Superconductor
JPH01183177A (en) * 1988-01-18 1989-07-20 Agency Of Ind Science & Technol Superconducting ceramic element
JPH01235287A (en) * 1988-03-15 1989-09-20 Fujitsu Ltd Patterning method for high-temperature superconducting thin-film
JPH01276679A (en) * 1988-04-27 1989-11-07 Fujitsu Ltd Superconducting ceramic line

Also Published As

Publication number Publication date
JPS5845194B2 (en) 1983-10-07

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